ATE535836T1 - Verfahren und einrichtungen zur verhinderung der neigung eines spiegels in einem interferometrischen modulator - Google Patents

Verfahren und einrichtungen zur verhinderung der neigung eines spiegels in einem interferometrischen modulator

Info

Publication number
ATE535836T1
ATE535836T1 AT05788595T AT05788595T ATE535836T1 AT E535836 T1 ATE535836 T1 AT E535836T1 AT 05788595 T AT05788595 T AT 05788595T AT 05788595 T AT05788595 T AT 05788595T AT E535836 T1 ATE535836 T1 AT E535836T1
Authority
AT
Austria
Prior art keywords
tilt
interferometric modulators
mirror
preventing
devices
Prior art date
Application number
AT05788595T
Other languages
English (en)
Inventor
William Cummings
Original Assignee
Qualcomm Mems Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc filed Critical Qualcomm Mems Technologies Inc
Application granted granted Critical
Publication of ATE535836T1 publication Critical patent/ATE535836T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Micromachines (AREA)
AT05788595T 2004-09-27 2005-08-22 Verfahren und einrichtungen zur verhinderung der neigung eines spiegels in einem interferometrischen modulator ATE535836T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US61355804P 2004-09-27 2004-09-27
US11/154,283 US7130104B2 (en) 2004-09-27 2005-06-16 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
PCT/US2005/029820 WO2006036384A1 (en) 2004-09-27 2005-08-22 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator

Publications (1)

Publication Number Publication Date
ATE535836T1 true ATE535836T1 (de) 2011-12-15

Family

ID=35432295

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05788595T ATE535836T1 (de) 2004-09-27 2005-08-22 Verfahren und einrichtungen zur verhinderung der neigung eines spiegels in einem interferometrischen modulator

Country Status (9)

Country Link
US (4) US7130104B2 (de)
EP (1) EP1800157B1 (de)
JP (1) JP4733135B2 (de)
AT (1) ATE535836T1 (de)
MX (1) MX2007003589A (de)
MY (1) MY135735A (de)
RU (1) RU2007115926A (de)
TW (1) TWI424191B (de)
WO (1) WO2006036384A1 (de)

Families Citing this family (96)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7532377B2 (en) * 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US7764950B2 (en) * 2002-05-24 2010-07-27 Kodiak Networks, Inc. Advanced voice services architecture framework
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
TWI233916B (en) * 2004-07-09 2005-06-11 Prime View Int Co Ltd A structure of a micro electro mechanical system
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7612932B2 (en) 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
US7893919B2 (en) * 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7259449B2 (en) * 2004-09-27 2007-08-21 Idc, Llc Method and system for sealing a substrate
US7130104B2 (en) * 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7884989B2 (en) 2005-05-27 2011-02-08 Qualcomm Mems Technologies, Inc. White interferometric modulators and methods for forming the same
US7460292B2 (en) * 2005-06-03 2008-12-02 Qualcomm Mems Technologies, Inc. Interferometric modulator with internal polarization and drive method
EP2495212A3 (de) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
US7561334B2 (en) * 2005-12-20 2009-07-14 Qualcomm Mems Technologies, Inc. Method and apparatus for reducing back-glass deflection in an interferometric modulator display device
US7636151B2 (en) * 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7547568B2 (en) * 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) * 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
WO2007120885A2 (en) * 2006-04-13 2007-10-25 Qualcomm Mems Technologies, Inc. Mems devices and processes for packaging such devices
US20070268201A1 (en) * 2006-05-22 2007-11-22 Sampsell Jeffrey B Back-to-back displays
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7551287B2 (en) * 2006-06-06 2009-06-23 Ge Homeland Protection, Inc. Actuator for micro-electromechanical system fabry-perot filter
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
EP2029473A2 (de) 2006-06-21 2009-03-04 Qualcomm Incorporated Mems-vorrichtung mit ausgespartem hohlraum und verfahren dafür
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
WO2008045207A2 (en) 2006-10-06 2008-04-17 Qualcomm Mems Technologies, Inc. Light guide
EP2366942A1 (de) 2006-10-06 2011-09-21 Qualcomm Mems Technologies, Inc. Beleuchtungseinrichtung einer Anzeigevorrichtung mit darin integrierter Struktur zur Erzeugung optischer Verluste
US7629197B2 (en) 2006-10-18 2009-12-08 Qualcomm Mems Technologies, Inc. Spatial light modulator
US7706042B2 (en) * 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8115987B2 (en) 2007-02-01 2012-02-14 Qualcomm Mems Technologies, Inc. Modulating the intensity of light from an interferometric reflector
CN101632150B (zh) * 2007-02-20 2011-11-23 高通Mems科技公司 用于蚀刻微机电***的装备及方法
US7742220B2 (en) 2007-03-28 2010-06-22 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing conducting layers separated by stops
US7715085B2 (en) 2007-05-09 2010-05-11 Qualcomm Mems Technologies, Inc. Electromechanical system having a dielectric movable membrane and a mirror
US7643202B2 (en) 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US8111262B2 (en) * 2007-05-18 2012-02-07 Qualcomm Mems Technologies, Inc. Interferometric modulator displays with reduced color sensitivity
US7643199B2 (en) * 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7782517B2 (en) 2007-06-21 2010-08-24 Qualcomm Mems Technologies, Inc. Infrared and dual mode displays
US7630121B2 (en) 2007-07-02 2009-12-08 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7813029B2 (en) 2007-07-31 2010-10-12 Qualcomm Mems Technologies, Inc. Devices and methods for enhancing color shift of interferometric modulators
US8072402B2 (en) 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
US7773286B2 (en) 2007-09-14 2010-08-10 Qualcomm Mems Technologies, Inc. Periodic dimple array
WO2009036215A2 (en) * 2007-09-14 2009-03-19 Qualcomm Mems Technologies, Inc. Etching processes used in mems production
US7847999B2 (en) 2007-09-14 2010-12-07 Qualcomm Mems Technologies, Inc. Interferometric modulator display devices
US20090078316A1 (en) * 2007-09-24 2009-03-26 Qualcomm Incorporated Interferometric photovoltaic cell
WO2009052326A2 (en) 2007-10-19 2009-04-23 Qualcomm Mems Technologies, Inc. Display with integrated photovoltaics
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
JP2011504243A (ja) 2007-10-23 2011-02-03 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 調節可能透過型ｍｅｍｓベースの装置
US20090293955A1 (en) * 2007-11-07 2009-12-03 Qualcomm Incorporated Photovoltaics with interferometric masks
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
US8068710B2 (en) * 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
BRPI0821371A2 (pt) * 2007-12-21 2015-06-16 Qualcomm Mems Technologies Inc Dispositivos fotovoltaicos e respectivo método de fabrico
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7612933B2 (en) 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
US7898723B2 (en) 2008-04-02 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical systems display element with photovoltaic structure
US7969638B2 (en) 2008-04-10 2011-06-28 Qualcomm Mems Technologies, Inc. Device having thin black mask and method of fabricating the same
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US7746539B2 (en) 2008-06-25 2010-06-29 Qualcomm Mems Technologies, Inc. Method for packing a display device and the device obtained thereof
US7859740B2 (en) * 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US7855826B2 (en) 2008-08-12 2010-12-21 Qualcomm Mems Technologies, Inc. Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
US20100096011A1 (en) * 2008-10-16 2010-04-22 Qualcomm Mems Technologies, Inc. High efficiency interferometric color filters for photovoltaic modules
WO2010044901A1 (en) * 2008-10-16 2010-04-22 Qualcomm Mems Technologies, Inc. Monolithic imod color enhanced photovoltaic cell
WO2011084229A2 (en) 2009-12-17 2011-07-14 Arizona Board Of Regents, For And On Behalf Of Arizona State University Embedded mems sensors and related methods
WO2010110827A1 (en) * 2009-01-27 2010-09-30 Arizona Board Of Regents, For And On Behalf Of Arizona State University Displays with embedded mems sensors and related methods
US8270056B2 (en) 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
KR20120090772A (ko) 2009-05-29 2012-08-17 퀄컴 엠이엠에스 테크놀로지스, 인크. 조명장치 및 그의 제조방법
US8270062B2 (en) 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
US8488228B2 (en) 2009-09-28 2013-07-16 Qualcomm Mems Technologies, Inc. Interferometric display with interferometric reflector
US8379392B2 (en) 2009-10-23 2013-02-19 Qualcomm Mems Technologies, Inc. Light-based sealing and device packaging
US8547626B2 (en) * 2010-03-25 2013-10-01 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of shaping the same
WO2011126953A1 (en) 2010-04-09 2011-10-13 Qualcomm Mems Technologies, Inc. Mechanical layer of an electromechanical device and methods of forming the same
BR112012026325A2 (pt) 2010-04-16 2019-09-24 Flex Lighting Ii Llc dispositivo de iluminação compreendendo um guia de luz baseado em película
KR102165542B1 (ko) 2010-04-16 2020-10-14 플렉스 라이팅 투 엘엘씨 필름 기반 라이트가이드를 포함하는 프론트 조명 디바이스
WO2012024238A1 (en) 2010-08-17 2012-02-23 Qualcomm Mems Technologies, Inc. Actuation and calibration of a charge neutral electrode in an interferometric display device
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US20120242638A1 (en) * 2011-03-24 2012-09-27 Qualcomm Mems Technologies, Inc. Dielectric spacer for display devices
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US20130100145A1 (en) * 2011-10-21 2013-04-25 Qualcomm Mems Technologies, Inc. Electromechanical systems device
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
JP6036341B2 (ja) * 2013-01-29 2016-11-30 セイコーエプソン株式会社 光学モジュール、及び電子機器
US9824642B2 (en) * 2013-09-27 2017-11-21 Intel Corporation Rendering techniques for textured displays

Family Cites Families (295)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2534846A (en) 1946-06-20 1950-12-19 Emi Ltd Color filter
US2590906A (en) * 1946-11-22 1952-04-01 Farrand Optical Co Inc Reflection interference filter
US3037189A (en) 1958-04-23 1962-05-29 Sylvania Electric Prod Visual display system
US3247392A (en) * 1961-05-17 1966-04-19 Optical Coating Laboratory Inc Optical coating and assembly used as a band pass interference filter reflecting in the ultraviolet and infrared
US3210757A (en) 1962-01-29 1965-10-05 Carlyle W Jacob Matrix controlled light valve display apparatus
DE1288651B (de) 1963-06-28 1969-02-06 Siemens Ag Anordnung elektrischer Dipole fuer Wellenlaengen unterhalb 1 mm und Verfahren zur Herstellung einer derartigen Anordnung
FR1603131A (de) * 1968-07-05 1971-03-22
US3653741A (en) * 1970-02-16 1972-04-04 Alvin M Marks Electro-optical dipolar material
US3813265A (en) 1970-02-16 1974-05-28 A Marks Electro-optical dipolar material
US3728030A (en) * 1970-06-22 1973-04-17 Cary Instruments Polarization interferometer
JPS4946974A (de) 1972-09-11 1974-05-07
DE2336930A1 (de) 1973-07-20 1975-02-06 Battelle Institut E V Infrarot-modulator (ii.)
US4099854A (en) 1976-10-12 1978-07-11 The Unites States Of America As Represented By The Secretary Of The Navy Optical notch filter utilizing electric dipole resonance absorption
US4389096A (en) 1977-12-27 1983-06-21 Matsushita Electric Industrial Co., Ltd. Image display apparatus of liquid crystal valve projection type
US4663083A (en) 1978-05-26 1987-05-05 Marks Alvin M Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics
US4445050A (en) * 1981-12-15 1984-04-24 Marks Alvin M Device for conversion of light power to electric power
US4228437A (en) 1979-06-26 1980-10-14 The United States Of America As Represented By The Secretary Of The Navy Wideband polarization-transforming electromagnetic mirror
NL8001281A (nl) 1980-03-04 1981-10-01 Philips Nv Weergeefinrichting.
DE3012253A1 (de) 1980-03-28 1981-10-15 Hoechst Ag, 6000 Frankfurt Verfahren zum sichtbarmaschen von ladungsbildern und eine hierfuer geeignete vorichtung
DE3109653A1 (de) * 1980-03-31 1982-01-28 Jenoptik Jena Gmbh, Ddr 6900 Jena "resonanzabsorber"
US4377324A (en) * 1980-08-04 1983-03-22 Honeywell Inc. Graded index Fabry-Perot optical filter device
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
FR2506026A1 (fr) 1981-05-18 1982-11-19 Radant Etudes Procede et dispositif pour l'analyse d'un faisceau de rayonnement d'ondes electromagnetiques hyperfrequence
NL8103377A (nl) 1981-07-16 1983-02-16 Philips Nv Weergeefinrichting.
US4571603A (en) * 1981-11-03 1986-02-18 Texas Instruments Incorporated Deformable mirror electrostatic printer
NL8200354A (nl) 1982-02-01 1983-09-01 Philips Nv Passieve weergeefinrichting.
US4500171A (en) * 1982-06-02 1985-02-19 Texas Instruments Incorporated Process for plastic LCD fill hole sealing
US4497974A (en) * 1982-11-22 1985-02-05 Exxon Research & Engineering Co. Realization of a thin film solar cell with a detached reflector
US4482213A (en) 1982-11-23 1984-11-13 Texas Instruments Incorporated Perimeter seal reinforcement holes for plastic LCDs
US4498953A (en) * 1983-07-27 1985-02-12 At&T Bell Laboratories Etching techniques
US4566935A (en) * 1984-07-31 1986-01-28 Texas Instruments Incorporated Spatial light modulator and method
US4710732A (en) 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US4596992A (en) 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US4615595A (en) 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4655554A (en) * 1985-03-06 1987-04-07 The United States Of America As Represented By The Secretary Of The Air Force Spatial light modulator having a capacitively coupled photoconductor
US5172262A (en) 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US4859060A (en) 1985-11-26 1989-08-22 501 Sharp Kabushiki Kaisha Variable interferometric device and a process for the production of the same
GB8610129D0 (en) 1986-04-25 1986-05-29 Secr Defence Electro-optical device
US4748366A (en) 1986-09-02 1988-05-31 Taylor George W Novel uses of piezoelectric materials for creating optical effects
US4786128A (en) 1986-12-02 1988-11-22 Quantum Diagnostics, Ltd. Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction
NL8701138A (nl) 1987-05-13 1988-12-01 Philips Nv Electroscopische beeldweergeefinrichting.
ATE71718T1 (de) * 1987-06-04 1992-02-15 Walter Lukosz Optisches modulations- und mess-verfahren.
US4900136A (en) * 1987-08-11 1990-02-13 North American Philips Corporation Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel
US4857978A (en) 1987-08-11 1989-08-15 North American Philips Corporation Solid state light modulator incorporating metallized gel and method of metallization
US4956619A (en) 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US4856863A (en) 1988-06-22 1989-08-15 Texas Instruments Incorporated Optical fiber interconnection network including spatial light modulator
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
JP2700903B2 (ja) * 1988-09-30 1998-01-21 シャープ株式会社 液晶表示装置
US4982184A (en) * 1989-01-03 1991-01-01 General Electric Company Electrocrystallochromic display and element
KR100202246B1 (ko) * 1989-02-27 1999-06-15 윌리엄 비. 켐플러 디지탈화 비디오 시스템을 위한 장치 및 방법
US5170156A (en) 1989-02-27 1992-12-08 Texas Instruments Incorporated Multi-frequency two dimensional display system
US5214420A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Spatial light modulator projection system with random polarity light
US5272473A (en) 1989-02-27 1993-12-21 Texas Instruments Incorporated Reduced-speckle display system
US5287096A (en) * 1989-02-27 1994-02-15 Texas Instruments Incorporated Variable luminosity display system
US5446479A (en) * 1989-02-27 1995-08-29 Texas Instruments Incorporated Multi-dimensional array video processor system
US5162787A (en) 1989-02-27 1992-11-10 Texas Instruments Incorporated Apparatus and method for digitized video system utilizing a moving display surface
US5206629A (en) * 1989-02-27 1993-04-27 Texas Instruments Incorporated Spatial light modulator and memory for digitized video display
US5079544A (en) * 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
US5192946A (en) * 1989-02-27 1993-03-09 Texas Instruments Incorporated Digitized color video display system
US5214419A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Planarized true three dimensional display
US4900395A (en) * 1989-04-07 1990-02-13 Fsi International, Inc. HF gas etching of wafers in an acid processor
US5022745A (en) 1989-09-07 1991-06-11 Massachusetts Institute Of Technology Electrostatically deformable single crystal dielectrically coated mirror
US4954789A (en) 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
US5381253A (en) * 1991-11-14 1995-01-10 Board Of Regents Of University Of Colorado Chiral smectic liquid crystal optical modulators having variable retardation
US5124834A (en) 1989-11-16 1992-06-23 General Electric Company Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same
US5037173A (en) 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
JP2910114B2 (ja) 1990-01-20 1999-06-23 ソニー株式会社 電子機器
US5500635A (en) * 1990-02-20 1996-03-19 Mott; Jonathan C. Products incorporating piezoelectric material
CH682523A5 (fr) * 1990-04-20 1993-09-30 Suisse Electronique Microtech Dispositif de modulation de lumière à adressage matriciel.
GB9012099D0 (en) 1990-05-31 1990-07-18 Kodak Ltd Optical article for multicolour imaging
US5099353A (en) * 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5216537A (en) 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
DE69113150T2 (de) * 1990-06-29 1996-04-04 Texas Instruments Inc Deformierbare Spiegelvorrichtung mit aktualisiertem Raster.
US5018256A (en) 1990-06-29 1991-05-28 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5142405A (en) 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5153771A (en) 1990-07-18 1992-10-06 Northrop Corporation Coherent light modulation and detector
US5192395A (en) * 1990-10-12 1993-03-09 Texas Instruments Incorporated Method of making a digital flexure beam accelerometer
US5044736A (en) 1990-11-06 1991-09-03 Motorola, Inc. Configurable optical filter or display
US5602671A (en) * 1990-11-13 1997-02-11 Texas Instruments Incorporated Low surface energy passivation layer for micromechanical devices
US5331454A (en) 1990-11-13 1994-07-19 Texas Instruments Incorporated Low reset voltage process for DMD
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
CA2063744C (en) * 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5142414A (en) 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
US5179274A (en) * 1991-07-12 1993-01-12 Texas Instruments Incorporated Method for controlling operation of optical systems and devices
US5287215A (en) 1991-07-17 1994-02-15 Optron Systems, Inc. Membrane light modulation systems
US5170283A (en) 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5168406A (en) 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
US5254980A (en) 1991-09-06 1993-10-19 Texas Instruments Incorporated DMD display system controller
US5358601A (en) 1991-09-24 1994-10-25 Micron Technology, Inc. Process for isotropically etching semiconductor devices
US5315370A (en) 1991-10-23 1994-05-24 Bulow Jeffrey A Interferometric modulator for optical signal processing
US5233385A (en) 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
US5233456A (en) 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
US5228013A (en) 1992-01-10 1993-07-13 Bik Russell J Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays
US6381022B1 (en) * 1992-01-22 2002-04-30 Northeastern University Light modulating device
US5296950A (en) * 1992-01-31 1994-03-22 Texas Instruments Incorporated Optical signal free-space conversion board
US5231532A (en) 1992-02-05 1993-07-27 Texas Instruments Incorporated Switchable resonant filter for optical radiation
EP0562424B1 (de) 1992-03-25 1997-05-28 Texas Instruments Incorporated Eingebautes optisches Eichsystem
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5401983A (en) * 1992-04-08 1995-03-28 Georgia Tech Research Corporation Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
TW245772B (de) 1992-05-19 1995-04-21 Akzo Nv
JPH0651250A (ja) * 1992-05-20 1994-02-25 Texas Instr Inc <Ti> モノリシックな空間的光変調器およびメモリのパッケージ
JPH06214169A (ja) * 1992-06-08 1994-08-05 Texas Instr Inc <Ti> 制御可能な光学的周期的表面フィルタ
US5818095A (en) 1992-08-11 1998-10-06 Texas Instruments Incorporated High-yield spatial light modulator with light blocking layer
US5293272A (en) * 1992-08-24 1994-03-08 Physical Optics Corporation High finesse holographic fabry-perot etalon and method of fabricating
US5327286A (en) 1992-08-31 1994-07-05 Texas Instruments Incorporated Real time optical correlation system
US5325116A (en) 1992-09-18 1994-06-28 Texas Instruments Incorporated Device for writing to and reading from optical storage media
US5296775A (en) 1992-09-24 1994-03-22 International Business Machines Corporation Cooling microfan arrangements and process
FI96450C (fi) 1993-01-13 1996-06-25 Vaisala Oy Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto
US7830587B2 (en) 1993-03-17 2010-11-09 Qualcomm Mems Technologies, Inc. Method and device for modulating light with semiconductor substrate
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5559358A (en) 1993-05-25 1996-09-24 Honeywell Inc. Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
US5324683A (en) 1993-06-02 1994-06-28 Motorola, Inc. Method of forming a semiconductor structure having an air region
US5489952A (en) * 1993-07-14 1996-02-06 Texas Instruments Incorporated Method and device for multi-format television
US5365283A (en) 1993-07-19 1994-11-15 Texas Instruments Incorporated Color phase control for projection display using spatial light modulator
US5526172A (en) 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US5497197A (en) * 1993-11-04 1996-03-05 Texas Instruments Incorporated System and method for packaging data into video processor
US5452024A (en) 1993-11-01 1995-09-19 Texas Instruments Incorporated DMD display system
US5448314A (en) 1994-01-07 1995-09-05 Texas Instruments Method and apparatus for sequential color imaging
US5500761A (en) * 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
US5444566A (en) 1994-03-07 1995-08-22 Texas Instruments Incorporated Optimized electronic operation of digital micromirror devices
US5665997A (en) 1994-03-31 1997-09-09 Texas Instruments Incorporated Grated landing area to eliminate sticking of micro-mechanical devices
GB9407116D0 (en) 1994-04-11 1994-06-01 Secr Defence Ferroelectric liquid crystal display with greyscale
US7460291B2 (en) * 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US7852545B2 (en) 1994-05-05 2010-12-14 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US8081369B2 (en) 1994-05-05 2011-12-20 Qualcomm Mems Technologies, Inc. System and method for a MEMS device
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US7738157B2 (en) 1994-05-05 2010-06-15 Qualcomm Mems Technologies, Inc. System and method for a MEMS device
US7808694B2 (en) 1994-05-05 2010-10-05 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US20010003487A1 (en) * 1996-11-05 2001-06-14 Mark W. Miles Visible spectrum modulator arrays
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US6710908B2 (en) * 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
US7826120B2 (en) * 1994-05-05 2010-11-02 Qualcomm Mems Technologies, Inc. Method and device for multi-color interferometric modulation
US5497172A (en) * 1994-06-13 1996-03-05 Texas Instruments Incorporated Pulse width modulation for spatial light modulator with split reset addressing
US5499062A (en) * 1994-06-23 1996-03-12 Texas Instruments Incorporated Multiplexed memory timing with block reset and secondary memory
US5485304A (en) 1994-07-29 1996-01-16 Texas Instruments, Inc. Support posts for micro-mechanical devices
US5636052A (en) 1994-07-29 1997-06-03 Lucent Technologies Inc. Direct view display based on a micromechanical modulation
US5619059A (en) * 1994-09-28 1997-04-08 National Research Council Of Canada Color deformable mirror device having optical thin film interference color coatings
JPH08153700A (ja) * 1994-11-25 1996-06-11 Semiconductor Energy Lab Co Ltd 導電性被膜の異方性エッチング方法
US5610624A (en) * 1994-11-30 1997-03-11 Texas Instruments Incorporated Spatial light modulator with reduced possibility of an on state defect
US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US7898722B2 (en) * 1995-05-01 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical device with restoring electrode
US5661592A (en) 1995-06-07 1997-08-26 Silicon Light Machines Method of making and an apparatus for a flat diffraction grating light valve
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6849471B2 (en) * 2003-03-28 2005-02-01 Reflectivity, Inc. Barrier layers for microelectromechanical systems
US5739945A (en) * 1995-09-29 1998-04-14 Tayebati; Parviz Electrically tunable optical filter utilizing a deformable multi-layer mirror
US6324192B1 (en) 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
JPH09127551A (ja) * 1995-10-31 1997-05-16 Sharp Corp 半導体装置およびアクティブマトリクス基板
US5999306A (en) 1995-12-01 1999-12-07 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US5825528A (en) 1995-12-26 1998-10-20 Lucent Technologies Inc. Phase-mismatched fabry-perot cavity micromechanical modulator
JP3799092B2 (ja) * 1995-12-29 2006-07-19 アジレント・テクノロジーズ・インク 光変調装置及びディスプレイ装置
US5751469A (en) 1996-02-01 1998-05-12 Lucent Technologies Inc. Method and apparatus for an improved micromechanical modulator
US5710656A (en) * 1996-07-30 1998-01-20 Lucent Technologies Inc. Micromechanical optical modulator having a reduced-mass composite membrane
US5838484A (en) 1996-08-19 1998-11-17 Lucent Technologies Inc. Micromechanical optical modulator with linear operating characteristic
US7830588B2 (en) * 1996-12-19 2010-11-09 Qualcomm Mems Technologies, Inc. Method of making a light modulating display device and associated transistor circuitry and structures thereof
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
US5786927A (en) 1997-03-12 1998-07-28 Lucent Technologies Inc. Gas-damped micromechanical structure
US6384952B1 (en) 1997-03-27 2002-05-07 Mems Optical Inc. Vertical comb drive actuated deformable mirror device and method
DE69806846T2 (de) * 1997-05-08 2002-12-12 Texas Instruments Inc., Dallas Verbesserungen für räumliche Lichtmodulatoren
US5870221A (en) * 1997-07-25 1999-02-09 Lucent Technologies, Inc. Micromechanical modulator having enhanced performance
US5867302A (en) 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6031653A (en) * 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
US6028690A (en) * 1997-11-26 2000-02-22 Texas Instruments Incorporated Reduced micromirror mirror gaps for improved contrast ratio
US6180428B1 (en) * 1997-12-12 2001-01-30 Xerox Corporation Monolithic scanning light emitting devices using micromachining
KR100604621B1 (ko) 1998-01-20 2006-07-28 세이코 엡슨 가부시키가이샤 광 스위칭 소자, 그의 제어 방법 및 화상 표시 장치
US6262697B1 (en) 1998-03-20 2001-07-17 Eastman Kodak Company Display having viewable and conductive images
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) * 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6339417B1 (en) * 1998-05-15 2002-01-15 Inviso, Inc. Display system having multiple memory elements per pixel
US6046659A (en) * 1998-05-15 2000-04-04 Hughes Electronics Corporation Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications
GB2341476A (en) 1998-09-03 2000-03-15 Sharp Kk Variable resolution display device
US6323834B1 (en) * 1998-10-08 2001-11-27 International Business Machines Corporation Micromechanical displays and fabrication method
JP3919954B2 (ja) 1998-10-16 2007-05-30 富士フイルム株式会社 アレイ型光変調素子及び平面ディスプレイの駆動方法
US6335831B2 (en) * 1998-12-18 2002-01-01 Eastman Kodak Company Multilevel mechanical grating device
US6465956B1 (en) 1998-12-28 2002-10-15 Pioneer Corporation Plasma display panel
US6201633B1 (en) * 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets
US6862029B1 (en) * 1999-07-27 2005-03-01 Hewlett-Packard Development Company, L.P. Color display system
US6335235B1 (en) * 1999-08-17 2002-01-01 Advanced Micro Devices, Inc. Simplified method of patterning field dielectric regions in a semiconductor device
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6351329B1 (en) * 1999-10-08 2002-02-26 Lucent Technologies Inc. Optical attenuator
US6741383B2 (en) * 2000-08-11 2004-05-25 Reflectivity, Inc. Deflectable micromirrors with stopping mechanisms
US6549338B1 (en) * 1999-11-12 2003-04-15 Texas Instruments Incorporated Bandpass filter to reduce thermal impact of dichroic light shift
US6548908B2 (en) * 1999-12-27 2003-04-15 Xerox Corporation Structure and method for planar lateral oxidation in passive devices
US6545335B1 (en) * 1999-12-27 2003-04-08 Xerox Corporation Structure and method for electrical isolation of optoelectronic integrated circuits
US6519073B1 (en) * 2000-01-10 2003-02-11 Lucent Technologies Inc. Micromechanical modulator and methods for fabricating the same
US6307663B1 (en) 2000-01-26 2001-10-23 Eastman Kodak Company Spatial light modulator with conformal grating device
EP1185972A1 (de) 2000-02-24 2002-03-13 Koninklijke Philips Electronics N.V. Anzeigevorrichtung mit lichtleiter
US6836366B1 (en) 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same
US6698295B1 (en) * 2000-03-31 2004-03-02 Shipley Company, L.L.C. Microstructures comprising silicon nitride layer and thin conductive polysilicon layer
EP1170618B1 (de) 2000-07-03 2010-06-16 Sony Corporation Optische mehrschichtige Struktur, optische Schalteinrichtung, und Bildanzeigevorrichtung
EP1172681A3 (de) * 2000-07-13 2004-06-09 Creo IL. Ltd. Mikromechanischer Lichtmodulator mit Blaze-Effekt und Matrix daraus
US6853129B1 (en) * 2000-07-28 2005-02-08 Candescent Technologies Corporation Protected substrate structure for a field emission display device
US6466354B1 (en) 2000-09-19 2002-10-15 Silicon Light Machines Method and apparatus for interferometric modulation of light
US6556338B2 (en) 2000-11-03 2003-04-29 Intpax, Inc. MEMS based variable optical attenuator (MBVOA)
US6859218B1 (en) * 2000-11-07 2005-02-22 Hewlett-Packard Development Company, L.P. Electronic display devices and methods
US6433917B1 (en) 2000-11-22 2002-08-13 Ball Semiconductor, Inc. Light modulation device and system
US6906847B2 (en) 2000-12-07 2005-06-14 Reflectivity, Inc Spatial light modulators with light blocking/absorbing areas
US6614576B2 (en) 2000-12-15 2003-09-02 Texas Instruments Incorporated Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices
DE10064616C2 (de) * 2000-12-22 2003-02-06 Ovd Kinegram Ag Zug Dekorfolie und Verfahren zum Beschriften der Dekorfolie
US6912078B2 (en) 2001-03-16 2005-06-28 Corning Incorporated Electrostatically actuated micro-electro-mechanical devices and method of manufacture
US6661561B2 (en) 2001-03-26 2003-12-09 Creo Inc. High frequency deformable mirror device
US6657832B2 (en) 2001-04-26 2003-12-02 Texas Instruments Incorporated Mechanically assisted restoring force support for micromachined membranes
FR2824643B1 (fr) * 2001-05-10 2003-10-31 Jean Pierre Lazzari Dispositif de modulation de lumiere
JP3740444B2 (ja) 2001-07-11 2006-02-01 キヤノン株式会社 光偏向器、それを用いた光学機器、ねじれ揺動体
JP4032216B2 (ja) 2001-07-12 2008-01-16 ソニー株式会社 光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置
US6594059B2 (en) * 2001-07-16 2003-07-15 Axsun Technologies, Inc. Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof
US6862022B2 (en) * 2001-07-20 2005-03-01 Hewlett-Packard Development Company, L.P. Method and system for automatically selecting a vertical refresh rate for a video display monitor
US6632698B2 (en) 2001-08-07 2003-10-14 Hewlett-Packard Development Company, L.P. Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
US6661562B2 (en) * 2001-08-17 2003-12-09 Lucent Technologies Inc. Optical modulator and method of manufacture thereof
GB2389150B (en) * 2001-09-07 2004-08-25 Avon Polymer Prod Ltd Noise and vibration suppressors
US20030053078A1 (en) 2001-09-17 2003-03-20 Mark Missey Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators
US6870581B2 (en) * 2001-10-30 2005-03-22 Sharp Laboratories Of America, Inc. Single panel color video projection display using reflective banded color falling-raster illumination
US6791735B2 (en) 2002-01-09 2004-09-14 The Regents Of The University Of California Differentially-driven MEMS spatial light modulator
US6608268B1 (en) 2002-02-05 2003-08-19 Memtronics, A Division Of Cogent Solutions, Inc. Proximity micro-electro-mechanical system
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6643053B2 (en) * 2002-02-20 2003-11-04 The Regents Of The University Of California Piecewise linear spatial phase modulator using dual-mode micromirror arrays for temporal and diffractive fourier optics
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US6965468B2 (en) * 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US6972882B2 (en) 2002-04-30 2005-12-06 Hewlett-Packard Development Company, L.P. Micro-mirror device with light angle amplification
US6954297B2 (en) 2002-04-30 2005-10-11 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic liquid
JP3801099B2 (ja) 2002-06-04 2006-07-26 株式会社デンソー チューナブルフィルタ、その製造方法、及びそれを使用した光スイッチング装置
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6822798B2 (en) 2002-08-09 2004-11-23 Optron Systems, Inc. Tunable optical filter
US6674033B1 (en) * 2002-08-21 2004-01-06 Ming-Shan Wang Press button type safety switch
TW544787B (en) * 2002-09-18 2003-08-01 Promos Technologies Inc Method of forming self-aligned contact structure with locally etched gate conductive layer
JP4057871B2 (ja) * 2002-09-19 2008-03-05 東芝松下ディスプレイテクノロジー株式会社 液晶表示装置
AU2003260825A1 (en) * 2002-09-19 2004-04-08 Koninklijke Philips Electronics N.V. Switchable optical element
US7085121B2 (en) 2002-10-21 2006-08-01 Hrl Laboratories, Llc Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
FR2846318B1 (fr) 2002-10-24 2005-01-07 Commissariat Energie Atomique Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression
US7370185B2 (en) * 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
US6958846B2 (en) 2002-11-26 2005-10-25 Reflectivity, Inc Spatial light modulators with light absorbing areas
US6844959B2 (en) * 2002-11-26 2005-01-18 Reflectivity, Inc Spatial light modulators with light absorbing areas
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
TW594155B (en) 2002-12-27 2004-06-21 Prime View Int Corp Ltd Optical interference type color display and optical interference modulator
JP2004219843A (ja) 2003-01-16 2004-08-05 Seiko Epson Corp 光変調器、表示装置及びその製造方法
US7079154B2 (en) 2003-01-18 2006-07-18 Hewlett-Packard Development Company, L.P. Sub-pixel assembly with dithering
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
TW557395B (en) 2003-01-29 2003-10-11 Yen Sun Technology Corp Optical interference type reflection panel and the manufacturing method thereof
US7250930B2 (en) 2003-02-07 2007-07-31 Hewlett-Packard Development Company, L.P. Transparent active-matrix display
TW200417806A (en) 2003-03-05 2004-09-16 Prime View Int Corp Ltd A structure of a light-incidence electrode of an optical interference display plate
KR100925195B1 (ko) 2003-03-17 2009-11-06 엘지전자 주식회사 대화형 디스크 플레이어의 이미지 데이터 처리장치 및처리방법
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
TWI224235B (en) 2003-04-21 2004-11-21 Prime View Int Co Ltd A method for fabricating an interference display cell
TW567355B (en) 2003-04-21 2003-12-21 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TWI226504B (en) 2003-04-21 2005-01-11 Prime View Int Co Ltd A structure of an interference display cell
US7447891B2 (en) * 2003-04-30 2008-11-04 Hewlett-Packard Development Company, L.P. Light modulator with concentric control-electrode structure
US6829132B2 (en) * 2003-04-30 2004-12-07 Hewlett-Packard Development Company, L.P. Charge control of micro-electromechanical device
US7072093B2 (en) * 2003-04-30 2006-07-04 Hewlett-Packard Development Company, L.P. Optical interference pixel display with charge control
US6940630B2 (en) 2003-05-01 2005-09-06 University Of Florida Research Foundation, Inc. Vertical displacement device
TW570896B (en) * 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
TW591716B (en) * 2003-05-26 2004-06-11 Prime View Int Co Ltd A structure of a structure release and manufacturing the same
TWI223855B (en) 2003-06-09 2004-11-11 Taiwan Semiconductor Mfg Method for manufacturing reflective spatial light modulator mirror devices
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
JP4026829B2 (ja) * 2003-07-24 2007-12-26 ローム アンド ハース カンパニー 殺微生物組成物
US6862127B1 (en) * 2003-11-01 2005-03-01 Fusao Ishii High performance micromirror arrays and methods of manufacturing the same
US7190380B2 (en) * 2003-09-26 2007-03-13 Hewlett-Packard Development Company, L.P. Generating and displaying spatially offset sub-frames
JP3786106B2 (ja) * 2003-08-11 2006-06-14 セイコーエプソン株式会社 波長可変光フィルタ及びその製造方法
US7173314B2 (en) * 2003-08-13 2007-02-06 Hewlett-Packard Development Company, L.P. Storage device having a probe and a storage cell with moveable parts
TW200506479A (en) * 2003-08-15 2005-02-16 Prime View Int Co Ltd Color changeable pixel for an interference display
TWI305599B (en) * 2003-08-15 2009-01-21 Qualcomm Mems Technologies Inc Interference display panel and method thereof
TWI251712B (en) * 2003-08-15 2006-03-21 Prime View Int Corp Ltd Interference display plate
TW593127B (en) * 2003-08-18 2004-06-21 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
TWI231865B (en) * 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
US20050057442A1 (en) * 2003-08-28 2005-03-17 Olan Way Adjacent display of sequential sub-images
JP3979982B2 (ja) * 2003-08-29 2007-09-19 シャープ株式会社 干渉性変調器および表示装置
TWI230801B (en) 2003-08-29 2005-04-11 Prime View Int Co Ltd Reflective display unit using interferometric modulation and manufacturing method thereof
TWI232333B (en) * 2003-09-03 2005-05-11 Prime View Int Co Ltd Display unit using interferometric modulation and manufacturing method thereof
US7027204B2 (en) * 2003-09-26 2006-04-11 Silicon Light Machines Corporation High-density spatial light modulator
US6982820B2 (en) 2003-09-26 2006-01-03 Prime View International Co., Ltd. Color changeable pixel
TW593126B (en) 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US20050068583A1 (en) * 2003-09-30 2005-03-31 Gutkowski Lawrence J. Organizing a digital image
US6861277B1 (en) * 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US7161728B2 (en) * 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
TWI235345B (en) 2004-01-20 2005-07-01 Prime View Int Co Ltd A structure of an optical interference display unit
TWI256941B (en) 2004-02-18 2006-06-21 Qualcomm Mems Technologies Inc A micro electro mechanical system display cell and method for fabricating thereof
US7119945B2 (en) 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
TW200530669A (en) 2004-03-05 2005-09-16 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
TWI261683B (en) 2004-03-10 2006-09-11 Qualcomm Mems Technologies Inc Interference reflective element and repairing method thereof
US7476327B2 (en) * 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
TWI233916B (en) * 2004-07-09 2005-06-11 Prime View Int Co Ltd A structure of a micro electro mechanical system
TWI270722B (en) * 2004-07-23 2007-01-11 Au Optronics Corp Dual-side display panel
US7372348B2 (en) * 2004-08-20 2008-05-13 Palo Alto Research Center Incorporated Stressed material and shape memory material MEMS devices and methods for manufacturing
KR100648310B1 (ko) * 2004-09-24 2006-11-23 삼성전자주식회사 영상의 휘도 정보를 이용한 색변환장치 및 이를 구비하는디스플레이 장치
EP1800173A1 (de) * 2004-09-27 2007-06-27 Idc, Llc Verfahren und einrichtung zur interferometrischen mehrzustands-lichtmodulation
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7130104B2 (en) * 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator

Also Published As

Publication number Publication date
US7385762B2 (en) 2008-06-10
RU2007115926A (ru) 2008-11-10
JP2008514984A (ja) 2008-05-08
EP1800157A1 (de) 2007-06-27
US20070040777A1 (en) 2007-02-22
TW200624862A (en) 2006-07-16
US7130104B2 (en) 2006-10-31
WO2006036384A1 (en) 2006-04-06
EP1800157B1 (de) 2011-11-30
US7663794B2 (en) 2010-02-16
US20080112035A1 (en) 2008-05-15
US20080110855A1 (en) 2008-05-15
US20060077527A1 (en) 2006-04-13
TWI424191B (zh) 2014-01-21
JP4733135B2 (ja) 2011-07-27
MY135735A (en) 2008-06-30
MX2007003589A (es) 2007-05-23

Similar Documents

Publication Publication Date Title
ATE535836T1 (de) Verfahren und einrichtungen zur verhinderung der neigung eines spiegels in einem interferometrischen modulator
WO2006042173A3 (en) Modulators of hepatocyte growth factor activator
IL181714A0 (en) System and method of implementation of interferometric modulators for display mirrors
DE602004020018D1 (de) Dispersionszusammensetzung mit feinen Partikeln, optische Komponente, optisches Filmlaminat, Polarisationsstrahlteilervorrichtung und Verfahren zur Herstellung der optischen Komponente
MY144734A (en) Systems and methods for producing silicone hydrogel contact lenses from a polymerizable composition
ATE369547T1 (de) Optisches messsystem
DE602006003737D1 (de) Licht-modulator und verfahren zu seiner herstellung
PE20070602A1 (es) Compuestos de carboxiamina como moduladores de histona desacetilasa
NO20063534L (no) Filmmaterialer med kontrollerte desintegreringsegenskaper
DE602004015531D1 (de) Verfahren zur Ansteuerung eines räumlichen Lichtmodulators und Projektor
DE60223731D1 (de) Adaptives Wellenfront-Modulationssystem und Verfahren zur refraktiven Augenoperation
TW200613922A (en) Protective film-forming composition for immersion exposure and pattern-forming method using the same
CR9428A (es) Metodos para el tratamiento y la prevencion de fibrosis
EP1739801A3 (de) Optische Excimer-Laser-Elemente mit längerer Lebensdauer
TW200615142A (en) Films
EP2267523A3 (de) Stabilisierte elektrochrome Mittel
ATE447611T1 (de) Polypeptid-display-bibliotheken und verfahren zur herstellung und verwendung davon
WO2006020697A3 (en) Lcd mirror system and method
EP1954775A4 (de) Silikonbasierte beschichtungszusammensetzung mit mittlerem und hohem brechungsindex, verfahren zu deren herstellung und daraus hergestellte optische linse
EP4238193A4 (de) Photonische kristallmaser
DE60221138D1 (de) Flüssigkristalline oxetanverbindung, polymerisierbare flüssigkeit, kristalline zusammensetzung, verfahren zur herstellung eines flüssigkristallinen films, optischer film und flüssigkristallanzeige
DE60200092D1 (de) Optischer Plattenspieler und Verfahren zur Kontrolle der Bewegung der Objektivlinse
ZA202110679B (en) Optical nanocellulose film, and preparation method therefor and application thereof
NO20075140L (no) Fremgangsmater og preparater for modulering av vaskulaer integritet
ATE405531T1 (de) Verfahren zum beimengen von eines zusatzes in eine auf ein substrat gebildete dünnschicht und dessen verwendung in der ophthalmischen optik