AT286738B - Device for coating substrates by vacuum vapor deposition - Google Patents

Device for coating substrates by vacuum vapor deposition

Info

Publication number
AT286738B
AT286738B AT205669A AT205669A AT286738B AT 286738 B AT286738 B AT 286738B AT 205669 A AT205669 A AT 205669A AT 205669 A AT205669 A AT 205669A AT 286738 B AT286738 B AT 286738B
Authority
AT
Austria
Prior art keywords
vapor deposition
vacuum vapor
coating substrates
substrates
coating
Prior art date
Application number
AT205669A
Other languages
German (de)
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Application granted granted Critical
Publication of AT286738B publication Critical patent/AT286738B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
AT205669A 1968-02-29 1969-02-28 Device for coating substrates by vacuum vapor deposition AT286738B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70937668A 1968-02-29 1968-02-29

Publications (1)

Publication Number Publication Date
AT286738B true AT286738B (en) 1970-12-28

Family

ID=24849612

Family Applications (1)

Application Number Title Priority Date Filing Date
AT205669A AT286738B (en) 1968-02-29 1969-02-28 Device for coating substrates by vacuum vapor deposition

Country Status (13)

Country Link
US (1) US3524426A (en)
JP (1) JPS494156B1 (en)
AT (1) AT286738B (en)
BE (1) BE729026A (en)
CH (1) CH501064A (en)
DE (1) DE1911198A1 (en)
FR (1) FR2002902A1 (en)
GB (1) GB1250544A (en)
IE (1) IE33433B1 (en)
LU (1) LU58110A1 (en)
NL (1) NL6903181A (en)
NO (1) NO123939B (en)
SE (1) SE347024B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3649339A (en) * 1969-09-05 1972-03-14 Eugene C Smith Apparatus and method for securing a high vacuum for particle coating process
US3648654A (en) * 1970-03-16 1972-03-14 Bell Telephone Labor Inc Vertical liquid phase crystal growth apparatus
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus
US3915118A (en) * 1973-09-17 1975-10-28 Etec Corp Specimen coating device for an SEM
US3921572A (en) * 1974-02-25 1975-11-25 Ibm Vacuum coating apparatus
JPS5130965A (en) * 1974-09-09 1976-03-16 Matsushita Electric Ind Co Ltd ATSUMAKUSHUSEKIKAIRO NO SEIZOHOHO
US4179530A (en) * 1977-05-20 1979-12-18 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for the deposition of pure semiconductor material
US4173944A (en) * 1977-05-20 1979-11-13 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Silverplated vapor deposition chamber
EP0008807A1 (en) * 1978-09-13 1980-03-19 Elektroschmelzwerk Kempten GmbH Apparatus and method for the discontinuous or continuous coating of articles or strips by vacuum evaporation
DE2940064A1 (en) * 1979-10-03 1981-04-16 Leybold-Heraeus GmbH, 5000 Köln VACUUM EVAPORATION SYSTEM WITH A VALVE CHAMBER, A STEAMING CHAMBER AND AN EVAPORATOR CHAMBER
JPS5769797A (en) * 1980-10-17 1982-04-28 Matsushita Electric Ind Co Ltd Method of producing hybrid thick film integrated circuit
JPS57193249U (en) * 1981-06-03 1982-12-07
JPS5851594A (en) * 1981-09-22 1983-03-26 日本電気株式会社 Thick film hybrid ic board
JPS5885378U (en) * 1981-12-04 1983-06-09 ソニー株式会社 printed wiring board
US4478174A (en) * 1983-02-25 1984-10-23 Canadian Patents & Development Limited Vacuum coating vessel with movable shutter plate
JPS61164076U (en) * 1986-03-20 1986-10-11
WO2008032668A1 (en) * 2006-09-11 2008-03-20 Ulvac, Inc. Vacuum evaporation processing equipment
KR101066033B1 (en) * 2009-07-28 2011-09-20 엘아이지에이디피 주식회사 Apparatus for Chemical Vapor Deposition and Apparatus for processing substrate
CN106947944A (en) * 2017-05-23 2017-07-14 京东方科技集团股份有限公司 One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method
CN115176084A (en) * 2020-02-28 2022-10-11 伊利诺斯工具制品有限公司 Piston monitoring assembly

Also Published As

Publication number Publication date
BE729026A (en) 1969-08-01
IE33433L (en) 1969-08-29
FR2002902A1 (en) 1969-10-31
US3524426A (en) 1970-08-18
LU58110A1 (en) 1969-06-03
NL6903181A (en) 1969-09-02
CH501064A (en) 1970-12-31
SE347024B (en) 1972-07-24
GB1250544A (en) 1971-10-20
NO123939B (en) 1972-02-07
IE33433B1 (en) 1974-06-26
DE1911198A1 (en) 1969-09-18
JPS494156B1 (en) 1974-01-30

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee