ATE396418T1 - Gehäuse für optoelektronisches bauteil auf waferebene - Google Patents

Gehäuse für optoelektronisches bauteil auf waferebene

Info

Publication number
ATE396418T1
ATE396418T1 AT04758439T AT04758439T ATE396418T1 AT E396418 T1 ATE396418 T1 AT E396418T1 AT 04758439 T AT04758439 T AT 04758439T AT 04758439 T AT04758439 T AT 04758439T AT E396418 T1 ATE396418 T1 AT E396418T1
Authority
AT
Austria
Prior art keywords
wafer
housing
optoelectronic component
optoelectronic device
layer
Prior art date
Application number
AT04758439T
Other languages
English (en)
Inventor
Alan Kathman
James E Morris
John Hammond
Michael Feldman
Original Assignee
Digital Optics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Digital Optics Corp filed Critical Digital Optics Corp
Application granted granted Critical
Publication of ATE396418T1 publication Critical patent/ATE396418T1/de

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4251Sealed packages
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4256Details of housings
    • G02B6/4257Details of housings having a supporting carrier or a mounting substrate or a mounting plate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0203Containers; Encapsulations, e.g. encapsulation of photodiodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0232Optical elements or arrangements associated with the device
    • H01L31/02325Optical elements or arrangements associated with the device the optical elements not being integrated nor being directly associated with the device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4292Coupling light guides with opto-electronic elements the light guide being disconnectable from the opto-electronic element, e.g. mutually self aligning arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Led Device Packages (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
AT04758439T 2003-03-26 2004-03-26 Gehäuse für optoelektronisches bauteil auf waferebene ATE396418T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45766403P 2003-03-26 2003-03-26

Publications (1)

Publication Number Publication Date
ATE396418T1 true ATE396418T1 (de) 2008-06-15

Family

ID=33131703

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04758439T ATE396418T1 (de) 2003-03-26 2004-03-26 Gehäuse für optoelektronisches bauteil auf waferebene

Country Status (6)

Country Link
EP (2) EP1611468B1 (de)
AT (1) ATE396418T1 (de)
CA (1) CA2523418C (de)
DE (1) DE602004013945D1 (de)
DK (1) DK1611468T3 (de)
WO (1) WO2004088380A2 (de)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4873566A (en) * 1985-10-28 1989-10-10 American Telephone And Telegraph Company Multilayer ceramic laser package
US5011256A (en) * 1988-10-28 1991-04-30 E. I. Du Pont De Nemours And Company Package for an opto-electronic component
TW272311B (de) * 1994-01-12 1996-03-11 At & T Corp
US5912872A (en) * 1996-09-27 1999-06-15 Digital Optics Corporation Integrated optical apparatus providing separated beams on a detector and associated methods
US5886971A (en) * 1996-09-27 1999-03-23 Digital Optics Corporation Optical head structures including support substrates adjacent transparent substrates and related methods
US6096155A (en) 1996-09-27 2000-08-01 Digital Optics Corporation Method of dicing wafer level integrated multiple optical elements
US6981804B2 (en) * 1998-06-08 2006-01-03 Arrayed Fiberoptics Corporation Vertically integrated optical devices coupled to optical fibers
US6314223B1 (en) 1998-08-31 2001-11-06 Digital Optics Corporation Diffractive vertical cavity surface emitting laser power monitor and system
US6249136B1 (en) * 1999-06-28 2001-06-19 Advanced Micro Devices, Inc. Bottom side C4 bumps for integrated circuits
US6351027B1 (en) * 2000-02-29 2002-02-26 Agilent Technologies, Inc. Chip-mounted enclosure
US6492699B1 (en) * 2000-05-22 2002-12-10 Amkor Technology, Inc. Image sensor package having sealed cavity over active area
US6798931B2 (en) * 2001-03-06 2004-09-28 Digital Optics Corp. Separating of optical integrated modules and structures formed thereby

Also Published As

Publication number Publication date
EP1953577A3 (de) 2010-06-16
WO2004088380A2 (en) 2004-10-14
EP1953577A2 (de) 2008-08-06
EP1611468A2 (de) 2006-01-04
WO2004088380A3 (en) 2005-04-21
DK1611468T3 (da) 2008-09-08
DE602004013945D1 (de) 2008-07-03
CA2523418C (en) 2011-05-03
CA2523418A1 (en) 2004-10-14
EP1611468B1 (de) 2008-05-21
EP1953577B1 (de) 2013-07-17

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties