AU2001262065A1 - A stiction-free electrostatically driven microstructure device - Google Patents

A stiction-free electrostatically driven microstructure device

Info

Publication number
AU2001262065A1
AU2001262065A1 AU2001262065A AU6206501A AU2001262065A1 AU 2001262065 A1 AU2001262065 A1 AU 2001262065A1 AU 2001262065 A AU2001262065 A AU 2001262065A AU 6206501 A AU6206501 A AU 6206501A AU 2001262065 A1 AU2001262065 A1 AU 2001262065A1
Authority
AU
Australia
Prior art keywords
stiction
free
microstructure device
electrostatically driven
driven microstructure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001262065A
Inventor
Chaker Khalfaoui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2001262065A1 publication Critical patent/AU2001262065A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0013—Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
AU2001262065A 2000-05-26 2001-05-23 A stiction-free electrostatically driven microstructure device Abandoned AU2001262065A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200000842 2000-05-26
DKPA200000842 2000-05-26
PCT/DK2001/000361 WO2001089986A1 (en) 2000-05-26 2001-05-23 A stiction-free electrostatically driven microstructure device

Publications (1)

Publication Number Publication Date
AU2001262065A1 true AU2001262065A1 (en) 2001-12-03

Family

ID=8159522

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001262065A Abandoned AU2001262065A1 (en) 2000-05-26 2001-05-23 A stiction-free electrostatically driven microstructure device

Country Status (2)

Country Link
AU (1) AU2001262065A1 (en)
WO (1) WO2001089986A1 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6788840B2 (en) 2001-02-27 2004-09-07 Northrop Grumman Corporation Bi-stable micro-actuator and optical switch
US6591027B2 (en) * 2001-02-27 2003-07-08 Litton Systems, Inc. Bi-stable micro-actuator and optical switch
FR2839194A1 (en) * 2002-04-25 2003-10-31 Memscap Microelectro mechanical components having deformable conductor bar two stable positions moving connected fixed points/RF connectors and drivers/push units moving deformable conductor bar.
US7187486B2 (en) * 2004-04-27 2007-03-06 Intel Corporation Electromechanical drives adapted to provide two degrees of mobility
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
JP4669520B2 (en) * 2005-02-23 2011-04-13 ピクストロニクス，インコーポレイテッド Display device and manufacturing method thereof
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
CN103728467B (en) * 2012-10-16 2016-03-16 无锡华润上华半导体有限公司 Plane-parallel capacitor
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
DE102013209829B4 (en) 2013-05-27 2016-04-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optical structure with webs disposed thereon and method of making the same
DE102016217371B3 (en) 2016-09-13 2017-12-14 Robert Bosch Gmbh Micromechanical component
NL2020143B1 (en) * 2017-12-21 2019-07-01 Univ Delft Tech Mechanical frequency converter

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4309917A1 (en) * 1992-03-30 1993-10-07 Awa Microelectronics Process for the production of silicon microstructures and silicon microstructure
JP3076465B2 (en) * 1992-11-20 2000-08-14 キヤノン株式会社 Micro actuator and optical deflector
US5482564A (en) * 1994-06-21 1996-01-09 Texas Instruments Incorporated Method of unsticking components of micro-mechanical devices
US5510156A (en) * 1994-08-23 1996-04-23 Analog Devices, Inc. Micromechanical structure with textured surface and method for making same

Also Published As

Publication number Publication date
WO2001089986A1 (en) 2001-11-29

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