AU2001212487A1 - Frequency tunable resonant scanner with auxiliary arms - Google Patents
Frequency tunable resonant scanner with auxiliary armsInfo
- Publication number
- AU2001212487A1 AU2001212487A1 AU2001212487A AU1248701A AU2001212487A1 AU 2001212487 A1 AU2001212487 A1 AU 2001212487A1 AU 2001212487 A AU2001212487 A AU 2001212487A AU 1248701 A AU1248701 A AU 1248701A AU 2001212487 A1 AU2001212487 A1 AU 2001212487A1
- Authority
- AU
- Australia
- Prior art keywords
- scanning device
- flexible arm
- mems
- absorptive material
- resonant frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Abstract
A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm (3506) that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertial of the oscillatory body and a secondary mass carried by the flexible arm. The shifted combined center of mass changes the resonant frequency of MEMs device. In another embodiment, an absorptive material forms a portion of a torsional arm that supports the oscillatory body. The mechanical properties of the absorptive material can be varied by varying the concentration of a gas surrounding the absorptive material. The varied mechanical properties change the resonant frequency of the scanning device. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2000/030412 WO2002037165A1 (en) | 2000-11-03 | 2000-11-03 | Frequency tunable resonant scanner with auxiliary arms |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001212487A1 true AU2001212487A1 (en) | 2002-05-15 |
Family
ID=21741967
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001212487A Abandoned AU2001212487A1 (en) | 2000-11-03 | 2000-11-03 | Frequency tunable resonant scanner with auxiliary arms |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1330673B1 (en) |
JP (1) | JP4533580B2 (en) |
AT (1) | ATE437382T1 (en) |
AU (1) | AU2001212487A1 (en) |
DE (1) | DE60042615D1 (en) |
WO (1) | WO2002037165A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4193817B2 (en) | 2005-06-22 | 2008-12-10 | セイコーエプソン株式会社 | Actuator |
JP5098254B2 (en) * | 2006-08-29 | 2012-12-12 | 富士通株式会社 | Micro oscillating device |
US7864390B2 (en) | 2007-05-28 | 2011-01-04 | Konica Minolta Opto, Inc. | Image display apparatus |
US8970455B2 (en) | 2012-06-28 | 2015-03-03 | Google Technology Holdings LLC | Systems and methods for processing content displayed on a flexible display |
JP6274845B2 (en) * | 2013-12-11 | 2018-02-07 | 富士電機株式会社 | Optical device |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3135869A (en) * | 1960-12-22 | 1964-06-02 | Kollsman Instr Corp | Scanning system for photosensitive light tracking device |
US5596339A (en) * | 1992-10-22 | 1997-01-21 | University Of Washington | Virtual retinal display with fiber optic point source |
US5467104A (en) * | 1992-10-22 | 1995-11-14 | Board Of Regents Of The University Of Washington | Virtual retinal display |
US5629790A (en) * | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
US5488862A (en) * | 1993-10-18 | 1996-02-06 | Armand P. Neukermans | Monolithic silicon rate-gyro with integrated sensors |
IL113971A (en) * | 1994-06-02 | 1998-02-08 | Honeywell Inc | Day/night heads-up display (hud) |
US5557444A (en) * | 1994-10-26 | 1996-09-17 | University Of Washington | Miniature optical scanner for a two axis scanning system |
US5701132A (en) * | 1996-03-29 | 1997-12-23 | University Of Washington | Virtual retinal display with expanded exit pupil |
JP2001500987A (en) * | 1996-09-23 | 2001-01-23 | ピーエスシー・スキャニング・インコーポレイテッド | Dithering mechanism for barcode scanner |
US5694237A (en) * | 1996-09-25 | 1997-12-02 | University Of Washington | Position detection of mechanical resonant scanner mirror |
US6128122A (en) * | 1998-09-18 | 2000-10-03 | Seagate Technology, Inc. | Micromachined mirror with stretchable restoring force member |
JP3552601B2 (en) * | 1998-11-16 | 2004-08-11 | 日本ビクター株式会社 | Optical deflector and display device using the same |
-
2000
- 2000-11-03 WO PCT/US2000/030412 patent/WO2002037165A1/en active Application Filing
- 2000-11-03 AT AT00974057T patent/ATE437382T1/en not_active IP Right Cessation
- 2000-11-03 JP JP2002539866A patent/JP4533580B2/en not_active Expired - Fee Related
- 2000-11-03 EP EP00974057A patent/EP1330673B1/en not_active Expired - Lifetime
- 2000-11-03 DE DE60042615T patent/DE60042615D1/en not_active Expired - Lifetime
- 2000-11-03 AU AU2001212487A patent/AU2001212487A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2004518992A (en) | 2004-06-24 |
WO2002037165A1 (en) | 2002-05-10 |
DE60042615D1 (en) | 2009-09-03 |
EP1330673B1 (en) | 2009-07-22 |
ATE437382T1 (en) | 2009-08-15 |
EP1330673A1 (en) | 2003-07-30 |
JP4533580B2 (en) | 2010-09-01 |
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