ATE62939T1 - PROCESS FOR DEPOSITED FILM FORMATION. - Google Patents

PROCESS FOR DEPOSITED FILM FORMATION.

Info

Publication number
ATE62939T1
ATE62939T1 AT86308272T AT86308272T ATE62939T1 AT E62939 T1 ATE62939 T1 AT E62939T1 AT 86308272 T AT86308272 T AT 86308272T AT 86308272 T AT86308272 T AT 86308272T AT E62939 T1 ATE62939 T1 AT E62939T1
Authority
AT
Austria
Prior art keywords
film formation
deposited film
deposited
formation
film
Prior art date
Application number
AT86308272T
Other languages
German (de)
Inventor
Shunichi Ishihara
Junichi Hanna
Isamu Shimizu
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60238495A external-priority patent/JPH0645883B2/en
Priority claimed from JP60238902A external-priority patent/JPH0647729B2/en
Application filed by Canon Kk filed Critical Canon Kk
Priority claimed from EP86308272A external-priority patent/EP0264505B1/en
Application granted granted Critical
Publication of ATE62939T1 publication Critical patent/ATE62939T1/en

Links

AT86308272T 1985-10-24 1986-10-23 PROCESS FOR DEPOSITED FILM FORMATION. ATE62939T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP60238495A JPH0645883B2 (en) 1985-10-24 1985-10-24 Deposited film formation method
JP60238902A JPH0647729B2 (en) 1985-10-25 1985-10-25 Deposited film formation method
EP86308272A EP0264505B1 (en) 1985-10-24 1986-10-23 Method for forming a deposited film

Publications (1)

Publication Number Publication Date
ATE62939T1 true ATE62939T1 (en) 1991-05-15

Family

ID=27229380

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86308272T ATE62939T1 (en) 1985-10-24 1986-10-23 PROCESS FOR DEPOSITED FILM FORMATION.

Country Status (1)

Country Link
AT (1) ATE62939T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
EELA Cancelled due to lapse of time