ATE450630T1 - Dampfphasenabscheidung - Google Patents

Dampfphasenabscheidung

Info

Publication number
ATE450630T1
ATE450630T1 AT01953374T AT01953374T ATE450630T1 AT E450630 T1 ATE450630 T1 AT E450630T1 AT 01953374 T AT01953374 T AT 01953374T AT 01953374 T AT01953374 T AT 01953374T AT E450630 T1 ATE450630 T1 AT E450630T1
Authority
AT
Austria
Prior art keywords
vapor phase
coating
phase deposition
metals
applying
Prior art date
Application number
AT01953374T
Other languages
English (en)
Inventor
Van Westrum Johannes Alphonsus Schade
Joannes Linden
Johannes Velthuis
Original Assignee
Tno
Corus Technology Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tno, Corus Technology Bv filed Critical Tno
Application granted granted Critical
Publication of ATE450630T1 publication Critical patent/ATE450630T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Magnetic Heads (AREA)
  • Thermistors And Varistors (AREA)
  • Tone Control, Compression And Expansion, Limiting Amplitude (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AT01953374T 2000-07-17 2001-07-17 Dampfphasenabscheidung ATE450630T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00202559A EP1174526A1 (de) 2000-07-17 2000-07-17 Kontinuierliches Abscheiden aus der Gasphase
PCT/NL2001/000546 WO2002006558A1 (en) 2000-07-17 2001-07-17 Vapour deposition

Publications (1)

Publication Number Publication Date
ATE450630T1 true ATE450630T1 (de) 2009-12-15

Family

ID=8171819

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01953374T ATE450630T1 (de) 2000-07-17 2001-07-17 Dampfphasenabscheidung

Country Status (13)

Country Link
US (1) US7220450B2 (de)
EP (2) EP1174526A1 (de)
JP (1) JP5049446B2 (de)
KR (1) KR100819892B1 (de)
CN (1) CN1213162C (de)
AT (1) ATE450630T1 (de)
AU (2) AU7583101A (de)
BR (1) BR0112552B1 (de)
CA (1) CA2416093C (de)
DE (1) DE60140673D1 (de)
ES (1) ES2337552T3 (de)
MX (1) MXPA03000438A (de)
WO (1) WO2002006558A1 (de)

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US8435352B2 (en) * 2005-05-31 2013-05-07 Tata Steel Nederland Technology Bv Apparatus and method for coating a substrate
EP1972699A1 (de) * 2007-03-20 2008-09-24 ArcelorMittal France Verfahren zur Beschichtung eines Substrats unter Vakuum
EP2048261A1 (de) * 2007-10-12 2009-04-15 ArcelorMittal France Industrieller Dampferzeuger zum Aufbringen einer Legierungsschicht auf einem Metallband
EP2199425A1 (de) * 2008-12-18 2010-06-23 ArcelorMittal France Industrieller Dampferzeuger zum Aufbringen einer Legierungsschicht auf einem Metallband (II)
US20110177622A1 (en) * 2009-12-28 2011-07-21 Global Solar Energy, Inc. Apparatus and methods of mixing and depositing thin film photovoltaic compositions
EP2652167B1 (de) * 2010-12-13 2015-04-08 Posco Kontinuierliche beschichtungsvorrichtung
KR101439694B1 (ko) 2012-12-26 2014-09-12 주식회사 포스코 Zn-Mg 합금도금강판 및 그의 제조방법
UA117592C2 (uk) * 2013-08-01 2018-08-27 Арселорміттал Пофарбований оцинкований сталевий лист та спосіб його виготовлення
UA116262C2 (uk) * 2013-08-01 2018-02-26 Арселорміттал Сталевий лист з цинковим покриттям
KR102242070B1 (ko) * 2013-11-05 2021-04-20 타타 스틸 네덜란드 테크날러지 베.뷔. 증발기 디바이스 내의 액상 금속의 조성을 제어하는 방법 및 장치
TWI523962B (zh) * 2014-10-03 2016-03-01 Nat Inst Chung Shan Science & Technology Method and apparatus for stabilizing vapor deposition uniformity film
TWI582251B (zh) * 2014-10-31 2017-05-11 財團法人工業技術研究院 蒸鍍系統以及蒸鍍方法
EP3117907B1 (de) * 2015-07-13 2017-10-25 HEC High End Coating GmbH Verfahren zur herstellung beschichteter substrate
EP3225717A1 (de) 2016-03-30 2017-10-04 HEC High End Coating GmbH Verfahren zur herstellung beschichteter substrate, beschichtete substrate und deren verwendung
KR102098455B1 (ko) 2017-12-26 2020-04-07 주식회사 포스코 연속 증착 장치 및 연속 증착 방법
WO2019239184A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
JP2019060021A (ja) * 2018-11-09 2019-04-18 アルセロルミタル・インベステイガシオン・イ・デサロジヨ・エセ・エレ 亜鉛コーティングを備えた塗装鋼板
JP2019060022A (ja) * 2018-11-09 2019-04-18 アルセロルミタル・インベステイガシオン・イ・デサロジヨ・エセ・エレ 亜鉛コーティングを備えた鋼板
CN112553578B (zh) * 2019-09-26 2022-01-14 宝山钢铁股份有限公司 一种具有抑流式喷嘴的真空镀膜装置
CN113432775B (zh) * 2020-03-23 2023-04-18 核工业理化工程研究院 一种标定设备内部气体滞止压力与悬臂梁部件温度关系曲线的方法
WO2023062410A1 (en) * 2021-10-14 2023-04-20 Arcelormittal Vapour nozzle for pvd

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JPS53110973A (en) * 1977-03-10 1978-09-28 Futaba Denshi Kogyo Kk Method and apparatus for manufacturing compounds
JPS59208006A (ja) * 1983-05-10 1984-11-26 Toyota Motor Corp 合金微粉末の製造方法
EP0173715B1 (de) * 1984-02-13 1992-04-22 SCHMITT, Jerome J. III Verfahren und vorrichtung für gasstrahlniederschlag von leitfähigen und dielektrischen dünnen festfilmen und so hergestellte erzeugnisse
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Also Published As

Publication number Publication date
EP1174526A1 (de) 2002-01-23
EP1301649A1 (de) 2003-04-16
CA2416093C (en) 2009-06-30
CN1458985A (zh) 2003-11-26
CN1213162C (zh) 2005-08-03
BR0112552B1 (pt) 2013-07-16
US20040022942A1 (en) 2004-02-05
CA2416093A1 (en) 2002-01-24
KR20030032999A (ko) 2003-04-26
AU2001275831B2 (en) 2006-09-07
WO2002006558A1 (en) 2002-01-24
DE60140673D1 (de) 2010-01-14
EP1301649B1 (de) 2009-12-02
AU7583101A (en) 2002-01-30
KR100819892B1 (ko) 2008-04-07
BR0112552A (pt) 2003-06-24
US7220450B2 (en) 2007-05-22
JP2004504487A (ja) 2004-02-12
JP5049446B2 (ja) 2012-10-17
ES2337552T3 (es) 2010-04-27
MXPA03000438A (es) 2004-09-10

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