ATA119098A - Verfahren zur erzeugung eines kohlenstoffilmes auf einem substrat - Google Patents
Verfahren zur erzeugung eines kohlenstoffilmes auf einem substratInfo
- Publication number
- ATA119098A ATA119098A AT0119098A AT119098A ATA119098A AT A119098 A ATA119098 A AT A119098A AT 0119098 A AT0119098 A AT 0119098A AT 119098 A AT119098 A AT 119098A AT A119098 A ATA119098 A AT A119098A
- Authority
- AT
- Austria
- Prior art keywords
- producing
- substrate
- carbon film
- carbon
- film
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0119098A ATA119098A (de) | 1998-07-09 | 1998-07-09 | Verfahren zur erzeugung eines kohlenstoffilmes auf einem substrat |
DE19930133A DE19930133A1 (de) | 1998-07-09 | 1999-06-30 | Verfahren zur Erzeugung eines Kohlenstoffilmes auf einem Substrat |
US09/349,936 US6136160A (en) | 1998-07-09 | 1999-07-08 | Process for producing a carbon film on a substrate |
JP11194696A JP2000073166A (ja) | 1998-07-09 | 1999-07-08 | 基板上への炭素皮膜の生成方法及びそれによって得られた炭素皮膜を有する基板 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0119098A ATA119098A (de) | 1998-07-09 | 1998-07-09 | Verfahren zur erzeugung eines kohlenstoffilmes auf einem substrat |
Publications (1)
Publication Number | Publication Date |
---|---|
ATA119098A true ATA119098A (de) | 1999-05-15 |
Family
ID=3508564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT0119098A ATA119098A (de) | 1998-07-09 | 1998-07-09 | Verfahren zur erzeugung eines kohlenstoffilmes auf einem substrat |
Country Status (4)
Country | Link |
---|---|
US (1) | US6136160A (de) |
JP (1) | JP2000073166A (de) |
AT (1) | ATA119098A (de) |
DE (1) | DE19930133A1 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10118200A1 (de) * | 2001-04-11 | 2002-10-24 | Infineon Technologies Ag | Gas-Sensorelement, Verfahren zum Herstellen eines Gas-Sensorelements und Verfahren zur Detektion von Gasen |
US6643165B2 (en) | 2001-07-25 | 2003-11-04 | Nantero, Inc. | Electromechanical memory having cell selection circuitry constructed with nanotube technology |
US6574130B2 (en) | 2001-07-25 | 2003-06-03 | Nantero, Inc. | Hybrid circuit having nanotube electromechanical memory |
US6706402B2 (en) | 2001-07-25 | 2004-03-16 | Nantero, Inc. | Nanotube films and articles |
US6835591B2 (en) | 2001-07-25 | 2004-12-28 | Nantero, Inc. | Methods of nanotube films and articles |
US6784028B2 (en) * | 2001-12-28 | 2004-08-31 | Nantero, Inc. | Methods of making electromechanical three-trace junction devices |
GB2399676B (en) * | 2003-03-21 | 2006-02-22 | Ims Ionen Mikrofab Syst | Apparatus for enhancing the lifetime of stencil masks |
US7294877B2 (en) | 2003-03-28 | 2007-11-13 | Nantero, Inc. | Nanotube-on-gate FET structures and applications |
CA2526946A1 (en) | 2003-05-14 | 2005-04-07 | Nantero, Inc. | Sensor platform using a non-horizontally oriented nanotube element |
WO2005001899A2 (en) | 2003-06-09 | 2005-01-06 | Nantero, Inc. | Non-volatile electromechanical field effect devices and circuits using same and methods of forming same |
US7989067B2 (en) * | 2003-06-12 | 2011-08-02 | Georgia Tech Research Corporation | Incorporation of functionalizing molecules in nanopatterned epitaxial graphene electronics |
US7015142B2 (en) * | 2003-06-12 | 2006-03-21 | Georgia Tech Research Corporation | Patterned thin film graphite devices and method for making same |
WO2005048296A2 (en) | 2003-08-13 | 2005-05-26 | Nantero, Inc. | Nanotube-based switching elements with multiple controls and circuits made from same |
US7132201B2 (en) * | 2003-09-12 | 2006-11-07 | Micron Technology, Inc. | Transparent amorphous carbon structure in semiconductor devices |
US7129180B2 (en) * | 2003-09-12 | 2006-10-31 | Micron Technology, Inc. | Masking structure having multiple layers including an amorphous carbon layer |
US7528437B2 (en) * | 2004-02-11 | 2009-05-05 | Nantero, Inc. | EEPROMS using carbon nanotubes for cell storage |
US7161403B2 (en) | 2004-06-18 | 2007-01-09 | Nantero, Inc. | Storage elements using nanotube switching elements |
US7164744B2 (en) | 2004-06-18 | 2007-01-16 | Nantero, Inc. | Nanotube-based logic driver circuits |
US7652342B2 (en) | 2004-06-18 | 2010-01-26 | Nantero, Inc. | Nanotube-based transfer devices and related circuits |
WO2006121461A2 (en) | 2004-09-16 | 2006-11-16 | Nantero, Inc. | Light emitters using nanotubes and methods of making same |
US7479654B2 (en) | 2005-05-09 | 2009-01-20 | Nantero, Inc. | Memory arrays using nanotube articles with reprogrammable resistance |
JP2011507131A (ja) * | 2007-12-06 | 2011-03-03 | インテバック・インコーポレイテッド | パターン化媒体を商業的に製造するシステム及び方法 |
US8460764B2 (en) * | 2008-03-06 | 2013-06-11 | Georgia Tech Research Corporation | Method and apparatus for producing ultra-thin graphitic layers |
US20090236608A1 (en) * | 2008-03-18 | 2009-09-24 | Georgia Tech Research Corporation | Method for Producing Graphitic Patterns on Silicon Carbide |
US8497499B2 (en) * | 2009-10-12 | 2013-07-30 | Georgia Tech Research Corporation | Method to modify the conductivity of graphene |
US9171907B2 (en) | 2011-09-27 | 2015-10-27 | Georgia Tech Research Corporation | Graphene transistor |
US9627790B2 (en) | 2012-10-04 | 2017-04-18 | Fci Americas Technology Llc | Electrical contact including corrosion-resistant coating |
JP6472016B2 (ja) * | 2014-09-25 | 2019-02-20 | 国立研究開発法人産業技術総合研究所 | 炭化珪素半導体装置の製造方法 |
CN113088913B (zh) * | 2021-04-13 | 2022-03-29 | 安徽工程大学 | 一种碳纤维改性方法及其产品 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5252367A (en) * | 1989-10-27 | 1993-10-12 | Kabushiki Kaisha Kobe Seiko Sho | Method of manufacturing a magnetic recording medium |
US5232570A (en) * | 1991-06-28 | 1993-08-03 | Digital Equipment Corporation | Nitrogen-containing materials for wear protection and friction reduction |
JPH06145975A (ja) * | 1992-03-20 | 1994-05-27 | Komag Inc | 炭素フィルムをスパタリングする方法及びその製造物 |
US5573864A (en) * | 1994-10-25 | 1996-11-12 | The United States Of America As Represented By The Secretary Of Commerce | Transparent carbon nitride films and compositions of matter comprising transparent carbon nitride films |
FR2726579A1 (fr) * | 1994-11-07 | 1996-05-10 | Neuville Stephane | Procede de depot d'un revetement protecteur de type pseudo carbonne diamant amorphe |
-
1998
- 1998-07-09 AT AT0119098A patent/ATA119098A/de not_active Application Discontinuation
-
1999
- 1999-06-30 DE DE19930133A patent/DE19930133A1/de not_active Withdrawn
- 1999-07-08 US US09/349,936 patent/US6136160A/en not_active Expired - Fee Related
- 1999-07-08 JP JP11194696A patent/JP2000073166A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US6136160A (en) | 2000-10-24 |
JP2000073166A (ja) | 2000-03-07 |
DE19930133A1 (de) | 2000-01-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A1J | Withdrawal paragraph 166 lit. 6 |