ATE512463T1 - Leistungshalbleitermodul in druckkontaktausführung sowie verfahren zur herstellung desselben - Google Patents

Leistungshalbleitermodul in druckkontaktausführung sowie verfahren zur herstellung desselben

Info

Publication number
ATE512463T1
ATE512463T1 AT08006196T AT08006196T ATE512463T1 AT E512463 T1 ATE512463 T1 AT E512463T1 AT 08006196 T AT08006196 T AT 08006196T AT 08006196 T AT08006196 T AT 08006196T AT E512463 T1 ATE512463 T1 AT E512463T1
Authority
AT
Austria
Prior art keywords
pressure contact
semiconductor module
producing
same
power semiconductor
Prior art date
Application number
AT08006196T
Other languages
English (en)
Inventor
Juergen Steger
Frank Ebersberger
Original Assignee
Semikron Elektronik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semikron Elektronik Gmbh filed Critical Semikron Elektronik Gmbh
Application granted granted Critical
Publication of ATE512463T1 publication Critical patent/ATE512463T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/71—Means for bonding not being attached to, or not being formed on, the surface to be connected
    • H01L24/72—Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01047—Silver [Ag]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01068—Erbium [Er]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901—Structure
    • H01L2924/1904—Component type
    • H01L2924/19041—Component type being a capacitor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Multi-Conductor Connections (AREA)
  • Led Device Packages (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
AT08006196T 2007-04-04 2008-03-29 Leistungshalbleitermodul in druckkontaktausführung sowie verfahren zur herstellung desselben ATE512463T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007016222A DE102007016222B3 (de) 2007-04-04 2007-04-04 Leistungshalbleitermodul in Druckkontaktausführung sowie Verfahren zur Herstellung desselben

Publications (1)

Publication Number Publication Date
ATE512463T1 true ATE512463T1 (de) 2011-06-15

Family

ID=39410259

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08006196T ATE512463T1 (de) 2007-04-04 2008-03-29 Leistungshalbleitermodul in druckkontaktausführung sowie verfahren zur herstellung desselben

Country Status (10)

Country Link
US (1) US8368207B2 (de)
EP (1) EP1978557B1 (de)
JP (1) JP5028317B2 (de)
KR (1) KR101419059B1 (de)
CN (1) CN101281890B (de)
AT (1) ATE512463T1 (de)
BR (1) BRPI0800886B1 (de)
DE (1) DE102007016222B3 (de)
DK (1) DK1978557T3 (de)
ES (1) ES2368413T3 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009002993B4 (de) 2009-05-11 2012-10-04 Infineon Technologies Ag Leistungshalbleitermodul mit beabstandeten Schaltungsträgern
DE102009037257B4 (de) * 2009-08-12 2014-07-31 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul mit Schaltungsträger und Lastanschlusselement sowie Herstellungsverfahren hierzu
DE102009028814B4 (de) * 2009-08-21 2018-04-26 Semikron Elektronik Gmbh & Co. Kg Verfahren zur Montage eines Leistungshalbleitermoduls
DE102009029476B4 (de) 2009-09-15 2012-11-08 Lisa Dräxlmaier GmbH Elektronische Vorrichtung zum Schalten von Strömen und Herstellungsverfahren für dieselbe
DE102011004491A1 (de) * 2011-02-22 2012-08-23 Semikron Elektronik Gmbh & Co. Kg Schaltungsanordnung
US8897010B2 (en) * 2011-08-22 2014-11-25 General Electric Company High performance liquid cooled heatsink for IGBT modules
DE102013209444A1 (de) * 2013-05-22 2014-11-27 Siemens Aktiengesellschaft Leistungshalbleitermodul, Verfahren zum Betrieb eines Leistungshalbleitermoduls und Verfahren zur Herstellung eines Leistungshalbleitermoduls
US9420724B2 (en) * 2014-11-04 2016-08-16 Ge Aviation Systems Llc Power converter assembly
DE102016112777B4 (de) * 2016-07-12 2021-03-18 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitereinrichtung
US11495517B2 (en) 2017-09-15 2022-11-08 Finar Module Sagl Packaging method and joint technology for an electronic device

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3808471A (en) * 1972-10-26 1974-04-30 Borg Warner Expandible pressure mounted semiconductor assembly
US4414562A (en) * 1980-07-24 1983-11-08 Thermal Associates, Inc. Semiconductor heat sink assembly including thermally responsive means for increasing compression as the temperature of said assembly increases
US4679118A (en) * 1984-08-07 1987-07-07 Aavid Engineering, Inc. Electronic chip-carrier heat sinks
US4748495A (en) * 1985-08-08 1988-05-31 Dypax Systems Corporation High density multi-chip interconnection and cooling package
EP0476322B1 (de) * 1990-09-10 1996-04-17 Yokogawa Electric Corporation Gehäuseanordnung für eine elektronische Anlage
JP2882143B2 (ja) * 1991-12-10 1999-04-12 富士電機株式会社 半導体装置の内部配線構造
EP0608418B1 (de) * 1992-05-20 1998-11-04 Seiko Epson Corporation Kassette für eine elektronische vorrichtung
US5479319A (en) * 1992-12-30 1995-12-26 Interconnect Systems, Inc. Multi-level assemblies for interconnecting integrated circuits
US5468157A (en) * 1993-10-29 1995-11-21 Texas Instruments Incorporated Non-destructive interconnect system for semiconductor devices
US5397245A (en) * 1993-10-29 1995-03-14 Texas Instruments Incorporated Non-destructive interconnect system for semiconductor devices
JP3316714B2 (ja) * 1994-05-31 2002-08-19 三菱電機株式会社 半導体装置
JP3433279B2 (ja) * 1995-11-09 2003-08-04 株式会社日立製作所 半導体装置
US6401807B1 (en) * 1997-04-03 2002-06-11 Silent Systems, Inc. Folded fin heat sink and fan attachment
US6703640B1 (en) * 1998-01-20 2004-03-09 Micron Technology, Inc. Spring element for use in an apparatus for attaching to a semiconductor and a method of attaching
US6381836B1 (en) * 1998-02-23 2002-05-07 Intel Corporation Clip and pin field for IC packaging
US6287435B1 (en) * 1998-05-06 2001-09-11 Tokyo Electron Limited Method and apparatus for ionized physical vapor deposition
US6327128B1 (en) * 1998-10-07 2001-12-04 Electro-Dyn Electronics Corporation Automotive bridge rectifier assembly with thermal protection
US6061235A (en) * 1998-11-18 2000-05-09 Hewlett-Packard Company Method and apparatus for a modular integrated apparatus for heat dissipation, processor integration, electrical interface, and electromagnetic interference management
US6801431B2 (en) * 1999-07-15 2004-10-05 Incep Technologies, Inc. Integrated power delivery and cooling system for high power microprocessors
US6803650B2 (en) * 2001-02-23 2004-10-12 Silicon Bandwidth Inc. Semiconductor die package having mesh power and ground planes
DE10149886A1 (de) * 2001-10-10 2003-04-30 Eupec Gmbh & Co Kg Leistunghalbleitermodul
DE10231219C1 (de) * 2002-07-11 2003-05-22 Semikron Elektronik Gmbh Druckkontaktiertes Halbleiterrelais
US7050765B2 (en) * 2003-01-08 2006-05-23 Xytrans, Inc. Highly integrated microwave outdoor unit (ODU)
TW566572U (en) * 2003-03-07 2003-12-11 Lite On Technology Corp Flexible assembling device applied in an optical projection apparatus and its mechanism
DE10316356B4 (de) * 2003-04-10 2012-07-26 Semikron Elektronik Gmbh & Co. Kg Modular aufgebautes Leistungshalbleitermodul
US6885557B2 (en) * 2003-04-24 2005-04-26 Intel Corporaiton Heatsink assembly
DE102005024900B4 (de) * 2004-06-08 2012-08-16 Fuji Electric Co., Ltd. Leistungsmodul
DE102005039278A1 (de) * 2005-08-19 2007-02-22 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul mit Leitungselement
JP4278680B2 (ja) * 2006-12-27 2009-06-17 三菱電機株式会社 電子制御装置
US8424594B2 (en) * 2007-12-10 2013-04-23 Presto Engineering, Inc. Apparatus for thermal control in the analysis of electronic devices

Also Published As

Publication number Publication date
CN101281890B (zh) 2011-08-03
KR20080090301A (ko) 2008-10-08
ES2368413T3 (es) 2011-11-17
US20080266812A1 (en) 2008-10-30
EP1978557A3 (de) 2010-11-17
JP2008258626A (ja) 2008-10-23
DE102007016222B3 (de) 2008-11-06
US8368207B2 (en) 2013-02-05
EP1978557B1 (de) 2011-06-08
BRPI0800886A2 (pt) 2009-11-17
EP1978557A2 (de) 2008-10-08
BRPI0800886B1 (pt) 2018-08-07
DK1978557T3 (da) 2011-09-12
KR101419059B1 (ko) 2014-08-13
CN101281890A (zh) 2008-10-08
JP5028317B2 (ja) 2012-09-19

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