ATE407430T1 - Optische vorrichtung zur messung von modulierten lichtsignalen - Google Patents
Optische vorrichtung zur messung von modulierten lichtsignalenInfo
- Publication number
- ATE407430T1 ATE407430T1 AT05021500T AT05021500T ATE407430T1 AT E407430 T1 ATE407430 T1 AT E407430T1 AT 05021500 T AT05021500 T AT 05021500T AT 05021500 T AT05021500 T AT 05021500T AT E407430 T1 ATE407430 T1 AT E407430T1
- Authority
- AT
- Austria
- Prior art keywords
- signal light
- light path
- interferometer
- probe
- detector
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
- G11B7/005—Reproducing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Biophysics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05021500A EP1770714B1 (de) | 2005-09-30 | 2005-09-30 | Optische Vorrichtung zur Messung von modulierten Lichtsignalen |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE407430T1 true ATE407430T1 (de) | 2008-09-15 |
Family
ID=35311504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05021500T ATE407430T1 (de) | 2005-09-30 | 2005-09-30 | Optische vorrichtung zur messung von modulierten lichtsignalen |
Country Status (6)
Country | Link |
---|---|
US (1) | US7738115B2 (de) |
EP (1) | EP1770714B1 (de) |
AT (1) | ATE407430T1 (de) |
DE (1) | DE602005009540D1 (de) |
ES (1) | ES2313179T3 (de) |
WO (1) | WO2007039210A1 (de) |
Families Citing this family (37)
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US8705040B2 (en) * | 2004-03-06 | 2014-04-22 | Michael Trainer | Methods and apparatus for determining particle characteristics by measuring scattered light |
US10955327B2 (en) * | 2004-03-06 | 2021-03-23 | Michael Trainer | Method and apparatus for determining particle characteristics utilizing a plurality of beam splitting functions and correction of scattered light |
US7933025B2 (en) * | 2006-12-18 | 2011-04-26 | Zygo Corporation | Sinusoidal phase shifting interferometry |
JP5183989B2 (ja) * | 2007-07-19 | 2013-04-17 | 株式会社ミツトヨ | 形状測定装置 |
FR2922307B1 (fr) * | 2007-10-10 | 2017-03-24 | Centre Nat Rech Scient | Procede et dispositif de caracterisation d'elements microscopiques |
US8564961B2 (en) | 2007-11-30 | 2013-10-22 | Apple Inc. | Methods and apparatus for providing holes through portions of a housing of an electronic device |
CN101620357B (zh) * | 2008-07-02 | 2012-06-13 | 昂纳信息技术(深圳)有限公司 | 一种光信号解调器和解调方法 |
US8004750B1 (en) * | 2008-09-07 | 2011-08-23 | Optoplex Corporation | Multiple-FSR DPSK demodulator |
US20140223612A1 (en) * | 2013-02-05 | 2014-08-07 | Asylum Corporation | Modular Atomic Force Microscope |
US10908084B2 (en) * | 2008-10-14 | 2021-02-02 | Timothy M. Ragan | Devices and methods for direct-sampling analog time-resolved detection |
US7948637B2 (en) * | 2009-03-20 | 2011-05-24 | Zygo Corporation | Error compensation in phase shifting interferometry |
US20110043814A1 (en) * | 2009-08-24 | 2011-02-24 | Raytheon Company | Ultra stable short pulse remote sensor |
KR101691560B1 (ko) * | 2009-11-24 | 2017-01-10 | 삼성디스플레이 주식회사 | 표시기판 및 이의 제조방법 |
DE102010013829A1 (de) * | 2010-03-26 | 2011-09-29 | Carl Zeiss Microlmaging Gmbh | Mikroskop und Verfahren zur Erfassung von Probenlicht |
EP2678695A2 (de) | 2011-02-23 | 2014-01-01 | RHK Technology Inc. | Integriertes mikroskop sowie zugehörige verfahren und vorrichtungen |
EP2613159A1 (de) | 2012-01-05 | 2013-07-10 | Neaspec GmbH | Messverfahren eines Nahfeldsignals |
US8665434B2 (en) | 2012-06-04 | 2014-03-04 | Empire Technology Development Llc | Integrated Raman spectroscopy detector |
US8646110B1 (en) * | 2012-11-27 | 2014-02-04 | Xiaoji Xu | Method to obtain absorption spectra from near-field infrared scattering using homodyne detection |
US9658247B2 (en) | 2013-03-15 | 2017-05-23 | Anasys Instruments | Method and apparatus for infrared scattering scanning near-field optical microscopy with high speed point spectroscopy |
US9778282B2 (en) * | 2013-03-15 | 2017-10-03 | Anasys Instruments | Method and apparatus for infrared scattering scanning near-field optical microscopy with high speed point spectroscopy |
CN107860944B (zh) * | 2013-03-15 | 2019-04-30 | 布鲁克纳米股份有限公司 | 使用归一化近场光谱对样品的化学纳米识别 |
FR3010555B1 (fr) * | 2013-09-11 | 2019-12-20 | Universite De Technologie De Troyes | Procede electronique d'extraction de l'amplitude et de la phase d'un signal dans une detection synchrone et son application dans des montages interferometriques. |
EP3108262B1 (de) * | 2014-02-19 | 2019-04-03 | Bruker Nano, Inc. | Feldabbildung und fokuspunktsverfolgung für s-snom |
EP3067701A1 (de) | 2015-03-13 | 2016-09-14 | Asociación-centro De Investigación Cooperativa En Nanociencias - CIC Nanogune | Optisches Nahfeldmikroskop zur Erfassung von Spektren |
CA2979031C (en) | 2015-04-13 | 2021-04-13 | Halliburton Energy Services, Inc. | Modulating downhole reflector |
US10228389B2 (en) * | 2015-12-02 | 2019-03-12 | Bruker Nano, Inc. | Method and apparatus for infrared scattering scanning near-field optical microscopy with background suppression |
WO2017095427A1 (en) * | 2015-12-03 | 2017-06-08 | Halliburton Energy Services, Inc. | Downhole telemetry using adaptive feedback |
US10241131B2 (en) * | 2016-08-28 | 2019-03-26 | Bruker Nano, Inc. | Method and apparatus for chemical and optical imaging with a broadband source |
EP3404424A1 (de) * | 2017-05-15 | 2018-11-21 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Rastersondenmikroskopiesystem und verfahren zur abbildung von nanostrukturen auf der oberfläche einer probe |
EP3743732A4 (de) | 2018-01-22 | 2021-09-15 | Lehigh University | System und verfahren für eine optische rasternahfeldmikroskopie mit non-tapping-modus |
US11391834B2 (en) * | 2018-02-28 | 2022-07-19 | Illusense, Inc. | Method and device for interferometric range measurements |
KR20210013577A (ko) | 2018-05-18 | 2021-02-04 | 더 리젠츠 오브 더 유니버시티 오브 미시건 | 주파수 변조 간섭계를 위한 경로 변동 모니터링 |
US11493323B2 (en) * | 2019-01-03 | 2022-11-08 | The Board Of Trustees Of The University Of Illinois | Infrared-optical hybrid imaging technology for all-digital histopathology |
JP6834116B2 (ja) * | 2020-02-26 | 2021-02-24 | 株式会社東京精密 | 距離測定装置及び距離測定方法 |
CN111693133B (zh) * | 2020-06-24 | 2022-04-15 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 光纤水听器光程差测试装置、方法、计算机设备 |
EP3940393A1 (de) | 2020-07-17 | 2022-01-19 | attocube systems AG | Verfahren zur referenzierung einer nahfeldmessung mit drift- und fluktuationskorrektur |
CN114184276A (zh) * | 2021-11-05 | 2022-03-15 | 深圳华迈兴微医疗科技有限公司 | 一种基于光纤的多通道采光方法及装置 |
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JP2704601B2 (ja) * | 1993-04-12 | 1998-01-26 | セイコーインスツルメンツ株式会社 | 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法 |
US6337479B1 (en) * | 1994-07-28 | 2002-01-08 | Victor B. Kley | Object inspection and/or modification system and method |
WO1996003641A1 (en) * | 1994-07-28 | 1996-02-08 | Kley Victor B | Scanning probe microscope assembly |
US6339217B1 (en) * | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
US5565987A (en) * | 1995-03-23 | 1996-10-15 | Anvik Corporation | Fabry-Perot probe profilometer having feedback loop to maintain resonance |
US5623339A (en) * | 1995-08-04 | 1997-04-22 | International Business Machines Corporation | Interferometric measuring method based on multi-pole sensing |
US5939709A (en) * | 1997-06-19 | 1999-08-17 | Ghislain; Lucien P. | Scanning probe optical microscope using a solid immersion lens |
DE10035134B4 (de) * | 2000-07-19 | 2006-06-01 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren und Vorrichtung zur optischen Nahfeldmikroskopie |
US6667809B2 (en) * | 2000-07-27 | 2003-12-23 | Zetetic Institute | Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation |
US6643012B2 (en) * | 2001-02-23 | 2003-11-04 | National University Of Singapore | Apertureless near-field scanning raman microscopy using reflection scattering geometry |
JP4076792B2 (ja) * | 2001-06-19 | 2008-04-16 | 独立行政法人科学技術振興機構 | カンチレバーアレイ、その製造方法及びその装置 |
US6718821B1 (en) * | 2001-11-07 | 2004-04-13 | Sandia Corporation | Laser interferometry force-feedback sensor for an interfacial force microscope |
US6650420B2 (en) * | 2002-02-27 | 2003-11-18 | The United States Of America As Represented By The Secretary Of The Navy | Nanoscale vibrometric measurement apparatus and method |
DE10228123B4 (de) * | 2002-06-24 | 2011-09-15 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren und Vorrichtungen zur Erfassung von optischen Nahfeldwechselwirkungssignalen |
JP3958206B2 (ja) * | 2002-12-27 | 2007-08-15 | 独立行政法人科学技術振興機構 | マルチカンチレバーの振動周波数の計測方法及び装置 |
US6985223B2 (en) * | 2003-03-07 | 2006-01-10 | Purdue Research Foundation | Raman imaging and sensing apparatus employing nanoantennas |
JP2008051556A (ja) * | 2006-08-22 | 2008-03-06 | Sii Nanotechnology Inc | 光学式変位検出機構及びそれを用いた表面情報計測装置 |
JP5122775B2 (ja) * | 2006-08-23 | 2013-01-16 | 株式会社ミツトヨ | 測定装置 |
US8156568B2 (en) * | 2007-04-27 | 2012-04-10 | Picocal, Inc. | Hybrid contact mode scanning cantilever system |
US8402819B2 (en) * | 2007-05-15 | 2013-03-26 | Anasys Instruments, Inc. | High frequency deflection measurement of IR absorption |
JP5183989B2 (ja) * | 2007-07-19 | 2013-04-17 | 株式会社ミツトヨ | 形状測定装置 |
-
2005
- 2005-09-30 ES ES05021500T patent/ES2313179T3/es active Active
- 2005-09-30 DE DE602005009540T patent/DE602005009540D1/de active Active
- 2005-09-30 EP EP05021500A patent/EP1770714B1/de active Active
- 2005-09-30 AT AT05021500T patent/ATE407430T1/de not_active IP Right Cessation
-
2006
- 2006-09-27 US US11/997,386 patent/US7738115B2/en active Active
- 2006-09-27 WO PCT/EP2006/009397 patent/WO2007039210A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2007039210A1 (en) | 2007-04-12 |
ES2313179T3 (es) | 2009-03-01 |
EP1770714B1 (de) | 2008-09-03 |
DE602005009540D1 (de) | 2008-10-16 |
US20080285041A1 (en) | 2008-11-20 |
US7738115B2 (en) | 2010-06-15 |
EP1770714A1 (de) | 2007-04-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |