AU2001227574A1 - Apparatus and methods for surface contour measurement - Google Patents

Apparatus and methods for surface contour measurement

Info

Publication number
AU2001227574A1
AU2001227574A1 AU2001227574A AU2757401A AU2001227574A1 AU 2001227574 A1 AU2001227574 A1 AU 2001227574A1 AU 2001227574 A AU2001227574 A AU 2001227574A AU 2757401 A AU2757401 A AU 2757401A AU 2001227574 A1 AU2001227574 A1 AU 2001227574A1
Authority
AU
Australia
Prior art keywords
fringe pattern
sources
point
fringe
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001227574A
Inventor
Lyle Shirley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
Original Assignee
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/480,043 external-priority patent/US6690474B1/en
Application filed by Massachusetts Institute of Technology filed Critical Massachusetts Institute of Technology
Publication of AU2001227574A1 publication Critical patent/AU2001227574A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2531—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings, projected with variable angle of incidence on the object, and one detection device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Apparatus and methods of measuring three-dimensional position information of a point on the surface of an object. In one embodiment, the method includes the steps of providing two sources of radiation having a spectral distribution, illuminating the surface with each of the sources to produce a first fringe pattern, moving the first fringe pattern to a second position, generating a first wrapped cycle map, estimating fringe numbers in the first fringe pattern, changing the first fringe pattern, moving the second fringe pattern to a second position, generating a second wrapped cycle map, estimating fringe numbers in the second fringe pattern, and determining position information in response to the estimated fringe numbers in the second fringe pattern and the second wrapped cycle map. In another embodiment the apparatus includes two sources of radiation having a spectral distribution and being coherent with respect to one another, a control system for moving each of the sources relative to each other, a detector positioned at the point on the surface of the object to receive radiation illuminating the point on the surface of the object, and a processor for receiving signals from the detector. The processor calculates position information of the point on the surface of the object in response to the movement of the sources and the radiation received at the point on the surface of the object.
AU2001227574A 2000-01-10 2001-01-03 Apparatus and methods for surface contour measurement Abandoned AU2001227574A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/480,043 US6690474B1 (en) 1996-02-12 2000-01-10 Apparatus and methods for surface contour measurement
US09/480,043 2000-01-10
PCT/US2001/000161 WO2001051886A1 (en) 2000-01-10 2001-01-03 Apparatus and methods for surface contour measurement

Publications (1)

Publication Number Publication Date
AU2001227574A1 true AU2001227574A1 (en) 2001-07-24

Family

ID=23906443

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001227574A Abandoned AU2001227574A1 (en) 2000-01-10 2001-01-03 Apparatus and methods for surface contour measurement

Country Status (7)

Country Link
EP (1) EP1247070B1 (en)
JP (2) JP2003519786A (en)
AT (1) ATE376165T1 (en)
AU (1) AU2001227574A1 (en)
CA (1) CA2397095C (en)
DE (1) DE60130968T2 (en)
WO (1) WO2001051886A1 (en)

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US7496004B2 (en) 2003-05-02 2009-02-24 Sony Corporation Data reproducing apparatus, data reproducing method, data recording and reproducing apparatus, and data recording and reproducing method
EP1548400A1 (en) * 2003-12-23 2005-06-29 Vogel und Ploetscher GmbH Apparatus for inspecting rails
JP4688625B2 (en) * 2005-10-18 2011-05-25 株式会社山武 3D measuring apparatus, 3D measuring method, and 3D measuring program
DE102007002880B4 (en) * 2007-01-15 2011-08-25 DMG Microset GmbH, 33689 Method and device for optically measuring an object, in particular a workpiece or a tool
EP1975680A1 (en) * 2007-03-31 2008-10-01 Sony Deutschland Gmbh Illumination device and method for illuminating uniformly an image generating micro display
KR100870930B1 (en) 2007-05-08 2008-11-28 주식회사 고영테크놀러지 Multi-directional projection type moire interferometer and inspection method using it
US8531650B2 (en) 2008-07-08 2013-09-10 Chiaro Technologies LLC Multiple channel locating
EP2166305B1 (en) * 2008-09-23 2012-05-16 Sick Ag Illumination unit and method for projecting an illumination pattern.
AU2011265572A1 (en) * 2011-12-23 2013-07-11 Canon Kabushiki Kaisha Structured light system for robust geometry acquisition
DE102013201469B4 (en) 2013-01-30 2023-01-12 Rohde & Schwarz GmbH & Co. Kommanditgesellschaft Method and device for surface determination
LU92173B1 (en) * 2013-03-20 2014-09-22 Iee Sarl Distance determination method
FI20135961A (en) * 2013-09-25 2015-03-26 Aalto Korkeakoulusäätiö Imaging arrangements and procedures as well as systems for mapping the topography of three-dimensional surface
US9562760B2 (en) 2014-03-10 2017-02-07 Cognex Corporation Spatially self-similar patterned illumination for depth imaging
US10571668B2 (en) 2015-05-09 2020-02-25 Cognex Corporation Catadioptric projector systems, devices, and methods
JPWO2017183181A1 (en) 2016-04-22 2019-02-28 オリンパス株式会社 3D shape measuring device
RU172076U9 (en) * 2016-06-14 2017-08-22 Александр Евгеньевич Соколов INFRARED LASER SCANNING DEVICE
CN110692084B (en) * 2017-05-31 2023-05-09 惠普发展公司，有限责任合伙企业 Apparatus and machine-readable storage medium for deriving topology information of a scene
CN109635619B (en) 2017-08-19 2021-08-31 康耐视公司 Encoding distance topology of structured light patterns for three-dimensional reconstruction
EP3444782B1 (en) 2017-08-19 2022-03-30 Cognex Corporation Coding distance topologies for structured light patterns for 3d reconstruction
FR3081592B1 (en) * 2018-05-25 2021-05-14 Vit THREE-DIMENSIONAL IMAGE DETERMINATION SYSTEM
US11143503B2 (en) 2018-08-07 2021-10-12 Kimball Electronics Indiana, Inc. Interferometric waviness detection systems
CN113396312B (en) * 2018-10-12 2024-03-01 电力研究所有限公司 Method for measuring surface properties in optically distorted media
CN110779461B (en) * 2019-10-16 2021-09-21 中国航空工业集团公司洛阳电光设备研究所 Testing device and method for plane reflector surface type in refraction and reflection convergence light path

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2641945B2 (en) * 1989-08-31 1997-08-20 日本電気株式会社 Range image acquisition method and apparatus
JPH06241727A (en) * 1993-02-19 1994-09-02 Nikon Corp Position detection device
US5870191A (en) * 1996-02-12 1999-02-09 Massachusetts Institute Of Technology Apparatus and methods for surface contour measurement
US6031612A (en) * 1996-02-12 2000-02-29 Massachusetts Institute Of Technology Apparatus and methods for contour measurement using movable sources

Also Published As

Publication number Publication date
CA2397095A1 (en) 2001-07-19
EP1247070A1 (en) 2002-10-09
DE60130968D1 (en) 2007-11-29
EP1247070B1 (en) 2007-10-17
JP5241806B2 (en) 2013-07-17
WO2001051886A1 (en) 2001-07-19
ATE376165T1 (en) 2007-11-15
JP2011053224A (en) 2011-03-17
JP2003519786A (en) 2003-06-24
CA2397095C (en) 2010-04-27
WO2001051886A9 (en) 2002-10-31
DE60130968T2 (en) 2008-07-10

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