WO2022142737A1 - 一种振动传感器 - Google Patents
一种振动传感器 Download PDFInfo
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- WO2022142737A1 WO2022142737A1 PCT/CN2021/129148 CN2021129148W WO2022142737A1 WO 2022142737 A1 WO2022142737 A1 WO 2022142737A1 CN 2021129148 W CN2021129148 W CN 2021129148W WO 2022142737 A1 WO2022142737 A1 WO 2022142737A1
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- mass element
- vibration
- acoustic
- acoustic cavity
- elastic
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- H04R1/00—Details of transducers, loudspeakers or microphones
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- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/08—Microphones
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/08—Mouthpieces; Microphones; Attachments therefor
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- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
- H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only
- H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
- H04R1/2807—Enclosures comprising vibrating or resonating arrangements
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- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/46—Special adaptations for use as contact microphones, e.g. on musical instrument, on stethoscope
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
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- H04R7/00—Diaphragms for electromechanical transducers; Cones
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2460/00—Details of hearing devices, i.e. of ear- or headphones covered by H04R1/10 or H04R5/033 but not provided for in any of their subgroups, or of hearing aids covered by H04R25/00 but not provided for in any of its subgroups
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Definitions
- the present application relates to the field of acoustic technology, and in particular, to a vibration sensor.
- a vibration sensor is an energy conversion device that converts vibration signals into electrical signals.
- the vibration sensor can be used as a bone conduction microphone.
- the vibration sensor can detect the vibration signal transmitted through the skin when a person speaks, so as to detect the voice signal without being disturbed by external noise.
- the structure of the vibration components in the vibration sensor is unstable, which leads to the problems that the product yield of the vibration sensor in the production process is not high and the sensitivity of the vibration sensor is low in the working process.
- the vibration sensor includes: a vibration receiver, including a housing and a vibration unit, the housing forms an acoustic cavity, the vibration unit is located in the acoustic cavity, and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity; and an acoustic transducer in acoustic communication with the first acoustic cavity, wherein: the housing is configured to vibrate based on an external vibration signal, and the vibration unit is responsive to the vibration of the housing Vibration changes the sound pressure in the first acoustic cavity, so that the acoustic transducer generates an electrical signal; the vibration unit includes a mass element and an elastic element, and the area of the side of the mass element facing away from the acoustic transducer is smaller than that of the mass element close to the acoustic transducer The area of one side of the elastic element surrounds the side wall connected to the mass element
- the mass element includes a first mass element and a second mass element, the second mass element is adjacent to the acoustic transducer, the first mass element is located on a side of the second mass element away from the acoustic transducer, and the first mass element is located on a side of the second mass element facing away from the acoustic transducer.
- the cross-sectional area of the element perpendicular to the vibration direction of the mass element is smaller than the cross-sectional area of the second mass element perpendicular to the vibration direction of the mass element.
- the first mass element is located in the middle region of the second mass element, and there is a certain distance between the side wall of the first mass element and the side wall of the second mass element.
- the specific pitch ranges from 10um to 500um.
- the elastic element includes a first elastic part and a second elastic part, two ends of the first elastic part are respectively connected with the side wall of the first mass element and the second elastic part, and the second elastic part is used for acoustic transduction
- the transducer extends and is connected to the acoustic transducer.
- the first elastic part includes a first side surface and a second side surface, the first side surface is connected to the side wall of the first mass element, and the second side surface and the second mass element are exposed on the surface of the second acoustic cavity connect.
- the side wall of the second mass element is connected with the second elastic portion.
- the acoustic transducer includes a substrate, the second elastic element extends toward and is connected to the substrate, and the substrate, the second mass element, and the second elastic element form a first acoustic cavity.
- the thickness of the first mass element is 50um-1000um, and the thickness of the second mass element is 10um-150um.
- the thickness of the first mass element is greater than the thickness of the second mass element.
- the line connecting the edge of the mass element on the side facing away from the acoustic transducer and the edge of the mass element on the side close to the acoustic transducer and the mass element forms an included angle, and the included angle ranges from 10° to 80°.
- the mass element includes a first hole portion that communicates with the first acoustic cavity and the second acoustic cavity.
- the radius of the first hole portion is 1 ⁇ m ⁇ 50 ⁇ m.
- the housing includes a third hole, and the second acoustic cavity communicates with the outside through the third hole.
- a vibration sensor including: a vibration receiver, the vibration receiver includes a housing and a vibration unit, the housing forms an acoustic cavity, and the vibration unit is located in the acoustic cavity and divide the acoustic cavity into a first acoustic cavity and a second acoustic cavity; and an acoustic transducer in acoustic communication with the first acoustic cavity, wherein: the housing is configured to Vibration is generated based on an external vibration signal, and the vibration unit changes the sound pressure in the first acoustic cavity in response to the vibration of the housing, so that the acoustic transducer generates an electrical signal; wherein the vibration unit includes A mass element and an elastic element, the elastic element is surrounded and connected to the side wall of the mass element, and the vibration sensor further includes a limit piece, the limit piece is located between the elastic piece and the housing with a limit. bit piece.
- the height of the limiting member is 100um ⁇ 1000um.
- One of the embodiments of the present application further provides a vibration sensor, including a vibration receiver, including a housing and a vibration unit, the housing forms an acoustic cavity, the vibration unit is located in the acoustic cavity, and the an acoustic cavity divided into a first acoustic cavity and a second acoustic cavity; and an acoustic transducer in acoustic communication with the first acoustic cavity, wherein: the housing is configured to generate based on an external vibration signal Vibration, the vibration unit changes the sound pressure in the first acoustic cavity in response to the vibration of the housing, so that the acoustic transducer generates an electrical signal; the vibration unit includes a mass element and an elastic element, The mass element includes grooves on the sides of the mass element in the direction of its vibration.
- the mass element includes a first hole portion, the first hole portion communicates with the first acoustic cavity and the second acoustic cavity, and the first hole portion is located in the concave slot.
- the radius of the first hole portion is 1 ⁇ m ⁇ 50 ⁇ m.
- the size of the groove is larger than the size of the first hole portion.
- One of the embodiments of the present application further provides a vibration sensor, including a vibration receiver, including a housing and a vibration unit, the housing forms an acoustic cavity, the vibration unit is located in the acoustic cavity, and separates the acoustic cavity into a first acoustic cavity an acoustic cavity and a second acoustic cavity; and an acoustic transducer in acoustic communication with the first acoustic cavity, wherein: the housing is configured to vibrate based on an external vibration signal, and the vibrating unit changes in response to the vibration of the housing The sound pressure in the first acoustic cavity causes the acoustic transducer to generate an electrical signal, the vibration unit includes a mass element and an elastic element, and the elastic element surrounds the side wall connected to the mass element and extends to the housing.
- the thickness of the elastic element is greater than the thickness of the mass element.
- the mass element or the housing is provided with a hole, and the radius of the hole is 1 um ⁇ 50 um.
- FIG. 1 is an exemplary frame diagram of a vibration sensor according to some embodiments of the present specification
- FIG. 2A is an exemplary structural diagram of a vibration sensor according to some embodiments of the present application.
- 2B is a schematic structural diagram of a mass element according to some embodiments of the present application.
- FIG. 3 is a schematic structural diagram of a vibration unit according to some embodiments of the present application.
- FIG. 4 is a schematic structural diagram of a vibration unit according to some embodiments of the present application.
- FIG. 5 is a schematic structural diagram of a mass element according to some embodiments of the present application.
- 6A is a schematic structural diagram of a vibration unit according to some embodiments of the present application.
- 6B is a schematic structural diagram of a vibration unit according to some embodiments of the present application.
- 6C is a schematic structural diagram of a vibration unit according to some embodiments of the present application.
- 6D is a schematic structural diagram of a vibration unit according to some embodiments of the present application.
- FIG. 7 is a schematic structural diagram of a vibration sensor according to some embodiments of the present application.
- FIG. 8 is a schematic structural diagram of a vibration sensor according to some embodiments of the present specification.
- FIG. 9 is a schematic structural diagram of a vibration transceiver according to some embodiments of the present application.
- system means for distinguishing different components, elements, parts, parts or assemblies at different levels.
- device means for converting components, elements, parts, parts or assemblies to different levels.
- the vibration sensor may include a vibration receiver and an acoustic transducer.
- the vibration receiver may include a housing and a vibration unit, the housing may form an acoustic cavity, and the vibration unit may be located in the acoustic cavity and partition the acoustic cavity into a first acoustic cavity and a second acoustic cavity acoustic cavity.
- the acoustic transducer may be in acoustic communication with the first acoustic cavity.
- the housing may be configured to vibrate based on external vibration signals (eg, signals generated by the vibration of bones, skin, etc., as the user speaks).
- the vibration unit may change the sound pressure of the first acoustic cavity in response to the vibration of the housing, so that the acoustic transducer generates an electrical signal.
- the vibration unit may include a mass element and an elastic element.
- the area of the side of the mass element facing away from the acoustic transducer is smaller than the area of the side of the mass element close to the acoustic transducer.
- the contact area between the mass element and the elastic element in the embodiments of the present specification increases relative to the contact area between the cylindrical (eg, cylindrical or prismatic) mass element and the elastic element.
- the connection area between the elastic element and the mass element increases, thereby improving the connection strength between the elastic element and the mass element, and improving the stability of the vibration assembly structure.
- connection strength between the elastic element and the mass element and improving the sealing performance of the first acoustic cavity, it is possible to effectively prevent a gap between the elastic element and the mass element, so that the gas in the first acoustic cavity can be effectively prevented.
- the leakage to the second acoustic cavity occurs, which in turn makes the change of the sound pressure of the first acoustic cavity in response to the vibration of the casing more sensitive, thereby improving the sensitivity of the vibration sensor.
- FIG. 1 is an exemplary frame diagram of a vibration sensor 100 according to some embodiments of the present specification.
- the vibration sensor 100 may include a vibration receiver 110 and an acoustic transducer 120 .
- vibration receiver 110 and acoustic transducer 120 may be physically connected.
- the physical connection in this specification may include welding, clamping, gluing, integral molding, etc., or any combination thereof.
- the vibration sensor 100 may be used as a bone conduction microphone.
- the vibration sensor 100 can receive vibration signals of tissues such as bones, skin and the like generated when the user speaks, and convert the vibration signals into electrical signals containing sound information. Since the sound (or vibration) in the air is hardly collected, the vibration sensor 100 can be protected from ambient noise (eg, the sound of others talking, the noise generated by the passing of vehicles) to a certain extent, and is suitable for use in a noisy environment To collect the voice signal when the user speaks.
- the noisy environment may include a noisy restaurant, a meeting place, a street, near a road, a fire scene, and the like.
- the vibration sensor 100 may be applied to earphones (eg, air conduction earphones and bone conduction earphones), hearing aids, hearing aids, glasses, helmets, augmented reality (AR) devices, virtual reality (VR) devices, etc. or any combination thereof.
- earphones eg, air conduction earphones and bone conduction earphones
- AR augmented reality
- VR virtual reality
- the vibration sensor 100 may be applied to earphones as a bone conduction microphone.
- the vibration receiver 110 may be configured to receive and transmit vibration signals.
- the vibration receiver 110 includes a housing and a vibration unit.
- the housing may be an internally hollow structure, and some components of the vibration sensor 100 (eg, the vibration unit) may be located within the housing.
- the housing may form an acoustic cavity, and the vibrating unit may be located within the acoustic cavity.
- the vibration unit may be located in the acoustic cavity, and the acoustic cavity formed by the housing is divided into a first acoustic cavity and a second acoustic cavity.
- the acoustic cavity may be in acoustic communication with the acoustic transducer 120 .
- Acoustic communication may be a communication that is capable of transmitting sound pressure, sound waves, or vibration signals.
- the acoustic transducer 120 may generate an electrical signal containing sound information based on changes in sound pressure of the first acoustic chamber.
- the vibration signal may be received via the vibration receiver 110 to change the air pressure inside the first acoustic cavity, and the acoustic transducer 120 may generate an electrical signal according to the change in air pressure inside the first acoustic cavity.
- the housing when the vibration sensor 100 is in operation, the housing may vibrate based on external vibration signals (eg, signals generated by the vibration of bones, skin, etc., when the user speaks).
- the vibration unit may vibrate in response to the vibration of the housing, and transmit the vibration to the acoustic transducer 120 through the first acoustic cavity.
- the vibration of the vibration unit can cause a volume change of the first acoustic cavity, thereby causing a change in air pressure in the first acoustic cavity, and converting the change in air pressure in the cavity into a change in sound pressure in the cavity.
- the acoustic transducer 120 may detect changes in sound pressure of the first acoustic cavity and generate electrical signals based thereon.
- the acoustic transducer 120 may include a diaphragm, the sound pressure in the first acoustic cavity changes and acts on the diaphragm to vibrate (or deform) the diaphragm, and the acoustic transducer 120 converts the vibration of the diaphragm into electricity Signal.
- FIGS. 2A-10 For a detailed description of the vibration sensor 100, reference may be made to the detailed description of FIGS. 2A-10 .
- vibration sensor 100 may also include other components, such as a power supply, to provide power to acoustic transducer 120, and the like. These corrections and changes are still within the scope of this specification.
- FIG. 2A is an exemplary structural diagram of a vibration sensor 200 according to some embodiments of the present application.
- the vibration sensor 200 may include a vibration receiver 210 and an acoustic transducer 220, wherein the vibration receiver 210 may include a housing 211 and a vibration unit 212.
- the housing 211 may be a hollow structure inside, and in some embodiments, the housing 211 may be connected with the acoustic transducer 220 to enclose a structure having an acoustic cavity.
- the housing 211 and the acoustic transducer 220 may be physically connected.
- the vibration unit 212 may be located in the acoustic cavity, and the vibration unit 212 may divide the acoustic cavity into a first acoustic cavity 213 and a second acoustic cavity 214 .
- the vibration unit 212 may form a first acoustic cavity 213 with the acoustic transducer 220
- the vibration unit 212 may form a second acoustic cavity 214 with the housing 211 .
- the vibration sensor 200 may convert external vibration signals into electrical signals.
- the external vibration signal may include a vibration signal when a person speaks, a vibration signal generated by the skin moving with the human body or other equipment (such as a speaker) working close to the skin, etc., and an object or air in contact with the vibration sensor 200. vibration signals, etc., or any combination thereof.
- the vibration sensor 200 works, the external vibration signal can be transmitted to the vibration unit 212 through the casing 211 , and the mass element 2121 of the vibration unit 212 vibrates in response to the vibration of the casing 211 driven by the elastic element 2122 .
- the vibration of the mass element 2121 can cause a volume change of the first acoustic cavity 213, thereby causing a change in air pressure in the first acoustic cavity 213, and converting the change in air pressure in the cavity into a change in sound pressure in the cavity.
- the acoustic transducer 220 may detect changes in sound pressure of the first acoustic cavity 213 and convert them into electrical signals.
- the acoustic transducer 220 may include a sound pickup hole 2221, and the sound pressure change in the first acoustic cavity 213 may act on the diaphragm of the acoustic transducer 220 through the sound pickup hole 2221, causing the diaphragm to vibrate (or deformation) to generate electrical signals. Further, the electrical signals generated by the acoustic transducer 220 may be transmitted to external electronic devices.
- acoustic transducer 220 may include interface 223 . The interface may be wired (eg, electrically) or wirelessly connected to an internal element (eg, a processor) of the external electronic device.
- the electrical signals generated by the acoustic transducer 220 may be transmitted to external electronic devices through an interface in a wired or wireless manner.
- the external electronic device may include a mobile device, a wearable device, a virtual reality device, an augmented reality device, etc., or any combination thereof.
- mobile devices may include smartphones, tablet computers, personal digital assistants (PDAs), gaming devices, navigation devices, etc., or any combination thereof.
- the wearable device may include a smart bracelet, earphones, hearing aids, smart helmets, smart watches, smart clothing, smart backpacks, smart accessories, etc., or any combination thereof.
- the virtual reality device and/or augmented reality device may include a virtual reality headset, virtual reality glasses, virtual reality patch, augmented reality helmet, augmented reality glasses, augmented reality patch, etc., or any combination thereof.
- virtual reality devices and/or augmented reality devices may include Google Glass, Oculus Rift, Hololens, Gear VR, and the like.
- the shape of the housing 211 may be a three-dimensional structure with a regular or irregular shape such as a cuboid, a cylinder, and a truncated cone.
- the material of the housing may include metals (eg, copper, stainless steel), alloys, plastics, etc., or any combination thereof.
- the casing may have a certain thickness to ensure sufficient strength to better protect the components of the vibration sensor 100 (eg, the vibration unit 212 ) disposed in the casing.
- the first acoustic cavity 213 may be in acoustic communication with the acoustic transducer 220 .
- the acoustic transducer 220 may include a sound pickup hole 2221 , and the acoustic transducer 220 may be in acoustic communication with the first acoustic cavity 213 through the sound pickup hole 2221 .
- the vibration sensor 200 may include more than one sound pickup hole 2221 .
- the vibration sensor 200 may include a plurality of sound pickup holes arranged in an array, wherein the sound pickup holes may be located at any positions of the acoustic transducer 220 corresponding to the first acoustic cavity 213 .
- the vibration unit 212 may include a mass element 2121 and an elastic element 2122 .
- the mass element 2121 and the elastic element 2122 may be physically connected, eg, glued.
- the elastic element 2122 may be a material with a certain viscosity, and is directly bonded to the mass element 2121 .
- the elastic element 2122 may be a high temperature resistant material such that the elastic element 2122 maintains performance during the manufacturing process of the vibration sensor 200 .
- its Young’s modulus and shear modulus have no change or little change (eg, the change is within 5%), wherein the Young’s modulus
- the modulus can be used to characterize the deformation capacity of the elastic element 2122 when subjected to tension or compression, and the shear modulus can be used to characterize the deformation capacity of the elastic member 2122 when subjected to shear.
- the elastic element 2122 may be a material with good elasticity (ie, easily elastically deformed), so that the vibration unit 212 may vibrate in response to the vibration of the housing 211 .
- the material of the elastic element 2122 may include silicone rubber, silicone gel, silicone sealant, etc., or any combination thereof.
- the Shore hardness of the elastic element 2122 may be less than 50 HA.
- the Shore hardness of the elastic member 2122 may be less than 45HA. More preferably, the Shore hardness of the elastic member 2122 may be less than 40 HA. More preferably, the Shore hardness of the elastic member 2122 may be less than 35HA.
- the Shore hardness of the elastic member 2122 may be less than 30 HA. More preferably, the Shore hardness of the elastic member 2122 may be less than 25HA. More preferably, the Shore hardness of the elastic member 2122 may be less than 20 HA. More preferably, the Shore hardness of the elastic member 2122 may be less than 15HA. More preferably, the Shore hardness of the elastic member 2122 may be less than 10 HA. More preferably, the Shore hardness of the elastic member 2122 may be less than 5HA.
- the material of the mass element 2121 may be a material with a density greater than a certain density threshold (eg, 6 g/cm 3 ), eg, a metal.
- a certain density threshold eg, 6 g/cm 3
- the material of the mass element 2121 may include metals or alloys such as lead, copper, silver, tin, stainless steel, stainless iron, or any combination thereof.
- the mass element 2121 is made of a material with a density greater than a certain density threshold, which can reduce the size of the vibration sensor 200 to a certain extent.
- the material density of the mass element 2121 has a large effect on the resonance peak and sensitivity of the frequency response curve of the vibration sensor 200 . Under the same volume, the greater the density of the mass element 2121, the greater its mass, and the resonance peak of the vibration sensor 200 is shifted to low frequencies. Since the frequency of the vibration signal (eg, bone conduction sound) is lower, by increasing the mass element 2121 quality, the sensitivity of the vibration sensor 200 in lower frequency bands (eg, 20Hz-6000Hz) can be improved. In some embodiments, the material density of mass element 2121 is greater than 6 g/cm 3 . In some embodiments, the material density of mass element 2121 is greater than 7 g/cm 3 .
- the material density of the mass element 2121 is 7-20 g/cm 3 .
- the material density of the mass element 2121 is 7 ⁇ 15 g/cm 3 . More preferably, the material density of the mass element 2121 is 7 ⁇ 10 g/cm 3 . More preferably, the material density of the mass element 2121 is 7 ⁇ 8 g/cm 3 .
- the mass element 2121 and the elastic element 2122 may be composed of different materials, and then assembled (eg, glued) together to form the vibration unit 212 . In some embodiments, the mass element 2121 and the elastic element 2122 may also be composed of the same material, and the vibration unit 212 is formed by integral molding.
- the thickness of the mass element 2121 along its vibration direction may be 60um-1150um.
- the thickness of the mass element 2121 along its vibration direction may be 70um-900um. More preferably, the thickness of the mass element 2121 along its vibration direction may be 80um-800um. More preferably, the thickness of the mass element 2121 along its vibration direction may be 90um-700um. More preferably, the thickness of the mass element 2121 along its vibration direction may be 100um-600um. More preferably, the thickness of the mass element 2121 along its vibration direction may be 110um-500um. More preferably, the thickness of the mass element 2121 along its vibration direction may be 120um-400um.
- the thickness of the mass element 2121 along its vibration direction may be 130um-300um. More preferably, the thickness of the mass element 2121 along its vibration direction may be 140um-200um. More preferably, the thickness of the mass element 2121 along its vibration direction may be 100um-150um.
- the elastic element 2122 may surround the peripheral side surface connected to the mass element 2121 .
- the peripheral side surface of the mass element 2121 is the side surface of the columnar structure.
- the peripheral surface of the mass element 2121 is in addition to the first mass element 21211 and the second mass element.
- the side surface of 21212 also includes, in the direction perpendicular to the vibration direction of the mass element 2121, the area of the second mass element 21212 not covered by the first mass element 21211.
- a side of the mass element 2121 away from the acoustic transducer 220 and a side of the mass element 2121 close to the acoustic transducer 220 are approximately perpendicular to the vibration direction, and are used to define the second acoustic cavity 214 and the first acoustic cavity 213 respectively . Since the elastic element 2122 is connected to the peripheral surface of the mass element 2121, during the vibration of the vibration unit 212 along the vibration direction, the momentum of the mass element 2121 is converted into a force on the elastic element 2122, so that the elastic element 2122 undergoes shear deformation .
- the shear deformation reduces the spring coefficient of the elastic element 2122, which reduces the resonant frequency of the vibration sensor 200, thereby increasing the vibration of the vibration unit 212 in the lower frequency range of the mass element 2121.
- the vibration amplitude within the range eg, 20Hz-6000Hz
- the elastic element 2122 is in close contact with the peripheral surface of the mass element 2121, which can ensure the sealing of the first acoustic cavity 213, so that the air pressure change of the first acoustic cavity 213 is only related to the vibration unit 212.
- the vibration amplitudes are related, so that the sound pressure change of the first acoustic cavity 213 can be made more obvious and effective.
- the elastic element 2122 may be a tubular structure.
- the shape of the inner wall of the elastic element 2122 in the tubular structure can be adapted to the shape of the peripheral surface of the mass element 2121 .
- the inner wall of the elastic element 2122 refers to the side wall on which the tube structure fits with the mass element 2121 .
- the mass element 2121 is in a stepped shape, and the connection between the elastic element 2122 and the mass element 2121 is in a stepped shape adapted to the mass element 2121 .
- the shape of the cross section of the mass element 2121 perpendicular to its vibration direction may be a triangle, a quadrangle, a circle, an ellipse, a fan shape, a rounded rectangle, or other regular or irregular shapes.
- the specification does not limit the shape of the outer wall of the tubular structure of the elastic element 2122 , and the outer wall of the elastic element 2122 may be a side wall away from the inner wall of the elastic element 2122 connected with the mass element 2121 .
- the shape of the outer wall of the tubular structure of the elastic element 2122 may include cylindrical, elliptical cylindrical, conical, rounded rectangular columns, rectangular columns, polygonal columns, irregular columns, etc., or any combination thereof.
- elastic element 2122 may extend toward and connect acoustic transducer 220 .
- one end of the elastic member 2122 extending toward the acoustic transducer 220 may be connected to the acoustic transducer 220 .
- the elastic element 2122 and the acoustic transducer 220 may be physically connected, eg, glued or welded.
- the elastic element 2122 can also be connected with the acoustic transducer 220 through a connecting piece (not shown in FIG. 2A ), wherein one end of the connecting piece is connected with the elastic element 2122 and the other end of the connecting piece is connected with the acoustic transducer device 220 is connected.
- the elastic element 2122 and the housing 211 may be in direct contact or spaced apart.
- the size of the interval between the elastic element 2122 and the housing 211 can be adjusted by the designer according to the size of the vibration sensor 200 .
- the space between the elastic element 2122 and the housing 211 can reduce the equivalent stiffness of the elastic element 2122 and increase the elasticity of the elastic element 2122 , thereby improving the vibration process of the vibration unit 212 Among them, the vibration amplitude of the mass element 2121 in a lower frequency range (eg, 20 Hz-6000 Hz) increases the sensitivity of the vibration sensor 200 .
- a lower frequency range eg, 20 Hz-6000 Hz
- the area of the side of the mass element 2121 facing away from the acoustic transducer 220 is smaller than the area of the side of the mass element 2121 close to the acoustic transducer 220 .
- the areas of the multiple cross-sections perpendicular to the vibration direction on the mass element 2121 may be different.
- the mass element 2121 has a stepped structure.
- the areas of multiple cross-sections on the mass element 2121 that are perpendicular to the vibration direction, along a portion of the mass element 2121 away from the acoustic transducer 220 increases gradually.
- the areas of multiple cross-sections perpendicular to the vibration direction on the mass element 2121 may be partially the same, for example, the peripheral side of the mass element 2121 may be a stepped structure.
- the areas of the multiple cross-sections perpendicular to the vibration direction on the mass element 2121 are different, which can increase the peripheral surface area of the mass element 2121, thereby making the elastic element 2122 and the elastic element 2122 different from each other.
- the connection area of the mass element 2121 is increased, the connection strength between the elastic element 2122 and the mass element 2121 is improved, the sealing performance of the first acoustic cavity is strengthened, and the sound pressure of the first acoustic cavity in response to the vibration of the casing is increased.
- the change is more pronounced, increasing the sensitivity of the vibration sensor.
- the peripheral side surface of the mass element 2121 may have at least one step-like structure.
- FIG. 2B is a schematic structural diagram of the mass element 2121 according to some embodiments of the present application. 2A and 2B, the mass element 2121 may include a first mass element 21211 and a second mass element 21212, the second mass element 21212 is close to the acoustic transducer 220, the first mass element 21211 is located at the second mass element 21212 away from the second mass element 21212 On one side of the mass element 21212, the cross-sectional area of the first mass element 21211 perpendicular to the vibration direction of the mass element 2121 is smaller than the cross-sectional area of the second mass element 21212 perpendicular to the vibration direction of the mass element 2121, so that the first mass element 21211 and the second mass element 21211 have a cross-sectional area perpendicular to the vibration direction.
- the overall outer edge of 21212 forms a stepped structure.
- the peripheral side surface of the mass element 2121 may include a side wall a of the first mass element 21211, a region b and a side wall c of the second mass element 21212, and the side wall a, the region b and the side wall c form a step like structure.
- the stepped structure can increase the area of the peripheral side surface of the mass element 2121. Accordingly, the connecting area between the elastic element 2122 and the side wall of the mass element 2121 is larger, which is conducive to the close fit between the mass element 2121 and the elastic element 2122, thereby Better sealing between the elastic element 2122 and the mass element 2121 is beneficial to ensure the sealing of the first acoustic cavity 213 .
- first mass element 21211 and the second mass element 21212 may be connected and fixed by physical means, for example, adhesive bonding (adhesion is achieved by using adhesives such as epoxy glue, silicone sealant, etc.), or One piece.
- adhesive bonding adhesive bonding
- the side of the first mass element 21211 close to the acoustic transducer 220 and the side of the second mass element 21212 away from the acoustic transducer 220 may be physically connected and fixed.
- the side of the first mass element 21211 away from the acoustic transducer 220 is perpendicular to its vibration direction
- the side of the second mass element 2121 close to the acoustic transducer 220 is perpendicular to its vibration direction.
- the closer to the second mass element 2121 the larger the area of the cross section perpendicular to its vibration direction on the first mass element 21211; The larger the area of the cross section.
- the first mass element 21211 may be disposed concentrically with the second mass element 21212 , or may be disposed not concentrically with the second mass element 21212 .
- the shape of the sidewall (ie, the cross section perpendicular to the vibration direction) of the first mass element 21211 and/or the second mass element 21212 may include cylindrical, elliptical cylindrical, trapezoidal, rounded rectangular columns (eg, 2B ), rectangular columns, polygonal columns, irregular columns (eg, columns with multiple stepped faces), etc., or any combination thereof.
- the shapes of the sidewalls of the first mass element 21211 and the second mass element 21212 may be the same. For example, as shown in FIG. 2B , the shapes of the sidewalls of the first mass element 21211 and the second mass element 21212 are both formed as Rounded rectangular column.
- the shapes of the sidewalls of the first mass element 21211 and the second mass element 21212 may be different.
- the shape of the sidewall of the first mass element 21211 is cylindrical
- the shape of the sidewall of the second mass element 21212 is cylindrical. Formed as a rounded rectangular column.
- the material of the first mass element 21211 and the material of the second mass element 21212 may be the same or different.
- the materials of the first mass element 21211 and the second mass element 21212 may include lead, Metals or alloys such as copper, silver, tin, stainless steel, stainless iron, or any combination thereof.
- the material density of the first mass element 21211 and the second mass element 21212 may be greater than 6 g/cm 3 .
- the material density of the first mass element 21211 and the second mass element 21212 may be greater than 7 g/cm 3 .
- the first mass element 21211 is located in the middle region of the second mass element 21212, so that there may be a certain distance d (eg, 10um) between the sidewall of the first mass element 21211 and the sidewall of the second mass element 21212 ⁇ 1000um), that is, there is a certain distance d between the side edge of the first mass element 21211 close to the acoustic transducer 220 and the side edge of the second mass element 21212 away from the acoustic transducer 220 .
- d eg, 10um
- the distance d between the side wall of the first mass element 21211 and the side wall of the second mass element 21212 may be equal everywhere, for example, when the first mass element 21211 and the second mass element 21212 are arranged concentrically, the The shape of the sidewall of the first mass element 21211 and the shape of the sidewall of the second mass element 21212 are both cylindrical structures, and the distance d between the sidewall of the first mass element 21211 and the sidewall of the second mass element 21212 is equal. In some embodiments, the distance d between the sidewall of the first mass element 21211 and the sidewall of the second mass element 21212 may not be equal everywhere.
- the sidewall of the first mass element 21211 has a cylindrical structure
- the The shape of the sidewall of the second mass element 21212 is a rectangular column.
- the distance between the edge on the sidewall of the second mass element 21212 and the sidewall of the first mass element 21211 is the same as the distance between the edge on the sidewall of the second mass element 21212 and the sidewall of the first mass element 21211.
- the spacing of the side walls of a mass element 21211 is not equal.
- the specific distance d may be 10um ⁇ 500um. More preferably, the specific distance d may be 20um ⁇ 450um. More preferably, the specific distance d may be 30um ⁇ 400um. More preferably, the specific distance d may be 40um ⁇ 350um.
- the specific distance d may be 50um ⁇ 300um. More preferably, the specific distance d may be 60um ⁇ 250um. More preferably, the specific distance d may be 70um ⁇ 200um. More preferably, the specific distance d may be 80um ⁇ 150um. More preferably, the specific distance d may be 90um ⁇ 100um.
- the thickness of the first mass element 21211 along its vibration direction may be greater than the thickness of the second mass element 21212 along its vibration direction.
- the thickness of the first mass element 21211 along its vibration direction may be 50um-1000um, and the thickness of the second mass element 21212 along its vibration direction may be 10um-150um.
- the thickness of the first mass element 21211 along its vibration direction may be 60um-900um, and the thickness of the second mass element 21212 along its vibration direction may be 20um-130um. More preferably, the thickness of the first mass element 21211 along its vibration direction may be 70um-800um, and the thickness of the second mass element 21212 along its vibration direction may be 30um-120um. More preferably, the thickness of the first mass element 21211 along its vibration direction may be 80um-700um, and the thickness of the second mass element 21212 along its vibration direction may be 40um-110um. More preferably, the thickness of the first mass element 21211 along its vibration direction may be 90um-600um, and the thickness of the second mass element 21212 along its vibration direction may be 50um-100um.
- the thickness of the first mass element 21211 along its vibration direction may be 100um-500um, and the thickness of the second mass element 21212 along its vibration direction may be 60um-90um. More preferably, the thickness of the first mass element 21211 along its vibration direction may be 200um-400um, and the thickness of the second mass element 21212 along its vibration direction may be 60um-90um. More preferably, the thickness of the first mass element 21211 along its vibration direction may be 300um-350um, and the thickness of the second mass element 21212 along its vibration direction may be 70um-80um.
- the mass element 2122 is not limited to the structure including the first mass element 21211 and the second mass element 21212 shown in FIG. 2A and FIG. 2B , and may also include a third mass element, a fourth mass element or more mass elements .
- a stepped structure may be formed between the sidewalls of every two mass elements.
- the elastic element 2122 may include a first elastic part 21221 and a second elastic part 21222, the first elastic part 21221 is connected to the side wall of the first mass element 21211, and the second elastic part 21222 is connected to the second elastic part 21222.
- the side wall of the mass element 21212, the first elastic part 21221 and the second elastic part 21222 may be connected by physical means, for example, gluing, welding.
- the first elastic portion 21221 and the second elastic portion 21222 may be integrally formed.
- the first elastic portion 21221 is in close contact with the sidewall of the first mass element 21211
- the second elastic portion 21222 is in close contact with the sidewall of the second mass element 21212
- the first elastic portion 21221 is in close contact with the second mass element 21212.
- the elastic part 21222 is connected sealingly.
- both ends of the first elastic portion 21221 may be connected to the sidewall of the first mass element 21211 and the second elastic portion 21222, respectively.
- both ends of the first elastic portion 21221 may be sealed with the sidewall of the first mass element 21211 and the second elastic portion 21222 in sealing connection, respectively.
- the first elastic part 21221 may include a first side surface 21221a and a second side surface 21221b, the first side surface 21221a is connected with the side wall of the first mass element 21211, and the second side surface 21221b and the second mass element 21212 are exposed to the second acoustic cavity 214 surface connection.
- the second side surface 21221b of the first elastic part 21221 can be connected with the stepped surface of the second mass element 21212 , and the stepped surface of the second mass element 21212 has a supporting effect on the first elastic part 21221 .
- the second side surface 21221b of the first elastic part 21221 may be connected with the second elastic part 21222 .
- the side wall of the second mass element 21212 is connected with the second elastic portion 21222 .
- the second elastic portion 21222 extends toward the acoustic transducer 220 and connects with the acoustic transducer 220 (eg, the substrate 222). In some embodiments, both ends of the second elastic part 21222 may be connected to the side wall of the second mass element 21212 and the acoustic transducer 220 respectively, and the second elastic part 21222 connected to the side wall of the second mass element 21212 One end can also be connected with the first elastic part 21221 . In some embodiments, the shape of the first side surface 21221a of the first elastic portion 21221 is adapted to the shape of the sidewall of the first mass element 21211.
- the shape of the side surface of the second elastic portion 21222 close to the side wall of the second mass element 21212 is adapted to the shape of the side wall of the second mass element 21212, for example, the cross section of the second mass element 21212 perpendicular to its vibration direction
- the shape can be a triangle, a quadrangle, a circle, an ellipse, a fan shape, a rounded rectangle, or other regular or irregular shapes.
- the side wall of the second elastic part 21222 close to the second mass element 21212
- the cross-sectional shape perpendicular to the vibration direction of the side of the second mass element 21212 is the same as the cross-sectional shape perpendicular to the vibration direction of the side wall of the second mass element 21212 .
- This specification does not limit the lateral shape of the first elastic portion 21221 away from the side wall of the first mass element 21211 and the lateral shape of the second elastic portion 21222 away from the side wall of the second mass element 21212, for example, the lateral shape may include a cylinder, an ellipse Cylindrical, conical, rounded rectangular, rectangular, polygonal, irregular, etc. or any combination thereof.
- the materials of the first elastic part 21221 and the second elastic part 21222 may be the same or different.
- the materials of the first elastic part 21221 or the second elastic part 21222 may include silicone rubber, silicone gel , silicone sealant, etc. or any combination thereof.
- the mass element 2121 may further include a first hole portion 21213 , and the first hole portion 21213 communicates with the first acoustic cavity 213 and the second acoustic cavity 214 .
- the first hole portion 21213 may penetrate the mass element 2121, and the first hole portion 21213 may allow the gas in the first acoustic cavity 213 and the second acoustic cavity 214 to circulate, so as to balance the manufacturing process of the vibration sensor 200 (eg, reflow).
- the first hole portion 21213 may be a single hole structure.
- the diameter of the single hole may be 1-50um.
- the diameter of the single hole may be 2-45um. More preferably, the diameter of the single hole may be 3-40um. More preferably, the diameter of the single hole may be 4-35um. More preferably, the diameter of the single hole may be 5-30um. More preferably, the diameter of the single hole may be 5-25um. More preferably, the diameter of the single hole may be 5-20um. More preferably, the diameter of the single hole may be 6-15um. More preferably, the diameter of the single hole may be 7-10um.
- the first hole portion 21213 may be an array composed of a certain number of micro holes.
- the number of microwells may be 2-10.
- the diameter of each micropore may be 0.1-25um.
- the diameter of each micropore may be 0.5-20um. More preferably, the diameter of each micropore may be 0.5-25um. More preferably, the diameter of each micropore may be 0.5-20um. More preferably, the diameter of each micropore may be 0.5-15um. More preferably, the diameter of each micropore may be 0.5-10um. More preferably, the diameter of each micropore may be 0.5-5um. More preferably, the diameter of each micropore may be 0.5-4um. More preferably, the diameter of each micropore may be 0.5-3um. More preferably, the diameter of each micropore may be 0.5-2um. More preferably, the diameter of each micropore may be 0.5-1 um.
- the mass element 2121 may not be provided with the first hole portion 21213 .
- the connection strength between the mass element 2121 and the elastic element 2122 can be improved (for example, by enhancing the strength of the glue between the mass element 2121 and the elastic element 2122 adhesive strength) to avoid damage to the components of the vibration sensor 200 due to changes in air pressure inside the first acoustic cavity 213 .
- the acoustic transducer 220 may include a substrate 222 .
- Substrate 222 may be used to secure and/or support vibration receiver 210 .
- the substrate 222 may be disposed on the acoustic transducer 220, and the housing 211 and the substrate 222 are physically connected to form an acoustic cavity.
- one end of the elastic element 2122 extending toward the acoustic transducer 220 may be connected to the base plate 222 , and the base plate 222 may be used to fix and support the vibration unit 212 .
- the arrangement of the base plate 222 allows the vibration receiver 210 to be processed, produced and sold as a stand-alone component.
- the vibration receiver 210 with the substrate 222 can be directly physically connected (eg, glued) with the acoustic transducer 220 to obtain the vibration sensor 200 , which simplifies the production process of the vibration sensor 200 and improves the process flexibility of producing the vibration sensor 200 .
- the thickness of the substrate 222 may be 10um ⁇ 300um.
- the thickness of the substrate 222 may be 20um ⁇ 280um. More preferably, the thickness of the substrate 222 may be 30um ⁇ 270um. More preferably, the thickness of the substrate 222 may be 40um ⁇ 250um. More preferably, the thickness of the substrate 222 may be 80um ⁇ 90um.
- the material of the substrate 222 may include metals (eg, iron, copper, stainless steel, etc.), alloys, non-metals (plastic, rubber, resin), etc., or any combination thereof.
- the sound pickup hole 2221 may be located on the base plate 222, and the sound pickup hole 2221 penetrates through the base plate 222 along the vibration direction.
- the sound pressure change in the first acoustic cavity 213 may act on the acoustic transducer 220 through the sound pickup hole 2221 to generate an electrical signal.
- the vibration sensor 200 may include at least one first hole portion 21213, and the first hole portion 21213 may penetrate the elastic element 2122 settings. These corrections and changes are still within the scope of this specification.
- FIG. 3 is a schematic structural diagram of a vibration unit 312 according to some embodiments of the present application. As shown in FIG. 3 , the area of the side of the mass element 3121 facing away from the acoustic transducer is smaller than the area of the side of the mass element 3121 close to the acoustic transducer.
- the side connecting the edge of the mass element 312 away from the acoustic transducer and the edge of the mass element 312 close to the acoustic transducer is an inclined surface, and the elastic element 3122 and the mass element 312 are away from the acoustic transducer.
- the inclined surface connection between the side of the mass element 312 and the side of the mass element 312 close to the acoustic transducer ensures that the elastic element 3122 and the mass element 3121 have a larger connection area, thereby improving the distance between the elastic element 3122 and the mass element 3121. connection strength.
- the side of the mass element 3121 facing away from the acoustic transducer and the side of the mass element 3121 close to the acoustic transducer may be a smooth inclined surface.
- the side of the mass element 3121 facing away from the acoustic transducer and the side of the mass element 3121 close to the acoustic transducer may be an inclined surface with multiple concavities and convexities, for example, a surface of an inclined surface Can be wavy or jagged in structure.
- the line between the edge of the mass element 3121 on the side facing away from the acoustic transducer and the edge of the mass element 3121 on the side close to the acoustic transducer is the same as the
- the vibration direction of the mass element 3121 forms an included angle, and the included angle c can be 10°-80°.
- the included angle c may be 20°-70°. More preferably, the included angle c may be 30°-60°. More preferably, the included angle c may be 40°-50°. More preferably, the included angle c may be 42°-48°. More preferably, the included angle c may be 44°-46°.
- the elastic element 3122 surrounds the side connected to the interface between the side of the mass element 3121 facing away from the acoustic transducer and the side of the mass element 3121 closer to the acoustic transducer.
- one end of the elastic element 3122 is connected with the inclined surface of the mass element 3121, and the other end of the elastic element 3122 is connected with the acoustic transducer.
- a first acoustic cavity 313 is formed between one side of the mass element 3121 close to the acoustic transducer, the elastic element 3122 and the acoustic transducer.
- the shape of the end surface of the elastic element 3122 connected to the inclined surface of the mass element 3121 is adapted to the shape of the inclined surface of the mass element 3121, for example, the edge of the connecting side surface is a wavy or zigzag curve, and the elastic element 3122 The outer edge of the end face connected to the joined side face is also a wavy or zigzag curve.
- This specification does not limit the shape of the side of the elastic element 3122 exposed to the second acoustic cavity.
- the edge of the side of the elastic element 3122 exposed to the second acoustic cavity may be is an irregular curve with multiple bumps.
- the mass element 3121 may further include a first hole portion 31213, and the first hole portion 31213 penetrates the mass element 3121 to allow the first acoustic cavity 313 to communicate with the gas in the second acoustic cavity.
- the first hole portion 31213 may be a single hole structure.
- the first hole portion 31213 may be an array composed of a certain number of micro holes. For example only, the number of microwells may be 2-10.
- the substrate 322 may be used to secure and/or support the vibration unit 312 .
- one end of the elastic element 3122 connected to the acoustic transducer may be connected to the base plate 322 , so that the base plate 322 can be used to fix and support the vibration unit 312 .
- the substrate 322 may include a pickup hole 2221 for acoustically communicating the first acoustic cavity 313 with the acoustic transducer.
- the vibration sensor 200 may include at least two elastic elements, the elastic elements are connected with the elastic elements, and the vibration element 312 is close to the mass element.
- the elastic element is connected with the mass element, and the mass element close to the acoustic transducer is connected with the acoustic transducer.
- FIG. 4 is a schematic structural diagram of a vibration unit 412 according to some embodiments of the present application.
- the two ends of the elastic element 4122 are respectively connected with the side wall of the mass element 4121 and the acoustic transducer by physical means, such as gluing.
- One side of the mass element 4121 close to the acoustic transducer, the elastic element 4122 and the A first acoustic cavity 413 is formed between the acoustic transducers.
- the mass element 4121 may be provided with a second hole portion 41214, and the first hole portion 41213 communicates with the second hole portion 41214.
- the mass element 4121 may include one or more second aperture portions 41214 . The setting of the second hole portion 41214 makes the local structure of the mass element 4121 thinner, so that the first hole portion 41213 can be opened at the thinned local structure, and at the same time, it is convenient to control the processing strength of the first hole portion 41213.
- the 41213 is processed without damage to other components of the vibration sensor (eg, substrate 422, acoustic transducer).
- the second hole portion 41214 is located on the side of the mass element 4121 along its vibration direction.
- the second hole portion 41214 may be located at a side portion of the mass element 4121 close to or away from the substrate 422 .
- the first hole portion 41213 and the second hole portion 41214 are disposed along the vibration direction of the mass element 4121 , wherein the first hole portion 41213 and the second hole portion 41214 penetrate the mass element 4121 .
- the second hole portion 41214 may be arranged concentrically with the mass element 4121, or may not be arranged concentrically with the mass element 4121.
- the first hole portion 41213 may be arranged concentrically with the second hole portion 41214 or may not be arranged concentrically with the second hole portion 41214 .
- the second hole portion 41214 and/or the first hole portion 41213 may be square holes, polygonal holes, round holes, irregular holes, etc. or any combination thereof.
- the hole shape of the hole portion 41213 is not limited. In some embodiments, the hole shapes of the first hole portion 41213 and the second hole portion 41214 may be the same or different. In some embodiments, both the first hole portion 41213 and the second hole portion 41214 may be a single hole structure. In some embodiments, the second hole portion 41214 may be a single hole structure, and the first hole portion 31213 may be an array composed of a certain number of micro holes.
- the size of the second hole portion 41214 is larger than that of the first hole portion 41213 , so that the first hole portion 41213 is processed in the second hole portion 41214 .
- the cross-sectional area of the second hole portion 41214 perpendicular to the vibration direction of the mass element 4121 is larger than the cross-sectional area of the first hole portion 41213 perpendicular to the vibration direction of the mass element 4121 .
- the diameter of the second hole portion 41214 may be 100um-1600um, and the diameter of the first hole portion 41213 may be 1um-50um.
- the diameter of the second hole portion 4121 may be 110um ⁇ 1400um, and the diameter of the first hole portion 41213 may be 2um ⁇ 45um.
- the diameter of the second hole portion 41214 may be 120um ⁇ 1200um, and the diameter of the first hole portion 41213 may be 3um ⁇ 40um.
- the diameter of the second hole portion 41214 may be 130um ⁇ 1000um, and the diameter of the first hole portion 41213 may be 4um ⁇ 35um.
- the diameter of the second hole portion 41214 may be 140um ⁇ 800um, and the diameter of the first hole portion 41213 may be 5um ⁇ 30um.
- the diameter of the second hole portion 41214 may be 160um ⁇ 600um, and the diameter of the first hole portion 41213 may be 5um ⁇ 25um.
- the diameter of the second hole portion 41214 may be 180um ⁇ 500um, and the diameter of the first hole portion 41213 may be 5um ⁇ 20um.
- the diameter of the second hole portion 41214 may be 200um ⁇ 400um, and the diameter of the first hole portion 41213 may be 10um ⁇ 15um.
- FIG. 5 is a schematic structural diagram of the mass element 4121 shown in FIG. 4 , the second hole 41214 is provided on the side of the mass element 4121 close to the acoustic transducer, and the first hole 41213 is provided on the mass element 4121 away from the acoustic transducer On one side, the second hole portion 41214 and the first hole portion 41213 are provided through the mass element 4121 .
- FIG. 6A is a schematic structural diagram of a vibration unit 412 according to some embodiments of the present application.
- the second hole 41214 may also be located on the side of the mass element 4121 away from the acoustic transducer, the first hole 41213 is provided on the side of the mass element 4121 close to the acoustic transducer, and the second hole 41214 , the first hole portion 41213 penetrates the mass element 4121 .
- the depth of the first hole portion 41213 along the vibration direction of the mass element 4121 may be greater than, less than, or equal to the depth of the second hole portion 41214 along the vibration direction of the mass element 4121 .
- FIG. 6B A schematic diagram of the structure of the vibration unit 412 shown in the embodiment.
- the second hole 41214 is located on the side of the mass element 4121 away from the acoustic transducer
- the first hole 41213 is located on the side of the mass element 4121 close to the acoustic transducer
- the second hole 41214 the first The hole portion 41213 penetrates through the mass element 4121
- the depth of the first hole portion 41213 along the vibration direction of the mass element 4121 is greater than the depth of the second hole portion 41214 along the vibration direction of the mass element 4121 .
- FIG. 6C is a schematic structural diagram of the vibration unit 412 according to some embodiments of the present application. As shown in FIG.
- second holes 41214 are provided on both sides of the mass element 4121 close to and away from the acoustic transducer, and the second holes 41214 on both sides of the mass element 4121 pass through the first holes Section 41213 is connected.
- the vibration unit 412 may include a mass element 4121 stacked in multiple layers, the materials of the multiple layers of the mass element 4121 may be the same or not identical or completely different, and the first hole portion 41213 is provided through part of the mass element 4121, The second hole portion 41214 is disposed through part of the mass element 4121, and the first hole portion 41213 communicates with the second hole portion 41214.
- the vibration unit 412 may include two layers of superposed mass elements 4121 , the materials of the two layers of the mass elements 4121 are different, the first hole 41213 is provided through the mass element 4121 facing away from the acoustic transducer, and the second hole The portion 41214 is provided through the adjacent mass element 4121, and the first hole portion 41213 communicates with the second hole portion 41214.
- the vibration unit 412 and its components is only for illustration and description, and does not limit the scope of application of this specification.
- various modifications and changes can be made to the vibration unit 412 under the guidance of this specification. These corrections and changes are still within the scope of this specification.
- the second hole portion 41214 shown in FIGS. 4-6D can also be applied to the vibration sensor 200 shown in FIG. 2A .
- the mass element 4121 in FIGS. 4 to 6D is only used for exemplary illustration, and its specific shape and structure can be referred to the contents of FIGS. 2A and 2B , which will not be further described herein.
- the vibration sensor may further include a limiter, the limiter is located between the elastic element and the housing to limit the flow trajectory of the elastic element in a high temperature state, so as to control the size of the elastic element.
- FIG. 7 is a schematic structural diagram of a vibration sensor 500 according to some embodiments of the present application. As shown in FIG.
- the vibration sensor 500 includes a vibration receiver 510 , an acoustic transducer 520 and a limiting member 530 .
- the vibration receiver 510 may include a housing 511 and a vibration unit 512 .
- the housing 511 may be connected with the acoustic transducer 520 to enclose a package structure having an acoustic cavity.
- the vibration unit 512 may be located within the acoustic cavity.
- the vibration unit 512 may divide the acoustic cavity into a first acoustic cavity 513 and a second acoustic cavity 514 .
- the vibration unit 512 may include a mass element 5121 and an elastic element 5122 .
- the elastic element 5122 may surround the side wall connected to the mass element 5121 and extend toward the acoustic transducer 520 and directly connect to the substrate 522 .
- the structure and components of the vibration sensor 500 are the same as or similar to those of the vibration sensor 200 described in FIG. 2A . For details, refer to the description in FIG. 2A , which will not be repeated here.
- the stopper 530 is located between the elastic element 5122 and the housing 511 , the stopper 530 acts as a restriction on the outer wall of the elastic element 5122 , and can control the flow of the elastic element 5122 during the preparation of the vibration receiver 510 , to better control the size and shape of the elastic element 5122.
- the limiter 530 may be disposed around the elastic element 5122 , the elastic element 5122 is physically connected to the mass element 5121 on the side close to the mass element 5121 , and the elastic element 5122 is connected to the limiter 53 on the side close to the limiter 53 . physical connection.
- the stopper 530 may be physically connected to the substrate 522 .
- the limiting member 530 may not be in contact with the housing 511 , or may be in contact with the housing 511 .
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 100um ⁇ 1000um.
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 110um ⁇ 900um.
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 120um ⁇ 800um.
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 130um ⁇ 700um.
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 140um ⁇ 600um.
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 150um ⁇ 500um.
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 160um ⁇ 400um.
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 170um ⁇ 300um.
- the height of the limiting member 530 along the vibration direction of the mass element 5121 may be 180um ⁇ 200um. More preferably, the height of the limiting member 530 along the vibration direction of the mass element 5121 is equal to the height of the mass element 5121 .
- This specification does not limit the material and/or density of the limiting member 530.
- the limiting member 530 may be made of a non-magnetic conductive metal material.
- At least one third hole 5111 may be provided on the casing 511 , and the third hole 5111 penetrates through the casing 511 .
- the structure of the third hole portion 5111 is the same as or similar to the structure of the first hole portion 21213 .
- the third hole portion 5111 can allow the second acoustic cavity 514 to communicate with the outside air, so as to balance the air inside the second acoustic cavity 514 caused by temperature changes during the preparation process of the vibration sensor 500 (eg, during reflow soldering).
- the change in air pressure reduces or prevents damage to components of the vibration sensor 500 caused by the change in air pressure, such as cracking, deformation, and the like.
- the third hole portion 5111 may serve to reduce the damping generated by the gas inside the second acoustic cavity 514 .
- air-conducted sound in the environment may affect the performance of vibration sensor 500 in use.
- a sealing material may be used to seal the third hole 5111 on the housing 511 .
- the sealing material may include epoxy glue, silicone sealant, or the like, or any combination thereof.
- the housing 511 may not be provided with the third hole portion 5111 .
- the above description of the vibration sensor 500 and its components in FIG. 7 is only for illustration and description, and does not limit the scope of application of this specification.
- various modifications and changes can be made to the vibration sensor 500 under the guidance of this specification.
- the housing 511 and the acoustic transducer 520 may be in contact (eg, physically connected) or indirectly connected. These corrections and changes are still within the scope of this specification.
- the limiting member 530 shown in FIG. 7 can also be applied to the vibration sensor shown in FIGS. 2A-6D .
- the mass element 5121 in FIG. 7 is only used for exemplary illustration, and its specific shape and structure can refer to the contents of FIGS. 2A-6D , which will not be further described herein.
- FIG. 8 is a schematic structural diagram of a vibration sensor 600 according to some embodiments of the present application.
- the vibration sensor 600 includes a vibration receiver 610 and an acoustic transducer 620 .
- the vibration receiver 610 may include a housing 611 and a vibration unit 612 .
- the housing 611 may be connected with the acoustic transducer 620 to enclose a package structure having an acoustic cavity, the vibration unit 612 may be located in the acoustic cavity, and the vibration unit 612 may divide the acoustic cavity into a first acoustic cavity 613 and a second acoustic cavity.
- Two acoustic cavities 614 Two acoustic cavities 614 .
- the vibration unit 612 may include a mass element 6121 and an elastic element 6122 , and the mass element 6121 is connected with the housing 611 through the elastic element 6122 .
- the structure and components of the vibration sensor 600 are the same as or similar to those of the vibration sensor 200 described in FIG. 2A . For details, refer to the description in FIG. 2A , which will not be repeated here.
- the elastic element 6122 is sleeved on the outer side of the mass element 6121 , wherein the inner side of the elastic element 6122 is physically connected with the mass element 6121 , and the outer side of the elastic element 6122 is physically connected with the housing 611 .
- the elastic element 6122 and the substrate 622 have a certain distance in the vibration direction of the mass element 6121, wherein the elastic element 6122, the mass element 6121, the housing 611 and the substrate 622 form the first acoustic cavity 613, and the elastic The element 6122 , the mass element 6121 and the housing 611 form a second acoustic cavity 614 .
- the height of the mass element 6121 can be controlled by a jig (not shown in FIG. 8 ). Lift the mass element 6121 with its own height, and then connect the mass element 6121 to the housing 611 through the elastic element 6122 to realize the height control of the mass element 6121, so that the first acoustic cavity 613 and the first acoustic cavity 613 and the second acoustic cavity can be controlled more stably.
- the height of the two acoustic cavity 614 .
- the thickness of the elastic element 6122 along the vibration direction of the mass element 6121 is equal to the thickness of the mass element 6121 . In some embodiments, the thickness of the elastic element 6122 along the vibration direction of the mass element 6121 is smaller or larger than the thickness of the mass element 6121 .
- FIG. 9 is a schematic structural diagram of a vibration transceiver 610 according to some embodiments of the present application.
- the thickness of the elastic element 6122 along the vibration direction of the mass element 6121 is greater than the thickness of the mass element 6121 , wherein the two sides of the elastic element 6122 along the vibration direction of the mass element 6121 may be relative to the mass element Both sides of the 6121 are protruded, so that the connection area between the elastic element 6122 and the mass element 6121 can be increased, thereby increasing the connection strength between the two.
- the mass element 6121 may be provided with a hole portion 630 .
- the hole portion 630 may penetrate the mass element 6121 to communicate the first acoustic cavity 613 and the second acoustic cavity 614, so as to balance the first acoustic cavity 613 caused by the temperature change during the preparation process of the vibration sensor 600 (eg, during the reflow process).
- Changes in air pressure inside the acoustic cavity 613 and the second acoustic cavity 614 reduce or prevent damage to components of the vibration sensor 200 caused by the changes in air pressure, such as cracking, deformation, and the like.
- the casing 611 may be provided with a hole 630, and the hole 630 may penetrate through the casing 611 to communicate with the second acoustic cavity 614 and the outside world.
- the hole 630 may be used to reduce Damping due to the gas inside the second acoustic cavity 614 .
- the hole portion 630 reference may be made to the related descriptions about the first hole portion, the second hole portion, and the third hole portion elsewhere in the embodiments of this specification, such as FIG. 2A and related contents.
- aspects of this application may be illustrated and described in several patentable categories or situations, including any new and useful process, machine, product, or combination of matter, or combinations of them. of any new and useful improvements. Accordingly, various aspects of the present application may be performed entirely by hardware, entirely by software (including firmware, resident software, microcode, etc.), or by a combination of hardware and software.
- the above hardware or software may be referred to as a "data block”, “module”, “engine”, “unit”, “component” or “system”.
- aspects of the present application may be embodied as a computer product comprising computer readable program code embodied in one or more computer readable media.
- a computer storage medium may contain a propagated data signal with the computer program code embodied therein, for example, on baseband or as part of a carrier wave.
- the propagating signal may take a variety of manifestations, including electromagnetic, optical, etc., or a suitable combination.
- Computer storage media can be any computer-readable media other than computer-readable storage media that can communicate, propagate, or transmit a program for use by coupling to an instruction execution system, apparatus, or device.
- Program code on a computer storage medium may be transmitted over any suitable medium, including radio, cable, fiber optic cable, RF, or the like, or a combination of any of the foregoing.
- the computer program coding required for the operation of the various parts of this application may be written in any one or more programming languages, including object-oriented programming languages such as Java, Scala, Smalltalk, Eiffel, JADE, Emerald, C++, C#, VB.NET, Python Etc., conventional procedural programming languages such as C language, Visual Basic, Fortran 2003, Perl, COBOL 2002, PHP, ABAP, dynamic programming languages such as Python, Ruby and Groovy, or other programming languages.
- the program code may run entirely on the user's computer, or as a stand-alone software package on the user's computer, or partly on the user's computer and partly on a remote computer, or entirely on the remote computer or server.
- the remote computer can be connected to the user's computer through any network, such as a local area network (LAN) or wide area network (WAN), or to an external computer (eg, through the Internet), or in a cloud computing environment, or as a service Use eg software as a service (SaaS).
- LAN local area network
- WAN wide area network
- SaaS software as a service
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Abstract
Description
Claims (23)
- 一种振动传感器,包括:振动接收器,包括壳体和振动单元,所述壳体形成声学腔体,所述振动单元位于所述声学腔体中,并将所述声学腔体分隔为第一声学腔体和第二声学腔体;以及声学换能器,与所述第一声学腔体声学连通,其中:所述壳体被配置为基于外部振动信号产生振动,所述振动单元响应于所述壳体的振动而改变所述第一声学腔体内的声压,使得所述声学换能器产生电信号;所述振动单元包括质量元件和弹性元件,所述质量元件背离所述声学换能器一侧的面积小于所述质量元件靠近所述声学换能器的一侧的面积,所述弹性元件环绕连接于所述质量元件的侧壁。
- 根据权利要求1所述的振动传感器,其中,所述质量元件包括第一质量元件和第二质量元件,所述第二质量元件靠近所述声学换能器,所述第一质量元件位于所述第二质量元件背离所述声学换能器的一侧,所述第一质量元件中垂直所述质量元件振动方向的截面积小于所述第二质量元件中垂直所述质量元件振动方向的截面积。
- 根据权利要求2所述的振动传感器,其中,所述第一质量元件位于所述第二质量元件的中部区域,且所述第一质量元件的侧壁与所述第二质量元件的侧壁之间具有特定间距。
- 根据权利要求3所述的振动传感器,其中,所述特定间距的范围为10um~500um。
- 根据权利要求3所述的振动传感器,其中,所述弹性元件包括第一弹性部和第二弹性部,所述第一弹性部的两端分别与所述第一质量元件的侧壁和所述第二弹性部连接,所述第二弹性部向所述声学换能器延伸并与所述声学换能器连接。
- 根据权利要求5所述的振动传感器,其中,所述第一弹性部包括第一侧面和第二侧面,所述第一侧面与所述第一质量元件的侧壁连接,所述第二侧面与所述第二质量元件上暴露在所述第二声学腔体的表面连接。
- 根据权利要求6所述的振动传感器,其中,所述第二质量元件的侧壁与所述第二弹性部连接。
- 根据权利要求5所述的振动传感器,其中,所述声学换能器包括基板,所述第二弹性元件向所述基板延伸并与所述基板连接,所述基板、所述第二质量元件和所述第二弹性元件形成所述第一声学腔体。
- 根据权利要求2所述的振动传感器,其中,沿所述质量元件的振动方向,所述第一质量元件的厚度为50um~1000um,所述第二质量元件的厚度为10um~150um。
- 根据权利要求9所述的振动传感器,其中,沿所述质量元件的振动方向,所述第一质量元件的厚度大于所述第二质量元件的厚度。
- 根据权利要求1所述的振动传感器,其中,在所述质量元件沿其振动方向获取的截面中,所述质量元件背离所述声学换能器一侧的边缘与所述质量元件靠近所述声学换能器的一侧的边缘之间的连线与所述质量元件振动方向形成夹角,所述夹角的范围为10°-80°。
- 根据权利要求1所述的振动传感器,其中,所述质量元件包括第一孔部,所述第一孔部连通所述第一声学腔体和所述第二声学腔体。
- 根据权利要求12所述的振动传感器,其中,所述第一孔部的半径为1um~50um。
- 根据权利要求1所述的振动传感器,所述壳体上包括第三孔部,所述第二声学腔体通过所述第三孔部与外部连通。
- 一种振动传感器,包括:振动接收器,包括壳体和振动单元,所述壳体形成声学腔体,所述振动单元位于所述声学腔体中,并将所述声学腔体分隔为第一声学腔体和第二声学腔体;以及声学换能器,与所述第一声学腔体声学连通,其中:所述壳体被配置为基于外部振动信号产生振动,所述振动单元响应于所述壳体的振动而改变所述第一声学腔体内的声压,使得所述声学换能器产生电信号;所述振动单元包括质量元件和弹性元件,所述弹性元件环绕连接于所述质量元件的侧壁,所述弹性件与所述壳体之间具有限位件。
- 根据权利要求15所述的振动传感器,其中,沿所述质量元件的振动方向,所述限位件的高度为100um~1000um。
- 一种振动传感器,包括:振动接收器,包括壳体和振动单元,所述壳体形成声学腔体,所述振动单元位于所述声学腔体中,并将所述声学腔体分隔为第一声学腔体和第二声学腔体;以及声学换能器,与所述第一声学腔体声学连通,其中:所述壳体被配置为基于外部振动信号产生振动,所述振动单元响应于所述壳体的振动而改变所述第一声学腔体内的声压,使得所述声学换能器产生电信号;所述振动单元包括质量元件和弹性元件,所述弹性元件环绕连接于所述质量元件的侧壁,所述质量元件包括凹槽,所述凹槽位于所述质量元件沿其振动方向的侧部。
- 根据权利要求17所述的振动传感器,其中,所述质量元件包括第一孔部,所述第一孔部连通所述第一声学腔体和所述第二声学腔体,所述第一孔部位于所述凹槽处。
- 根据权利要求18所述的振动传感器,其中,所述第一孔部的半径为1um~50um。
- 根据权利要求19所述的振动传感器,其中,所述凹槽的尺寸大于所述第一孔部的尺寸。
- 一种振动传感器,包括振动接收器,包括壳体和振动单元,所述壳体形成声学腔体,所述振动单元位于所述声学腔体中,并将所述声学腔体分隔为第一声学腔体和第二声学腔体;以及声学换能器,与所述第一声学腔体声学连通,其中:所述壳体被配置为基于外部振动信号产生振动,所述振动单元响应于所述壳体的振动而改变所述第一声学腔体内的声压,使得所述声学换能器产生电信号,所述振动单元包括质量元件和弹性元件,所述弹性元件环绕连接于所述质量元件的侧壁,并延伸到所述壳体。
- 根据权利要求21所述的振动传感器,其中,沿所述质量元件的振动方向,所述弹性元件的厚度大于所述质量元件的厚度。
- 根据权利要求21所述的振动传感器,其中,所述质量元件或所述壳体上开设有孔部,所述孔部的半径为1um~50um。
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CN202180066637.9A CN116584108A (zh) | 2020-12-28 | 2021-11-05 | 一种振动传感器 |
BR112023004959A BR112023004959A2 (pt) | 2020-12-28 | 2021-11-05 | Sensores de vibração |
EP21913481.4A EP4187216A4 (en) | 2020-12-28 | 2021-11-05 | VIBRATION SENSOR |
JP2023521923A JP2023544877A (ja) | 2020-12-28 | 2021-11-05 | 振動センサ |
EP21914041.5A EP4184134A4 (en) | 2020-12-28 | 2021-12-21 | VIBRATION SENSOR |
BR112023003742A BR112023003742A2 (pt) | 2020-12-28 | 2021-12-21 | Sensor de vibração |
CN202180057471.4A CN116171582A (zh) | 2020-12-28 | 2021-12-21 | 一种振动传感器 |
PCT/CN2021/140090 WO2022143302A1 (zh) | 2020-12-28 | 2021-12-21 | 一种振动传感器 |
JP2023518843A JP2023543765A (ja) | 2020-12-28 | 2021-12-21 | 振動センサ |
CN202111573072.1A CN114697824B (zh) | 2020-12-28 | 2021-12-21 | 一种振动传感器 |
KR1020237011152A KR20230058505A (ko) | 2020-12-28 | 2021-12-21 | 진동센서 |
US18/168,585 US20230199370A1 (en) | 2020-12-28 | 2023-02-14 | Vibration sensor |
US18/173,043 US20230199360A1 (en) | 2020-12-28 | 2023-02-22 | Vibration sensors |
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KR20230074238A (ko) | 2023-05-26 |
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