ATE364168T1 - Linearpositionsgeber mit temperaturkompensation - Google Patents
Linearpositionsgeber mit temperaturkompensationInfo
- Publication number
- ATE364168T1 ATE364168T1 AT04380233T AT04380233T ATE364168T1 AT E364168 T1 ATE364168 T1 AT E364168T1 AT 04380233 T AT04380233 T AT 04380233T AT 04380233 T AT04380233 T AT 04380233T AT E364168 T1 ATE364168 T1 AT E364168T1
- Authority
- AT
- Austria
- Prior art keywords
- support piece
- temperature compensation
- photoemitter
- graticule
- photodetectors
- Prior art date
Links
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
- G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04380233A EP1659373B1 (de) | 2004-11-23 | 2004-11-23 | Linearpositionsgeber mit Temperaturkompensation |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE364168T1 true ATE364168T1 (de) | 2007-06-15 |
Family
ID=34931874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04380233T ATE364168T1 (de) | 2004-11-23 | 2004-11-23 | Linearpositionsgeber mit temperaturkompensation |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1659373B1 (de) |
CN (1) | CN100575886C (de) |
AT (1) | ATE364168T1 (de) |
DE (1) | DE602004006877T2 (de) |
ES (1) | ES2285390T3 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4885072B2 (ja) | 2006-07-27 | 2012-02-29 | 株式会社リコー | 位置検出装置、および画像形成装置 |
EP2325610B1 (de) * | 2010-03-18 | 2011-11-09 | Fagor, S. Coop. | Optoelektronisches Messgerät |
FR2974897B1 (fr) * | 2011-05-02 | 2013-11-01 | Symetrie | Dispositif lineaire de mesure de distance a faible sensibilite thermique. |
EP2636991A1 (de) * | 2012-03-07 | 2013-09-11 | Hexagon Metrology S.p.A. | Messmaschine mit kompensierten Meßsystem von thermisch bedingten Fehlern aufgrund der Dilatation des Maßstabs eines linearen Transducers |
EP2908098B1 (de) * | 2014-02-18 | 2016-11-30 | Hexagon Technology Center GmbH | Lineargeber mit Kalibrierfunktionalität |
CN114721098B (zh) * | 2022-02-22 | 2024-01-30 | 中国电子科技集团公司第十三研究所 | 光电耦合器件及其制造方法 |
GB202211615D0 (en) * | 2022-08-09 | 2022-09-21 | Renishaw Plc | Scale |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4815213A (en) * | 1987-10-09 | 1989-03-28 | Brown & Sharpe Manufacturing Co. | Apparatus for temperature compensation of sensing means of a machine |
CH683798A5 (fr) * | 1990-12-10 | 1994-05-13 | Tesa Sa | Capteur de position pour un appareil de mesure de grandeurs linéaires ou angulaires. |
DE59102125D1 (de) * | 1991-05-11 | 1994-08-11 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung. |
DE19919042A1 (de) * | 1999-04-27 | 2000-11-02 | Heidenhain Gmbh Dr Johannes | Thermisch kompensiertes Meßsystem |
DE10132521A1 (de) * | 2001-07-09 | 2003-01-30 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung |
-
2004
- 2004-11-23 AT AT04380233T patent/ATE364168T1/de not_active IP Right Cessation
- 2004-11-23 DE DE602004006877T patent/DE602004006877T2/de active Active
- 2004-11-23 EP EP04380233A patent/EP1659373B1/de active Active
- 2004-11-23 ES ES04380233T patent/ES2285390T3/es active Active
-
2005
- 2005-11-23 CN CN200510123348A patent/CN100575886C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1659373B1 (de) | 2007-06-06 |
DE602004006877T2 (de) | 2008-02-07 |
CN100575886C (zh) | 2009-12-30 |
EP1659373A1 (de) | 2006-05-24 |
DE602004006877D1 (de) | 2007-07-19 |
CN1779419A (zh) | 2006-05-31 |
ES2285390T3 (es) | 2007-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES2557994T3 (es) | Sensor de presión | |
SE0502526L (sv) | Inställningsanordning för ett mäthuvud | |
GB2459426A (en) | Location dependent calibration for distributed temperature sensor measurements | |
DE602005001882D1 (de) | Temperatursensor mit kontrolliertem thermischen Offset zur Messung der statischen Temperatur | |
WO2012059743A3 (en) | Temperature calibration methods and apparatus for optical absorption gas sensors, and optical absorption gas sensors thereby calibrated | |
WO2010030587A3 (en) | Compact fiber optic sensors and method of making same | |
ATE409020T1 (de) | Inkubator mit feuchtigkeitssensor | |
ATE556294T1 (de) | Messsonde | |
ATE364168T1 (de) | Linearpositionsgeber mit temperaturkompensation | |
FR2938908B1 (fr) | Dispositif et procede de mesure de la position d'au moins un objet en mouvement dans un repere a trois dimensions | |
CN203908504U (zh) | 一种带测温功能的光纤光栅位移装置 | |
ATE503208T1 (de) | Kalibrierung einer positionsmesseinrichtung einer optischen einrichtung | |
NO20022417L (no) | Fiber Braggitter-referansesensor for nöyaktig referansetemperaturmåling | |
JP5596056B2 (ja) | エンコーダスケール部材および取付方法 | |
WO2010040997A8 (en) | Gradiometer for measuring gravitational and magnetic field gradients with improved sensor | |
DE502005006317D1 (de) | Gravimetrisches Messgerät mit Kalibriergewicht | |
SE9100393D0 (sv) | Foerfarande och anordning foer bestaemning av termisk laengdutvidgning hos laangstraeckta kroppar | |
ES2875050T3 (es) | Dispositivo de medición de la posición para uso en una máquina herramienta | |
KR20130102499A (ko) | 측정기와, 측정 오차의 보정 방법 | |
RU2013140281A (ru) | Система, включающая в себя измерительную рейку и измерительный прибор | |
ATE505713T1 (de) | Abtasteinheit für eine optische positionsmesseinrichtung | |
CN105890533A (zh) | 一种材料表面应变光纤光栅反向差动检测传感器件 | |
DE50203509D1 (de) | Lagerung für ein koordinatenmessgerät | |
WO2005022127A3 (de) | Vorrichtung zur vermessung eines flächigen elementes | |
ATE55483T1 (de) | Positionsmesseinrichtung. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |