WO2018143422A1 - 液体供給システム - Google Patents
液体供給システム Download PDFInfo
- Publication number
- WO2018143422A1 WO2018143422A1 PCT/JP2018/003638 JP2018003638W WO2018143422A1 WO 2018143422 A1 WO2018143422 A1 WO 2018143422A1 JP 2018003638 W JP2018003638 W JP 2018003638W WO 2018143422 A1 WO2018143422 A1 WO 2018143422A1
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- WIPO (PCT)
- Prior art keywords
- liquid
- pump chamber
- supply system
- liquid supply
- bellows
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B3/00—Machines or pumps with pistons coacting within one cylinder, e.g. multi-stage
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
- F04B2015/081—Liquefied gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
- F04B2015/081—Liquefied gases
- F04B2015/082—Helium
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
- F04B2015/081—Liquefied gases
- F04B2015/0824—Nitrogen
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
Definitions
- the present invention relates to a liquid supply system for supplying a liquid.
- Patent Document 1 As a liquid supply system that circulates liquid through a circulation channel, a system using a bellows pump having a pump chamber formed by a bellows is known (see Patent Document 1).
- This system has two pump chambers arranged vertically in the vertical direction, and the bellows constituting each pump chamber is fixed to a shaft driven in the vertical direction by an actuator, and is moved in the vertical direction in conjunction with the movement of the shaft. Extends and contracts.
- the entire pump device is housed in a vacuum vessel for heat insulation, and an actuator is installed above the vacuum vessel. It is desirable that the suction pipe for supplying the liquid to the pump apparatus from the outside and the delivery pipe for discharging the liquid from the pump apparatus to the outside are connected to the pump apparatus at a position as far as possible from the outside air for heat insulation. Therefore, the suction pipe and the delivery pipe enter the vacuum container from above the vacuum container, extend to a position lower than the pump apparatus, and are connected to the opening at the bottom of the pump apparatus in a U shape. By making piping connected with a pump apparatus into such a shape, the high heat insulation performance with respect to the heat from the outside is implement
- the bellows pump having such a configuration is preferably used in an application for supplying an ultra-low temperature liquid such as liquid nitrogen or liquid helium to a cooled apparatus such as a superconducting device.
- a process of cooling the components of the pump device from the room temperature to the temperature of the cryogenic liquid is required. This is because if the temperature of the constituent member is high, the low-temperature liquid evaporates in the bellows chamber and enters a gas-liquid mixed state, and the pump does not operate properly.
- a method for cooling the pump device there is a method in which a cryogenic liquid is poured into the pump device to cause heat exchange between the component member and the cryogenic liquid, and the temperature of the component member is gradually lowered.
- the cryogenic liquid that has flowed in from the bottom of the pump device gradually fills the pump device, such as the lower bellows pump chamber and then the upper bellows pump chamber, and the water level of the cryogenic liquid rises. Go.
- the pump device such as the lower bellows pump chamber and then the upper bellows pump chamber
- the reason is that, when the water level of the cryogenic liquid in the pump device is low, the liquid contact area between the pump constituent member and the cryogenic liquid is small, so the cooling efficiency is low at the initial stage of the cooling process. Further, when the temperature of the pump constituent member is high, the cryogenic liquid evaporates and the gas stays in the pump chamber, thereby inhibiting the inflow of the cryogenic liquid. Further, since the two bellows pump chambers are arranged vertically, when the upper pump chamber is the first pump chamber and the lower pump chamber is the second pump chamber, the liquid poured into the pump device is the second pump chamber. It flows out of the discharge port of the chamber, and the water level does not easily rise above the height of the discharge port of the second pump chamber.
- the pump component is made of a highly rigid metal material in order to obtain a high discharge pressure.
- the gas generated by the vaporization of the cryogenic liquid is used.
- the surface is covered. This phenomenon is called film boiling.
- the gas layer formed on the metal surface acts as a heat insulating layer, and inhibits heat transfer between the low temperature liquid and the pump component.
- Patent Document 2 describes a configuration in which PTFE (polytetrafluoroethylene) is coated on the sliding portion of the pump chamber for the purpose of reducing frictional resistance (improving sliding property).
- An object of the present invention is to provide a liquid supply system that can be efficiently cooled.
- the liquid supply system of the present invention is A container having a pump chamber therein and provided with a fluid inlet and outlet, a supply passage for supplying liquid flowing in from the inlet to the pump chamber, and liquid discharged from the pump chamber
- a liquid supply system having a discharge passage leading to the delivery port
- a heat resistance layer made of a material having a lower thermal conductivity than a member constituting the wall surface is formed on the wall surface in contact with the liquid.
- the thermal resistance layer is formed in a situation where the temperature difference between the members constituting the liquid supply system and the fluid is large (for example, when cooling is performed by pouring low temperature liquid into the liquid supply system at room temperature).
- the thermal conductivity between the cryogenic liquid and the system component is low compared to the case where the cryogenic liquid and the system component are in direct contact. Therefore, the temperature gradient from the surface of the heat resistance layer in contact with the liquid to the inside of the system component increases. That is, a large temperature difference occurs between the wetted surface of the surface of the thermal resistance layer and the interface between the thermal resistance layer and the component member.
- the temperature inside the constituent member is relatively high (for example, near normal temperature)
- the temperature of the surface of the heat resistance layer in contact with the component is relatively low (for example, near the temperature of the low temperature liquid). Therefore, boiling of the low temperature liquid proceeds gently on the surface of the heat resistance layer. Since boiling proceeds gently, bubbles caused by the boiling liquid gas generated on the surface of the heat resistance layer become fine. This suppresses the formation of a gas layer due to large bubbles on the surface of the thermal resistance layer. Since it becomes difficult to form a gas layer that exhibits a heat insulation effect on the surface of the heat resistance layer, the gas layer is less likely to hinder heat conduction between the liquid and the constituent member. Therefore, heat exchange between the low-temperature liquid and the constituent member is efficiently performed.
- the liquid supply system can be efficiently cooled by pouring the low temperature liquid.
- the time required for the process of cooling the liquid supply system in a room temperature environment can be shortened, so that an increase in man-hours for system installation work and maintenance work can be suppressed.
- the consumption of the low temperature liquid in a cooling process can be suppressed.
- the thermal resistance layer may be formed of a coating film. Thereby, a heat resistance layer can be formed with a simple configuration.
- the coating film may be formed by arranging a plurality of film members. Thereby, since the coating film is formed by a plurality of film members instead of a single film, it is possible to suppress an increase in stress due to thermal shrinkage or the like occurring in the coating film. Therefore, it can suppress that a coating film peels from a wall surface.
- the thermal resistance layer may be provided on an inner wall surface in contact with the liquid in the pump chamber.
- the thermal resistance layer may be provided on inner wall surfaces of the supply passage and the discharge passage. Thereby, the member which comprises a liquid supply system can be cooled more efficiently.
- the wall surface on which the thermal resistance layer is formed is made of a metal material
- the thermal resistance layer may be formed of PTFE having a thickness of 0.2 mm.
- the present invention can be applied to a liquid supply system including a bellows pump. That is, A shaft member that reciprocates in the vertical direction in the container; A first bellows and a second bellows that are arranged side by side in the vertical direction and expand and contract with the reciprocation of the shaft member;
- the pump chamber has A first pump chamber formed by a space surrounding an outer peripheral surface of the first bellows;
- Consists of The thermal resistance layer is An inner wall surface of a space surrounding an outer peripheral surface of the first bellows in the first pump chamber; An inner wall surface of a space surrounding an outer peripheral surface of the second bellows in the second pump chamber; It is good also as a structure formed in.
- the liquid supply system having such a configuration, since the low-temperature liquid gently boils on the wall surfaces in the first pump chamber and the second pump chamber, it is possible to suppress the formation of a gas layer having a heat insulating effect on the wall surface, The first pump chamber and the second pump chamber can be efficiently cooled with the low-temperature liquid. Therefore, the time required for the cooling process for operating the liquid supply system can be shortened.
- the liquid supply system of the present invention can be efficiently cooled.
- FIG. 1 is a schematic configuration diagram of a liquid supply system according to an embodiment of the present invention.
- FIG. 2 is a schematic view for explaining the action of the thermal resistance layer according to the embodiment of the present invention.
- FIG. 3 is a schematic diagram showing a configuration example of the thermal resistance layer according to the embodiment of the present invention.
- a liquid supply system according to an embodiment of the present invention will be described with reference to FIGS. 1 and 2.
- the liquid supply system according to the present embodiment can be suitably used, for example, to maintain the superconducting device in an ultra-low temperature state. That is, in a superconducting device, it is necessary to always cool a superconducting coil or the like. Therefore, the apparatus to be cooled is always cooled by always supplying an ultra-low temperature liquid (liquid nitrogen or liquid helium) to the apparatus to be cooled provided with a superconducting coil. More specifically, by providing a circulation flow path that passes through the apparatus to be cooled, and by attaching the liquid supply system according to the present embodiment in the circulation flow path, the ultra low temperature liquid is circulated to It becomes possible to always cool.
- FIG. 1 is a schematic configuration diagram of an entire liquid supply system according to an embodiment of the present invention, and is a diagram showing a schematic configuration of the entire liquid supply system in cross-section.
- the liquid supply system 10 includes a liquid supply system main body (hereinafter referred to as the system main body 100), a vacuum container 200 in which the system main body 100 is installed, and piping (a suction pipe 310 and a delivery pipe 320). And. Both the suction pipe 310 and the delivery pipe 320 enter the inside of the vacuum container 200 from the outside of the vacuum container 200 and are connected to the system main body 100.
- the inside of the vacuum container 200 is sealed, and the space outside the system main body 100, the suction pipe 310, and the delivery pipe 320 is maintained in a vacuum state in the vacuum container 200. Thereby, this space has a heat insulating function.
- the liquid supply system 10 is usually installed on a horizontal plane. In the state where the liquid supply system 10 is installed, the upper side in FIG. 1 is the upper side in the vertical direction, and the lower side in FIG. 1 is the lower side in the vertical direction.
- the system main body 100 includes a linear actuator 110 serving as a driving source, a shaft member 120 that reciprocates in the vertical direction by the linear actuator 110, and a container 130.
- the linear actuator 110 is fixed at an arbitrary place, and the place to be fixed may be the container 130 or another place not shown.
- the container 130 includes a case portion 131.
- the shaft member 120 is installed from the outside of the container 130 so as to enter the inside of the container through an opening 131 a provided in the ceiling part of the case part 131. Further, a fluid suction port 131b and a delivery port 131c are provided at the bottom of the case portion 131.
- the suction pipe 310 is connected to a position where the suction port 131b is provided, and the delivery pipe 320 is connected to a position where the delivery port 131c is provided.
- a plurality of members are provided in the case portion 131, and a plurality of spaces partitioned by the plurality of members form a plurality of pump chambers, a liquid flow path, and a heat insulating vacuum chamber. ing.
- the internal configuration of the case portion 131 will be described in more detail.
- the shaft member 120 includes a shaft main body 121 having a hollow portion therein, a cylindrical portion 122 provided so as to surround the outer peripheral surface side of the shaft main body 121, and a connecting portion 123 that connects the shaft main body 121 and the cylindrical portion 122. And have. Further, an upper end side outward flange portion 122 a is provided at the upper end of the cylindrical portion 122, and a lower end side outward flange portion 122 b is provided at the lower end of the cylindrical portion 122.
- the case portion 131 includes a substantially cylindrical body portion 131X and a bottom plate portion 131Y.
- the body portion 131X is provided with a first inward flange portion 131Xa provided near the center in the height direction and a second inward flange portion 131Xb provided above.
- a plurality of first flow paths 131Xc that are provided below the first inward flange portion 131Xa and extend in the axial direction are formed in the body portion 131X at intervals in the circumferential direction.
- a second flow path 131Xd configured by a cylindrical space extending in the axial direction is further provided inside the body portion 131X at a radially outer side than a region where the first flow path 131Xc is provided. Yes.
- a flow path 131d that extends outward in the radial direction and is connected to the first flow path 131Xc is uniformly formed on the bottom of the case portion 131 in a circumferential shape.
- the bottom plate portion 131Y of the case portion 131 is uniformly formed with a circumferential channel 131e extending radially outward. That is, the flow channel 131d and the flow channel 131e are configured such that liquid can flow radially in all directions from 360 ° toward the radially outer side.
- a first bellows 141 and a second bellows 142 that are expanded and contracted with the reciprocation of the shaft member 120 are provided inside the container 130.
- the first bellows 141 and the second bellows 142 are arranged side by side in the vertical direction.
- the upper end side of the first bellows 141 is fixed to the upper end side outward flange portion 122a of the cylindrical portion 122 of the shaft member 120, and the lower end side of the first bellows 141 is fixed to the first inward flange portion 131Xa of the case portion 131.
- the upper end side of the second bellows 142 is fixed to the first inward flange portion 131Xa of the case portion 131, and the lower end side of the second bellows 142 is the lower end side outward flange portion 122b of the cylindrical portion 122 of the shaft member 120. It is fixed to.
- a first pump chamber P1 is formed by a space surrounding the outer peripheral surface of the first bellows 141, and a second pump chamber P2 is formed by a space surrounding the outer peripheral surface of the second bellows 142.
- a third bellows 151 and a fourth bellows 152 that are expanded and contracted with the reciprocating movement of the shaft member 120 are also provided inside the container 130.
- the upper end side of the third bellows 151 is fixed to the ceiling portion of the case portion 131, and the lower end side of the third bellows 151 is fixed to the shaft member 120. Thereby, the opening part 131a provided in the case part 131 is closed.
- the upper end side of the fourth bellows 152 is fixed to a second inward flange portion 131Xb provided in the case portion 131, and the lower end side of the fourth bellows 152 is fixed to the connecting portion 123 in the shaft member 120.
- the space K ⁇ b> 2 is connected to the third space K ⁇ b> 3 formed by the inner peripheral surface side of the first bellows 141 and the second bellows 142 and the outer peripheral surface side of the cylindrical portion 122.
- a space formed by the first space K1, the second space K2, and the third space K3 is sealed. In the present embodiment, the sealed space formed by these is maintained in a vacuum state and has a heat insulating function.
- first check valve 160A second check valve 160B, third check valve 160C and fourth check valve according to the position of attachment.
- a stop valve 160D In addition, the first check valve 160A and the second check valve 160B are disposed on the opposite side (vertical direction lower side) from the linear actuator 110 via the first pump chamber P1 and the second pump chamber P2.
- the third check valve 160C and the fourth check valve 160D are arranged on the upper side in the vertical direction than the first check valve 160A and the second check valve 160B.
- the first check valve 160A and the third check valve 160C are provided on the flow path passing through the first pump chamber P1.
- the first check valve 160A and the third check valve 160C play a role of stopping the backflow of the fluid flowing by the pumping action by the first pump chamber P1.
- the first check valve 160A is provided on the upstream side with respect to the first pump chamber P1
- the third check valve 160C is provided on the downstream side.
- the first check valve 160 ⁇ / b> A is provided on a flow path 131 d formed at the bottom of the case portion 131.
- the third check valve 160C is provided on a flow path formed in the vicinity of the second inward flange portion 131Xb provided in the case portion 131.
- the second check valve 160B and the fourth check valve 160D are provided on the flow path passing through the second pump chamber P2.
- the second check valve 160B and the fourth check valve 160D play a role of stopping the backflow of the fluid flowing by the pumping action by the second pump chamber P2.
- the second check valve 160B is provided on the upstream side with respect to the second pump chamber P2, and the fourth check valve 160D is provided on the downstream side.
- the second check valve 160B is provided on the flow path 131e formed in the bottom plate portion 131Y of the case portion 131.
- the fourth check valve 160D is provided on a flow path formed in the vicinity of the first inward flange portion 131Xa of the case portion 131.
- the fluid that has passed through the first check valve 160A passes through the first flow path 131Xc inside the body portion 131X in the case portion 131 and is sent to the first pump chamber P1. Further, since the fluid pressure in the second pump chamber P2 is increased, the second check valve 160B is closed and the fourth check valve 160D is opened. As a result, the fluid in the second pump chamber P2 passes through the fourth check valve 160D and is sent to the second flow path 131Xd inside the body portion 131X (see arrow T12). Thereafter, the fluid passes through the delivery port 131 c and is delivered to the outside of the liquid supply system 10 through the delivery pipe 320.
- the first bellows 141 is extended and the second bellows 142 is contracted.
- the first check valve 160A is closed and the third check valve 160C is opened.
- the fluid in the first pump chamber P1 passes through the third check valve 160C (see arrow T11) and is sent to the second flow path 131Xd inside the trunk portion 131X.
- the fluid passes through the delivery port 131 c and is delivered to the outside of the liquid supply system 10 through the delivery pipe 320.
- the second check valve 160B is opened and the fourth check valve 160D is closed.
- the fluid (see arrow S10) sent from the outside of the liquid supply system 10 through the suction pipe 310 is sucked into the container 130 from the suction port 131b and passes through the second check valve 160B (see arrow S12). ). Then, the fluid that has passed through the second check valve 160B is sent to the second pump chamber P2.
- the fluid can be flowed from the suction pipe 310 side to the delivery pipe 320 side when the shaft member 120 is lowered or raised. Therefore, so-called pulsation can be suppressed.
- the liquid supply system 10 When the liquid supply system 10 according to the present embodiment is used for circulation of an ultra-low temperature liquid such as liquid nitrogen or liquid helium, the liquid supply system 10 in a room temperature environment is about the same as a low-temperature liquid that is a working fluid before operation. It is necessary to cool to a temperature of In this embodiment, the same liquid as the low-temperature liquid circulated when the system is operating is used for system cooling.
- the system cooling liquid may be different from the liquid circulated when the system is operating.
- a low-temperature fluid is poured from the suction pipe 310, heat is exchanged between the case 131 and the low-temperature liquid, which are constituent members of the liquid supply system 10, and the temperature of the constituent members is gradually lowered.
- the suction port 131b and the delivery port 131c are provided at the bottom of the container 100, the low-temperature liquid poured in in the cooling step is gradually gradually in the order of the second pump chamber P2 and then the first pump chamber P1.
- the water level of the cryogenic liquid rises.
- the number of components that exchange heat with the cryogenic liquid for cooling increases, and cooling proceeds from the lower part to the upper part of the system.
- FIG. 2A is an enlarged view of a portion A in FIG.
- FIG. 2B is a comparative example showing the case where the thermal resistance layer does not exist in FIG.
- FIG. 2A shows only the first bellows 141 and the inner wall 131Xe of the first pump chamber P1 for simplicity.
- FIG. 3 is a diagram showing an example of a method for coating the thermal resistance layer.
- the first pump chamber P1 is a space surrounded by the outer peripheral surface of the first bellows 141 and the wall surface 180 of the inner wall 131Xe facing the first bellows 141.
- the inner wall 131Xe is in contact with the liquid flowing through the first pump chamber P1 and is a part of the case portion 131, and exchanges heat with members constituting the system main body 100.
- a heat resistance layer 500 is provided on the wall surface 180 of the inner wall 131Xe as shown in FIG.
- the inner wall 131Xe is formed of a metal material
- the thermal resistance layer 500 is formed by covering the wall surface 180 with a PTFE film having a lower thermal conductivity than the metal material.
- the film thickness of PTFE is 0.2 mm.
- the thermal resistance layer 500 may be bonded to a member constituting the main body 100 with an adhesive, or may be fixed to a member constituting the main body 100 by the elastic force of another elastic member.
- the same heat resistance layer is also provided in the second pump chamber P2. That is, in the second pump chamber P2, a PTFE coating film is provided as a thermal resistance layer on the wall surface 181 of the inner wall 131Xf facing the second bellows 142.
- the heat resistance layer 500 formed of a coating film made of PTFE is formed into a tile-shaped inner wall surface in a relatively small size of a rectangular film member 600 made of PTFE. Form side by side. Thereby, it can suppress that the stress resulting from heat shrink etc. becomes large, and can suppress that a coating film peels from an inner wall face.
- a thermal resistance layer 500 may be formed by forming a coating film of PTFE with a single film member 601. Further, when forming a coating film by arranging a plurality of film members, the shape of each film member is not limited to a rectangle as shown in FIG.
- FIG. 2B shows a case where a heat resistance layer made of a PTFE coating film is not formed on the inner wall surface formed of a metal material. Since metal has a high thermal conductivity, when a normal-temperature metal and an ultra-low temperature liquid come into contact with each other during system cooling, the low-temperature liquid suddenly boils on the inner wall surface, and a large bubble 502 is generated by the generated gas, and a gas layer is formed on the inner wall surface. Will be formed.
- a PTFE coating film was formed as the thermal resistance layer 500 on the wall surface 180 of the inner wall 131Xe made of metal.
- PTFE has a lower thermal conductivity than metal. Therefore, the temperature gradient from the surface 180a of the heat resistance layer 500 in contact with the liquid to the inside of the inner wall 131Xe, which is a metal component, increases. That is, the heat of the inner wall 131Xe is gradually transferred to the wetted surface little by little in comparison with metal. Thereby, even when the temperature of the inner wall 131Xe is relatively high (for example, near normal temperature), the temperature of the surface 180a of the heat resistance layer 500 in contact with the liquid is relatively low (for example, near the temperature of the low-temperature liquid).
- the consumption of the low temperature liquid in a cooling process can be suppressed. Also in the second pump chamber P2, by providing a similar thermal resistance layer, it is possible to suppress the generation of a gas layer on the inner wall surface, and efficient heat exchange between the low-temperature liquid and the constituent member is possible.
- the example in which the heat resistance layer is provided on the wall surface 180 and the wall surface 181 of each of the inner wall 131Xe and the inner wall 131Xf constituting the first pump chamber P1 and the second pump chamber P2 has been described.
- a thermal resistance layer may be provided also on the inner wall surface of the flow path that guides the liquid to the pump chamber.
- a PTFE coating film as a heat resistance layer may also be provided on the inner wall surface of the connected supply passage and the inner wall surface of the discharge passage connected to the outlet 404 of the second pump chamber P2.
- the material which forms a heat resistance layer is thermal conductivity from the material (for example, metal) which comprises inner wall surfaces, such as a pump chamber etc. which are cooling objects. If it is a low material, it will not be limited to PTFE.
- the present invention is applied to a liquid supply system having a bellows pump in which two pump chambers surrounding the outer peripheral surface of the bellows are arranged in series vertically in the vertical direction (bellows expansion and contraction direction) has been described.
- the liquid supply system to which the invention is applicable is not limited to this.
- INDUSTRIAL APPLICABILITY The present invention is generally applicable to a pump that sucks and delivers a fluid, and increases the wetted area in a portion of the inner wall surface that is in contact with liquid in the pump chamber and that exchanges heat with a component of the pump chamber (or liquid supply system body) By providing the surface area increasing structure, the same effect as the above-described embodiment can be obtained.
- a configuration is adopted in which the outside of the system main body 100, the suction pipe 310, and the delivery pipe 320 is evacuated to provide a heat insulating function. Further, in this embodiment, a configuration is adopted in which the sealed space formed by the first space K1, the second space K2, and the third space K3 is evacuated to have a heat insulating function. However, it is also possible to maintain the temperature of the fluid flowing through the circulation flow path at a low temperature by flowing an ultra-low temperature liquid in these spaces.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Reciprocating Pumps (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Description
すなわち、本発明の液体供給システムは、
内部にポンプ室が備えられ、かつ流体の吸入口及び送出口が設けられている容器と、前記吸入口から流入する液体を前記ポンプ室に供給する供給通路と、前記ポンプ室から排出される液体を前記送出口へ導く排出通路と、を有する液体供給システムであって、
前記液体供給システムにおいて前記液体と接する壁面に、前記壁面を構成する部材より熱伝導率が低い材料による熱抵抗層を形成したことを特徴とする。
これにより、簡易な構成で熱抵抗層を形成することができる。
これにより、単一の膜ではなく複数の膜部材により被覆膜が形成されるため、被覆膜に生じる熱収縮等に起因する応力が大きくなることを抑制できる。従って、被覆膜が壁面から剥離することを抑制できる。
これにより、熱抵抗層が設けられたポンプ室の内壁面では、低温液体の沸騰が穏やかに進行する。よって、ポンプ室の内壁面には、沸騰した低温気体のガスによる大きな気泡が形成されにくくなり、内壁面にガス層が形成されることを抑制できる。従って、低温液体とポンプ室の構成部材との熱交換がより効率良く行われる。従って、低温液体を流し込むことによりポンプ室を効率良く冷却することができる。本発明によれば、ポンプ室を効率的に冷却することができるため、ポンプ室に低温液体のガスが滞留する状況を早期に解消でき、液体供給システムの稼働のための冷却工程に要する時間を短縮することができる。
これにより、液体供給システムを構成する部材をより効率良く冷却することができる。
前記熱抵抗層は、膜厚0.2mmのPTFEにより形成されるとよい。
実験により、金属材料で構成される壁面に膜厚0.2mmのPTFEにより熱抵抗層を形成すると、熱抵抗層を形成しない場合よりも約2倍の冷却速度が得られた。
前記容器内において、鉛直方向に往復移動する軸部材と、
鉛直方向に並べて配置され、かつ前記軸部材の往復移動に伴って伸縮する第1ベローズ及び第2ベローズと、
を有し、前記ポンプ室は、
前記第1ベローズの外周面を囲む空間により形成される第1ポンプ室と、
前記第2ベローズの外周面を囲む空間により形成される第2ポンプ室と、
からなり、
前記熱抵抗層は、
前記第1ポンプ室内において前記第1ベローズの外周面を囲む空間の内壁面と、
前記第2ポンプ室内において前記第2ベローズの外周面を囲む空間の内壁面と、
に形成される構成としてもよい。
図1及び図2を参照して、本発明の実施例に係る液体供給システムについて説明する。本実施例に係る液体供給システムは、例えば、超電導機器を超低温状態に維持させるために好適に用いることができる。すなわち、超電導機器においては、超電導コイルなどを常時冷却させる必要がある。そこで、超電導コイルなどが備えられた被冷却装置に超低温の液体(液体窒素や液体ヘリウム)を常時供給することで、被冷却装置は常時冷却される。より具体的には、被冷却装置を通る循環流路を設け、かつ、この循環流路中に本実施例に係る液体供給システムを取り付けることにより、超低温の液体を循環させて、被冷却装置を常時冷却させることが可能となる。
図1は本発明の実施例に係る液体供給システム全体の概略構成図であり、液体供給システム全体の概略構成を断面的に示した図である。本実施例に係る液体供給システム10は、液体供給システム本体(以下、システム本体100と称する)と、システム本体100が内部に設置される真空容器200と、配管(吸入管310及び送出管320)とを備えている。吸入管310及び送出管320は、いずれも真空容器200の外部から真空容器200の内部に入り込み、システム本体100に接続されている。真空容器200の内部は密閉されており、真空容器200の内部のうち、システム本体100,吸入管310及び送出管320の外側の空間は真空状態が維持されている。これにより、この空間は断熱機能を備えている。液体供給システム10は、通常、水平面上に設置される。液体供給システム10が設置された状態において、図1における上方が鉛直方向上方となり、図1における下方が鉛直方向下方となる。
液体供給システム全体の動作について説明する。リニアアクチュエータ110によって、軸部材120が下降する際においては、第1ベローズ141は縮み、第2ベローズ142は伸びる。このとき、第1ポンプ室P1の流体圧力は低くなるため、第1逆止弁160Aは弁が開き、第3逆止弁160Cは弁が閉じた状態となる。これにより、液体供給システム10の外部から吸入管310により送られる流体(矢印S10参照)は、吸入口131bから容器130内に吸入されて、第1逆止弁160Aを通り抜けていく(矢印S11参照)。そして、第1逆止弁160Aを通り抜けた流体は、ケース部131における胴体部131Xの内部の第1流路131Xcを通り、第1ポンプ室P1へと送られる。また、第2ポンプ室P2の流体圧力は高くなるため、第2逆止弁160Bは弁が閉じ、第4逆止弁160Dは弁が開いた状態となる。これにより、第2ポンプ室P2内の流体は、第4逆止弁160Dを通り抜けて、胴体部131Xの内部の第2流路131Xdへと送られる(矢印T12参照)。その後、流体は、送出口131cを通り、送出管320により液体供給システム10の外部へと送出される。
本実施例に係る液体供給システム10を、液体窒素や液体ヘリウム等の超低温液体の循環に使用する場合、常温環境下にある液体供給システム10を、稼働前に作動流体である低温液体と同程度の温度まで冷却する必要がある。本実施例では、システム稼働時に流通させる低温液体と同じ液体をシステム冷却用に用いる。なお、システム冷却用の液体と、システム稼働時に流通させる液体とは異なるものであってもよい。
図1~図3を参照して、本実施例に係る熱抵抗層について説明する。図2(A)は、図1のA部の拡大図である。図2(B)は、図2(A)において熱抵抗層が存在しない場合を示す比較例である。図2(A)は、簡単のため第1ベローズ141及び第1ポンプ室P1の内壁131Xeの部分のみを示す。図3は熱抵抗層の被覆方法の例を示す図である。
図2(B)は、金属材料で形成される内壁面にPTFEの被覆膜による熱抵抗層が形成されていない場合を示す。金属は熱伝導率が高いため、システム冷却時に常温の金属と超低温の液体とが接触すると、内壁面において低温液体が急激に沸騰し、発生したガスにより大きな気泡502が生じ、内壁面にガス層が形成されてしまう。また、気泡が移動し、ガス層がない箇所で再度接液しても、熱伝導率が高いため、内壁の内部の熱が直ぐに金属表面に伝わり、再度大きな気泡502が生じてしまい、常に内壁面にガス層が形成されてしまう。このガス層が断熱効果を有し、低温液体と内壁との熱伝導を阻害するため、金属材料で形成される内壁等のシステム構成部材の冷却に時間がかかってしまう。
本実施例では、熱抵抗層が、第1ポンプ室P1及び第2ポンプ室P2をそれぞれ構成する内壁131Xe及び内壁131Xfそれぞれの壁面180及び壁面181に設けられる例を説明したが、熱抵抗層は、システム本体100の構成部材と熱交換し、かつ低温液体と接する部位であれば、その他のどの部分に設けられていても良い。例えば、ポンプ室に液体を導く流路の内壁面にも熱抵抗層が設けられてもよい。具体的には、第1ポンプ室P1の入口401に接続される供給通路の内壁面、第1ポンプ室P1の出口402に接続される排出通路の内壁面、第2ポンプ室P2の入口403に接続される供給通路の内壁面、第2ポンプ室P2の出口404に接続される排出通路の内壁面にも、熱抵抗層としてPTFEの被覆膜が設けられてもよい。また、本実施例では熱抵抗層としてPTFEを設ける例を説明したが、熱抵抗層を形成する材料は、冷却対象であるポンプ室等の内壁面を構成する材料(例えば金属)より熱伝導率が低い材料であれば、PTFEに限定されない。
100 システム本体
110 リニアアクチュエータ
120 軸部材
121 軸本体部
122 円筒部
122a 上端側外向きフランジ部
122b 下端側外向きフランジ部
123 連結部
130 容器
131 ケース部
131a 開口部
131b 吸入口
131c 送出口
131d 流路
131e 流路
131X 胴体部
131Xa 第1内向きフランジ部
131Xb 第2内向きフランジ部
131Xc 第1流路
131Xd 第2流路
131Xe 内壁
131Xf 内壁
131Y 底板部
141 第1ベローズ
142 第2ベローズ
151 第3ベローズ
152 第4ベローズ
160 逆止弁
160A 第1逆止弁
160B 第2逆止弁
160C 第3逆止弁
160D 第4逆止弁
180 壁面
180a 熱抵抗層の表面
181 壁面
190 内壁面
200 真空容器
310 吸入管
320 送出管
401 第1ポンプ室入口
402 第1ポンプ室出口
403 第2ポンプ室入口
404 第2ポンプ室出口
500 熱抵抗層
501 気泡
502 気泡
600 膜部材
601 膜部材
P1 第1ポンプ室
P2 第2ポンプ室
Claims (7)
- 内部にポンプ室が備えられ、かつ流体の吸入口及び送出口が設けられている容器と、前記吸入口から流入する液体を前記ポンプ室に供給する供給通路と、前記ポンプ室から排出される液体を前記送出口へ導く排出通路と、を有する液体供給システムであって、
前記液体供給システムにおいて前記液体と接する壁面に、前記壁面を構成する部材より熱伝導率の低い材料による熱抵抗層を形成したことを特徴とする液体供給システム。 - 前記熱抵抗層は、被覆膜により形成される請求項1に記載の液体供給システム。
- 前記被覆膜は、膜部材を複数並べて形成される請求項2に記載の液体供給システム。
- 前記熱抵抗層は、前記ポンプ室内で前記液体と接する内壁面に設けられる請求項1~3のいずれか1項に記載の液体供給システム。
- 前記熱抵抗層は、前記供給通路及び前記排出通路の内壁面に設けられる請求項1~4のいずれか1項に記載の液体供給システム。
- 前記熱抵抗層が形成される前記壁面は金属材料で構成され、
前記熱抵抗層は、膜厚0.2mmのPTFEにより形成される請求項1~4のいずれか1項に記載の液体供給システム。 - 前記容器内において、鉛直方向に往復移動する軸部材と、
鉛直方向に並べて配置され、かつ前記軸部材の往復移動に伴って伸縮する第1ベローズ及び第2ベローズと、
を有し、前記ポンプ室は、
前記第1ベローズの外周面を囲む空間により形成される第1ポンプ室と、
前記第2ベローズの外周面を囲む空間により形成される第2ポンプ室と、
からなり、
前記熱抵抗層は、
前記第1ポンプ室内において前記第1ベローズの外周面を囲む空間の内壁面と、
前記第2ポンプ室内において前記第2ベローズの外周面を囲む空間の内壁面と、
に形成されることを特徴とする請求項1~6のいずれか1項に記載の液体供給システム。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08177728A (ja) * | 1994-12-19 | 1996-07-12 | Goto Ikueikai | 極低温液体用ポンプ |
JP2005113858A (ja) * | 2003-10-10 | 2005-04-28 | Nippon Pillar Packing Co Ltd | ベローズを有する流体機器及びその流体機器内の残留空気排出方法 |
WO2010098176A1 (ja) * | 2009-02-24 | 2010-09-02 | 日本ピラー工業株式会社 | ベローズポンプ |
JP2012193664A (ja) | 2011-03-16 | 2012-10-11 | Nissha Printing Co Ltd | シリンダ型塗料注入機 |
WO2016006648A1 (ja) | 2014-07-10 | 2016-01-14 | イーグル工業株式会社 | 液体供給システム |
WO2016047620A1 (ja) * | 2014-09-22 | 2016-03-31 | イーグル工業株式会社 | 液体供給システム |
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US8991658B2 (en) * | 2011-03-15 | 2015-03-31 | Eagle Industry Co., Ltd. | Liquid supply system |
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DE102019002318B4 (de) * | 2019-03-30 | 2021-01-28 | Dörschler GmbH | Energieautarkes Pumpensystem mit einem Antriebsmittel aus einer Formgedächtnislegierung und Verfahren zum Betreiben des Pumpensystems |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08177728A (ja) * | 1994-12-19 | 1996-07-12 | Goto Ikueikai | 極低温液体用ポンプ |
JP2005113858A (ja) * | 2003-10-10 | 2005-04-28 | Nippon Pillar Packing Co Ltd | ベローズを有する流体機器及びその流体機器内の残留空気排出方法 |
WO2010098176A1 (ja) * | 2009-02-24 | 2010-09-02 | 日本ピラー工業株式会社 | ベローズポンプ |
JP2012193664A (ja) | 2011-03-16 | 2012-10-11 | Nissha Printing Co Ltd | シリンダ型塗料注入機 |
WO2016006648A1 (ja) | 2014-07-10 | 2016-01-14 | イーグル工業株式会社 | 液体供給システム |
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