ATE531069T1 - Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung - Google Patents

Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung

Info

Publication number
ATE531069T1
ATE531069T1 AT09757210T AT09757210T ATE531069T1 AT E531069 T1 ATE531069 T1 AT E531069T1 AT 09757210 T AT09757210 T AT 09757210T AT 09757210 T AT09757210 T AT 09757210T AT E531069 T1 ATE531069 T1 AT E531069T1
Authority
AT
Austria
Prior art keywords
liquid
radiation source
ray
generating
radiation
Prior art date
Application number
AT09757210T
Other languages
English (en)
Inventor
Frank Sukowski
Norman Uhlmann
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Application granted granted Critical
Publication of ATE531069T1 publication Critical patent/ATE531069T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H01J35/13—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT09757210T 2008-06-05 2009-05-28 Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung ATE531069T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008026938A DE102008026938A1 (de) 2008-06-05 2008-06-05 Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung
PCT/EP2009/003784 WO2009146827A1 (de) 2008-06-05 2009-05-28 Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung

Publications (1)

Publication Number Publication Date
ATE531069T1 true ATE531069T1 (de) 2011-11-15

Family

ID=41078192

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09757210T ATE531069T1 (de) 2008-06-05 2009-05-28 Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung

Country Status (6)

Country Link
US (1) US8565381B2 (de)
EP (1) EP2283508B1 (de)
AT (1) ATE531069T1 (de)
DE (1) DE102008026938A1 (de)
PL (1) PL2283508T3 (de)
WO (1) WO2009146827A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014226813A1 (de) * 2014-12-22 2016-06-23 Siemens Aktiengesellschaft Metallstrahlröntgenröhre
US10748736B2 (en) 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
EP3493239A1 (de) * 2017-12-01 2019-06-05 Excillum AB Röntgenquelle und verfahren zum erzeugen von röntgenstrahlung
US11719652B2 (en) 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
US11882642B2 (en) 2021-12-29 2024-01-23 Innovicum Technology Ab Particle based X-ray source
US11955308B1 (en) 2022-09-22 2024-04-09 Kla Corporation Water cooled, air bearing based rotating anode x-ray illumination source

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4737647A (en) 1986-03-31 1988-04-12 Siemens Medical Laboratories, Inc. Target assembly for an electron linear accelerator
DE19955392A1 (de) * 1999-11-18 2001-05-23 Philips Corp Intellectual Pty Monochromatische Röntgenstrahlenquelle
AU2001272873A1 (en) 2000-07-28 2002-02-13 Jettec Ab Method and apparatus for generating x-ray or euv radiation
DE10062928A1 (de) * 2000-12-16 2002-06-20 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
DE10106740A1 (de) * 2001-02-14 2002-08-22 Philips Corp Intellectual Pty Röntgenstrahler mit einem Target aus einem flüssigen Metall
DE10129463A1 (de) * 2001-06-19 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit einem Flüssigmetall-Target
DE10130070A1 (de) * 2001-06-21 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
US6961408B2 (en) * 2002-03-08 2005-11-01 Koninklijke Philips Electronics N.V. Device for generating X-rays having a liquid metal anode
WO2003077276A1 (en) * 2002-03-08 2003-09-18 Koninklijke Philips Electronics N.V. A device for generating x-rays having a liquid metal anode
EP1573774A2 (de) * 2002-12-11 2005-09-14 Koninklijke Philips Electronics N.V. Röntgenstrhalungsquelle zur erzeugung monochromatischer röntgenstrahlung
DE102004013620B4 (de) * 2004-03-19 2008-12-04 GE Homeland Protection, Inc., Newark Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers
DE102004013618B4 (de) * 2004-03-19 2007-07-26 Yxlon International Security Gmbh Verfahren zum Betrieb einer magnetohydrodynamischen Pumpe, Flüssigmetallanode für eine Röntgenquelle sowie Röntgenstrahler
DE102004015590B4 (de) 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
DE602005002257T2 (de) * 2004-04-13 2008-05-29 Philips Intellectual Property & Standards Gmbh Vorrichtung zur erzeugung von röntgenstrahlen mit einer flüssigmetallanode

Also Published As

Publication number Publication date
US8565381B2 (en) 2013-10-22
DE102008026938A1 (de) 2009-12-17
WO2009146827A1 (de) 2009-12-10
PL2283508T3 (pl) 2012-03-30
US20110080997A1 (en) 2011-04-07
EP2283508A1 (de) 2011-02-16
EP2283508B1 (de) 2011-10-26

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