WO2023077834A1 - Multi-band acousto-optic tuned filter - Google Patents
Multi-band acousto-optic tuned filter Download PDFInfo
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- WO2023077834A1 WO2023077834A1 PCT/CN2022/102089 CN2022102089W WO2023077834A1 WO 2023077834 A1 WO2023077834 A1 WO 2023077834A1 CN 2022102089 W CN2022102089 W CN 2022102089W WO 2023077834 A1 WO2023077834 A1 WO 2023077834A1
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 7
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/116—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/125—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves in an optical waveguide structure
Definitions
- the invention belongs to the fields of optical communication, optical interconnection, optical sensing technology, etc., and is suitable for tunable filters in systems such as wavelength division multiplexing optical communication, optical interconnection, spectral analysis, and adjustable light sources, and especially relates to multi-band acoustic Optical tuning filter.
- Tunable photonic filters are extremely important reconfigurable photonic devices, which can be widely used in wavelength division multiplexing optical communication and optical interconnection, spectral analysis, tunable light source, etc.
- the large-capacity wavelength division multiplexing optical communication network is one of the basic structures of the Internet and the Internet of Things.
- Tunable photonic integrated filters are the key to flexible reconfiguration of wavelength division multiplexing optical networks, and the physical basis of elastic optical networks that realize real-time dynamic optimization of network structure and bandwidth allocation. How to achieve a larger tuning range and adjustable filter spectrum etc. are facing important challenges and have very important research significance.
- thermo-optic modulation is a common implementation scheme of tunable photonic integrated filters, and its device structure mainly includes arrayed waveguide gratings, Mach-Zehnder interferometers, microring resonators, and waveguide gratings.
- the mechanism of thermo-optic regulation determines that the tuning range of a single device is generally only 10–20 nm at reasonable device power consumption and operating temperature.
- the actual dense WDM system occupies the bands of C (1530–1565nm) and L (1565–1625nm), while the sparse WDM system can occupy the band of hundreds of nanometers (1270–1610nm).
- key indicators such as tuning speed (a few microseconds) and power consumption (tens of milliwatts and above) of existing typical thermo-optical devices still need to be fully broken through.
- the guided wave acousto-optic device provides a new idea to break through this problem. From the point of view of classical physics, the essence of guided wave acousto-optic modulation is to form a reconfigurable multimode waveguide grating by exciting one or more acoustic modes to achieve flexible modulation of light wave modes. Electro-optic, thermo-optic, and magneto-optical control methods are completely different, and they have very unique advantages in realizing a variety of reconfigurable photonic integrated devices.
- the object of the present invention is to provide a multi-band acousto-optic tuning filter, which can realize band-pass or band-stop filtering, and has the advantages of low power consumption, high tuning speed, and super large tuning range. And it can form a synthetic time-varying waveguide grating by exciting multiple sound waves of different frequencies to propagate together, so as to realize independent switching of multiple common-channel wavebands and filter spectrum control.
- a multi-band acousto-optic tuning filter including an acousto-optic waveguide and an optical mode beam splitter, the optical mode A is input into the acousto-optic waveguide, and the acoustic mode is excited at the same time, and a reconfigurable multi-mode is formed by exciting one or more acoustic modes.
- the mode waveguide grating makes the input optical mode A convert in the same direction or in the opposite direction in the optical band of the acousto-optic phase matching.
- the output band-stop filtered optical mode A and band-pass filter Optical Mode B After being split by the optical mode beam splitter, the output band-stop filtered optical mode A and band-pass filter Optical Mode B.
- Another multi-band acousto-optic tuning filter includes an acousto-optic waveguide and an optical mode beam splitter.
- the optical mode A is output to the acousto-optic waveguide through the optical mode beam splitter to excite the acoustic mode, and by exciting one or more acoustic modes A reconfigurable multimode waveguide grating is formed, so that the input optical mode A is reversely converted in the optical band of the acousto-optic phase matching, and the output band-stop filtered optical mode A is output through the optical mode beam splitter.
- Optical Mode B is an acousto-optic waveguide and an optical mode beam splitter.
- the acoustic mode is a single frequency or multiple different frequencies.
- a synthetic time-varying waveguide grating is formed, thereby realizing independent switching of multiple common-channel wavebands And filter spectrum control.
- the acousto-optic waveguides and optical mode beam splitters may be based on piezoelectric or non-piezoelectric materials.
- the optical mode A is converted in the same direction or in the opposite direction in the optical waveband of the acousto-optic phase matching, and the conversion of different polarization modes or modes of different orders is used.
- the efficiency of optical mode conversion is the same as that excited in the acousto-optic waveguide. related to the type of acoustic mode.
- SV 1 acoustic mode has high conversion efficiency to TE 0 /TM 0
- SH 0 acoustic mode has high conversion efficiency to TE 0 /TE 1 .
- the length of the acousto-optic waveguide decreases with the increase of the acoustic wave power, and increases with the increase of the acoustic wave loss.
- the acoustic modes are at equal or non-equal frequency intervals to synthesize periodic or aperiodic sound waves.
- the control of the filter spectrum type adjusts the frequency interval of the acoustic mode to realize the adjustment of the wavelength interval of the filter band, and can generate a flat-top filter spectrum type.
- the linewidth of the bandpass filter can be narrowed by cascading the input end of the acousto-optic waveguide and the output end of the optical mode beam splitter multiple times, wherein the output end of the odd-numbered level unit is the output of the optical mode B, and the even-numbered level unit
- the output terminal is the optical mode A output.
- the invention has simple process and low cost.
- the multi-waveband acousto-optic tuning filter of the present invention can realize band-pass or band-stop filtering, and has the advantages of low power consumption, high tuning speed, super-large tuning range, etc.; and can transmit together by exciting multiple sound waves of different frequencies to form a composite time Variable waveguide grating, so as to realize the independent switching of multiple common channel bands and filter spectrum control.
- Figure 1 is a schematic diagram of the transmission of the action of a single-frequency acoustic mode using a multi-band acousto-optic tuning filter in the present invention, in which the input optical mode A in the figure is converted into another optical mode B in the same direction.
- Fig. 2 is a schematic diagram of the transmission of the action of the single-frequency acoustic mode using a multi-band acousto-optic tuning filter in the present invention, in which the input optical mode A is reversely converted into another optical mode B.
- Fig. 3 is a schematic diagram of the transmission of multi-frequency acoustic modes using multi-band acousto-optic tuning filters according to the present invention.
- the input optical mode A is transformed into another optical mode B in the same direction.
- Fig. 4 is the optical mode TE 0 in the lithium niobate suspended waveguide in the embodiment of the present invention.
- Fig. 5 is the optical mode TM 0 in the lithium niobate suspended waveguide in the embodiment of the present invention.
- Fig. 6 is the optical mode TE 1 in the lithium niobate suspended waveguide in the embodiment of the present invention.
- Fig. 7 is the acoustic mode SV 1 in the lithium niobate suspended waveguide in the embodiment of the present invention.
- Fig. 8 is the acoustic mode SH 0 in the lithium niobate suspended waveguide in the embodiment of the present invention.
- Fig. 9 is a single-band filter spectrum pattern of TE 0 /TM 0 co-transformation in an embodiment of the present invention.
- Fig. 10 is a dual-frequency acoustic power waveform of co-transformed TE 0 /TM 0 in an embodiment of the present invention.
- Fig. 11 is a dual-band filter spectrum pattern of TE 0 /TM 0 co-transformed in an embodiment of the present invention.
- Fig. 12 is a three-frequency acoustic power waveform of co-transformed TE 0 /TM 0 in an embodiment of the present invention.
- Fig. 13 is a three-band filter spectrum pattern of co-transformation of TE 0 /TM 0 in the embodiment of the present invention.
- Fig. 14 is the power waveform at the midpoint of the five-frequency sound wave period transformed in the same direction by TE 0 /TM 0 in the embodiment of the present invention.
- Fig. 15 is a five-band synthesized flat-top filter spectrum pattern of TE 0 /TM 0 co-transformed in an embodiment of the present invention.
- Fig. 16 is the power waveform at the first and last moments of the five-frequency sound wave period transformed in the same direction by TE 0 /TM 0 in the embodiment of the present invention.
- Fig. 17 is a five-band filter spectrum pattern of co-transformation of TE 0 /TM 0 in the embodiment of the present invention.
- Fig. 18 is a single-band general filter spectrum pattern of reverse conversion of TE 0 /TE 1 in the embodiment of the present invention.
- a multi-band acousto-optic tuning filter includes an acousto-optic waveguide and an optical mode beam splitter.
- the optical mode A is input into the acousto-optic waveguide, and the acoustic mode is excited at the same time.
- By exciting one or more Two acoustic modes form a reconfigurable multimode waveguide grating, so that the input optical mode A is converted in the same direction in the optical band of the acousto-optic phase matching.
- the output band-stop filtered optical mode A and bandpass filtered optical mode B After being split by the optical mode beam splitter, the output band-stop filtered optical mode A and bandpass filtered optical mode B.
- Figure 1 shows a single frequency
- Figure 3 shows a multi-frequency acoustic mode.
- another multi-band acousto-optic tuning filter includes an acousto-optic waveguide and an optical mode beam splitter.
- the optical mode A is output to the acousto-optic waveguide through the optical mode beam splitter to excite the acoustic mode.
- One or more acoustic modes form a reconfigurable multimode waveguide grating, so that the input optical mode A is reversely converted in the optical band of the acousto-optic phase matching, and the output band-stop filtered optical mode A is split by the optical mode tor output bandpass filtered optical mode B.
- Acousto-optic waveguides and optical mode beam splitters can be based on 400nm thickness x-cut thin-film lithium niobate wafers.
- the width of the waveguide is 0.8 ⁇ m. Due to the characteristics of the existing lithium niobate etching process, there is a 30° angle between the side of the waveguide and the vertical direction. .
- the transmission direction of the waveguide is z. In order to enhance the acousto-optic interaction and reduce the acoustic loss, the acousto-optic waveguide is suspended in the air.
- TE 0 Fig. 4
- TM 0 Fig. 5
- TE 1 Fig. 6
- two examples are given for the way of realizing the mode conversion in the same direction through the acousto-optic interaction, and one example is given for the way of realizing the reverse mode conversion through the acousto-optic interaction, but the actual optional way is not limited to this.
- the first is the mutual conversion of TE 0 and TM 0
- the corresponding acoustic mode is SV 1 ( Figure 7)
- the optical mode beam splitter is used to separate TE 0 and TM 0
- the two are the mutual transformation of TE 0 and TE 1
- the corresponding acoustic mode is SH 0 ( Figure 8)
- the optical mode beam splitter is used to separate TE 0 and TE 1 .
- the acoustic mode is a single frequency
- TE 0 is used as the input of optical mode A
- SV 1 is used as the excitation of the acoustic mode
- the acoustic wave wavelength is 4.55 ⁇ m, assuming that the acoustic wave loss is negligible
- the acoustic wave power is a constant value of 0.1 mW
- TE 0 at the central wavelength of 1550nm is completely converted to TM 0
- the optical mode beam splitter the output of TE 0 realizes band-stop filtering
- the output of TM 0 realizes band-pass filtering, and the band-pass filtering spectral type
- the filter bandwidth is 16nm
- the sidelobe suppression ratio is about 10dB.
- the acoustic spectrum type is shown in Figure 14, and the filter spectrum type is shown in Figure 15, which produces a five-band synthetic flat-top filter spectrum type; while at the beginning and end of the cycle, the acoustic wave spectrum type is shown in Figure 16.
- the filter spectrum type is shown in Figure 17, which produces a five-band general filter spectrum type.
- the acoustic mode is a single frequency, with TE 0 as the input of optical mode A, SH 0 as the excitation of the acoustic mode, the acoustic wave wavelength is 0.577 ⁇ m, assuming that the acoustic wave loss is negligible, the acoustic wave power is a constant value of 1mW, after 10mm About 95% of the TE 0 at the center wavelength of 1550nm is converted into TE 1 , and the output of TE 0 realizes band-stop filtering, and the reflected TE 1 realizes band-pass filtering through the output of the optical mode beam splitter, and the band-pass filtering spectrum
- the type is shown in Figure 18.
- the loss at the central wavelength is -0.25dB, and the filtering bandwidth is 3nm.
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Abstract
Disclosed is a multi-band acousto-optic tuned filter. The acousto-optic filter consists of an acousto-optic waveguide and an optical mode beam splitter. In the acousto-optic waveguide part, a reconfigurable multimode waveguide grating is formed by means of exciting one or more acoustic modes, causing an input optical mode to be converted into another optical mode in a same direction or in a reverse direction in a phase-matched wave band; the two optical modes are then separated by the optical mode beam splitter, thereby achieving band-pass or band-stop filtering. The method has advantages such as low power consumption, high tuning speed, and an ultra-large tuning range. A synthesized time-varying waveguide grating can be formed by means of exciting propagation of multiple sound waves having different frequencies, thereby achieving independent switching of multiple common-path wave bands and filtering spectral type modulation.
Description
本发明属于光通信和光互连、光传感技术等领域,适用于波分复用光通信和光互连、光谱分析、可调光源等***中的可调谐滤波器,尤其是涉及了多波带声光调谐滤波器。The invention belongs to the fields of optical communication, optical interconnection, optical sensing technology, etc., and is suitable for tunable filters in systems such as wavelength division multiplexing optical communication, optical interconnection, spectral analysis, and adjustable light sources, and especially relates to multi-band acoustic Optical tuning filter.
可调谐光子滤波器是极其重要的可重构光子器件,可广泛应用于波分复用光通信和光互连、光谱分析、可调光源等。尤其是大容量波分复用光通信网络,是现今互联网、物联网的基础架构之一。可调谐光子集成滤波器是实现波分复用光网络灵活重构的关键,是实现实时动态优化网络结构和带宽分配的弹性光网络的物理基础,如何实现更大调谐范围及可调控滤波谱型等方面正面临重要挑战,具有十分重要的研究意义。Tunable photonic filters are extremely important reconfigurable photonic devices, which can be widely used in wavelength division multiplexing optical communication and optical interconnection, spectral analysis, tunable light source, etc. In particular, the large-capacity wavelength division multiplexing optical communication network is one of the basic structures of the Internet and the Internet of Things. Tunable photonic integrated filters are the key to flexible reconfiguration of wavelength division multiplexing optical networks, and the physical basis of elastic optical networks that realize real-time dynamic optimization of network structure and bandwidth allocation. How to achieve a larger tuning range and adjustable filter spectrum etc. are facing important challenges and have very important research significance.
目前,热光调控是可调谐光子集成滤波器的常用实现方案,其器件结构主要包括阵列波导光栅、马赫-曾德干涉仪、微环谐振器和波导光栅。虽然近年来取得了长足的进步,但是热光调控的机理决定了其单个器件的调谐范围在合理的器件功耗和工作温度下一般仅10–20nm。而实际的密集波分复用***占用波段为C(1530–1565nm)和L(1565–1625nm),稀疏波分复用***则可占用数百纳米的波段(1270–1610nm),其所需调谐范围是热光调谐滤波器难以企及的。此外,现有典型热光器件的调谐速度(数微秒)和功耗(数十毫瓦及以上)等关键指标也有待全面突破。At present, thermo-optic modulation is a common implementation scheme of tunable photonic integrated filters, and its device structure mainly includes arrayed waveguide gratings, Mach-Zehnder interferometers, microring resonators, and waveguide gratings. Although great progress has been made in recent years, the mechanism of thermo-optic regulation determines that the tuning range of a single device is generally only 10–20 nm at reasonable device power consumption and operating temperature. The actual dense WDM system occupies the bands of C (1530–1565nm) and L (1565–1625nm), while the sparse WDM system can occupy the band of hundreds of nanometers (1270–1610nm). A range that is unattainable with thermo-optical tuned filters. In addition, key indicators such as tuning speed (a few microseconds) and power consumption (tens of milliwatts and above) of existing typical thermo-optical devices still need to be fully broken through.
而导波声光器件为突破这一难题提供了全新的思路。从经典物理的角度来看,导波声光调控的本质是通过激发一个或多个声学模式形成可重构多模波导光栅,实现对光波模式的灵活调控,其调控机理、方式、自由度与电光、热光、磁光等调控方式截然不同,在实现多种可重构光子集成器件方面具有十分独特的优势。The guided wave acousto-optic device provides a new idea to break through this problem. From the point of view of classical physics, the essence of guided wave acousto-optic modulation is to form a reconfigurable multimode waveguide grating by exciting one or more acoustic modes to achieve flexible modulation of light wave modes. Electro-optic, thermo-optic, and magneto-optical control methods are completely different, and they have very unique advantages in realizing a variety of reconfigurable photonic integrated devices.
发明内容Contents of the invention
针对背景技术中存在的问题,本发明的目的在于提供了多波带声光调谐滤波器,可以实现带通或带阻滤波,具有低功耗、高调谐速度、超大调谐范围等优势。并且可以通过激发多个不同频率的声波共同传播,形成合成时变波导光栅,从而实现多个共路波带的独立切换以及滤波谱型调控。In view of the problems existing in the background technology, the object of the present invention is to provide a multi-band acousto-optic tuning filter, which can realize band-pass or band-stop filtering, and has the advantages of low power consumption, high tuning speed, and super large tuning range. And it can form a synthetic time-varying waveguide grating by exciting multiple sound waves of different frequencies to propagate together, so as to realize independent switching of multiple common-channel wavebands and filter spectrum control.
本发明所采用的技术方案是:The technical scheme adopted in the present invention is:
一种多波带声光调谐滤波器,包括声光波导和光学模式分束器,在声光波导中输入光学模式A,同时激发声学模式,通过激发一个或多个声学模式形成可重构多模波导光栅,使得输入的光学模式A在声光相位匹配的光学波带内发生同向或反向转换,经过光学模式分束器分束后,输出带阻滤波的光学模式A和带通滤波的光学模式B。A multi-band acousto-optic tuning filter, including an acousto-optic waveguide and an optical mode beam splitter, the optical mode A is input into the acousto-optic waveguide, and the acoustic mode is excited at the same time, and a reconfigurable multi-mode is formed by exciting one or more acoustic modes. The mode waveguide grating makes the input optical mode A convert in the same direction or in the opposite direction in the optical band of the acousto-optic phase matching. After being split by the optical mode beam splitter, the output band-stop filtered optical mode A and band-pass filter Optical Mode B.
另外一种多波带声光调谐滤波器,包括声光波导和光学模式分束器,光学模式A经过光学模式分束器输出到声光波导,激发声学模式,通过激发一个或多个声学模式形成可重构多模波导光栅,使得输入的光学模式A在声光相位匹配的光学波带内发生反向转换,输出带阻滤波的光学模式A,经过光学模式分束器输出带通滤波的光学模式B。Another multi-band acousto-optic tuning filter includes an acousto-optic waveguide and an optical mode beam splitter. The optical mode A is output to the acousto-optic waveguide through the optical mode beam splitter to excite the acoustic mode, and by exciting one or more acoustic modes A reconfigurable multimode waveguide grating is formed, so that the input optical mode A is reversely converted in the optical band of the acousto-optic phase matching, and the output band-stop filtered optical mode A is output through the optical mode beam splitter. Optical Mode B.
所述的声学模式为单一的频率或者多个不同频率,当多个不同频率的声学模式在声光波导中共同传播时,形成合成时变波导光栅,从而实现多个共路波带的独立切换以及滤波谱型调控。The acoustic mode is a single frequency or multiple different frequencies. When multiple acoustic modes of different frequencies propagate together in the acousto-optic waveguide, a synthetic time-varying waveguide grating is formed, thereby realizing independent switching of multiple common-channel wavebands And filter spectrum control.
所述声光波导和光学模式分束器可基于压电材料,也可基于非压电材料。The acousto-optic waveguides and optical mode beam splitters may be based on piezoelectric or non-piezoelectric materials.
所述的光学模式A在声光相位匹配的光学波带内发生同向或反向转换,采用不同偏振模式的转换或者不同阶数模式的转换,光学模式转换的效率与声光波导中所激发的声学模式种类相关。The optical mode A is converted in the same direction or in the opposite direction in the optical waveband of the acousto-optic phase matching, and the conversion of different polarization modes or modes of different orders is used. The efficiency of optical mode conversion is the same as that excited in the acousto-optic waveguide. related to the type of acoustic mode.
SV
1声学模式对TE
0/TM
0转换效率高,SH
0声学模式对TE
0/TE
1转换效率高。
SV 1 acoustic mode has high conversion efficiency to TE 0 /TM 0 , and SH 0 acoustic mode has high conversion efficiency to TE 0 /TE 1 .
所述声光波导的长度随着声波功率的增大而减小,随着声波损耗的增大而增大。The length of the acousto-optic waveguide decreases with the increase of the acoustic wave power, and increases with the increase of the acoustic wave loss.
当多个不同频率的声学模式在声光波导中共同传播时,声学模式为等频率间隔或非等频率间隔,以合成周期性或非周期性声波。When multiple acoustic modes of different frequencies propagate together in the acousto-optic waveguide, the acoustic modes are at equal or non-equal frequency intervals to synthesize periodic or aperiodic sound waves.
所述滤波谱型调控,对声学模式的频率间隔调整实现滤波波带的波长间隔调整,并可产生平顶滤波谱型。The control of the filter spectrum type adjusts the frequency interval of the acoustic mode to realize the adjustment of the wavelength interval of the filter band, and can generate a flat-top filter spectrum type.
所述带通滤波的线宽可通过对声光波导输入端和光学模式分束器的输出端进行多次级联来缩窄,其中奇数级单元的输出端为光学模式B输出,偶数级单元的输出端为光学模式A输出。The linewidth of the bandpass filter can be narrowed by cascading the input end of the acousto-optic waveguide and the output end of the optical mode beam splitter multiple times, wherein the output end of the odd-numbered level unit is the output of the optical mode B, and the even-numbered level unit The output terminal is the optical mode A output.
本发明具有的有益效果是:The beneficial effects that the present invention has are:
本发明工艺简单,成本低。本发明多波带声光调谐滤波器可以实现带通或带阻滤波,具有低功耗、高调谐速度、超大调谐范围等优势;并且可以通过激发多个不同频率的声波共同传播,形成合成时变波导光栅,从而实现多个共路波带的独立切换以及滤波谱型调控。The invention has simple process and low cost. The multi-waveband acousto-optic tuning filter of the present invention can realize band-pass or band-stop filtering, and has the advantages of low power consumption, high tuning speed, super-large tuning range, etc.; and can transmit together by exciting multiple sound waves of different frequencies to form a composite time Variable waveguide grating, so as to realize the independent switching of multiple common channel bands and filter spectrum control.
图1是本发明采用多波带声光调谐滤波器的单频率声学模式作用的传输示意图,图中输入的光学模式A发生同向转换为另一种光学模式B。Figure 1 is a schematic diagram of the transmission of the action of a single-frequency acoustic mode using a multi-band acousto-optic tuning filter in the present invention, in which the input optical mode A in the figure is converted into another optical mode B in the same direction.
图2是本发明采用多波带声光调谐滤波器的单频率声学模式作用的传输示意图,图中输入的光学模式A发生反向转换为另一种光学模式B。Fig. 2 is a schematic diagram of the transmission of the action of the single-frequency acoustic mode using a multi-band acousto-optic tuning filter in the present invention, in which the input optical mode A is reversely converted into another optical mode B.
图3是本发明采用多波带声光调谐滤波器的多频率声学模式作用的传输示意图,图中输入的光学模式A发生同向转换为另一种光学模式B。Fig. 3 is a schematic diagram of the transmission of multi-frequency acoustic modes using multi-band acousto-optic tuning filters according to the present invention. In the figure, the input optical mode A is transformed into another optical mode B in the same direction.
图4是本发明实施例中铌酸锂悬空波导中的光学模式TE
0。
Fig. 4 is the optical mode TE 0 in the lithium niobate suspended waveguide in the embodiment of the present invention.
图5是本发明实施例中铌酸锂悬空波导中的光学模式TM
0。
Fig. 5 is the optical mode TM 0 in the lithium niobate suspended waveguide in the embodiment of the present invention.
图6是本发明实施例中铌酸锂悬空波导中的光学模式TE
1。
Fig. 6 is the optical mode TE 1 in the lithium niobate suspended waveguide in the embodiment of the present invention.
图7是本发明实施例中铌酸锂悬空波导中的声学模式SV
1。
Fig. 7 is the acoustic mode SV 1 in the lithium niobate suspended waveguide in the embodiment of the present invention.
图8是本发明实施例中铌酸锂悬空波导中的声学模式SH
0。
Fig. 8 is the acoustic mode SH 0 in the lithium niobate suspended waveguide in the embodiment of the present invention.
图9是本发明实施例中TE
0/TM
0同向转化的单波带滤波谱型。
Fig. 9 is a single-band filter spectrum pattern of TE 0 /TM 0 co-transformation in an embodiment of the present invention.
图10是本发明实施例中TE
0/TM
0同向转化的双频率声波功率波形。
Fig. 10 is a dual-frequency acoustic power waveform of co-transformed TE 0 /TM 0 in an embodiment of the present invention.
图11是本发明实施例中TE
0/TM
0同向转化的双波带滤波谱型。
Fig. 11 is a dual-band filter spectrum pattern of TE 0 /TM 0 co-transformed in an embodiment of the present invention.
图12是本发明实施例中TE
0/TM
0同向转化的三频率声波功率波形。
Fig. 12 is a three-frequency acoustic power waveform of co-transformed TE 0 /TM 0 in an embodiment of the present invention.
图13是本发明实施例中TE
0/TM
0同向转化的三波带滤波谱型。
Fig. 13 is a three-band filter spectrum pattern of co-transformation of TE 0 /TM 0 in the embodiment of the present invention.
图14是本发明实施例中TE
0/TM
0同向转化的五频率声波周期中点时刻功率波形。
Fig. 14 is the power waveform at the midpoint of the five-frequency sound wave period transformed in the same direction by TE 0 /TM 0 in the embodiment of the present invention.
图15是本发明实施例中TE
0/TM
0同向转化的五波带合成平顶滤波谱型。
Fig. 15 is a five-band synthesized flat-top filter spectrum pattern of TE 0 /TM 0 co-transformed in an embodiment of the present invention.
图16是本发明实施例中TE
0/TM
0同向转化的五频率声波周期首末时刻功率波形。
Fig. 16 is the power waveform at the first and last moments of the five-frequency sound wave period transformed in the same direction by TE 0 /TM 0 in the embodiment of the present invention.
图17是本发明实施例中TE
0/TM
0同向转化的五波带滤波谱型。
Fig. 17 is a five-band filter spectrum pattern of co-transformation of TE 0 /TM 0 in the embodiment of the present invention.
图18是本发明实施例中TE
0/TE
1反向转化的单波带一般滤波谱型。
Fig. 18 is a single-band general filter spectrum pattern of reverse conversion of TE 0 /TE 1 in the embodiment of the present invention.
下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.
如图1、3所示,一种多波带声光调谐滤波器,包括声光波导和光学模式分束器,在声光波导中输入光学模式A,同时激发声学模式,通过激发一个或多个声学模式形成可重构多模波导光栅,使得输入的光学模式A在声光相位匹配的光学波带内发生同向转换,经过光学模式分束器分束后,输出带阻滤波的光学模式A和带通滤波的光学模式B。其中,图1所示为单一频率,图3所示为多频率声学模式。As shown in Figures 1 and 3, a multi-band acousto-optic tuning filter includes an acousto-optic waveguide and an optical mode beam splitter. The optical mode A is input into the acousto-optic waveguide, and the acoustic mode is excited at the same time. By exciting one or more Two acoustic modes form a reconfigurable multimode waveguide grating, so that the input optical mode A is converted in the same direction in the optical band of the acousto-optic phase matching. After being split by the optical mode beam splitter, the output band-stop filtered optical mode A and bandpass filtered optical mode B. Among them, Figure 1 shows a single frequency, and Figure 3 shows a multi-frequency acoustic mode.
如图2所示,另外一种多波带声光调谐滤波器,包括声光波导和光学模式分束器,光学模式A经过光学模式分束器输出到声光波导,激发声学模式,通过激发一个或多个声学模式形成可重构多模波导光栅,使得输入的光学模式A在声光相位匹配的光学波带内发生反向转换,输出带阻滤波的光学模式A,经过光学模式分束器输出带通滤波的光学模式B。As shown in Figure 2, another multi-band acousto-optic tuning filter includes an acousto-optic waveguide and an optical mode beam splitter. The optical mode A is output to the acousto-optic waveguide through the optical mode beam splitter to excite the acoustic mode. One or more acoustic modes form a reconfigurable multimode waveguide grating, so that the input optical mode A is reversely converted in the optical band of the acousto-optic phase matching, and the output band-stop filtered optical mode A is split by the optical mode tor output bandpass filtered optical mode B.
声光波导和光学模式分束器可以基于400nm厚度x切薄膜铌酸锂晶圆,波导宽度为0.8μm,因现有铌酸锂刻蚀工艺特点,波导侧边与垂直方向有30°夹角。波导传输方向为z,为增强声光相互作用并减小声波损耗,声光波导悬空放置。Acousto-optic waveguides and optical mode beam splitters can be based on 400nm thickness x-cut thin-film lithium niobate wafers. The width of the waveguide is 0.8μm. Due to the characteristics of the existing lithium niobate etching process, there is a 30° angle between the side of the waveguide and the vertical direction. . The transmission direction of the waveguide is z. In order to enhance the acousto-optic interaction and reduce the acoustic loss, the acousto-optic waveguide is suspended in the air.
声光波导中可存在3种光学模式,分别为TE
0(图4)、TM
0(图5)、TE
1(图6)。本实施方案中,对于通过声光相互作用实现同向模式转换的方式给出两种示例,对于通过声光相互作用实现反向模式转换的方式给出一种示例,而实际可选用方式不限于此。如图1同向转化中,第一种为TE
0和TM
0的相互转化,与之对应的声学模式为SV
1(图7),光学模式分束器用以将TE
0和TM
0分离;第二种为TE
0和TE
1的相互转化,与之对应的声学模式为SH
0(图8),光学模式分束器用以将TE
0和TE
1分离。通过计算,当声波功率为0.1mW时,TE
0和TM
0完全转换的长度约为389μm,TE
0和TE
1完全转换的长度约为1063μm。如图2反向转化中,给出TE
0和TE
1的相互转化,与之对应的声学模式为SH
0(图8),转换效率随着声光波导长度的增加而增加,光学衰减常数约为200m
-1。
There are three optical modes in the acousto-optic waveguide, namely TE 0 (Fig. 4), TM 0 (Fig. 5), and TE 1 (Fig. 6). In this embodiment, two examples are given for the way of realizing the mode conversion in the same direction through the acousto-optic interaction, and one example is given for the way of realizing the reverse mode conversion through the acousto-optic interaction, but the actual optional way is not limited to this. As shown in Figure 1, the first is the mutual conversion of TE 0 and TM 0 , and the corresponding acoustic mode is SV 1 (Figure 7), and the optical mode beam splitter is used to separate TE 0 and TM 0 ; The two are the mutual transformation of TE 0 and TE 1 , and the corresponding acoustic mode is SH 0 (Figure 8), and the optical mode beam splitter is used to separate TE 0 and TE 1 . By calculation, when the acoustic power is 0.1 mW, the length of complete conversion of TE 0 and TM 0 is about 389 μm, and the length of complete conversion of TE 0 and TE 1 is about 1063 μm. As shown in Figure 2, the mutual conversion of TE 0 and TE 1 is given, and the corresponding acoustic mode is SH 0 (Figure 8). The conversion efficiency increases with the length of the acousto-optic waveguide, and the optical attenuation constant is about is 200m -1 .
下面以TE
0/TM
0同向转化为例,给出具体的滤波谱型计算结果。
Taking the co-directional conversion of TE 0 /TM 0 as an example, the specific calculation results of the filter spectrum type are given below.
对于图1所示,声学模式为单一频率,以TE
0作为光学模式A输入,SV
1作为声学模式激发,声波波长为4.55μm,假设声波损耗可忽略不计,声波功率为0.1mW恒定值,经过389μm的共同传输距离,1550nm中心波长处的TE
0完全转换为TM
0,再经由光学模式分束器,TE
0输出端实现带阻滤波,TM
0输出端实现带通滤波,带通滤波谱型如图9所示。中心波长处无额外损耗,滤波带宽为16nm,旁瓣抑制比约为10dB。
As shown in Figure 1, the acoustic mode is a single frequency, TE 0 is used as the input of optical mode A, SV 1 is used as the excitation of the acoustic mode, the acoustic wave wavelength is 4.55 μm, assuming that the acoustic wave loss is negligible, the acoustic wave power is a constant value of 0.1 mW, after With a common transmission distance of 389μm, TE 0 at the central wavelength of 1550nm is completely converted to TM 0 , and then through the optical mode beam splitter, the output of TE 0 realizes band-stop filtering, and the output of TM 0 realizes band-pass filtering, and the band-pass filtering spectral type As shown in Figure 9. There is no additional loss at the center wavelength, the filter bandwidth is 16nm, and the sidelobe suppression ratio is about 10dB.
对于图3所示,将声学模式设置为多频率,则可实现多波带滤波谱型调控。当声波为76.5MHz间隔的双频率,声波功率随传输距离的变化如图10所示,为周期变化,滤波谱型如图11所示,为双波带滤波;当声波为
和
间隔的三频率,声波功率随传输距离的变化如图12所示,为非周期变化,滤波谱型如图13所示,为三波带滤波。特别地,当声波为7MHz间隔的五频率,此时声波传输周期大于传输长度,滤波谱型具有时变特性。例如在周期中点时刻,声波谱型如图14所示,滤波谱型如图15所示,产生五波带合成平顶滤波谱型;而在周期首末时刻,声波谱型如图16所示,滤波谱型如图17所示,产生五波带一般滤波谱型。
As shown in Figure 3, if the acoustic mode is set to multi-frequency, multi-band filter spectrum control can be realized. When the sound wave has dual frequencies at 76.5MHz intervals, the change of the sound wave power with the transmission distance is shown in Figure 10, which is a periodic change, and the filter spectrum type is shown in Figure 11, which is a dual-band filter; when the sound wave is and For the three frequencies at intervals, the change of the acoustic power with the transmission distance is shown in Figure 12, which is an aperiodic change, and the filter spectrum type is shown in Figure 13, which is a three-band filter. In particular, when the sound wave has five frequencies at intervals of 7 MHz, the transmission period of the sound wave is longer than the transmission length, and the filter spectrum has time-varying characteristics. For example, at the midpoint of the cycle, the acoustic spectrum type is shown in Figure 14, and the filter spectrum type is shown in Figure 15, which produces a five-band synthetic flat-top filter spectrum type; while at the beginning and end of the cycle, the acoustic wave spectrum type is shown in Figure 16. As shown, the filter spectrum type is shown in Figure 17, which produces a five-band general filter spectrum type.
下面以TE
0/TE
1反向转化为例,给出具体的滤波谱型计算结果。
Taking the inverse conversion of TE 0 /TE 1 as an example, the specific calculation results of the filter spectrum type are given below.
对于图2所示,声学模式为单一频率,以TE
0作为光学模式A输入,SH
0作为声学模式激发,声波波长为0.577μm,假设声波损耗可忽略不计,声波功率为1mW恒定值,经过10mm的共同传输距离,1550nm中心波长处的TE
0约95%反射转化为TE
1,TE
0输出端实 现带阻滤波,反射的TE
1经由光学模式分束器输出实现带通滤波,带通滤波谱型如图18所示。中心波长处损耗为-0.25dB,滤波带宽为3nm。
As shown in Figure 2, the acoustic mode is a single frequency, with TE 0 as the input of optical mode A, SH 0 as the excitation of the acoustic mode, the acoustic wave wavelength is 0.577μm, assuming that the acoustic wave loss is negligible, the acoustic wave power is a constant value of 1mW, after 10mm About 95% of the TE 0 at the center wavelength of 1550nm is converted into TE 1 , and the output of TE 0 realizes band-stop filtering, and the reflected TE 1 realizes band-pass filtering through the output of the optical mode beam splitter, and the band-pass filtering spectrum The type is shown in Figure 18. The loss at the central wavelength is -0.25dB, and the filtering bandwidth is 3nm.
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应所述以权利要求的保护范围为准。The above is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Anyone skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present invention. Should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
Claims (10)
- 一种多波带声光调谐滤波器,其特征在于:包括声光波导和光学模式分束器,在声光波导中输入光学模式A,同时激发声学模式,通过激发一个或多个声学模式形成可重构多模波导光栅,使得输入的光学模式A在声光相位匹配的光学波带内发生同向转换,经过光学模式分束器分束后,输出带阻滤波的光学模式A和带通滤波的光学模式B。A multi-band acousto-optic tuning filter is characterized in that: it includes an acousto-optic waveguide and an optical mode beam splitter, the optical mode A is input into the acousto-optic waveguide, and the acoustic mode is excited at the same time, and is formed by exciting one or more acoustic modes The reconfigurable multimode waveguide grating enables the input optical mode A to be converted in the same direction in the optical band of the acousto-optic phase matching. After being split by the optical mode beam splitter, the output band-stop filtered optical mode A and the band-pass Filtered Optical Mode B.
- 一种多波带声光调谐滤波器,其特征在于:包括声光波导和光学模式分束器,光学模式A经过光学模式分束器输出到声光波导,激发声学模式,通过激发一个或多个声学模式形成可重构多模波导光栅,使得输入的光学模式A在声光相位匹配的光学波带内发生反向转换,输出带阻滤波的光学模式A,经过光学模式分束器输出带通滤波的光学模式B。A multi-band acousto-optic tuning filter is characterized in that it includes an acousto-optic waveguide and an optical mode beam splitter, the optical mode A is output to the acousto-optic waveguide through the optical mode beam splitter, and the acoustic mode is excited, and by exciting one or more Two acoustic modes form a reconfigurable multimode waveguide grating, so that the input optical mode A is reversely converted in the optical band of the acousto-optic phase matching, and the output band-stop filtered optical mode A passes through the optical mode beam splitter output band Pass-filtered optical mode B.
- 根据权利要求1或者2所述的一种多波带声光调谐滤波器,其特征在于:所述的声学模式为单一的频率或者多个不同频率,当多个不同频率的声学模式在声光波导中共同传播时,形成合成时变波导光栅,从而实现多个共路波带的独立切换以及滤波谱型调控。A multi-band acousto-optic tuning filter according to claim 1 or 2, characterized in that: the acoustic mode is a single frequency or a plurality of different frequencies, when the acoustic modes of a plurality of different frequencies are in the acousto-optic When co-propagating in the waveguide, a synthetic time-varying waveguide grating is formed, thereby realizing the independent switching of multiple co-channel wavebands and the control of the filter spectrum.
- 根据权利要求1或者2所述的一种多波带声光调谐滤波器,其特征在于:A multi-band acousto-optic tuning filter according to claim 1 or 2, characterized in that:所述声光波导和光学模式分束器可基于压电材料,也可基于非压电材料。The acousto-optic waveguides and optical mode beam splitters may be based on piezoelectric or non-piezoelectric materials.
- 根据权利要求1或者2所述的一种多波带声光调谐滤波器,其特征在于:A multi-band acousto-optic tuning filter according to claim 1 or 2, characterized in that:所述的光学模式A在声光相位匹配的光学波带内发生同向或反向转换,采用不同偏振模式的转换或者不同阶数模式的转换,光学模式转换的效率与声光波导中所激发的声学模式种类相关。The optical mode A is converted in the same direction or in the opposite direction in the optical waveband of the acousto-optic phase matching, and the conversion of different polarization modes or modes of different orders is used. The efficiency of optical mode conversion is the same as that excited in the acousto-optic waveguide. related to the type of acoustic mode.
- 根据权利要求5所述的一种多波带声光调谐滤波器,其特征在于:A multi-band acousto-optic tuning filter according to claim 5, characterized in that:SV 1声学模式对TE 0/TM 0转换效率高,SH 0声学模式对TE 0/TE 1转换效率高。 SV 1 acoustic mode has high conversion efficiency to TE 0 /TM 0 , and SH 0 acoustic mode has high conversion efficiency to TE 0 /TE 1 .
- 根据权利要求1或者2所述的一种多波带声光调谐滤波器,其特征在于:A multi-band acousto-optic tuning filter according to claim 1 or 2, characterized in that:所述声光波导的长度随着声波功率的增大而减小,随着声波损耗的增大而增大。The length of the acousto-optic waveguide decreases with the increase of the acoustic wave power, and increases with the increase of the acoustic wave loss.
- 根据权利要求3所述的一种多波带声光调谐滤波器,其特征在于:A multi-band acousto-optic tuning filter according to claim 3, characterized in that:当多个不同频率的声学模式在声光波导中共同传播时,声学模式为等频率间隔或非等频率间隔,以合成周期性或非周期性声波。When multiple acoustic modes of different frequencies propagate together in the acousto-optic waveguide, the acoustic modes are at equal or non-equal frequency intervals to synthesize periodic or aperiodic sound waves.
- 根据权利要求8所述的一种多波带声光调谐滤波器,其特征在于:A multi-band acousto-optic tuning filter according to claim 8, characterized in that:所述滤波谱型调控,对声学模式的频率间隔调整实现滤波波带的波长间隔调整,并可产生平顶滤波谱型。The control of the filter spectrum type adjusts the frequency interval of the acoustic mode to realize the adjustment of the wavelength interval of the filter band, and can generate a flat-top filter spectrum type.
- 根据权利要求1或者2所述的一种多波带声光调谐滤波器,其特征在于: 所述带通滤波的线宽可通过对声光波导输入端和光学模式分束器的输出端进行多次级联来缩窄,其中奇数级单元的输出端为光学模式B输出,偶数级单元的输出端为光学模式A输出。A multi-band acousto-optic tuning filter according to claim 1 or 2, characterized in that: the line width of the band-pass filter can be adjusted by the input end of the acousto-optic waveguide and the output end of the optical mode beam splitter Multiple cascading to narrow, where the output of the odd-numbered units is the optical mode B output, and the output of the even-numbered units is the optical mode A output.
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CN102004333A (en) * | 2010-09-17 | 2011-04-06 | 中国科学院上海技术物理研究所 | Device for realizing spectral-response electric regulation by acoustic-optic tunable filter by way of multi-frequency drive |
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US6721466B2 (en) * | 1999-12-23 | 2004-04-13 | Henry F. Taylor | Guided wave electrooptic and acoustooptic tunable filter apparatus and method |
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US20030035200A1 (en) * | 2001-08-14 | 2003-02-20 | Fujitsu Limited | Acousto-optic tunable filter |
CN102004333A (en) * | 2010-09-17 | 2011-04-06 | 中国科学院上海技术物理研究所 | Device for realizing spectral-response electric regulation by acoustic-optic tunable filter by way of multi-frequency drive |
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