ATE325274T1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
ATE325274T1
ATE325274T1 AT04292018T AT04292018T ATE325274T1 AT E325274 T1 ATE325274 T1 AT E325274T1 AT 04292018 T AT04292018 T AT 04292018T AT 04292018 T AT04292018 T AT 04292018T AT E325274 T1 ATE325274 T1 AT E325274T1
Authority
AT
Austria
Prior art keywords
rotor
vacuum pump
motor
molecular
shaft
Prior art date
Application number
AT04292018T
Other languages
English (en)
Inventor
Jean-Luc Rival
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34089871&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE325274(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Cit Alcatel filed Critical Cit Alcatel
Application granted granted Critical
Publication of ATE325274T1 publication Critical patent/ATE325274T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
AT04292018T 2003-08-29 2004-08-09 Vakuumpumpe ATE325274T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0310282A FR2859250B1 (fr) 2003-08-29 2003-08-29 Pompe a vide

Publications (1)

Publication Number Publication Date
ATE325274T1 true ATE325274T1 (de) 2006-06-15

Family

ID=34089871

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04292018T ATE325274T1 (de) 2003-08-29 2004-08-09 Vakuumpumpe

Country Status (6)

Country Link
US (1) US7160081B2 (de)
EP (1) EP1510697B1 (de)
JP (1) JP2005076631A (de)
AT (1) ATE325274T1 (de)
DE (1) DE602004000798T2 (de)
FR (1) FR2859250B1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
US20090081022A1 (en) * 2007-09-21 2009-03-26 Honeywell International Inc. Radially Staged Microscale Turbomolecular Pump
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
DE102009021642B4 (de) * 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2472120B1 (de) * 2009-08-28 2022-11-30 Edwards Japan Limited Vakuumpumpe und element für die vakuumpumpe
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe
KR101704053B1 (ko) * 2011-09-06 2017-02-07 현대자동차주식회사 진공펌프 통합형 주행 안정성 제어 장치
CN103195724B (zh) * 2012-01-04 2015-05-27 李晨 立式鼠笼分子泵
EP2809949A4 (de) * 2012-02-03 2015-12-09 Invacare Corp Pumpvorrichtung
US20150377239A1 (en) * 2013-02-15 2015-12-31 Edwards Limited Vacuum pump
DE102013203421A1 (de) 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014112553A1 (de) * 2014-09-01 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB201715151D0 (en) 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
FR3093544B1 (fr) * 2019-03-05 2021-03-12 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé de purge

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
JP3130890B2 (ja) * 1999-02-25 2001-01-31 セイコー精機株式会社 磁気軸受装置及び磁気軸受制御装置
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
DE602004000798D1 (de) 2006-06-08
JP2005076631A (ja) 2005-03-24
US20050047904A1 (en) 2005-03-03
FR2859250B1 (fr) 2005-11-11
US7160081B2 (en) 2007-01-09
EP1510697B1 (de) 2006-05-03
DE602004000798T2 (de) 2007-08-16
FR2859250A1 (fr) 2005-03-04
EP1510697A1 (de) 2005-03-02

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Legal Events

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