ATE182677T1 - Apparat zum detektieren einer relativen bewegung - Google Patents
Apparat zum detektieren einer relativen bewegungInfo
- Publication number
- ATE182677T1 ATE182677T1 AT93911085T AT93911085T ATE182677T1 AT E182677 T1 ATE182677 T1 AT E182677T1 AT 93911085 T AT93911085 T AT 93911085T AT 93911085 T AT93911085 T AT 93911085T AT E182677 T1 ATE182677 T1 AT E182677T1
- Authority
- AT
- Austria
- Prior art keywords
- scale
- detector
- phase
- orders
- poly
- Prior art date
Links
- 239000012141 concentrate Substances 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Power Steering Mechanism (AREA)
- Vehicle Body Suspensions (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87849492A | 1992-05-05 | 1992-05-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE182677T1 true ATE182677T1 (de) | 1999-08-15 |
Family
ID=25372143
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT93911085T ATE182677T1 (de) | 1992-05-05 | 1993-05-04 | Apparat zum detektieren einer relativen bewegung |
Country Status (7)
Country | Link |
---|---|
US (1) | US5559600A (de) |
EP (1) | EP0639259B1 (de) |
JP (1) | JP3390440B2 (de) |
AT (1) | ATE182677T1 (de) |
CA (1) | CA2118110C (de) |
DE (1) | DE69325799T2 (de) |
WO (1) | WO1993022615A1 (de) |
Families Citing this family (30)
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US5486923A (en) * | 1992-05-05 | 1996-01-23 | Microe | Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference |
US5754295A (en) * | 1996-12-20 | 1998-05-19 | Microe, Inc. | Non-contacting torque sensor and displacement measuring apparatus and method |
US5909283A (en) * | 1997-10-07 | 1999-06-01 | Eselun; Steven Albert | Linear encoder using diverging light beam diffraction |
US6424407B1 (en) * | 1998-03-09 | 2002-07-23 | Otm Technologies Ltd. | Optical translation measurement |
US6144118A (en) * | 1998-09-18 | 2000-11-07 | General Scanning, Inc. | High-speed precision positioning apparatus |
US6188484B1 (en) | 1998-10-29 | 2001-02-13 | Maxtor Corporation | Method and apparatus for measuring angular displacement of an actuator arm relative to a reference position |
US6552802B1 (en) | 1999-05-04 | 2003-04-22 | Microe Systems, Inc. | Apparatus and method for roll invariant reflective position sensing |
DE19941318A1 (de) * | 1999-08-31 | 2001-03-15 | Heidenhain Gmbh Dr Johannes | Optische Positionsmeßeinrichtung |
WO2003021194A2 (en) * | 2001-08-30 | 2003-03-13 | Microe Systems Corporation | Reference point talbot encoder |
WO2003021197A1 (en) * | 2001-08-30 | 2003-03-13 | Microe Systems Corporation | Harmonic suppressing photodetector array |
US7002137B2 (en) * | 2001-08-30 | 2006-02-21 | Gsi Lumonics Corporation | Reference point talbot encoder |
US7881896B2 (en) | 2002-02-14 | 2011-02-01 | Faro Technologies, Inc. | Portable coordinate measurement machine with integrated line laser scanner |
USRE42082E1 (en) | 2002-02-14 | 2011-02-01 | Faro Technologies, Inc. | Method and apparatus for improving measurement accuracy of a portable coordinate measurement machine |
US7073271B2 (en) | 2002-02-14 | 2006-07-11 | Faro Technologies Inc. | Portable coordinate measurement machine |
US7519493B2 (en) | 2002-02-14 | 2009-04-14 | Faro Technologies, Inc. | Portable coordinate measurement machine with integrated line laser scanner |
US6952882B2 (en) * | 2002-02-14 | 2005-10-11 | Faro Technologies, Inc. | Portable coordinate measurement machine |
US7246030B2 (en) * | 2002-02-14 | 2007-07-17 | Faro Technologies, Inc. | Portable coordinate measurement machine with integrated line laser scanner |
US6957496B2 (en) | 2002-02-14 | 2005-10-25 | Faro Technologies, Inc. | Method for improving measurement accuracy of a portable coordinate measurement machine |
US6973734B2 (en) * | 2002-02-14 | 2005-12-13 | Faro Technologies, Inc. | Method for providing sensory feedback to the operator of a portable measurement machine |
US6904691B2 (en) * | 2002-02-14 | 2005-06-14 | Faro Technologies, Inc. | Portable coordinate measurement machine with improved counter balance |
WO2004005855A2 (en) * | 2002-07-08 | 2004-01-15 | Microe Systems Corporation | Multi-track optical encoder employing beam divider |
US20070024865A1 (en) * | 2005-07-26 | 2007-02-01 | Mitchell Donald K | Optical encoder having slanted optical detector elements for harmonic suppression |
KR101184167B1 (ko) * | 2006-09-08 | 2012-09-18 | 지에스아이 그룹 코포레이션 | 광 위치 인코더 |
GB2496230B (en) * | 2008-08-28 | 2013-07-17 | Faro Tech Inc | Indexed optical encoder, method for indexing an optical encoder, and method for dynamically adjusting gain and offset in an optical encoder |
JP5170046B2 (ja) | 2009-09-18 | 2013-03-27 | 株式会社安川電機 | ロータリエンコーダ、ロータリモータ、ロータリモータシステム、ディスク及びロータリエンコーダの製造方法 |
EP2372302A1 (de) | 2010-03-26 | 2011-10-05 | Leica Geosystems AG | Messverfahren für eine oberflächenvermessende Messmaschine |
WO2011152076A1 (ja) | 2010-05-31 | 2011-12-08 | 株式会社安川電機 | ロータリエンコーダ、ロータリモータ及びロータリモータシステム |
JP5126290B2 (ja) | 2010-06-07 | 2013-01-23 | 株式会社安川電機 | エンコーダ、サーボモータ、サーボユニット及びエンコーダの製造方法 |
WO2012029927A1 (ja) | 2010-09-02 | 2012-03-08 | 株式会社安川電機 | エンコーダ、サーボモータ、及びモータユニット |
GB2554230A (en) | 2015-04-22 | 2018-03-28 | Faro Tech Inc | Indexed optical encoder |
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CH626169A5 (de) * | 1976-11-25 | 1981-10-30 | Leitz Ernst Gmbh | |
US4168908A (en) * | 1977-12-30 | 1979-09-25 | The United States Of America As Represented By The Secretary Of The Air Force | Precision pointing and tracking control system |
EP0112399B1 (de) * | 1982-12-20 | 1987-03-11 | Ibm Deutschland Gmbh | Interferometrisches Messverfahren für Oberflächen |
US4711573A (en) * | 1983-03-07 | 1987-12-08 | Beckman Instruments, Inc. | Dynamic mirror alignment control |
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JPH0621801B2 (ja) * | 1985-07-03 | 1994-03-23 | キヤノン株式会社 | ロ−タリ−エンコ−ダ− |
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US4731772A (en) * | 1986-05-06 | 1988-03-15 | Lee Wai Hon | Optical head using hologram lens for both beam splitting and focus error detection functions |
EP0248277A3 (de) * | 1986-06-03 | 1990-03-28 | Optra, Inc. | Zwei-Frequenz-Laser-Rotationssensorsystem |
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DE3737278A1 (de) * | 1986-11-04 | 1988-05-11 | Canon Kk | Verfahren und vorrichtung zum optischen erfassen der stellung eines objekts |
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US5182610A (en) * | 1990-04-19 | 1993-01-26 | Sortec Corporation | Position detecting method and device therefor as well as aligning device |
US5121371A (en) * | 1990-06-18 | 1992-06-09 | Bernoulli Optical Systems Company | Optical servo system for magnetic disk |
US5162955A (en) * | 1990-06-29 | 1992-11-10 | Digital Equipment Corporation | Apparatus for writing servo information onto a magnetic disk |
US5108184A (en) * | 1990-07-16 | 1992-04-28 | International Business Machines Corporation | Non-invasive laser positioning system for rotary actuators |
US5227930A (en) * | 1990-07-20 | 1993-07-13 | Quantum Corporation | Head position recalibration for disk drive |
US5136152A (en) * | 1990-12-19 | 1992-08-04 | Hoetron, Inc. | Hybrid optical pickup with integrated power emission and reading photodetectors |
US5104225A (en) * | 1991-01-25 | 1992-04-14 | Mitutoyo Corporation | Position detector and method of measuring position |
US5159408A (en) * | 1991-03-27 | 1992-10-27 | Hughes Danbury Optical Systems, Inc. | Optical thickness profiler using synthetic wavelengths |
US5325349A (en) * | 1991-05-29 | 1994-06-28 | Sony Magnescale Inc. | Hard disc drive and a servo signal writing apparatus |
-
1993
- 1993-05-04 AT AT93911085T patent/ATE182677T1/de not_active IP Right Cessation
- 1993-05-04 CA CA002118110A patent/CA2118110C/en not_active Expired - Fee Related
- 1993-05-04 EP EP93911085A patent/EP0639259B1/de not_active Expired - Lifetime
- 1993-05-04 DE DE69325799T patent/DE69325799T2/de not_active Expired - Lifetime
- 1993-05-04 WO PCT/US1993/004260 patent/WO1993022615A1/en active IP Right Grant
- 1993-05-04 JP JP51961993A patent/JP3390440B2/ja not_active Expired - Fee Related
-
1995
- 1995-02-01 US US08/383,700 patent/US5559600A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0639259A4 (de) | 1997-11-05 |
EP0639259B1 (de) | 1999-07-28 |
JP3390440B2 (ja) | 2003-03-24 |
JPH07506669A (ja) | 1995-07-20 |
EP0639259A1 (de) | 1995-02-22 |
US5559600A (en) | 1996-09-24 |
DE69325799T2 (de) | 2000-04-13 |
DE69325799D1 (de) | 1999-09-02 |
CA2118110A1 (en) | 1993-11-11 |
CA2118110C (en) | 2002-08-13 |
WO1993022615A1 (en) | 1993-11-11 |
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Ch | Fresnel patterns of finite grating illuminated by coherent and partially coherent fields |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |