ATE511095T1 - MICROMECHANICAL ACCELERATION SENSOR - Google Patents

MICROMECHANICAL ACCELERATION SENSOR

Info

Publication number
ATE511095T1
ATE511095T1 AT09172519T AT09172519T ATE511095T1 AT E511095 T1 ATE511095 T1 AT E511095T1 AT 09172519 T AT09172519 T AT 09172519T AT 09172519 T AT09172519 T AT 09172519T AT E511095 T1 ATE511095 T1 AT E511095T1
Authority
AT
Austria
Prior art keywords
accelerometer
movable seismic
connection unit
masses
amplification units
Prior art date
Application number
AT09172519T
Other languages
German (de)
Inventor
Regis Quer
Olivier Lefort
Andre Boura
Original Assignee
Thales Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Sa filed Critical Thales Sa
Application granted granted Critical
Publication of ATE511095T1 publication Critical patent/ATE511095T1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Pressure Sensors (AREA)
  • Inorganic Fibers (AREA)

Abstract

The accelerometer (ACC) has a common movable seismic element (ESMC) with movable seismic masses (MSM1, MSM2) that are displaced in translation along a sensitive axis (Oy) or in rotation with respect to a rotation axis. The masses are connected together by a flexible mechanical connection unit (OLM) i.e. flexion beam, to avoid deformation of amplification units (MA1, MA2), following the deformation of the accelerometer due to external thermal constraints. Mechanical stiffness of the connection unit is lower than that of an assembly formed by the amplification units and resonators (R1, R2). An independent claim is also included for method for thermo-mechanical decoupling of a common movable seismic element from measurement cells of a micro-machined accelerometer.
AT09172519T 2008-10-10 2009-10-08 MICROMECHANICAL ACCELERATION SENSOR ATE511095T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0805615A FR2937145B1 (en) 2008-10-10 2008-10-10 MICRO-FACTORY ACCELEROMETER

Publications (1)

Publication Number Publication Date
ATE511095T1 true ATE511095T1 (en) 2011-06-15

Family

ID=40635787

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09172519T ATE511095T1 (en) 2008-10-10 2009-10-08 MICROMECHANICAL ACCELERATION SENSOR

Country Status (4)

Country Link
US (1) US8297121B2 (en)
EP (1) EP2175282B1 (en)
AT (1) ATE511095T1 (en)
FR (1) FR2937145B1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2910635B1 (en) * 2006-12-20 2009-03-06 Thales Sa TEST MASS GUIDING BLADE AND MICRO-FACTORY ELECTROMECHANICAL SYSTEM COMPRISING SUCH A BLADE
JP5375624B2 (en) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 Acceleration sensor and acceleration detection device
FR2957414B1 (en) * 2010-03-15 2012-09-28 Commissariat Energie Atomique FORCE SENSOR WITH REDUCED NOISE
FR2970073B1 (en) 2010-12-31 2014-02-07 Thales Sa FASTENING SYSTEM FOR LASER GYROMETER OPTIC BLOCK
JP2012242343A (en) * 2011-05-24 2012-12-10 Seiko Epson Corp Acceleration sensor and acceleration detector
KR101328642B1 (en) * 2011-09-30 2013-11-14 (주)마이크로인피니티 Mems resonating accelerometer
ITTO20120855A1 (en) * 2012-09-28 2014-03-29 Milano Politecnico INTEGRATED STRUCTURE OF DETECTIVE DETECTION OF ACCELERATION AND ANGULAR SPEED AND RELATIVE MEMS SENSOR DEVICE
US9631304B2 (en) * 2013-03-15 2017-04-25 Singer Sourcing Limited Llc Variable timing system of a sewing machine and method for selectively adjusting a timing of such a system
EP3028007A4 (en) 2013-08-02 2017-07-12 Motion Engine Inc. Mems motion sensor and method of manufacturing
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
ITUA20162172A1 (en) * 2016-03-31 2017-10-01 St Microelectronics Srl ACCELEROMETRIC SENSOR MADE IN MEMS TECHNOLOGY WITH HIGH ACCURACY AND REDUCED SENSITIVITY TOWARDS TEMPERATURE AND AGING
GB2561887B (en) * 2017-04-27 2022-10-05 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
GB2561886B (en) * 2017-04-27 2022-10-19 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2984111A (en) * 1959-06-19 1961-05-16 Bosch Arma Corp Accelerometer
US4750363A (en) * 1986-06-27 1988-06-14 Sundstrand Data Control, Inc. Temperature compensation of an accelerometer
US4970903A (en) * 1987-10-22 1990-11-20 Hanson Richard A Force sensing device
FR2720509B1 (en) * 1994-05-27 1996-08-23 Sextant Avionique Temperature compensated resonator microaccelerometer.
FR2848298B1 (en) * 2002-12-10 2005-03-11 Thales Sa ACCELEROMETER WITH VIBRATING BEAM

Also Published As

Publication number Publication date
US20100089157A1 (en) 2010-04-15
EP2175282A1 (en) 2010-04-14
US8297121B2 (en) 2012-10-30
FR2937145B1 (en) 2010-09-24
EP2175282B1 (en) 2011-05-25
FR2937145A1 (en) 2010-04-16

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