ATE225580T1 - Verformbares antriebselement mit erhöhter rückstellkraft - Google Patents
Verformbares antriebselement mit erhöhter rückstellkraftInfo
- Publication number
- ATE225580T1 ATE225580T1 AT98956646T AT98956646T ATE225580T1 AT E225580 T1 ATE225580 T1 AT E225580T1 AT 98956646 T AT98956646 T AT 98956646T AT 98956646 T AT98956646 T AT 98956646T AT E225580 T1 ATE225580 T1 AT E225580T1
- Authority
- AT
- Austria
- Prior art keywords
- electrodes
- voltage
- electrode
- stationary support
- restoring force
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0051—Electric operating means therefor using electrostatic means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Micromachines (AREA)
- Air Bags (AREA)
- Transmission Devices (AREA)
- Push-Button Switches (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US1998/023659 WO2000028650A1 (en) | 1998-11-06 | 1998-11-06 | Buckled actuator with enhanced restoring force |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE225580T1 true ATE225580T1 (de) | 2002-10-15 |
Family
ID=22268245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT98956646T ATE225580T1 (de) | 1998-11-06 | 1998-11-06 | Verformbares antriebselement mit erhöhter rückstellkraft |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1127403B1 (de) |
KR (1) | KR20010107950A (de) |
CN (1) | CN1337086A (de) |
AT (1) | ATE225580T1 (de) |
CA (1) | CA2350077C (de) |
DE (1) | DE69808525T2 (de) |
WO (1) | WO2000028650A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4492252B2 (ja) * | 2003-09-05 | 2010-06-30 | セイコーエプソン株式会社 | アクチュエータ |
EP2024182B1 (de) * | 2006-05-19 | 2014-09-03 | Koninklijke Philips N.V. | Elektrostatisches stellglied für tintenstrahlköpfe |
FR3055429B1 (fr) * | 2016-09-01 | 2018-08-10 | Laclaree | Dispositif a actionnement electrostatique |
DE102022131394A1 (de) | 2022-11-28 | 2024-05-29 | Pi Ceramic Gmbh | Aktuatorvorrichtung |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4119955C2 (de) * | 1991-06-18 | 2000-05-31 | Danfoss As | Miniatur-Betätigungselement |
US6168395B1 (en) * | 1996-02-10 | 2001-01-02 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Bistable microactuator with coupled membranes |
DE19637928C2 (de) * | 1996-02-10 | 1999-01-14 | Fraunhofer Ges Forschung | Bistabile Membran-Aktivierungseinrichtung und Membran |
-
1998
- 1998-11-06 CA CA002350077A patent/CA2350077C/en not_active Expired - Fee Related
- 1998-11-06 AT AT98956646T patent/ATE225580T1/de not_active IP Right Cessation
- 1998-11-06 DE DE69808525T patent/DE69808525T2/de not_active Expired - Fee Related
- 1998-11-06 KR KR1020017005769A patent/KR20010107950A/ko not_active Application Discontinuation
- 1998-11-06 EP EP98956646A patent/EP1127403B1/de not_active Expired - Lifetime
- 1998-11-06 WO PCT/US1998/023659 patent/WO2000028650A1/en not_active Application Discontinuation
- 1998-11-06 CN CN98814379A patent/CN1337086A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1127403A1 (de) | 2001-08-29 |
DE69808525D1 (de) | 2002-11-07 |
DE69808525T2 (de) | 2003-06-18 |
CN1337086A (zh) | 2002-02-20 |
WO2000028650A1 (en) | 2000-05-18 |
EP1127403B1 (de) | 2002-10-02 |
CA2350077A1 (en) | 2000-05-18 |
CA2350077C (en) | 2007-09-04 |
KR20010107950A (ko) | 2001-12-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |
Ref document number: 1127403 Country of ref document: EP |
|
REN | Ceased due to non-payment of the annual fee |