AU2001228696A1 - Instrument and method for combined surface topography and spectroscopic analysis - Google Patents
Instrument and method for combined surface topography and spectroscopic analysisInfo
- Publication number
- AU2001228696A1 AU2001228696A1 AU2001228696A AU2869601A AU2001228696A1 AU 2001228696 A1 AU2001228696 A1 AU 2001228696A1 AU 2001228696 A AU2001228696 A AU 2001228696A AU 2869601 A AU2869601 A AU 2869601A AU 2001228696 A1 AU2001228696 A1 AU 2001228696A1
- Authority
- AU
- Australia
- Prior art keywords
- tip
- sample
- spectroscopic analysis
- analyzer
- sample surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
Landscapes
- General Health & Medical Sciences (AREA)
- Radiology & Medical Imaging (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Spectrometry And Color Measurement (AREA)
- Electron Tubes For Measurement (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
A combined surface topography and spectroscopic analysis instrument comprises a scanning tunnelling microscope tip (12); and a sample carrier (58) which supports a sample (10) so that a surface thereto to be analyzed is presented towards the tip (12). The sample carrier (58) and the tip (12) are relative movable to enable the distance between the tip (12) and the surface to be varied in use and the sample surface to be scanned in two dimensions by the tip (12). An electronic analyzer is positioned to detect electrons from the tip (12) which have been back-scattered off the sample surface. A voltage controller (59) enables selective operation of the tip (12) in a first voltage range in scanning tunnelling mode, to enable spatial resolution imaging of the sample surface, and in a second, higher, voltage range in electron field emission mode whereby to permit the electron analyzer to analyze the back-scattered electrons. The electron analyzer is positioned so as to detect back-scattered electrons travelling at an angle of less than 20° with respect to the sample surface.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0002367.1A GB0002367D0 (en) | 2000-02-03 | 2000-02-03 | Spectrometer |
GB0002367 | 2000-02-03 | ||
PCT/GB2001/000377 WO2001057878A1 (en) | 2000-02-03 | 2001-01-31 | Instrument and method for combined surface topography and spectroscopic analysis |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001228696A1 true AU2001228696A1 (en) | 2001-08-14 |
Family
ID=9884810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001228696A Abandoned AU2001228696A1 (en) | 2000-02-03 | 2001-01-31 | Instrument and method for combined surface topography and spectroscopic analysis |
Country Status (8)
Country | Link |
---|---|
US (1) | US6855926B2 (en) |
EP (1) | EP1252634B1 (en) |
JP (1) | JP2003522327A (en) |
AT (1) | ATE352089T1 (en) |
AU (1) | AU2001228696A1 (en) |
DE (1) | DE60126057T2 (en) |
GB (1) | GB0002367D0 (en) |
WO (1) | WO2001057878A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0002367D0 (en) * | 2000-02-03 | 2000-03-22 | Limited | Spectrometer |
WO2006025705A1 (en) * | 2004-09-01 | 2006-03-09 | Cebt Co. Ltd. | Portable electron microscope using micro-column |
FR2886755B1 (en) * | 2005-06-06 | 2009-06-05 | Centre Nat Rech Scient | NANOMETER TRANSLATOR / RECEIVER GUIDES |
US7884326B2 (en) * | 2007-01-22 | 2011-02-08 | Fei Company | Manipulator for rotating and translating a sample holder |
EP2051280A1 (en) * | 2007-10-18 | 2009-04-22 | The Regents of the University of California | Motorized manipulator for positioning a TEM specimen |
US20090121133A1 (en) * | 2007-11-14 | 2009-05-14 | University Of Washington | Identification of nucleic acids using inelastic/elastic electron tunneling spectroscopy |
EP2091065A1 (en) | 2008-02-18 | 2009-08-19 | ETH Zürich | Low-voltage field emission scanning electron microscope |
US8283631B2 (en) * | 2008-05-08 | 2012-10-09 | Kla-Tencor Corporation | In-situ differential spectroscopy |
US7924983B2 (en) * | 2008-06-30 | 2011-04-12 | Varian Medical Systems, Inc. | Thermionic emitter designed to control electron beam current profile in two dimensions |
WO2010144267A1 (en) * | 2009-06-12 | 2010-12-16 | Carl Zeiss Nts, Llc | Method and system for heating a tip apex of a charged particle source |
US8384020B2 (en) * | 2010-09-24 | 2013-02-26 | Ut-Battelle, Llc | Spatially resolved thermal desorption/ionization coupled with mass spectrometry |
JP6646290B2 (en) * | 2014-12-17 | 2020-02-14 | 国立研究開発法人産業技術総合研究所 | Method of measuring elements in a sample and visualization of concentration distribution |
CN105445498A (en) * | 2015-09-30 | 2016-03-30 | 哈尔滨理工大学 | Probe locus planning and tracking method for micro-nano operation under SEM |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3938001A (en) * | 1974-02-26 | 1976-02-10 | Nihon Denshi Kabushiki Kaisha | Protection circuit for electron gun |
EP0189498B1 (en) * | 1985-01-29 | 1989-05-03 | International Business Machines Corporation | Field-emission scanning auger electron microscope |
JPH02174047A (en) * | 1988-12-27 | 1990-07-05 | Nec Corp | Scanning type electron microscope |
JPH03295142A (en) * | 1990-04-13 | 1991-12-26 | Hitachi Ltd | Scanning electron microscope |
JPH063295A (en) * | 1992-06-19 | 1994-01-11 | Hitachi Ltd | Surface analyzing device |
JP3101539B2 (en) * | 1994-06-24 | 2000-10-23 | インターナショナル・ビジネス・マシーンズ・コーポレ−ション | Electron beam nanometrology system |
JPH10104179A (en) * | 1996-09-30 | 1998-04-24 | Fujitsu Ltd | Electron spectroscopic method and apparatus therefor |
JP3687243B2 (en) * | 1997-01-08 | 2005-08-24 | 株式会社ニコン | Pattern inspection device |
JP3401158B2 (en) * | 1997-03-10 | 2003-04-28 | 日本電子株式会社 | Ultra-high vacuum surface observation device |
JPH11135047A (en) * | 1997-09-01 | 1999-05-21 | Jeol Ltd | Transmission electron microscope |
GB0002367D0 (en) * | 2000-02-03 | 2000-03-22 | Limited | Spectrometer |
-
2000
- 2000-02-03 GB GBGB0002367.1A patent/GB0002367D0/en not_active Ceased
-
2001
- 2001-01-31 WO PCT/GB2001/000377 patent/WO2001057878A1/en active IP Right Grant
- 2001-01-31 DE DE60126057T patent/DE60126057T2/en not_active Expired - Lifetime
- 2001-01-31 US US10/182,168 patent/US6855926B2/en not_active Expired - Fee Related
- 2001-01-31 EP EP01949062A patent/EP1252634B1/en not_active Expired - Lifetime
- 2001-01-31 JP JP2001557045A patent/JP2003522327A/en active Pending
- 2001-01-31 AU AU2001228696A patent/AU2001228696A1/en not_active Abandoned
- 2001-01-31 AT AT01949062T patent/ATE352089T1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2003522327A (en) | 2003-07-22 |
US6855926B2 (en) | 2005-02-15 |
DE60126057T2 (en) | 2007-11-08 |
EP1252634A1 (en) | 2002-10-30 |
DE60126057D1 (en) | 2007-03-08 |
EP1252634B1 (en) | 2007-01-17 |
US20030010911A1 (en) | 2003-01-16 |
GB0002367D0 (en) | 2000-03-22 |
WO2001057878A1 (en) | 2001-08-09 |
ATE352089T1 (en) | 2007-02-15 |
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