ATA65289A - Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles - Google Patents

Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles

Info

Publication number
ATA65289A
ATA65289A AT65289A AT65289A ATA65289A AT A65289 A ATA65289 A AT A65289A AT 65289 A AT65289 A AT 65289A AT 65289 A AT65289 A AT 65289A AT A65289 A ATA65289 A AT A65289A
Authority
AT
Austria
Prior art keywords
determination
distance
moving component
interferometer arrangement
interferometer
Prior art date
Application number
AT65289A
Other languages
English (en)
Other versions
AT392537B (de
Original Assignee
Tabarelli Werner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tabarelli Werner filed Critical Tabarelli Werner
Priority to AT65289A priority Critical patent/AT392537B/de
Priority to EP19900904355 priority patent/EP0422143A1/de
Priority to JP50454490A priority patent/JPH03504768A/ja
Priority to PCT/EP1990/000423 priority patent/WO1990011484A1/de
Publication of ATA65289A publication Critical patent/ATA65289A/de
Application granted granted Critical
Publication of AT392537B publication Critical patent/AT392537B/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AT65289A 1989-03-21 1989-03-21 Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles AT392537B (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT65289A AT392537B (de) 1989-03-21 1989-03-21 Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
EP19900904355 EP0422143A1 (de) 1989-03-21 1990-03-15 Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
JP50454490A JPH03504768A (ja) 1989-03-21 1990-03-15 特に可動な構成要素の距離及至シフト運動を測定するための干渉計システム
PCT/EP1990/000423 WO1990011484A1 (de) 1989-03-21 1990-03-15 Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT65289A AT392537B (de) 1989-03-21 1989-03-21 Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles

Publications (2)

Publication Number Publication Date
ATA65289A true ATA65289A (de) 1990-09-15
AT392537B AT392537B (de) 1991-04-25

Family

ID=3496240

Family Applications (1)

Application Number Title Priority Date Filing Date
AT65289A AT392537B (de) 1989-03-21 1989-03-21 Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles

Country Status (4)

Country Link
EP (1) EP0422143A1 (de)
JP (1) JPH03504768A (de)
AT (1) AT392537B (de)
WO (1) WO1990011484A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5617207A (en) * 1990-04-23 1997-04-01 Commonwealth Scientific And Industrial Research Organisation Appartatus and method for measuring a change in an energy path length
EP0546071B1 (de) * 1990-08-31 1995-12-27 Commonwealth Scientific And Industrial Research Organisation Interferenzmikroskop
FR2676808B1 (fr) * 1991-05-21 1993-08-13 Commissariat Energie Atomique Dispositif de mesure d'une caracteristique d'un objet en optique integree, par interferometrie.
US5291267A (en) * 1992-01-22 1994-03-01 Hewlett-Packard Company Optical low-coherence reflectometry using optical amplification
FR2696545B1 (fr) * 1992-10-06 1994-12-30 Suisse Electronique Microtech Interféromètre comprenant un ensemble intégré et une unité réfléchissante séparés l'un de l'autre par une région de mesure.
FR2696546B1 (fr) * 1992-10-06 1994-12-30 Suisse Electronique Microtech Interféromètre comprenant un ensemble intégré et un miroir séparés l'un de l'autre par une région de mesure.
FR2699269B1 (fr) * 1992-12-10 1995-01-13 Merlin Gerin Dispositif de mesure interferrométrique.
DE102011005937B4 (de) * 2011-03-23 2020-10-22 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
DE102013209833A1 (de) * 2013-05-27 2014-11-27 Polytec Gmbh Optisches Interferometer und Vibrometer mit solch einem optischen Interferometer
JP6204272B2 (ja) * 2014-06-05 2017-09-27 日本電信電話株式会社 距離計測装置
EP3415887B1 (de) 2017-06-14 2020-03-18 IMEC vzw Kraftmessvorrichtung und kraftmesssystem
EP3415874A1 (de) * 2017-06-14 2018-12-19 IMEC vzw Sensorvorrichtung, messsystem und verfahren zur erkennung eines externen einflusses
CN115039022A (zh) * 2019-12-11 2022-09-09 洛克利光子有限公司 用于外差干涉测量的移频器以及具有此类移频器的用于外差干涉测量的装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609290A (en) * 1983-06-06 1986-09-02 Mcdonnell Douglas Corporation Passive homodyne demodulator and sensor system
US4522495A (en) * 1983-06-13 1985-06-11 The United States Of America As Represented By The Secretary Of The Navy Optical sensing devices
SE447601B (sv) * 1985-04-04 1986-11-24 Ericsson Telefon Ab L M Fiberoptisk interferometer
GB2182223A (en) * 1985-10-23 1987-05-07 Stc Plc Optical fibre reflectometer
DE3616393C1 (en) * 1986-05-15 1987-07-02 Daimler Benz Ag Two-frequency laser interferometer
JPS6412204A (en) * 1987-07-07 1989-01-17 Topcon Corp Optical ic interferometer
CH678109A5 (de) * 1988-06-13 1991-07-31 Althis Ag
DE3918812A1 (de) * 1988-06-13 1989-12-28 Kerner Anna Entfernungsmessendes heterodynes interferometer

Also Published As

Publication number Publication date
WO1990011484A1 (de) 1990-10-04
EP0422143A1 (de) 1991-04-17
JPH03504768A (ja) 1991-10-17
AT392537B (de) 1991-04-25

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
ELJ Ceased due to non-payment of the annual fee