ATE484733T1 - Thermischer durchflussmesser mit einem umgekehrten substrat - Google Patents
Thermischer durchflussmesser mit einem umgekehrten substratInfo
- Publication number
- ATE484733T1 ATE484733T1 AT05254050T AT05254050T ATE484733T1 AT E484733 T1 ATE484733 T1 AT E484733T1 AT 05254050 T AT05254050 T AT 05254050T AT 05254050 T AT05254050 T AT 05254050T AT E484733 T1 ATE484733 T1 AT E484733T1
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- thermal flow
- flow meter
- reversed substrate
- conduit
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/026—Measuring blood flow
- A61B5/0275—Measuring blood flow using tracers, e.g. dye dilution
- A61B5/028—Measuring blood flow using tracers, e.g. dye dilution by thermo-dilution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Cardiology (AREA)
- Physiology (AREA)
- General Physics & Mathematics (AREA)
- Biophysics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Fluid Mechanics (AREA)
- Medical Informatics (AREA)
- Hematology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Measuring Volume Flow (AREA)
- Finger-Pressure Massage (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- External Artificial Organs (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/881,425 US7069779B2 (en) | 2004-06-30 | 2004-06-30 | Thermal flow sensor having an inverted substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE484733T1 true ATE484733T1 (de) | 2010-10-15 |
Family
ID=35064653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05254050T ATE484733T1 (de) | 2004-06-30 | 2005-06-29 | Thermischer durchflussmesser mit einem umgekehrten substrat |
Country Status (6)
Country | Link |
---|---|
US (1) | US7069779B2 (de) |
EP (1) | EP1612522B1 (de) |
JP (1) | JP5242002B2 (de) |
AT (1) | ATE484733T1 (de) |
DE (1) | DE602005024079D1 (de) |
ES (1) | ES2353216T3 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9694166B2 (en) | 2002-03-26 | 2017-07-04 | Medtronics Ps Medical, Inc. | Method of draining cerebrospinal fluid |
US20030216710A1 (en) * | 2002-03-26 | 2003-11-20 | Hurt Robert F. | Catheter |
JP5121159B2 (ja) | 2006-04-18 | 2013-01-16 | ヤマハ発動機株式会社 | 自動変速制御装置および車両 |
US20080013291A1 (en) * | 2006-07-17 | 2008-01-17 | Toralf Bork | Thermal flow sensor having streamlined packaging |
US7603898B2 (en) * | 2007-12-19 | 2009-10-20 | Honeywell International Inc. | MEMS structure for flow sensor |
US20090204019A1 (en) | 2008-02-13 | 2009-08-13 | Alec Ginggen | Combined Pressure and Flow Sensor Integrated in a Shunt System |
WO2011075568A1 (en) * | 2009-12-18 | 2011-06-23 | Waters Technologies Corporation | Thermal-based flow sensing apparatus and method for high-performance liquid chromatography |
JP5481454B2 (ja) * | 2011-09-22 | 2014-04-23 | 株式会社東芝 | 流量センサ、マスフローコントローラ、および流量センサの製造方法 |
WO2014145858A2 (en) | 2013-03-15 | 2014-09-18 | Bitol Designs, Llc | Occlusion resistant catheter and method of use |
US9243943B2 (en) * | 2013-04-10 | 2016-01-26 | International Business Machines Corporation | Air-flow sensor for adapter slots in a data processing system |
JP6563211B2 (ja) * | 2015-02-23 | 2019-08-21 | サーパス工業株式会社 | 熱式流量計およびその製造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0131318B1 (de) * | 1983-05-18 | 1991-12-27 | Bronkhorst High-Tech B.V. | Durchflussmessgerät |
JP3324855B2 (ja) * | 1993-12-04 | 2002-09-17 | 株式会社エステック | 質量流量センサ |
DE4439222C2 (de) * | 1994-11-03 | 1998-05-28 | Bosch Gmbh Robert | Massenflußsensor mit Druckkompensation |
US5623097A (en) * | 1994-11-24 | 1997-04-22 | Ricoh Company, Ltd. | Thermal-type flow sensor |
JP3543820B2 (ja) * | 1995-12-13 | 2004-07-21 | 松下電器産業株式会社 | 超音波流量計 |
JP3659394B2 (ja) * | 1998-06-30 | 2005-06-15 | 株式会社日本自動車部品総合研究所 | 液密計測装置 |
JP3857526B2 (ja) * | 1999-03-31 | 2006-12-13 | シーメンス アクチエンゲゼルシヤフト | 無支持の微細構造体または肉薄の扁平部分またはダイアフラムを製造する方法および該方法により製造された無支持の微細構造体の使用法 |
US6526823B2 (en) * | 1999-11-30 | 2003-03-04 | California Institute Of Technology | Microelectromechanical system sensor assembly |
JP2001264139A (ja) * | 2000-03-22 | 2001-09-26 | Seiko Instruments Inc | 容積式流量計および流量検出用プローブ |
JP2001349759A (ja) * | 2000-06-08 | 2001-12-21 | Mitsubishi Electric Corp | 熱式流量センサ |
JP2002062306A (ja) * | 2000-08-23 | 2002-02-28 | Tokyo Gas Co Ltd | 流速検出装置 |
US6647778B2 (en) * | 2001-06-20 | 2003-11-18 | Integrated Sensing Systems | Integrated microtube sensing device |
US6527835B1 (en) * | 2001-12-21 | 2003-03-04 | Sandia Corporation | Chemical preconcentrator with integral thermal flow sensor |
AU2003211060A1 (en) * | 2002-02-15 | 2003-09-09 | Eunoe, Inc. | Systems and methods for flow detection and measurement in csf shunts |
JP2003285298A (ja) * | 2002-03-26 | 2003-10-07 | Seiko Instruments Inc | マイクロ流路デバイスおよびマイクロ流路デバイスの作製法 |
JP3683868B2 (ja) * | 2002-05-10 | 2005-08-17 | 株式会社山武 | 熱式フローセンサ |
EP1365216B1 (de) * | 2002-05-10 | 2018-01-17 | Azbil Corporation | Durchflusssensor und Verfahren zu dessen Herstellung |
-
2004
- 2004-06-30 US US10/881,425 patent/US7069779B2/en not_active Expired - Lifetime
-
2005
- 2005-06-29 ES ES05254050T patent/ES2353216T3/es active Active
- 2005-06-29 EP EP05254050A patent/EP1612522B1/de active Active
- 2005-06-29 AT AT05254050T patent/ATE484733T1/de active
- 2005-06-29 JP JP2005190333A patent/JP5242002B2/ja active Active
- 2005-06-29 DE DE602005024079T patent/DE602005024079D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
US20060000270A1 (en) | 2006-01-05 |
ES2353216T3 (es) | 2011-02-28 |
JP5242002B2 (ja) | 2013-07-24 |
JP2006017721A (ja) | 2006-01-19 |
DE602005024079D1 (de) | 2010-11-25 |
EP1612522B1 (de) | 2010-10-13 |
EP1612522A3 (de) | 2006-07-19 |
EP1612522A2 (de) | 2006-01-04 |
US7069779B2 (en) | 2006-07-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |
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