AT510240A3 - Positionsmesseinrichtung mit randkompensation - Google Patents

Positionsmesseinrichtung mit randkompensation Download PDF

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Publication number
AT510240A3
AT510240A3 ATA1117/2011A AT11172011A AT510240A3 AT 510240 A3 AT510240 A3 AT 510240A3 AT 11172011 A AT11172011 A AT 11172011A AT 510240 A3 AT510240 A3 AT 510240A3
Authority
AT
Austria
Prior art keywords
transmitter
coils
last
measuring
measuring direction
Prior art date
Application number
ATA1117/2011A
Other languages
English (en)
Other versions
AT510240B1 (de
AT510240A2 (de
Inventor
Günter Reusing
Hubert Nestler
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of AT510240A2 publication Critical patent/AT510240A2/de
Application granted granted Critical
Publication of AT510240B1 publication Critical patent/AT510240B1/de
Publication of AT510240A3 publication Critical patent/AT510240A3/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2046—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

Die Erfindung betrifft eine Positionsmesseinrichtung (10) umfassend eine Maßverkörperung (20) und eine Abtasteinrichtung (30), wobei die Abtasteinrichtung (30) gegenüber der Maßverkörperung (20) in Messrichtung (11) beweglich ist, wobei die Abtasteinrichtung (30) eine Senderwindungsanordnung (40) aufweist, deren elektromagnetisches Feld von den Messmarkierungen (21) der Maßverkörperung (20) beeinflusst werden kann, wobei die Senderwin-dungsanordnung (40) mehrere entlang der Mess-richtung (11) periodisch angeordnete, planare, sich nicht überlappende effektive Senderspulen (43) aufweist, wobei innerhalb wenigstens eines Teils der Senderspulen (43) je ein einziges planares Empfängerspulenpaar (Eij) angeordnet ist, welches jeweils zwei effektive Einzelspulen aufweist, die mit entgegen gesetzter Windungsrichtung in Reihe geschaltet sind, wobei sie in Messrichtung (11) mit einem Abstand von λ/2 versetzt angeordnet sind, wobei alle effektiven Einzelspulen mit Ausnahme der Windungsrichtung im Wesentlichen gleich ausgeführt sind. Erfindungsgemäß sind ein erstes Empfängerspulenpaar (E11), welches innerhalb der in Messrichtung (11) zuerst gelegenen Senderspule angeordnet ist, und ein letztes Empfängerspulenpaar (E13), welches innerhalb der in Messrichtung (11) zuletzt gelegenen Senderspule angeordnet ist, in Reihe geschaltet, wobei die Windungsrichtungen des ersten und des letzten Empfängerspulenpaares (E11, E13) und der ersten und der letzten Senderspule entweder beide gleich oder beide entgegengesetzt sind, wobei der Abstand (51) des ersten und des letzten Empfängerspulenpaares (E11, E13) ein ganzzahliges Vielfaches des Teilungsabstandes λ ist.
ATA1117/2011A 2010-08-04 2011-08-01 Positionsmesseinrichtung mit randkompensation AT510240B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010033397 2010-08-04

Publications (3)

Publication Number Publication Date
AT510240A2 AT510240A2 (de) 2012-02-15
AT510240B1 AT510240B1 (de) 2015-11-15
AT510240A3 true AT510240A3 (de) 2015-11-15

Family

ID=45495179

Family Applications (1)

Application Number Title Priority Date Filing Date
ATA1117/2011A AT510240B1 (de) 2010-08-04 2011-08-01 Positionsmesseinrichtung mit randkompensation

Country Status (3)

Country Link
AT (1) AT510240B1 (de)
CH (1) CH703582B1 (de)
DE (1) DE102011106940A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2725325B1 (de) 2012-10-26 2019-12-11 Robert Bosch Gmbh Positionsmesssystem
DE102013226200A1 (de) * 2013-12-17 2015-06-18 Robert Bosch Gmbh Absolute Positionsmessvorrichtung
DE102015203403A1 (de) * 2015-02-26 2016-09-01 Robert Bosch Gmbh Positionsmesssystem mit Kalibriermitteln
DE102015207275B4 (de) 2015-04-22 2018-06-07 Robert Bosch Gmbh Maßverkörperung mit signalkompensierenden Markierungen
DE102017204871A1 (de) 2017-04-19 2018-10-25 Robert Bosch Gmbh Energiesparendes Positionsbestimmungsverfahren

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0743508A2 (de) * 1995-05-16 1996-11-20 Mitutoyo Corporation Positionssensor unter Anwendung des Strominduktionsprinzips
US5804963A (en) * 1996-01-24 1998-09-08 Meyer; Hans Ulrich Inductive displacement sensor with a cursor and a movable coupling scale
US5886519A (en) * 1997-01-29 1999-03-23 Mitutoyo Corporation Multi-scale induced current absolute position transducer
EP1164358A1 (de) * 2000-06-16 2001-12-19 AMO Automatisierung Messtechnik Optik GmbH Induktives Längenmesssystem
JP2002031546A (ja) * 2000-07-14 2002-01-31 Mitsutoyo Corp 磁気式エンコーダ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1157805A (en) 1965-07-30 1969-07-09 Emi Ltd Improvements in or relating to Circuit Elements especially for use as Scanning Coils
DE102009042940A1 (de) 2009-09-24 2011-05-19 Robert Bosch Gmbh Positionsmesseinrichtung mit sich mehrfach kreuzender Senderwindungsanordnung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0743508A2 (de) * 1995-05-16 1996-11-20 Mitutoyo Corporation Positionssensor unter Anwendung des Strominduktionsprinzips
US5804963A (en) * 1996-01-24 1998-09-08 Meyer; Hans Ulrich Inductive displacement sensor with a cursor and a movable coupling scale
US5886519A (en) * 1997-01-29 1999-03-23 Mitutoyo Corporation Multi-scale induced current absolute position transducer
EP1164358A1 (de) * 2000-06-16 2001-12-19 AMO Automatisierung Messtechnik Optik GmbH Induktives Längenmesssystem
JP2002031546A (ja) * 2000-07-14 2002-01-31 Mitsutoyo Corp 磁気式エンコーダ

Also Published As

Publication number Publication date
CH703582A2 (de) 2012-02-15
AT510240B1 (de) 2015-11-15
AT510240A2 (de) 2012-02-15
CH703582B1 (de) 2016-03-15
DE102011106940A1 (de) 2012-02-09

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