WO2018067174A1 - Coating for a vapor chamber - Google Patents
Coating for a vapor chamber Download PDFInfo
- Publication number
- WO2018067174A1 WO2018067174A1 PCT/US2016/056017 US2016056017W WO2018067174A1 WO 2018067174 A1 WO2018067174 A1 WO 2018067174A1 US 2016056017 W US2016056017 W US 2016056017W WO 2018067174 A1 WO2018067174 A1 WO 2018067174A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- approximately
- coating
- silica derived
- vapor chamber
- aerogel
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 60
- 238000000576 coating method Methods 0.000 title claims abstract description 60
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 122
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 71
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 71
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 71
- 239000004964 aerogel Substances 0.000 claims abstract description 61
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 61
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 45
- 230000008569 process Effects 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 24
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 4
- 239000003377 acid catalyst Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 239000002243 precursor Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 3
- 238000004108 freeze drying Methods 0.000 claims description 3
- 238000000352 supercritical drying Methods 0.000 claims description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 claims description 2
- 229910017604 nitric acid Inorganic materials 0.000 claims description 2
- 235000006408 oxalic acid Nutrition 0.000 claims description 2
- 238000003756 stirring Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 2
- 230000032683 aging Effects 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 10
- 238000012546 transfer Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000001459 lithography Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 125000005372 silanol group Chemical group 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
Definitions
- Vapor chambers are used for various electronic devices to help transfer heat away from the electronic devices. For example, high temperatures can negatively affect the operation of electronic devices such as computer processors.
- Vapor chambers operate by taking heat from an electronic device on one side to heat a liquid within the vapor chamber into a vapor.
- the vapors rise to an opposite side of the vapor chamber that acts as a condenser.
- the vapors are condensed back into a liquid form against the condenser portion of the vapor chamber.
- the liquid is then returned to the side that takes in the heat and the process is repeated to dissipate heat away from the electronic device.
- FIG. 1 is a block diagram of an example vapor chamber of the present disclosure
- FIG. 2 is a block diagram of an example process flow diagram of the present disclosure
- FIG. 3 is a flow diagram of an example method for forming a silica derived carbon nanotube (CNT) aerogel of the present disclosure
- FIG. 4 is a diagram of an example chemical structure of the silica derived CNT aerogel.
- the present disclosure provides a vapor chamber and method for building the vapor chamber.
- vapor chambers are used for various electronic devices to help transfer heat away from the electronic devices.
- the present disclosure uses a silica derived CNT aerogel that is sprayed onto an inside wall of the vapor chamber, dried and cured to form the wick structure.
- the silica derived CNT aerogel has many advantages over the existing wick structures used in vapor chambers. For example, the silica derived CNT aerogel is easy to apply without using a lithography process or sintering process.
- the silica derived CNT aerogel has a low density, a light weight, a high porosity and a high surface area that enhances heat transfer and heat dissipation performance within the vapor chamber.
- the chemistry of the silica derived CNT aerogel provides strong hydrogen bonding in order to have high water absorption and enhances capillary force ability of the wick structure.
- FIG. 1 illustrates a block diagram of an example vapor chamber 100 of the present disclosure.
- the vapor chamber 100 includes a metallic housing 102, a nickel coating 104 and a silica derived carbon nanotube (CNT) aerogel coating 106.
- the metallic housing 102 may be any conductive metal, such as for example, copper, aluminum, stainless steel, and the like.
- the metallic housing 102 may have a thickness 1 14 of approximately 0.1 millimeters (mm) to 6 mm.
- the nickel coating 104 may be applied using an electroplating processor or a physical vapor deposition (PVD) process.
- the nickel coating 104 may be applied to prevent the metallic housing 102 from oxidizing, which can lead to corrosion of the surface of the metallic housing 102.
- the silica derived CNT aerogel coating 106 may be sprayed on, dried and cured.
- the silica derived CNT aerogel coating 106 may provide the wick structure that performs the heat transfer.
- One example of how the silica derived CNT aerogel coating 106 is formulated is described below and illustrated in FIG. 3.
- An example of the chemical structure of the silica derived CNT aerogel coating 106 is discussed below and illustrated in FIG. 4.
- the silica derived CNT aerogel coating 106 may have a high porosity, which provides a greater surface area. The large surface area helps to improve the efficiency of heat transfer within the vapor chamber 100.
- the silica derived CNT aerogel coating 106 may be sprayed onto the surface of the metallic housing 102, rather than using a lithography process or sintering to form the wick structure.
- FIG. 1 illustrates one example of how the vapor chamber 100 operates.
- one or more surfaces 108 e.g., a bottom surface
- a heat source e.g., an operating electronic device
- the surfaces 108 may be in contact with a processor, a memory device, or other electronic component that generates heat.
- the heat may enter the vapor chamber 100 via the surfaces 108.
- the vapor chamber 100 may have an inside or internal volume 1 12.
- the internal volume 1 12 may be vacuum sealed and be injected with a small amount of liquid (e.g., water) that wets the silica derived CNT aerogel coating 106.
- the heat that enters the vapor chamber 100 heats the liquid and converts the liquid into a vapor.
- the vapor may contact a second surface 1 10 that is opposite the surface 108 (e.g., a top surface).
- the second surface 1 10 may act as a condenser that converts the vapor back into liquid form.
- the liquid may return back to the bottom of the internal volume 1 12 to re-wet the silica derived CNT aerogel coating 106 so that the process may be repeated.
- the heat may be dissipated away from the electronic device through the top second surface 1 10.
- heat fins or other conductive materials may be coupled to an outer side of the second surface 1 10 to help further dissipate the heat away.
- the chemical properties and structural properties of the silica derived CNT aerogel coating 106 may help improve the efficiency of the heat transfer.
- the silica derived CNT aerogel coating 106 may have a high porosity that greatly increases the surface area available to perform the heat transfer.
- the silica derived CNT aerogel coating 106 may have an approximately 90%-95% void.
- the silica derived CNT aerogel coating 106 may have a surface area of approximately 250 square meters per gram (m 2 /g) to 1 ,000 m 2 /g.
- the carbon nanotubes within the silica derived CNT aerogel coating 106 may have a diameter of approximately 7-12 nanometers (nm) and have a length of approximately 1 -3 microns ( ⁇ ). In one example, the silica derived CNT aerogel coating 106 may be sprayed on or applied to a thickness 1 18 of approximately 3-25 ⁇ .
- FIG. 2 illustrates an example process flow diagram of how the vapor chamber 100 is formed.
- a first metallic substrate 102i and a second metallic substrate 1022 are provided.
- the first metallic substrate 102i and the second metallic substrate 1022 may be two halves that are combined, as discussed below to form the metallic housing 102.
- the first metallic substrate 102i and the second metallic substrate 1022 may be the same conductive metal.
- the first metallic substrate 102i and the second metallic substrate 1022 may be copper, aluminum, stainless steel, and the like.
- a nickel coating 104 is applied to the first metallic substrate 102i and the second metallic substrate 1022.
- the nickel coating 104 may be applied via an electroplating process or a PVD process.
- a silica derived CNT aerogel coating 106 may be sprayed onto the nickel coating 104 of the first metallic substrate 102i and the second metallic substrate 1022.
- the silica derived CNT aerogel coating 106 may form the wick structure for the vapor chamber 100.
- the silica derived aerogel coating 106 may be sprayed on or applied without using lithography or sintering.
- the silica derived CNT aerogel coating 106 may be dried.
- the silica derived CNT aerogel coating 106 may be dried using a freeze drying process.
- the freeze drying process may be applied at a temperature of approximately -4 Celsius (°C) to -80 °C and at a pressure of approximately 4 x 10 "4 to 5 x 10 "4 milli-Torr (mTorr) for approximately 24 hours to 48 hours.
- the silica derived CNT aerogel coating 106 may be dried using a supercritical drying process.
- the supercritical drying process may be applied at a temperature of approximately 35 °C to 250 °C and at a pressure of approximately 30 bar to 150 bar for approximately 30 minutes to 120 minutes.
- the silica derived CNT aerogel coating 106 may be cured.
- the curing may be performed at a temperature of approximately 300 °C to 500 °C for approximately 30 minutes to 40 minutes.
- the first metallic substrate 102i and the second metallic substrate 1022 may be welded together to form the vapor chamber 100 having the silica derived CNT aerogel coating 106 cured onto the nickel coating 104 on an inside 1 12 of the vapor chamber 100.
- the vapor chamber 100 may be vacuum sealed to remove any air from the inside 1 12 of the vapor chamber 100.
- a small amount of liquid, such as water may be injected into the inside 1 12 of the vapor chamber 100 to wet the silica derived CNT aerogel coating 106.
- FIG. 3 illustrates a flow diagram of an example method 300 for forming a silica derived carbon nanotube (CNT) aerogel of the present disclosure.
- the method 300 begins.
- the method 300 reacts a mixture of tetraethylorthosilicate (TEOS) and ethanol or isopropanol with an acid catalyst, while stirring for approximately 30-60 minutes at a room temperature.
- the acid catalyst may be one of carbonic acid, oxalic acid, phosphoric acid, hydrochloric acid or nitric acid.
- Room temperature may be defined to be approximately 20 °C.
- the method 300 ages the mixture for approximately 24 hours at a room temperature to form the silica derived CNT aerogel coating precursor.
- the silica derived CNT aerogel may form carbon nanotubes having a diameter of approximately 8-12 nm and a length of approximately 1 -3 ⁇ .
- the silica derived CNT aerogel may have a high porosity that creates a large surface area of approximately 250-1 ,000 m 2 /g.
- FIG. 4 illustrates an example chemical structure 400 of the silica derived CNT aerogel.
- the chemical structure 400 shows that the silica derived CNT aerogel includes a high amount of hydroxyl (OH) groups 410 on silanol groups 402, 404 and 406.
- OH groups 410 provide a strong hydrogen bonding in order to have high water absorption and also enhance the capillary force ability of the silica derived CNT aerogel.
- These properties of the chemical structure 400 provide a very efficient heat transfer for the vapor chamber 100 and help improve the liquid return rate within the wick structure.
- the method 300 sprays the silica derived CNT aerogel to coat an inside nickel coated surface of a vapor chamber to a thickness of approximately 3 ⁇ to 25 ⁇ .
- the coating of the silica derived CNT aerogel may be dried and cured.
- the silica derived CNT aerogel coating precursor may be sprayed onto two halves of the metallic housing of the vapor chamber that are eventually welded together.
- the method 300 ends.
- the present disclosure provides a vapor chamber design that is more efficient to produce and that dissipates heat away more efficiently than currently used vapor chambers.
- the composition and structure of the silica derived CNT aerogel help to provide properties and characteristics that allow the silica derived CNT aerogel to be easily applied to the inside walls of the vapor chamber and increase the efficiency of heat transfer of the vapor chamber.
- the design of the vapor chamber of the present disclosure has a reduced thickness compared to vapor chambers produced via a copper powder sintering treatment.
- the light weight of the silica derived CNT aerogel coating also provides flexible design capability to match the design space for electronic devices with weight reduction.
- the vapor chamber of the present disclosure With the improved efficiency of the heat transfer provided by the vapor chamber of the present disclosure, lifetimes of products such as liquid crystal display (LCD) panels, light emitting diodes (LEDs), computer processing unites (CPUs), batteries and the like may be extended.
- the vapor chamber of the present disclosure may improve speed, power efficiency and safety (e.g., reducing the risk of battery explosion) of these electronic devices.
Abstract
In example implementations, a vapor chamber is provided. The vapor chamber includes a metallic housing. A nickel coating is applied on inside walls of the metallic housing. A silica derived carbon nanotube (CNT) aerogel coating is applied on the nickel coating on the inside walls of the metallic housing. The silica derived CNT aerogel coating is sprayed onto the nickel coating, dried and cured.
Description
COATING FOR A VAPOR CHAMBER
BACKGROUND
[0001] Vapor chambers are used for various electronic devices to help transfer heat away from the electronic devices. For example, high temperatures can negatively affect the operation of electronic devices such as computer processors.
[0002] Vapor chambers operate by taking heat from an electronic device on one side to heat a liquid within the vapor chamber into a vapor. The vapors rise to an opposite side of the vapor chamber that acts as a condenser. The vapors are condensed back into a liquid form against the condenser portion of the vapor chamber. The liquid is then returned to the side that takes in the heat and the process is repeated to dissipate heat away from the electronic device.
[0003] Existing designs for vapor chambers use a copper powder to form a wick structure. The copper can be sintered to form a thicker coat for high process temperatures. Other examples use a lithography process to form wick structures on the inside walls of the vapor chambers. However, the sintering process and the lithography process can have long process times and high costs.
BRIEF DESCRIPTION OF THE DRAWINGS
[0004] FIG. 1 is a block diagram of an example vapor chamber of the present disclosure;
[0005] FIG. 2 is a block diagram of an example process flow diagram of the present disclosure;
[0006] FIG. 3 is a flow diagram of an example method for forming a silica derived carbon nanotube (CNT) aerogel of the present disclosure; and
[0007] FIG. 4 is a diagram of an example chemical structure of the silica derived CNT aerogel.
DETAILED DESCRIPTION
[0008] The present disclosure provides a vapor chamber and method for building the vapor chamber. As discussed above, vapor chambers are used for various electronic devices to help transfer heat away from the electronic devices.
[0009] Existing designs for vapor chambers use a copper powder to form a wick structure. The copper can be sintered to form a thicker coat for high process temperatures. Other examples use a lithography process to form wick structures on the inside walls of the vapor chambers. However, the sintering process and the lithography process can have long process times and high costs.
[0010] The present disclosure uses a silica derived CNT aerogel that is sprayed onto an inside wall of the vapor chamber, dried and cured to form the wick structure. The silica derived CNT aerogel has many advantages over the existing wick structures used in vapor chambers. For example, the silica derived CNT aerogel is easy to apply without using a lithography process or sintering process. In addition, the silica derived CNT aerogel has a low density, a light weight, a high porosity and a high surface area that enhances heat transfer and heat dissipation performance within the vapor chamber.
Furthermore, the chemistry of the silica derived CNT aerogel provides strong hydrogen bonding in order to have high water absorption and enhances capillary force ability of the wick structure.
[0011] FIG. 1 illustrates a block diagram of an example vapor chamber 100 of the present disclosure. The vapor chamber 100 includes a metallic housing 102, a nickel coating 104 and a silica derived carbon nanotube (CNT) aerogel coating 106. In one implementation the metallic housing 102 may be any conductive metal, such as for example, copper, aluminum, stainless steel, and
the like. The metallic housing 102 may have a thickness 1 14 of approximately 0.1 millimeters (mm) to 6 mm.
[0012] In one example, the nickel coating 104 may be applied using an electroplating processor or a physical vapor deposition (PVD) process. The nickel coating 104 may be applied to prevent the metallic housing 102 from oxidizing, which can lead to corrosion of the surface of the metallic housing 102.
[0013] In one example, the silica derived CNT aerogel coating 106 may be sprayed on, dried and cured. The silica derived CNT aerogel coating 106 may provide the wick structure that performs the heat transfer. One example of how the silica derived CNT aerogel coating 106 is formulated is described below and illustrated in FIG. 3. An example of the chemical structure of the silica derived CNT aerogel coating 106 is discussed below and illustrated in FIG. 4.
[0014] The silica derived CNT aerogel coating 106 may have a high porosity, which provides a greater surface area. The large surface area helps to improve the efficiency of heat transfer within the vapor chamber 100. In addition, the silica derived CNT aerogel coating 106 may be sprayed onto the surface of the metallic housing 102, rather than using a lithography process or sintering to form the wick structure.
[0015] FIG. 1 illustrates one example of how the vapor chamber 100 operates. In one example, one or more surfaces 108 (e.g., a bottom surface) may be in contact with a heat source (e.g., an operating electronic device). For example, the surfaces 108 may be in contact with a processor, a memory device, or other electronic component that generates heat. The heat may enter the vapor chamber 100 via the surfaces 108.
[0016] The vapor chamber 100 may have an inside or internal volume 1 12. The internal volume 1 12 may be vacuum sealed and be injected with a small amount of liquid (e.g., water) that wets the silica derived CNT aerogel coating 106. The heat that enters the vapor chamber 100 heats the liquid and converts the liquid into a vapor.
[0017] As the vapor rises (as shown by arrows 1 16), the vapor may contact a second surface 1 10 that is opposite the surface 108 (e.g., a top surface). The second surface 1 10 may act as a condenser that converts the vapor back into
liquid form. The liquid may return back to the bottom of the internal volume 1 12 to re-wet the silica derived CNT aerogel coating 106 so that the process may be repeated.
[0018] The heat may be dissipated away from the electronic device through the top second surface 1 10. In some examples, heat fins or other conductive materials may be coupled to an outer side of the second surface 1 10 to help further dissipate the heat away.
[0019] As noted above, the chemical properties and structural properties of the silica derived CNT aerogel coating 106 may help improve the efficiency of the heat transfer. The silica derived CNT aerogel coating 106 may have a high porosity that greatly increases the surface area available to perform the heat transfer. For example, the silica derived CNT aerogel coating 106 may have an approximately 90%-95% void. Said another way, the silica derived CNT aerogel coating 106 may have a surface area of approximately 250 square meters per gram (m2/g) to 1 ,000 m2/g.
[0020] In one example, the carbon nanotubes within the silica derived CNT aerogel coating 106 may have a diameter of approximately 7-12 nanometers (nm) and have a length of approximately 1 -3 microns (μιη). In one example, the silica derived CNT aerogel coating 106 may be sprayed on or applied to a thickness 1 18 of approximately 3-25 μιη.
[0021] FIG. 2 illustrates an example process flow diagram of how the vapor chamber 100 is formed. At block 202 a first metallic substrate 102i and a second metallic substrate 1022 are provided. The first metallic substrate 102i and the second metallic substrate 1022 may be two halves that are combined, as discussed below to form the metallic housing 102.
[0022] The first metallic substrate 102i and the second metallic substrate 1022 may be the same conductive metal. For example, the first metallic substrate 102i and the second metallic substrate 1022 may be copper, aluminum, stainless steel, and the like.
[0023] At block 204 a nickel coating 104 is applied to the first metallic substrate 102i and the second metallic substrate 1022. The nickel coating 104 may be applied via an electroplating process or a PVD process.
[0024] At block 206, a silica derived CNT aerogel coating 106 may be sprayed onto the nickel coating 104 of the first metallic substrate 102i and the second metallic substrate 1022. The silica derived CNT aerogel coating 106 may form the wick structure for the vapor chamber 100. Notably, the silica derived aerogel coating 106 may be sprayed on or applied without using lithography or sintering.
[0025] At block 208, the silica derived CNT aerogel coating 106 may be dried. In one example, the silica derived CNT aerogel coating 106 may be dried using a freeze drying process. The freeze drying process may be applied at a temperature of approximately -4 Celsius (°C) to -80 °C and at a pressure of approximately 4 x 10"4 to 5 x 10"4 milli-Torr (mTorr) for approximately 24 hours to 48 hours.
[0026] In another example, the silica derived CNT aerogel coating 106 may be dried using a supercritical drying process. The supercritical drying process may be applied at a temperature of approximately 35 °C to 250 °C and at a pressure of approximately 30 bar to 150 bar for approximately 30 minutes to 120 minutes.
[0027] At block 210, the silica derived CNT aerogel coating 106 may be cured. The curing may be performed at a temperature of approximately 300 °C to 500 °C for approximately 30 minutes to 40 minutes.
[0028] At block 212, the first metallic substrate 102i and the second metallic substrate 1022 may be welded together to form the vapor chamber 100 having the silica derived CNT aerogel coating 106 cured onto the nickel coating 104 on an inside 1 12 of the vapor chamber 100. In one implementation, the vapor chamber 100 may be vacuum sealed to remove any air from the inside 1 12 of the vapor chamber 100. In addition, a small amount of liquid, such as water, may be injected into the inside 1 12 of the vapor chamber 100 to wet the silica derived CNT aerogel coating 106.
[0029] FIG. 3 illustrates a flow diagram of an example method 300 for forming a silica derived carbon nanotube (CNT) aerogel of the present disclosure. At block 302, the method 300 begins.
[0030] At block 304, the method 300 reacts a mixture of
tetraethylorthosilicate (TEOS) and ethanol or isopropanol with an acid catalyst, while stirring for approximately 30-60 minutes at a room temperature. The acid catalyst may be one of carbonic acid, oxalic acid, phosphoric acid, hydrochloric acid or nitric acid. Room temperature may be defined to be approximately 20 °C.
[0031] At block 306 the method 300 ages the mixture for approximately 24 hours at a room temperature to form the silica derived CNT aerogel coating precursor. The silica derived CNT aerogel may form carbon nanotubes having a diameter of approximately 8-12 nm and a length of approximately 1 -3 μιη. As described above, the silica derived CNT aerogel may have a high porosity that creates a large surface area of approximately 250-1 ,000 m2/g.
[0032] FIG. 4 illustrates an example chemical structure 400 of the silica derived CNT aerogel. The chemical structure 400 shows that the silica derived CNT aerogel includes a high amount of hydroxyl (OH) groups 410 on silanol groups 402, 404 and 406. The large amounts of OH groups 410 provide a strong hydrogen bonding in order to have high water absorption and also enhance the capillary force ability of the silica derived CNT aerogel. These properties of the chemical structure 400 provide a very efficient heat transfer for the vapor chamber 100 and help improve the liquid return rate within the wick structure.
[0033] Referring back to FIG. 3, at block 308, the method 300 sprays the silica derived CNT aerogel to coat an inside nickel coated surface of a vapor chamber to a thickness of approximately 3 μιη to 25 μιη. The coating of the silica derived CNT aerogel may be dried and cured. In one example, the silica derived CNT aerogel coating precursor may be sprayed onto two halves of the metallic housing of the vapor chamber that are eventually welded together. At block 310, the method 300 ends.
[0034] As a result, the present disclosure provides a vapor chamber design that is more efficient to produce and that dissipates heat away more efficiently than currently used vapor chambers. The composition and structure of the silica derived CNT aerogel help to provide properties and characteristics that allow the silica derived CNT aerogel to be easily applied to the inside walls of the
vapor chamber and increase the efficiency of heat transfer of the vapor chamber.
[0035] In addition, the design of the vapor chamber of the present disclosure has a reduced thickness compared to vapor chambers produced via a copper powder sintering treatment. The light weight of the silica derived CNT aerogel coating also provides flexible design capability to match the design space for electronic devices with weight reduction.
[0036] With the improved efficiency of the heat transfer provided by the vapor chamber of the present disclosure, lifetimes of products such as liquid crystal display (LCD) panels, light emitting diodes (LEDs), computer processing unites (CPUs), batteries and the like may be extended. In addition, by efficiently cooling electronic devices, the vapor chamber of the present disclosure may improve speed, power efficiency and safety (e.g., reducing the risk of battery explosion) of these electronic devices.
[0037] It will be appreciated that variants of the above-disclosed and other features and functions, or alternatives thereof, may be combined into many other different systems or applications. Various presently unforeseen or unanticipated alternatives, modifications, variations, or improvements therein may be subsequently made by those skilled in the art which are also intended to be encompassed by the following claims.
Claims
1 . A method, comprising:
providing a first metallic substrate and a second metallic substrate;
applying a nickel coating to the first metallic substrate and the second metallic substrate;
spraying a silica derived carbon nanotube (CNT) aerogel coating onto the nickel coating of the first metallic substrate and the second metallic substrate; drying the silica derived CNT aerogel coating;
curing the silica derived CNT aerogel coating; and
welding the first metallic substrate to the second metallic substrate to form a vapor chamber having the silica derived CNT aerogel coating cured onto the nickel coating on an inside of the vapor chamber.
2. The method of claim 1 , wherein the first metallic substrate and the second metallic substrate each comprises at least one of: copper, aluminum or stainless steel.
3. The method of claim 1 , wherein the nickel coating is applied via at least one of: an electroplating process or a physical vapor deposition process.
4. The method of claim 1 , wherein the silica derived CNT aerogel is dried using a freeze drying process at a temperature of approximately -4 Celsius (°C) to -80 °C at a pressure of approximately 4 x 10"4 to 5 x 10"4 milli-Torr (mTorr) for approximately 24 hours to 48 hours.
5. The method of claim 1 , wherein the silica derived CNT aerogel is dried using a supercritical drying process at a temperature of approximately 35 Celsius (°C) to 250 °C at a pressure of approximately 30 bar to 150 bar for approximately 30 minutes to 120 minutes.
6. The method of claim 1 , wherein the silica derived CNT aerogel is cured at
a temperature of approximately 300 Celsius (°C) to 500 °C for approximately 30 minutes to 40 minutes.
7. A vapor chamber, comprising:
a metallic housing;
a nickel coating on inside walls of the metallic housing; and
a silica derived carbon nanotube (CNT) aerogel coating on the nickel coating on the inside walls of the metallic housing, wherein the silica derived CNT aerogel coating is sprayed onto the nickel coating, dried and cured.
8. The vapor chamber of claim 7, wherein the metallic housing comprises at least one of: copper, aluminum or stainless steel.
9. The vapor chamber of claim 7, wherein the silica derived CNT aerogel coating comprises carbon nanotubes having a diameter of approximately 8-12 nanometers (nm) and a length of approximately 1 -3 microns (μιη).
10. The vapor chamber of claim 7, wherein the silica derived CNT aerogel coating has a surface area of approximately 250-1 ,000 square meters per gram (m2/g).
1 1 . The vapor chamber of claim 7, wherein the silica derived CNT aerogel coating is sprayed to have a thickness of approximately 3 microns (μιη) to 25 μιη.
12. The vapor chamber of claim 7, wherein the inside walls of the metallic housing have a thickness of approximately 0.1 millimeter (mm) to 6 mm.
13. A method comprising:
reacting a mixture of tetraethylorthosilicate (TEOS) and ethanol or isopropanol with an acid catalyst, while stirring for approximately 30-60 minutes at a room temperature;
aging the mixture for approximately 24 hours at the room temperature to form a silica derived carbon nanotube (CNT) aerogel coating precursor; and spraying the silica derived CNT aerogel coating precursor to coat an inside nickel coated surface of a vapor chamber to a thickness of approximately 3 microns (μιη) to 25 μιη.
14. The method of claim 13, wherein the acid catalyst comprises at least one of: carbonic acid, oxalic acid, phosphoric acid, hydrochloric acid or nitric acid.
15. The method of claim 13, wherein the silica derived CNT aerogel comprises carbon nanotubes having a diameter of approximately 8-12 nanometers (nm) and a length of approximately 1 -3 μιη and has a surface area of approximately 250-1 ,000 square meters per gram (m2/g).
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201680088907.5A CN109715854A (en) | 2016-10-07 | 2016-10-07 | The coating of soaking plate |
US16/074,552 US10851460B2 (en) | 2016-10-07 | 2016-10-07 | Coating for a vapor chamber |
PCT/US2016/056017 WO2018067174A1 (en) | 2016-10-07 | 2016-10-07 | Coating for a vapor chamber |
EP16918448.8A EP3485062A4 (en) | 2016-10-07 | 2016-10-07 | Coating for a vapor chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2016/056017 WO2018067174A1 (en) | 2016-10-07 | 2016-10-07 | Coating for a vapor chamber |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2018067174A1 true WO2018067174A1 (en) | 2018-04-12 |
Family
ID=61831234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2016/056017 WO2018067174A1 (en) | 2016-10-07 | 2016-10-07 | Coating for a vapor chamber |
Country Status (4)
Country | Link |
---|---|
US (1) | US10851460B2 (en) |
EP (1) | EP3485062A4 (en) |
CN (1) | CN109715854A (en) |
WO (1) | WO2018067174A1 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999065821A1 (en) * | 1998-06-19 | 1999-12-23 | The Research Foundation Of State University Of New York | Free-standing and aligned carbon nanotubes and synthesis thereof |
US20090040726A1 (en) * | 2007-08-09 | 2009-02-12 | Paul Hoffman | Vapor chamber structure and method for manufacturing the same |
WO2010045904A2 (en) * | 2008-10-24 | 2010-04-29 | Kme Germany Ag & Co. Kg | Metal/cnt and/or fullerene composite coating on strip materials |
WO2013056847A1 (en) * | 2011-10-19 | 2013-04-25 | Tata Steel Uk Limited | Anti-scale and anti-corrosion hybrid coatings for steel substrates |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6063714A (en) * | 1995-11-16 | 2000-05-16 | Texas Instruments Incorporated | Nanoporous dielectric thin film surface modification |
US7732918B2 (en) | 2003-08-25 | 2010-06-08 | Nanoconduction, Inc. | Vapor chamber heat sink having a carbon nanotube fluid interface |
US20070284089A1 (en) | 2006-05-31 | 2007-12-13 | Intel Corporation | Method, apparatus and system for carbon nanotube wick structures |
CN101232794B (en) | 2007-01-24 | 2011-11-30 | 富准精密工业(深圳)有限公司 | Soaking plate and heat radiating device |
CN101309573A (en) | 2007-05-18 | 2008-11-19 | 富准精密工业(深圳)有限公司 | Even heating board and heat radiating device |
US9702636B2 (en) * | 2008-05-05 | 2017-07-11 | Cornell University | High performance wick |
US8323439B2 (en) * | 2009-03-08 | 2012-12-04 | Hewlett-Packard Development Company, L.P. | Depositing carbon nanotubes onto substrate |
US20100294467A1 (en) * | 2009-05-22 | 2010-11-25 | General Electric Company | High performance heat transfer device, methods of manufacture thereof and articles comprising the same |
CN102732070A (en) * | 2011-04-07 | 2012-10-17 | 陈群 | Construction of nano-carbon heat-conducting layer of electronic component |
US10018428B2 (en) | 2011-06-27 | 2018-07-10 | Raytheon Company | Method and apparatus for heat spreaders having a vapor chamber with a wick structure to promote incipient boiling |
CN102351494B (en) * | 2011-07-20 | 2013-07-24 | 厦门大学 | Method for preparing foam material reinforced silica aerogel composite material |
CN105392343A (en) * | 2015-12-11 | 2016-03-09 | 赛尔康技术(深圳)有限公司 | Radiating treatment structure |
-
2016
- 2016-10-07 CN CN201680088907.5A patent/CN109715854A/en active Pending
- 2016-10-07 US US16/074,552 patent/US10851460B2/en active Active
- 2016-10-07 WO PCT/US2016/056017 patent/WO2018067174A1/en unknown
- 2016-10-07 EP EP16918448.8A patent/EP3485062A4/en not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999065821A1 (en) * | 1998-06-19 | 1999-12-23 | The Research Foundation Of State University Of New York | Free-standing and aligned carbon nanotubes and synthesis thereof |
US20090040726A1 (en) * | 2007-08-09 | 2009-02-12 | Paul Hoffman | Vapor chamber structure and method for manufacturing the same |
WO2010045904A2 (en) * | 2008-10-24 | 2010-04-29 | Kme Germany Ag & Co. Kg | Metal/cnt and/or fullerene composite coating on strip materials |
WO2013056847A1 (en) * | 2011-10-19 | 2013-04-25 | Tata Steel Uk Limited | Anti-scale and anti-corrosion hybrid coatings for steel substrates |
Non-Patent Citations (1)
Title |
---|
See also references of EP3485062A4 * |
Also Published As
Publication number | Publication date |
---|---|
US10851460B2 (en) | 2020-12-01 |
CN109715854A (en) | 2019-05-03 |
EP3485062A1 (en) | 2019-05-22 |
EP3485062A4 (en) | 2020-03-11 |
US20190048476A1 (en) | 2019-02-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11333288B2 (en) | Aerogel laminate and thermal insulation material | |
US7694725B2 (en) | Heat dissipation system | |
Wang et al. | Highly thermally conductive graphene-based thermal interface materials with a bilayer structure for central processing unit cooling | |
US7874347B2 (en) | Heat pipe with hydrophilic layer and/or protective layer | |
US20080174963A1 (en) | Heat spreader with vapor chamber defined therein | |
CN106604607B (en) | A kind of no liquid-sucking core ultrathin heat pipe device | |
JP2007019453A (en) | Heat sink coated with carbon nano tube, and manufacturing method thereof | |
US8545933B2 (en) | Molecular fan | |
Choi et al. | Application of hexagonal boron nitride to a heat-transfer medium of an InGaN/GaN quantum-well green LED | |
US20190033007A1 (en) | Carbon nanotube and graphene aerogel heat pipe wick | |
US10851460B2 (en) | Coating for a vapor chamber | |
JP2012057841A (en) | Heat pipe, and manufacturing method thereof | |
JP2005228855A (en) | Radiator | |
CN105679725A (en) | Radiator for laser display and preparation method of radiator | |
CN103219250A (en) | Preparation method of graphene radiating fins | |
JP2018145330A (en) | Sol coating liquid | |
JP2009092344A (en) | Vapor chamber with superior heat transport characteristic | |
US20200340757A1 (en) | Expanded graphite-enhanced vapor-based heat transfer device and production process | |
US20160116132A1 (en) | Heat dissipating plate device for light emitting diode, head lamp for automobile and method for preparing the same | |
TWI599754B (en) | A heat pipe component and manufacture method thereof | |
US20120211203A1 (en) | Heat Dissipating Apparatus and Method for Improving the Same | |
WO2004109797A1 (en) | Heatsink for integrated circuit such as cpu | |
JP2005317742A (en) | Heat radiator for closed structure | |
JP2001237355A (en) | Heat transmitting method, heat sink and manufacturing method therefor | |
CN105890412A (en) | Plate type pulsating heat pipe and manufacturing method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 16918448 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2016918448 Country of ref document: EP Effective date: 20190212 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |