ATE531069T1 - Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung - Google Patents
Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlungInfo
- Publication number
- ATE531069T1 ATE531069T1 AT09757210T AT09757210T ATE531069T1 AT E531069 T1 ATE531069 T1 AT E531069T1 AT 09757210 T AT09757210 T AT 09757210T AT 09757210 T AT09757210 T AT 09757210T AT E531069 T1 ATE531069 T1 AT E531069T1
- Authority
- AT
- Austria
- Prior art keywords
- liquid
- radiation source
- ray
- generating
- radiation
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
- H01J35/13—Active cooling, e.g. fluid flow, heat pipes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H01J2235/082—Fluids, e.g. liquids, gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008026938A DE102008026938A1 (de) | 2008-06-05 | 2008-06-05 | Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung |
PCT/EP2009/003784 WO2009146827A1 (de) | 2008-06-05 | 2009-05-28 | Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE531069T1 true ATE531069T1 (de) | 2011-11-15 |
Family
ID=41078192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT09757210T ATE531069T1 (de) | 2008-06-05 | 2009-05-28 | Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung |
Country Status (6)
Country | Link |
---|---|
US (1) | US8565381B2 (de) |
EP (1) | EP2283508B1 (de) |
AT (1) | ATE531069T1 (de) |
DE (1) | DE102008026938A1 (de) |
PL (1) | PL2283508T3 (de) |
WO (1) | WO2009146827A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014226813A1 (de) * | 2014-12-22 | 2016-06-23 | Siemens Aktiengesellschaft | Metallstrahlröntgenröhre |
US10748736B2 (en) | 2017-10-18 | 2020-08-18 | Kla-Tencor Corporation | Liquid metal rotating anode X-ray source for semiconductor metrology |
EP3493239A1 (de) * | 2017-12-01 | 2019-06-05 | Excillum AB | Röntgenquelle und verfahren zum erzeugen von röntgenstrahlung |
US11719652B2 (en) | 2020-02-04 | 2023-08-08 | Kla Corporation | Semiconductor metrology and inspection based on an x-ray source with an electron emitter array |
US11882642B2 (en) | 2021-12-29 | 2024-01-23 | Innovicum Technology Ab | Particle based X-ray source |
US11955308B1 (en) | 2022-09-22 | 2024-04-09 | Kla Corporation | Water cooled, air bearing based rotating anode x-ray illumination source |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4737647A (en) | 1986-03-31 | 1988-04-12 | Siemens Medical Laboratories, Inc. | Target assembly for an electron linear accelerator |
DE19955392A1 (de) * | 1999-11-18 | 2001-05-23 | Philips Corp Intellectual Pty | Monochromatische Röntgenstrahlenquelle |
AU2001272873A1 (en) | 2000-07-28 | 2002-02-13 | Jettec Ab | Method and apparatus for generating x-ray or euv radiation |
DE10062928A1 (de) * | 2000-12-16 | 2002-06-20 | Philips Corp Intellectual Pty | Röntgenstrahler mit Flüssigmetall-Target |
DE10106740A1 (de) * | 2001-02-14 | 2002-08-22 | Philips Corp Intellectual Pty | Röntgenstrahler mit einem Target aus einem flüssigen Metall |
DE10129463A1 (de) * | 2001-06-19 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit einem Flüssigmetall-Target |
DE10130070A1 (de) * | 2001-06-21 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit Flüssigmetall-Target |
US6961408B2 (en) * | 2002-03-08 | 2005-11-01 | Koninklijke Philips Electronics N.V. | Device for generating X-rays having a liquid metal anode |
WO2003077276A1 (en) * | 2002-03-08 | 2003-09-18 | Koninklijke Philips Electronics N.V. | A device for generating x-rays having a liquid metal anode |
EP1573774A2 (de) * | 2002-12-11 | 2005-09-14 | Koninklijke Philips Electronics N.V. | Röntgenstrhalungsquelle zur erzeugung monochromatischer röntgenstrahlung |
DE102004013620B4 (de) * | 2004-03-19 | 2008-12-04 | GE Homeland Protection, Inc., Newark | Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers |
DE102004013618B4 (de) * | 2004-03-19 | 2007-07-26 | Yxlon International Security Gmbh | Verfahren zum Betrieb einer magnetohydrodynamischen Pumpe, Flüssigmetallanode für eine Röntgenquelle sowie Röntgenstrahler |
DE102004015590B4 (de) | 2004-03-30 | 2008-10-09 | GE Homeland Protection, Inc., Newark | Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul |
DE602005002257T2 (de) * | 2004-04-13 | 2008-05-29 | Philips Intellectual Property & Standards Gmbh | Vorrichtung zur erzeugung von röntgenstrahlen mit einer flüssigmetallanode |
-
2008
- 2008-06-05 DE DE102008026938A patent/DE102008026938A1/de not_active Withdrawn
-
2009
- 2009-05-28 WO PCT/EP2009/003784 patent/WO2009146827A1/de active Application Filing
- 2009-05-28 PL PL09757210T patent/PL2283508T3/pl unknown
- 2009-05-28 US US12/996,239 patent/US8565381B2/en active Active
- 2009-05-28 AT AT09757210T patent/ATE531069T1/de active
- 2009-05-28 EP EP09757210A patent/EP2283508B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
US8565381B2 (en) | 2013-10-22 |
DE102008026938A1 (de) | 2009-12-17 |
WO2009146827A1 (de) | 2009-12-10 |
PL2283508T3 (pl) | 2012-03-30 |
US20110080997A1 (en) | 2011-04-07 |
EP2283508A1 (de) | 2011-02-16 |
EP2283508B1 (de) | 2011-10-26 |
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