ATA219387A - ROD-SHAPED MAGNETRON- OR SPUTTER CATHODE ARRANGEMENT, SPUTTER METHOD, DEVICE FOR IMPLEMENTING THE METHOD AND TUBULAR TARGET - Google Patents
ROD-SHAPED MAGNETRON- OR SPUTTER CATHODE ARRANGEMENT, SPUTTER METHOD, DEVICE FOR IMPLEMENTING THE METHOD AND TUBULAR TARGETInfo
- Publication number
- ATA219387A ATA219387A AT0219387A AT219387A ATA219387A AT A219387 A ATA219387 A AT A219387A AT 0219387 A AT0219387 A AT 0219387A AT 219387 A AT219387 A AT 219387A AT A219387 A ATA219387 A AT A219387A
- Authority
- AT
- Austria
- Prior art keywords
- sputter
- implementing
- rod
- cathode arrangement
- tubular target
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
- F16C33/122—Multilayer structures of sleeves, washers or liners
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2204/00—Metallic materials; Alloys
- F16C2204/20—Alloys based on aluminium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2204/00—Metallic materials; Alloys
- F16C2204/20—Alloys based on aluminium
- F16C2204/24—Alloys based on aluminium with lead as the next major constituent
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2204/00—Metallic materials; Alloys
- F16C2204/60—Ferrous alloys, e.g. steel alloys
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT2193/87A AT392291B (en) | 1987-09-01 | 1987-09-01 | Rod-shaped magnetron or sputtering cathode arrangement, sputtering process and apparatus for carrying out the process |
US07/221,383 US4904362A (en) | 1987-07-24 | 1988-07-19 | Bar-shaped magnetron or sputter cathode arrangement |
DE3852976T DE3852976D1 (en) | 1987-07-24 | 1988-07-20 | Rod-shaped magnetron or sputter cathode arrangement, sputtering method, device for carrying out the method and tubular target. |
EP88890192A EP0300995B1 (en) | 1987-07-24 | 1988-07-20 | Rod shaped magnetron or sputter cathode arrangement, sputtering process, device for implementing the process and tube shaped target |
JP63184442A JPH01104770A (en) | 1987-07-24 | 1988-07-22 | Arrangement of rod-shaped magnetoelectric pipe or sputter cathode, sputtering method, apparatus for performing said method and tubular target |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT2193/87A AT392291B (en) | 1987-09-01 | 1987-09-01 | Rod-shaped magnetron or sputtering cathode arrangement, sputtering process and apparatus for carrying out the process |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA219387A true ATA219387A (en) | 1988-09-15 |
AT392291B AT392291B (en) | 1991-02-25 |
Family
ID=3529710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT2193/87A AT392291B (en) | 1987-07-24 | 1987-09-01 | Rod-shaped magnetron or sputtering cathode arrangement, sputtering process and apparatus for carrying out the process |
Country Status (1)
Country | Link |
---|---|
AT (1) | AT392291B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19514835C1 (en) * | 1995-04-21 | 1997-01-23 | Fraunhofer Ges Forschung | Process for producing sliding elements concavely curved on the sliding surface |
DE19753656C1 (en) | 1997-12-03 | 1998-12-03 | Fraunhofer Ges Forschung | Installation for vacuum coating of sliding bearings |
US10900117B2 (en) | 2018-10-24 | 2021-01-26 | Vapor Technologies, Inc. | Plasma corridor for high volume PE-CVD processing |
US10900116B2 (en) * | 2018-10-24 | 2021-01-26 | Vapor Technologies, Inc. | PVD system with remote arc discharge plasma assisted process |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2707144A1 (en) * | 1976-02-19 | 1977-08-25 | Sloan Technology Corp | Cathode sputtering device with magnetic equipment - which can be displaced to move the area of sputtering over an extended surface by relative movement |
NL7607473A (en) * | 1976-07-07 | 1978-01-10 | Philips Nv | SPRAYING DEVICE AND METHOD FOR SPRAYING WITH SUCH A DEVICE |
DE2923174A1 (en) * | 1979-06-08 | 1980-12-11 | Demetron | SPUTTER TARGET ON CARRIER PLATE |
EP0045822B1 (en) * | 1980-08-08 | 1985-05-29 | Battelle Development Corporation | Cylindrical magnetron sputtering cathode |
US4356073A (en) * | 1981-02-12 | 1982-10-26 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
US4525264A (en) * | 1981-12-07 | 1985-06-25 | Ford Motor Company | Cylindrical post magnetron sputtering system |
US4521286A (en) * | 1983-03-09 | 1985-06-04 | Unisearch Limited | Hollow cathode sputter etcher |
US4519885A (en) * | 1983-12-27 | 1985-05-28 | Shatterproof Glass Corp. | Method and apparatus for changing sputtering targets in a magnetron sputtering system |
-
1987
- 1987-09-01 AT AT2193/87A patent/AT392291B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AT392291B (en) | 1991-02-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee | ||
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |