ATE515678T1 - Optisches messgerät und messverfahren - Google Patents

Optisches messgerät und messverfahren

Info

Publication number
ATE515678T1
ATE515678T1 AT10159535T AT10159535T ATE515678T1 AT E515678 T1 ATE515678 T1 AT E515678T1 AT 10159535 T AT10159535 T AT 10159535T AT 10159535 T AT10159535 T AT 10159535T AT E515678 T1 ATE515678 T1 AT E515678T1
Authority
AT
Austria
Prior art keywords
light
measurement
received
optical measuring
basis
Prior art date
Application number
AT10159535T
Other languages
English (en)
Inventor
Masanobu Kataoka
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Application granted granted Critical
Publication of ATE515678T1 publication Critical patent/ATE515678T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AT10159535T 2009-04-14 2010-04-09 Optisches messgerät und messverfahren ATE515678T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009098113A JP2010249604A (ja) 2009-04-14 2009-04-14 光学式測定装置、光学式測定方法、及び光学式測定処理プログラム

Publications (1)

Publication Number Publication Date
ATE515678T1 true ATE515678T1 (de) 2011-07-15

Family

ID=42126385

Family Applications (1)

Application Number Title Priority Date Filing Date
AT10159535T ATE515678T1 (de) 2009-04-14 2010-04-09 Optisches messgerät und messverfahren

Country Status (4)

Country Link
US (1) US7948642B2 (de)
EP (1) EP2241855B1 (de)
JP (1) JP2010249604A (de)
AT (1) ATE515678T1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102927920A (zh) * 2012-10-31 2013-02-13 昆山允可精密工业技术有限公司 圆柱材测量装置
JP6178617B2 (ja) * 2013-05-20 2017-08-09 株式会社ミツトヨ 光学式測定装置
JP6862303B2 (ja) * 2017-06-30 2021-04-21 株式会社ミツトヨ 光学測定装置
EP3450097A1 (de) * 2017-09-05 2019-03-06 Renishaw PLC Otische vorrichtung und optisches verfahren zur kontaktlosen werkzeugeinrichtung
EP3537100B1 (de) * 2018-03-01 2020-08-05 Mitutoyo Corporation Verfahren und vorrichtungen zur brechungsindexmessung eines transparenten rohrs
JP7240937B2 (ja) * 2019-04-05 2023-03-16 株式会社ミツトヨ 光学式測定装置および光学式測定方法
JP7503465B2 (ja) 2020-09-23 2024-06-20 株式会社ミツトヨ 光学式測定装置および光学式測定方法
JP7478084B2 (ja) * 2020-11-20 2024-05-02 株式会社キーエンス 光学測定装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3905705A (en) * 1972-01-31 1975-09-16 Techmet Co Optical measuring apparatus
US4007992A (en) * 1975-06-02 1977-02-15 Techmet Company Light beam shape control in optical measuring apparatus
JPH06249618A (ja) 1993-03-01 1994-09-09 Mitsutoyo Corp 光学式寸法測定装置
JPH0915156A (ja) * 1995-06-28 1997-01-17 Kdk Corp 分光測定方法及び測定装置
JP4191953B2 (ja) 2002-05-09 2008-12-03 株式会社ミツトヨ レ−ザ走査型寸法測定機の校正方法
JP2006038487A (ja) * 2004-07-22 2006-02-09 Mitsutoyo Corp 光学式測定装置

Also Published As

Publication number Publication date
US7948642B2 (en) 2011-05-24
US20100259769A1 (en) 2010-10-14
EP2241855B1 (de) 2011-07-06
EP2241855A1 (de) 2010-10-20
JP2010249604A (ja) 2010-11-04

Similar Documents

Publication Publication Date Title
ATE515678T1 (de) Optisches messgerät und messverfahren
ATE520005T1 (de) Vorrichtung und verfahren zur optischen distanzmessung
ATE493632T1 (de) Vorrichtung zur dreidimensionalen optischen vermessung
EP2482040A3 (de) Optischer Kodierer mit Fehlausrichtungserkennung und damit assoziiertes Anpassverfahren
WO2011107302A3 (en) Imprint lithography
FR2930334B1 (fr) Dispositif et procede d'analyse optique, appareil et procede de mesure chromatique associes
WO2009049834A3 (en) Optical sensor device
WO2014197786A3 (en) Apparatus and methods for detecting optical signals from implanted sensors
ATE514919T1 (de) Distanzmessendes verfahren für ein referenzlinienprojizierendes gerät und ebensolches gerät
ATE511075T1 (de) Interferometrische vorrichtung zum messen von formen
EA201291288A1 (ru) Способ и устройство измерения оптических характеристик оптически изменяемой маркировки, нанесенной на объект
WO2014056708A3 (en) Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method
ATE460641T1 (de) Optisches bildmessgerät
RU2015117776A (ru) Спектроскопическое измерительное устройство
ATE518153T1 (de) Bearbeitungsanordnung für impulssignal, bearbeitungsverfahren und programme dafür
WO2009057114A3 (en) Optical sensor measurement and crosstalk evaluation
ATE497180T1 (de) Vorrichtung zur messung der empfangszeit eines lichtimpulses sowie abstandsmessung damit
ATE447459T1 (de) Verfahren und laseranordnung mit einer vorrichtung zur zustandserkennung eines optischen elements
ATE465426T1 (de) Optoelektronischer sensor zur entfernungsmessung
WO2011147385A3 (en) Method and device for continuous detection of the thickness and/or homogeneity of linear objects, particularly textile fibres, and their application
ATE543116T1 (de) Fokuserkennungsvorrichtung und damit versehene bildaufnahmevorrichtung
ATE370388T1 (de) Optischer axialverschiebungssensor
JP2012205887A5 (de)
WO2009016405A3 (en) Optical measurement apparatus and method therefor
DE602006007332D1 (de) Sicherheitssystem und alarmverifikationssystem

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties