AU1333800A - Capacitive vacuum sensor - Google Patents

Capacitive vacuum sensor

Info

Publication number
AU1333800A
AU1333800A AU13338/00A AU1333800A AU1333800A AU 1333800 A AU1333800 A AU 1333800A AU 13338/00 A AU13338/00 A AU 13338/00A AU 1333800 A AU1333800 A AU 1333800A AU 1333800 A AU1333800 A AU 1333800A
Authority
AU
Australia
Prior art keywords
vacuum sensor
capacitive vacuum
capacitive
sensor
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU13338/00A
Inventor
Kevin P. Kepley
James P. Perkins
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bausch and Lomb Surgical Inc
Original Assignee
Bausch and Lomb Surgical Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bausch and Lomb Surgical Inc filed Critical Bausch and Lomb Surgical Inc
Publication of AU1333800A publication Critical patent/AU1333800A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AU13338/00A 1998-11-06 1999-10-29 Capacitive vacuum sensor Abandoned AU1333800A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US18793498A 1998-11-06 1998-11-06
US09187934 1998-11-06
PCT/US1999/025556 WO2000028295A1 (en) 1998-11-06 1999-10-29 Capacitive vacuum sensor

Publications (1)

Publication Number Publication Date
AU1333800A true AU1333800A (en) 2000-05-29

Family

ID=22691087

Family Applications (1)

Application Number Title Priority Date Filing Date
AU13338/00A Abandoned AU1333800A (en) 1998-11-06 1999-10-29 Capacitive vacuum sensor

Country Status (2)

Country Link
AU (1) AU1333800A (en)
WO (1) WO2000028295A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069555A (en) * 2002-08-07 2004-03-04 Omron Corp Pressure sensor and manufacturing method thereof
EP1979730B1 (en) * 2006-01-18 2011-06-01 Inficon GmbH Vacuum measuring cell having a membrane

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1450709A (en) * 1973-12-31 1976-09-29 Birchall D J Pressure transducers
JPS62174249U (en) * 1986-04-24 1987-11-05
US4785669A (en) * 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers

Also Published As

Publication number Publication date
WO2000028295A1 (en) 2000-05-18

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase