AU2000256249A1 - Process and system for determining acceptability of a fluid dispense - Google Patents

Process and system for determining acceptability of a fluid dispense

Info

Publication number
AU2000256249A1
AU2000256249A1 AU2000256249A AU5624900A AU2000256249A1 AU 2000256249 A1 AU2000256249 A1 AU 2000256249A1 AU 2000256249 A AU2000256249 A AU 2000256249A AU 5624900 A AU5624900 A AU 5624900A AU 2000256249 A1 AU2000256249 A1 AU 2000256249A1
Authority
AU
Australia
Prior art keywords
fluid dispense
determining acceptability
acceptability
determining
dispense
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2000256249A
Inventor
Robert F. Mcloughlin
John E. Pillion
Jieh-Hwa Shyu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Publication of AU2000256249A1 publication Critical patent/AU2000256249A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1005—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material already applied to the surface, e.g. coating thickness, weight or pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F3/00—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Coating Apparatus (AREA)
AU2000256249A 2000-06-19 2000-06-19 Process and system for determining acceptability of a fluid dispense Abandoned AU2000256249A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2000/016843 WO2001097983A1 (en) 2000-06-19 2000-06-19 Process and system for determining acceptability of a fluid dispense

Publications (1)

Publication Number Publication Date
AU2000256249A1 true AU2000256249A1 (en) 2002-01-02

Family

ID=21741507

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2000256249A Abandoned AU2000256249A1 (en) 2000-06-19 2000-06-19 Process and system for determining acceptability of a fluid dispense

Country Status (6)

Country Link
EP (1) EP1292398B1 (en)
JP (1) JP2003536265A (en)
CN (1) CN1454121A (en)
AU (1) AU2000256249A1 (en)
DE (1) DE60030007T2 (en)
WO (1) WO2001097983A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014104996A1 (en) * 2014-04-08 2015-10-08 Marco Systemanalyse Und Entwicklung Gmbh metering valve
US10562054B2 (en) 2016-03-11 2020-02-18 Precision Valve & Automation, Inc. Automatically controlling a liquid spray pattern
DE102016114607A1 (en) * 2016-08-05 2018-02-08 Infineon Technologies Ag Fluid delivery system, apparatus and method
CN107728432A (en) * 2016-08-11 2018-02-23 东京毅力科创株式会社 High purity distribution system
WO2018233842A1 (en) 2017-06-23 2018-12-27 Hp Indigo B.V. Method, apparatus and system for material displacement by a pulsed laser beam

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421924A (en) * 1987-07-17 1989-01-25 Oki Electric Ind Co Ltd Resist dropping apparatus
JPH04158510A (en) * 1990-10-22 1992-06-01 Nec Kyushu Ltd Semiconductor processing equipment
JPH06304518A (en) * 1993-04-27 1994-11-01 Sanyo Electric Co Ltd Paint dropping device
JP2000042472A (en) * 1998-07-29 2000-02-15 Matsushita Electronics Industry Corp Apparatus for membrane coating having coating abnormality detection means, exposure device, and membrane coating

Also Published As

Publication number Publication date
CN1454121A (en) 2003-11-05
DE60030007D1 (en) 2006-09-21
JP2003536265A (en) 2003-12-02
DE60030007T2 (en) 2007-04-26
EP1292398B1 (en) 2006-08-09
WO2001097983A1 (en) 2001-12-27
EP1292398A1 (en) 2003-03-19

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