ATE471457T1 - Mikrofluidische vorrichtung - Google Patents

Mikrofluidische vorrichtung

Info

Publication number
ATE471457T1
ATE471457T1 AT08169675T AT08169675T ATE471457T1 AT E471457 T1 ATE471457 T1 AT E471457T1 AT 08169675 T AT08169675 T AT 08169675T AT 08169675 T AT08169675 T AT 08169675T AT E471457 T1 ATE471457 T1 AT E471457T1
Authority
AT
Austria
Prior art keywords
transport channel
working chamber
microfluidic device
fluid
electrodes
Prior art date
Application number
AT08169675T
Other languages
English (en)
Inventor
Mihai Patrascu
Mercedes Crego Calama
Martijn Goedbloed
Koray Karakaya
Original Assignee
Stichting Imec Nederland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stichting Imec Nederland filed Critical Stichting Imec Nederland
Application granted granted Critical
Publication of ATE471457T1 publication Critical patent/ATE471457T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Materials For Photolithography (AREA)
AT08169675T 2007-11-23 2008-11-21 Mikrofluidische vorrichtung ATE471457T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US98963607P 2007-11-23 2007-11-23
EP07076017 2007-11-23

Publications (1)

Publication Number Publication Date
ATE471457T1 true ATE471457T1 (de) 2010-07-15

Family

ID=39277122

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08169675T ATE471457T1 (de) 2007-11-23 2008-11-21 Mikrofluidische vorrichtung

Country Status (4)

Country Link
US (1) US8353682B2 (de)
EP (1) EP2071189B1 (de)
AT (1) ATE471457T1 (de)
DE (1) DE602008001547D1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2481425A (en) 2010-06-23 2011-12-28 Iti Scotland Ltd Method and device for assembling polynucleic acid sequences
JP5654827B2 (ja) * 2010-10-06 2015-01-14 学校法人慶應義塾 ポンプ装置及びそれを用いた内視鏡装置
EP2888479B1 (de) * 2012-07-05 2021-03-03 3M Innovative Properties Company Systeme und verfahren zur zuführung von reduziertem druck unter verwendung einer scheibenpumpe mit elektrostatischer betätigung
US11033898B2 (en) 2014-02-01 2021-06-15 Ezmems Ltd. Fluidic microelectromechanical sensors/devices and fabrication methods thereof
EP3100016B1 (de) 2014-02-01 2020-06-10 Ezmems Ltd. Chip-vorrichtung zur überwachung und regulierung des flüssigkeitsstroms
US10344753B2 (en) * 2014-02-28 2019-07-09 Encite Llc Micro pump systems
US10330095B2 (en) 2014-10-31 2019-06-25 Encite Llc Microelectromechanical systems fabricated with roll to roll processing
WO2016174607A1 (en) * 2015-04-29 2016-11-03 Politecnico Di Milano Microfluidic device and relative method for the generation and/or culture and/or maturation of three- dimensional cell and/or tissue constructs
US20180257069A1 (en) * 2015-09-16 2018-09-13 Technion Research & Development Foundation Limited Dynamic microfluidic devices and use thereof
US11020524B1 (en) * 2016-02-19 2021-06-01 University Of South Florida Peristaltic micropumps and fluid delivery devices that incorporate them
US20170285858A1 (en) * 2016-03-30 2017-10-05 Intel Corporation Intelligent pressure sensitive display
US11454563B2 (en) 2016-08-05 2022-09-27 Encite Llc Micro pressure sensor
EP3596339A4 (de) 2017-03-13 2020-07-29 Marsh, Stephen Alan Mikropumpensysteme und verarbeitungstechniken
US11213824B2 (en) 2017-03-29 2022-01-04 The Research Foundation For The State University Of New York Microfluidic device and methods
US10739170B2 (en) 2017-08-04 2020-08-11 Encite Llc Micro flow measurement devices and devices with movable features
US11046575B2 (en) 2017-10-31 2021-06-29 Encite Llc Broad range micro pressure sensor
US11331618B2 (en) 2018-03-07 2022-05-17 Encite Llc R2R microelectromechanical gas concentrator
US11245344B2 (en) 2018-06-07 2022-02-08 Encite Llc Micro electrostatic motor and micro mechanical force transfer devices
US10746206B1 (en) 2019-02-07 2020-08-18 Toyota Motor Engineering & Manufacturing North America, Inc. Soft-bodied fluidic actuator
US20240206116A1 (en) * 2022-12-19 2024-06-20 Microsoft Technology Licensing, Llc Systems and methods for microfluidic thermal management

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EP0424087A1 (de) * 1989-10-17 1991-04-24 Seiko Epson Corporation Mikropumpe oder Mikrodurchflussmenge
KR910012538A (ko) * 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
JP3328300B2 (ja) * 1991-07-18 2002-09-24 アイシン精機株式会社 流体制御装置
FR2727474B1 (fr) 1994-11-25 1997-01-10 Centre Nat Rech Scient Micro-actionneur integre a decharges electriques et microsysteme comprenant ce micro-actionneur
US6074178A (en) * 1997-04-15 2000-06-13 Face International Corp. Piezoelectrically actuated peristaltic pump
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
KR100398309B1 (ko) * 2001-02-20 2003-09-19 한국과학기술원 연속 전기습윤에 의해 유도된 운동하는 액체 방울에 의해구동되는 마이크로펌프
US6802342B2 (en) 2001-04-06 2004-10-12 Fluidigm Corporation Microfabricated fluidic circuit elements and applications
US6752601B2 (en) * 2001-04-06 2004-06-22 Ngk Insulators, Ltd. Micropump
US7648619B2 (en) * 2002-06-04 2010-01-19 Industrial Technology Research Hydrogel-driven micropump
DE10238600A1 (de) * 2002-08-22 2004-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Peristaltische Mikropumpe
US6749407B2 (en) * 2002-08-22 2004-06-15 Motorola, Inc. Method of installing valves in a micro-pump
US7604394B2 (en) * 2002-12-02 2009-10-20 Cfd Research Corporation Self-cleaning and mixing microfluidic elements
US7090471B2 (en) * 2003-01-15 2006-08-15 California Institute Of Technology Integrated electrostatic peristaltic pump method and apparatus
US6986649B2 (en) * 2003-04-09 2006-01-17 Motorola, Inc. Micropump with integrated pressure sensor
US8056881B2 (en) * 2004-10-13 2011-11-15 University Of Virginia Patent Foundation Electrostatic actuation for management of flow in micro-total analysis systems (μ-TAS) and related method thereof
DE102006017482A1 (de) 2006-04-13 2007-10-18 Technische Universität Chemnitz Mikrofluidischer Aktor, Aktorverfahren und Verfahren zum Herstellen eines Mikroaktors

Also Published As

Publication number Publication date
DE602008001547D1 (de) 2010-07-29
EP2071189B1 (de) 2010-06-16
US20090129952A1 (en) 2009-05-21
EP2071189A1 (de) 2009-06-17
US8353682B2 (en) 2013-01-15

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