ATE478346T1 - Kapazitiv arbeitender hf-leistungssensor zur messung eines hf-leistungssignals - Google Patents

Kapazitiv arbeitender hf-leistungssensor zur messung eines hf-leistungssignals

Info

Publication number
ATE478346T1
ATE478346T1 AT03008483T AT03008483T ATE478346T1 AT E478346 T1 ATE478346 T1 AT E478346T1 AT 03008483 T AT03008483 T AT 03008483T AT 03008483 T AT03008483 T AT 03008483T AT E478346 T1 ATE478346 T1 AT E478346T1
Authority
AT
Austria
Prior art keywords
power
bridge
signal line
signal
capacitance
Prior art date
Application number
AT03008483T
Other languages
English (en)
Inventor
Dong-Ha Shim
In-Sang Song
Young-Il Kim
Sun-Hee Park
Young-Tack Hong
Dong-Ki Min
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of ATE478346T1 publication Critical patent/ATE478346T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Burglar Alarm Systems (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AT03008483T 2002-04-16 2003-04-11 Kapazitiv arbeitender hf-leistungssensor zur messung eines hf-leistungssignals ATE478346T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2002-0020554A KR100465235B1 (ko) 2002-04-16 2002-04-16 정전용량에 의해 ｒｆ 신호에 대한 전력을 측정하는 ｒｆ파워센서

Publications (1)

Publication Number Publication Date
ATE478346T1 true ATE478346T1 (de) 2010-09-15

Family

ID=28673100

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03008483T ATE478346T1 (de) 2002-04-16 2003-04-11 Kapazitiv arbeitender hf-leistungssensor zur messung eines hf-leistungssignals

Country Status (7)

Country Link
US (1) US6989664B2 (de)
EP (1) EP1355162B1 (de)
JP (1) JP3825417B2 (de)
KR (1) KR100465235B1 (de)
CN (1) CN1213306C (de)
AT (1) ATE478346T1 (de)
DE (1) DE60333812D1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI118490B (fi) * 2004-06-29 2007-11-30 Valtion Teknillinen Mikromekaaninen anturi mikroaaltotehon mittaamiseen
US7652464B2 (en) * 2006-05-05 2010-01-26 Viasat, Inc. RF power sensor with chopping amplifier
JP5182859B2 (ja) * 2007-01-29 2013-04-17 株式会社ステップテクニカ 評価装置及び評価システム
CN101332971B (zh) * 2008-07-29 2011-07-06 东南大学 基于微电子机械悬臂梁通过式微波功率检测器及制备方法
RU2408005C1 (ru) * 2009-11-26 2010-12-27 Общество с ограниченной ответственностью "Научно-технический центр прикладной физики" (ООО "НТЦ ПФ") Способ определения диэлектрической проницаемости диэлектрического объекта
CN102539933B (zh) * 2010-12-13 2014-08-20 中兴通讯股份有限公司 一种射频识别电子标签的检测工具及方法
US8717061B2 (en) * 2011-02-18 2014-05-06 Repesa, Llc All-in-one motor assessment precision sizing system and capacitance calculator unit
CN102175909B (zh) * 2011-03-08 2013-11-20 东南大学 微电子机械悬臂梁式微波功率自动检测***及其检测方法和制备方法
CN102735935B (zh) * 2012-06-20 2014-08-13 东南大学 基于微机械硅基悬臂梁的相位检测器及检测方法
CN102735932B (zh) * 2012-06-20 2014-08-13 东南大学 基于微机械砷化镓基固支梁的相位检测器及检测方法
KR101442226B1 (ko) * 2013-03-06 2014-09-23 서강대학교산학협력단 초고주파 속도 측정 센서
CN105024690B (zh) * 2015-07-01 2017-11-24 东南大学 硅基低漏电流双固支梁可动栅锁相环电路
CN104993825B (zh) * 2015-07-01 2017-11-24 东南大学 砷化镓基低漏电流双悬臂梁开关双栅分频器
CN104993824B (zh) * 2015-07-01 2018-02-23 东南大学 硅基低漏电流双悬臂梁可动栅分频器
CN104935334B (zh) * 2015-07-01 2017-09-29 东南大学 硅基低漏电流双固支梁可动栅nmos相位检测器
CN105049038B (zh) * 2015-07-01 2017-11-07 东南大学 砷化镓基低漏电流双固支梁开关双栅分频器
CN104935335B (zh) * 2015-07-01 2017-09-29 东南大学 砷化镓基低漏电流双固支梁开关双栅锁相环电路
CN104935330B (zh) * 2015-07-01 2017-10-20 东南大学 砷化镓基低漏电流双悬臂梁开关双栅锁相环电路
CN104935336B (zh) * 2015-07-01 2017-09-29 东南大学 硅基低漏电流双悬臂梁可动栅锁相环电路
KR102019543B1 (ko) 2017-06-01 2019-09-06 명지대학교 산학협력단 신호 감지 거리 조절이 가능한 알에프 파워 센서 및 구조체
KR101917516B1 (ko) 2017-06-01 2019-01-24 명지대학교 산학협력단 신호 출력 감도 조절 및 위상차 보정이 가능한 알에프 센서
CN107632193B (zh) * 2017-09-28 2019-05-07 东南大学 一种基于超材料结构的微波功率传感器
JP7219276B2 (ja) 2017-11-15 2023-02-07 カプレス・アクティーゼルスカブ 供試標本の電気特性を試験するためのプローブ及び関連する近接度検出器
EP3608679B1 (de) * 2018-08-08 2023-03-01 Rohde & Schwarz GmbH & Co. KG Hf-kabel und verfahren zur bestimmung von kabelgebundenen wegverlusten
KR102661822B1 (ko) 2018-12-14 2024-04-30 삼성전자주식회사 커넥터와 전기적 경로 사이의 연결 상태를 식별하기 위한 전자 장치 및 방법

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4647848A (en) * 1984-03-05 1987-03-03 Tektronix, Inc. Broadband RF power detector using FET
DE3539402A1 (de) * 1985-11-07 1987-05-21 Rohde & Schwarz Leistungsmesssensor zum messen von hochfrequenzleistung
US4943764A (en) * 1987-12-11 1990-07-24 Hewlett-Packard Company Wide dynamic range radio-frequency power sensor
US5070241A (en) * 1989-07-31 1991-12-03 Santa Barbara Research Center Resonant frequency modulation detector
US5055889A (en) * 1989-10-31 1991-10-08 Knauf Fiber Glass, Gmbh Lateral varactor with staggered punch-through and method of fabrication
US5204613A (en) * 1991-05-02 1993-04-20 Wavetek Microwave, Inc. Rf power sensor having improved linearity over greater dynamic range
US5204614A (en) * 1991-08-14 1993-04-20 Hewlett-Packard Company Broad-band microwave power sensor using diodes above their resonant frequency
US5467013A (en) * 1993-12-07 1995-11-14 Sematech, Inc. Radio frequency monitor for semiconductor process control
US5517123A (en) * 1994-08-26 1996-05-14 Analog Devices, Inc. High sensitivity integrated micromechanical electrostatic potential sensor
GB9423158D0 (en) * 1994-11-17 1995-01-04 At & T Global Inf Solution Radio frequency detector circuit
US6081700A (en) * 1996-12-17 2000-06-27 Motorola, Inc. Radio having a self-tuning antenna and method thereof
US5808210A (en) * 1996-12-31 1998-09-15 Honeywell Inc. Thin film resonant microbeam absolute pressure sensor
US5912560A (en) * 1997-02-25 1999-06-15 Waferscale Integration Inc. Charge pump circuit for voltage boosting in integrated semiconductor circuits
EP1004883A4 (de) * 1998-05-28 2001-10-04 Anritsu Corp Breitbandiges hochfrequenz-leistungsdetektionselement und leistungsdetektor unter vewendung eines solchen elements
DE19858826A1 (de) * 1998-12-19 2000-06-29 Micronas Intermetall Gmbh Kapazitiver Magnetfeldsensor
US6242901B1 (en) * 1999-04-09 2001-06-05 Agilent Technologies Inc. True average wide dynamic range microwave power sensor using diode stack attenuator-diode stack
SE521733C2 (sv) * 1999-06-04 2003-12-02 Ericsson Telefon Ab L M Variabel kapacitans, lågpassfilter samt mikroelektromekaniskt omkopplingsarrangemang
KR20010053918A (ko) * 1999-12-02 2001-07-02 박종섭 알에프 파워계측장치
FI20000339A (fi) * 2000-02-16 2001-08-16 Nokia Mobile Phones Ltd Mikromekaaninen säädettävä kondensaattori ja integroitu säädettävä resonaattori
FI109382B (fi) * 2000-06-27 2002-07-15 Nokia Corp Sovituspiiri
US6788175B1 (en) * 2001-10-04 2004-09-07 Superconductor Technologies, Inc. Anchors for micro-electro-mechanical systems (MEMS) devices
US6803774B2 (en) * 2002-09-23 2004-10-12 Agilent Technologies, Inc. MEMS varactor for measuring RF power

Also Published As

Publication number Publication date
US6989664B2 (en) 2006-01-24
KR20030082045A (ko) 2003-10-22
JP3825417B2 (ja) 2006-09-27
CN1213306C (zh) 2005-08-03
CN1455261A (zh) 2003-11-12
US20030214309A1 (en) 2003-11-20
JP2003344462A (ja) 2003-12-03
EP1355162B1 (de) 2010-08-18
EP1355162A1 (de) 2003-10-22
KR100465235B1 (ko) 2005-01-13
DE60333812D1 (de) 2010-09-30

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