AU2001239949A1 - Vertical counter balanced test head manipulator - Google Patents

Vertical counter balanced test head manipulator

Info

Publication number
AU2001239949A1
AU2001239949A1 AU2001239949A AU3994901A AU2001239949A1 AU 2001239949 A1 AU2001239949 A1 AU 2001239949A1 AU 2001239949 A AU2001239949 A AU 2001239949A AU 3994901 A AU3994901 A AU 3994901A AU 2001239949 A1 AU2001239949 A1 AU 2001239949A1
Authority
AU
Australia
Prior art keywords
test head
vertical support
main arm
vertical counter
counter balanced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001239949A
Inventor
Henri M. Akouka
Alyn R. Holt
Brian R. Moore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InTest Corp
Original Assignee
InTest IP Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InTest IP Corp filed Critical InTest IP Corp
Publication of AU2001239949A1 publication Critical patent/AU2001239949A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56016—Apparatus features

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Manipulator (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Transmission Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vehicle Body Suspensions (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

A positioner, such as a test head carrier for a semiconductor wafer and device tester, includes a vertical support and a main arm for supporting a test head. The main arm is suspended for vernier movement by use of a counterbalancing force such as counterweights. The suspension of the main arm is performed at a mechanical advantage so that reduced counterblancing force and correspondingly large movements on the counterblance side are used to effect the vernier movement. The vertical support may be adjusted with a non-compliant drive such as a ball screw mechanism. The vernier movement can also be used to sense collisions and other positioning errors and actuation of the drive for the vertical support can be controlled accordingly.
AU2001239949A 2000-03-01 2001-03-01 Vertical counter balanced test head manipulator Abandoned AU2001239949A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US18619600P 2000-03-01 2000-03-01
US60/186,196 2000-03-01
PCT/US2001/006456 WO2001064389A2 (en) 2000-03-01 2001-03-01 Vertical counter balanced test head manipulator

Publications (1)

Publication Number Publication Date
AU2001239949A1 true AU2001239949A1 (en) 2001-09-12

Family

ID=22684009

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001239949A Abandoned AU2001239949A1 (en) 2000-03-01 2001-03-01 Vertical counter balanced test head manipulator

Country Status (11)

Country Link
US (1) US7554321B2 (en)
EP (2) EP1259829B1 (en)
JP (1) JP2003525433A (en)
KR (1) KR20020082862A (en)
CN (1) CN100495040C (en)
AT (1) ATE317128T1 (en)
AU (1) AU2001239949A1 (en)
DE (2) DE60117003T2 (en)
MY (2) MY144519A (en)
TW (1) TWI222911B (en)
WO (1) WO2001064389A2 (en)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY147595A (en) * 2000-09-22 2012-12-31 Intest Corp Apparatus and method for balancing and for providing a compliant range to a test head
WO2004031782A1 (en) * 2002-10-02 2004-04-15 Intest Ip Corp. Test head positioning apparatus
US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
MY146692A (en) * 2003-08-06 2012-09-14 Intest Corp Test head positioning system
CN100429757C (en) * 2004-03-25 2008-10-29 东京毅力科创株式会社 Turning device for heavy object
JP4793809B2 (en) * 2004-09-02 2011-10-12 東京エレクトロン株式会社 Heavy object turning mechanism
US8607935B2 (en) 2005-12-20 2013-12-17 Intuitive Surgical Operations, Inc. Guide systems for laminated spring assemblies
TWI490513B (en) * 2006-12-29 2015-07-01 Intest Corp Load positioning system for translating load along axis of translation and method of balancing load
US8350584B2 (en) * 2006-12-29 2013-01-08 Intest Corporation Test head positioning system and method
CN101720269B (en) * 2007-02-23 2014-04-16 英泰斯特股份有限公司 Test head manipulator
US7750657B2 (en) * 2007-03-15 2010-07-06 Applied Materials Inc. Polishing head testing with movable pedestal
JP5221118B2 (en) * 2007-12-14 2013-06-26 東京エレクトロン株式会社 Inspection device
CN101846589B (en) * 2009-03-24 2013-06-05 京元电子股份有限公司 Turnover testing module and testing system thereof
US8981807B2 (en) * 2010-07-27 2015-03-17 Intest Corporation Positioner system and method of positioning
WO2013009817A1 (en) 2011-07-12 2013-01-17 Intest Corporation Method and apparatus for docking a test head with a peripheral
US8935952B2 (en) * 2012-06-27 2015-01-20 International Business Machines Corporation Dynamic rack cabinet stability testing
CN102735387B (en) * 2012-07-16 2014-08-06 台州市计量技术研究院 Static torque precise testing device and torque testing method using same
CN103629913B (en) * 2012-08-16 2015-04-08 上海华虹宏力半导体制造有限公司 Vertical gravity center adjusting devices of revolution type rotary drier
JP5953215B2 (en) * 2012-12-07 2016-07-20 三鷹光器株式会社 Automatic balancing structure of medical balancing stand
EP3461754B1 (en) 2013-02-13 2020-04-29 Lantech.Com LLC Packaging material profiling for containment force-based wrapping
CA3202736A1 (en) 2014-01-14 2015-07-23 Lantech.Com, Llc Dynamic adjustment of wrap force parameter responsive to monitored wrap force and/or for film break reduction
AU2015330915B2 (en) 2014-10-07 2018-11-08 Lantech.Com, Llc Load stability-based wrapping
EP3280646B1 (en) 2015-04-10 2021-06-02 Lantech.com, LLC Stretch wrapping machine supporting top layer containment operations
WO2017053608A1 (en) * 2015-09-25 2017-03-30 Lantech.Com, Llc Stretch wrapping machine with automated determination of load stability by subjecting a load to a disturbance
KR102221204B1 (en) * 2016-10-10 2021-03-03 레이드-애쉬맨 매뉴팩추어링 인코포레이티드 Manipulator
TWI658271B (en) * 2017-08-25 2019-05-01 鴻勁精密股份有限公司 Electronic component crimping unit and test equipment for its application
AU2018338049B2 (en) 2017-09-22 2021-12-23 Lantech.Com, Llc Load wrapping apparatus wrap profiles with controlled wrap cycle interruptions
CN110303487B (en) * 2018-05-17 2023-06-20 青岛理工大学 Manipulator device for carrying pipes
CN109856554A (en) * 2019-04-22 2019-06-07 星云智能装备（昆山）有限公司 It is a kind of automatically to slotting mechanism and battery pack test device
CN110251197A (en) * 2019-07-05 2019-09-20 四川大学 A kind of backbone drilling operation auxiliary device
AU2020346736B2 (en) 2019-09-09 2024-02-22 Lantech.Com, Llc Stretch wrapping machine with dispense rate control based on sensed rate of dispensed packaging material and predicted load geometry
AU2020350496B2 (en) 2019-09-19 2024-01-25 Lantech.Com, Llc Packaging material grading and/or factory profiles
CN114325325B (en) * 2021-12-29 2023-12-01 日月新半导体(昆山)有限公司 Apparatus for testing integrated circuit products

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1639608A (en) * 1926-03-24 1927-08-16 Hofland Christian Hitch for draft animals
CH516806A (en) * 1970-06-09 1971-12-15 Bbc Brown Boveri & Cie Electro-optical device for rotating the plane of polarization of a linearly polarized light wave
US3994476A (en) * 1975-03-20 1976-11-30 Gennep Jan Van Automatic braking arrangement for a windlass
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
US5149029A (en) * 1982-08-25 1992-09-22 Intest Corporation Electronic test head positioner for test systems
US4973015A (en) * 1987-09-17 1990-11-27 Schlumberger Technologies, Inc. Manipulator apparatus for test head support and orientation
US4893074A (en) 1988-05-13 1990-01-09 Intest Corporation Electronic device testing system
US5059089A (en) * 1988-10-17 1991-10-22 Kocaoglan Harutyun A Infinitely adjustable travel lead screw and multi-cylinder driven movement unit
US5030869A (en) 1990-07-25 1991-07-09 Intest Corporation Device testing system with cable pivot
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5352946A (en) * 1993-02-04 1994-10-04 Megamation Incorporated Linear motor suspension system
US5600258A (en) * 1993-09-15 1997-02-04 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
US5506512A (en) * 1993-11-25 1996-04-09 Tokyo Electron Limited Transfer apparatus having an elevator and prober using the same
KR960019641A (en) * 1994-11-24 1996-06-17 오우라 히로시 Semiconductor test equipment equipped with a test head connection device
JP3869465B2 (en) 1995-02-23 2007-01-17 テラダイン・インコーポレーテッド Manipulator for test head of automatic test equipment
US5603677A (en) * 1995-03-28 1997-02-18 Sollo; Robert E. Weight assisted rehabilitation system
US5608334A (en) 1995-04-20 1997-03-04 Intest Corporation Device testing system with cable pivot and method of installation
JPH08324913A (en) * 1995-06-06 1996-12-10 Hitachi Ltd Elevator device
US5606262A (en) * 1995-06-07 1997-02-25 Teradyne, Inc. Manipulator for automatic test equipment test head
JP3266509B2 (en) * 1996-05-09 2002-03-18 東京エレクトロン株式会社 Heavy object turning device and inspection device
US6023173A (en) * 1997-04-30 2000-02-08 Credence Systems Corporation Manipulator with expanded range of motion
US5949002A (en) 1997-11-12 1999-09-07 Teradyne, Inc. Manipulator for automatic test equipment with active compliance
US6271658B1 (en) * 1998-10-19 2001-08-07 St Assembly Test Services Pte, Ltd. Universal Docking System
US6009670A (en) * 1999-02-01 2000-01-04 Howard; Glenn Gate operator for vertical gate movement
US6837125B1 (en) * 1999-07-14 2005-01-04 Teradyne, Inc. Automatic test manipulator with support internal to test head
US6396257B1 (en) * 2000-04-26 2002-05-28 Credence Systems Corporation Test head manipulator for semiconductor tester with manual assist for vertical test head movement
US6640610B2 (en) * 2001-03-30 2003-11-04 Analog Devices, Inc. Automatic integrated mechanical and electrical angular motion detector test system

Also Published As

Publication number Publication date
ATE317128T1 (en) 2006-02-15
EP1650573B1 (en) 2011-04-20
CN100495040C (en) 2009-06-03
TWI222911B (en) 2004-11-01
EP1259829A2 (en) 2002-11-27
CN1408065A (en) 2003-04-02
DE60117003D1 (en) 2006-04-13
KR20020082862A (en) 2002-10-31
US7554321B2 (en) 2009-06-30
EP1650573A2 (en) 2006-04-26
US20040051517A1 (en) 2004-03-18
WO2001064389A3 (en) 2002-09-06
EP1259829B1 (en) 2006-02-01
WO2001064389A2 (en) 2001-09-07
DE60144498D1 (en) 2011-06-01
DE60117003T2 (en) 2006-11-30
JP2003525433A (en) 2003-08-26
MY138984A (en) 2009-08-28
EP1650573A3 (en) 2006-07-19
MY144519A (en) 2011-09-30

Similar Documents

Publication Publication Date Title
AU2001239949A1 (en) Vertical counter balanced test head manipulator
EP0811167B1 (en) Manipulator for automatic test equipment test head
CN103229067B (en) Fixture system and localization method
WO2005010940A3 (en) High resolution, dynamic positioning mechanism for specimen inspection and processing
TWI701439B (en) Modular rail systems, rail systems, mechanisms, and equipment for devices under test
CN112098692A (en) Electronic component probe testing device
DE3888102D1 (en) Device for carrying out the delivery movement of a work organ to a work station.
TW200631724A (en) Stage device, gantry-type stage device, and method for controlling stage device
US6766996B1 (en) Manipulator
CN109433518B (en) Device for multidirectional elastic dispensing of earphone
ATE291718T1 (en) APPARATUS HOLDING DEVICE
CN107855746A (en) A kind of vehicle GPS support frame feed mechanism
CN111816603A (en) Substrate bearing device and detection device
CN103672328A (en) Lifting device controlling measuring head to move and be positioned on Z axis
US20210247216A1 (en) Cantilever Linear Motion Reference Device Employing Two-Layer Air Suspension
EP1145018A3 (en) Test head manipulator
TH49303A (en) Balanced vertical approaching movement in the vertical axis driven test head controller
CN107270851A (en) Fixed jig
CN208984476U (en) A kind of comprehensive hardness measurement instrument of building detection
CN221436263U (en) Adjustable auxiliary clamp for vacuum manipulator
CN115856368B (en) Positioning detection device
CN216117718U (en) Inverted probe clamp
JP3275872B2 (en) Movable stage device
TH20592EX (en) Topical scent-release mixtures
JP2005156418A (en) Marking device