WO2013157033A1 - ケルビンコンタクトプローブおよびそれを備えたケルビン検査治具 - Google Patents
ケルビンコンタクトプローブおよびそれを備えたケルビン検査治具 Download PDFInfo
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- WO2013157033A1 WO2013157033A1 PCT/JP2012/002639 JP2012002639W WO2013157033A1 WO 2013157033 A1 WO2013157033 A1 WO 2013157033A1 JP 2012002639 W JP2012002639 W JP 2012002639W WO 2013157033 A1 WO2013157033 A1 WO 2013157033A1
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- Prior art keywords
- electrode
- land
- contact terminal
- side contact
- contact
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
Definitions
- the present invention relates to a contact probe and a Kelvin inspection jig provided with the contact probe, and more particularly to a Kelvin contact probe used when inspecting a semiconductor integrated circuit and a Kelvin inspection jig provided with the same.
- a measurement method using a Kelvin connection (four-terminal resistance measurement method) is known as a method for measuring a two-terminal circuit.
- the probe of the current supply circuit and the probe of the voltage measurement circuit are connected to each terminal of the two-terminal circuit, the circuit resistance of the current supply circuit and the voltage measurement circuit, and the contact between each probe and the terminal.
- a two-terminal circuit can be measured without being affected by resistance.
- Kelvin inspection jig for inspecting a semiconductor integrated circuit, a semiconductor device or the like (hereinafter referred to as “IC or the like”) using a measurement method by Kelvin connection, for example, the one disclosed in Patent Document 1 has been proposed.
- This Kelvin inspection jig has two contact probes arranged in parallel to each other.
- Each contact probe has an electrode-side tip that contacts the solder ball electrode of the IC and a land-side tip that contacts the land of the circuit board to which the inspection circuit is connected.
- Each electrode-side tip has two inclined surfaces inclined at different angles with respect to the axial direction of the contact probe, and ridge lines formed by these inclined surfaces, so that the ridge lines face each other. Has been placed.
- the ridge line at the tip of the electrode side touches the solder ball electrode, so that the oxide on the surface of the solder ball electrode is destroyed, and the contact probe and the solder ball electrode are separated. Secure electrical connection.
- the conventional Kelvin inspection jig has a configuration in which the ridge lines at the electrode side tip are opposed to each other. Therefore, when the electrode of an IC or the like is a solder ball, the pitch can be reduced to some extent. When the electrode is a planar electrode, there is a problem that it is difficult to cope with a narrow pitch.
- the present invention has been made in order to solve the conventional problems, can cope with the narrow pitch of the electrodes regardless of the electrode shape of the object to be inspected, and can avoid the increase in the manufacturing cost of the circuit board.
- An object of the present invention is to provide a Kelvin contact probe and a Kelvin inspection jig including the same.
- the Kelvin contact probe of the present invention comprises two contact probes that electrically connect one electrode provided on the object to be inspected and each of two lands provided on the circuit board.
- the other contact probe is a Kelvin contact probe arranged in parallel with each other, wherein the one and the other contact probes are the electrode-side contact terminals that are in contact with the electrodes.
- a land-side contact terminal that contacts the land, and a metal spring provided between the electrode-side contact terminal and the land-side contact terminal, the electrode-side contact terminal being a disc-shaped electrode side A contact terminal flange portion and a planar electrode side contact terminal circuit extending from the electrode side surface of the electrode side contact terminal flange portion.
- An electrode-side contact terminal rotation preventing portion comprising a prevention surface and a semi-arc surface electrode-side contact terminal semi-arc surface, and an inclination from the center of the tip of the electrode-side contact terminal semi-arc surface toward the electrode-side contact terminal flange portion
- An electrode-side inclined surface portion which is a surface and a cylindrical rod having a smaller diameter than the electrode-side contact terminal flange portion extending from the center of the land side surface of the electrode-side contact terminal flange portion,
- a land-side contact terminal rotation preventing portion a land-side inclined surface portion which is a surface inclined from the center of the tip of the land-side contact terminal semicircular arc surface toward the land-side contact terminal flange portion,
- one contact probe and the other contact probe are arranged such that the electrode side inclined surfaces face opposite sides, and the land side inclined surfaces face each other. Therefore, the pitch of the electrodes can be reduced regardless of the electrode shape of the object to be inspected, and an increase in the manufacturing cost of the circuit board can be avoided.
- the Kelvin contact probe of the present invention has a configuration in which each of the electrode side contact terminals has a plurality of vertices provided with at least one groove formed on the top of the electrode side inclined surface.
- the Kelvin contact probe of the present invention can bring a plurality of vertices into contact with the electrode of the object to be inspected, so that a more stable contact state can be obtained.
- the Kelvin inspection jig of the present invention is a Kelvin inspection jig provided with a Kelvin contact probe, wherein a housing in which a through hole for holding the one and the other contact probes is formed, and the electrode side contact terminals are provided. It has the structure provided with the electrode side holding body to hold
- the Kelvin inspection jig of the present invention can cope with the narrowing of the electrode pitch regardless of the shape of the electrode of the object to be inspected, and can avoid the increase in the manufacturing cost of the circuit board.
- the Kelvin inspection jig according to the present invention includes a connecting portion that is provided between the one contact probe and the other contact probe and connects the electrode side holding body and the land side holding body. Is desirable.
- the Kelvin inspection jig of the present invention has a configuration including a cover member that covers the outer circumferences of the one and the other contact probes.
- the present invention provides a Kelvin contact probe that can cope with a narrow pitch of electrodes regardless of the electrode shape of an object to be inspected, and can avoid an increase in manufacturing cost of a circuit board, and a Kelvin equipped with the Kelvin contact probe An inspection jig can be provided.
- FIG. 1 is a perspective view of a contact probe in a first embodiment of a Kelvin inspection jig according to the present invention.
- FIG. 3 is a configuration diagram around a contact probe in the first embodiment of the Kelvin inspection jig according to the present invention.
- It is a perspective view of the other aspect 1 of the contact probe in 1st Embodiment of the Kelvin inspection jig concerning the present invention.
- the Kelvin inspection jig 100 in this embodiment uses a BGA (Ball Grid Array) type IC 60 as an object to be inspected, and resistance between solder balls 61 and 62 provided on the lower surface of the IC 60. Is inspected by Kelvin connection.
- a circuit board 70 to which wirings (not shown) from a current supply circuit and a voltage measurement circuit are connected is arranged. Lands 71 to 74 are formed on the upper surface of the circuit board 70.
- the Kelvin inspection jig 100 includes contact probes 10, 20, 30 and 40, a casing 51, an electrode side holding body 52, a pressing plate 53, a screw 54, a land side holding body 55, and a screw 56.
- the contact probes 10 and 20 are in contact with the solder balls 61, and the contact probes 30 and 40 are in contact with the solder balls 62. As shown in the figure, the configuration of the contact probe 10 and the components of the contact probes 20, 30 and 40 are the same, but for the sake of convenience, reference numerals different from those of the contact probe 10 are given.
- the contact probes 10 and 20 and the contact probes 30 and 40 each constitute a Kelvin contact probe according to the present invention.
- the contact probe 10 includes a metal electrode-side contact terminal 11 that contacts the solder ball 61, a metal land-side contact terminal 12 that contacts the land 71, and the electrode-side contact terminal 11 and the land-side contact terminal 12. And a metal spring 13 provided on the surface.
- the contact probe 20 includes a metal electrode-side contact terminal 21 that contacts the solder ball 61, a metal land-side contact terminal 22 that contacts the land 72, and the electrode-side contact terminal 21 and the land-side contact terminal 22. And a metal spring 23 provided between the two.
- the electrode-side contact terminal 11 of the contact probe 10 extends from a disk-like electrode-side contact terminal flange portion 11a and an electrode side surface 11b of the electrode-side contact terminal flange portion 11a.
- An electrode side contact terminal rotation preventing portion 11e comprising a contact terminal rotation preventing surface 11c and a semicircular arc-shaped electrode side contact terminal semicircular arc surface 11d, and an electrode side contact terminal flange from the center of the tip of the electrode side contact terminal semicircular arc surface 11d
- An electrode side contact terminal columnar rod 11h having a diameter smaller than that of the electrode side contact surface flange portion 11a extending from the center of the land side surface 11g of the electrode side contact terminal flange portion 11a, which is a surface inclined toward the portion 11a. And comprising.
- the land-side contact terminal 12 of the contact probe 10 extends from the disk-like land-side contact terminal flange portion 12a and the land side surface 12b of the land-side contact terminal flange portion 12a and has a planar land-side contact terminal rotation prevention surface. 12c and a land-side contact terminal rotation preventing portion 12e composed of a land-side contact terminal semi-arc surface 12d having a semicircular arc surface shape, and from the center of the tip of the land-side contact terminal semi-arc surface 12d toward the land-side contact terminal flange portion 12a.
- the land-side inclined surface portion 12f which is an inclined surface
- the land-side contact terminal flange portion 12a extending from the center of the electrode side surface 12g of the land-side contact terminal flange portion 12a are smaller in diameter and the electrode-side contact terminal cylindrical rod 11h is inserted.
- the electrode-side contact terminals 11 and 21 and the land-side contact terminals 12 and 22 are formed by processing a metal cylindrical body.
- a metal cylindrical body For example, a triangular prism body or a polygonal column body is processed. You may form by what.
- the electrode-side inclined surface 11f is an inclined surface inclined from the center of the tip of the electrode-side contact terminal semicircular arc surface 11d toward the electrode-side contact terminal flange portion 11a, and the land-side inclined surface 12f is the land-side contact terminal semicircular arc surface 12d.
- the inclined surface is inclined from the center of the tip toward the land-side contact terminal flange portion 12a.
- the angle of each inclined surface with respect to the central axis of the contact probe 10 is about 45 degrees, but is not limited to this. Further, it is desirable that the electrode side inclined surface 11f and the land side inclined surface 12f are parallel to each other.
- the electrode side surface 11b of the electrode side contact terminal flange portion 11a and the land side surface 12b of the land side contact terminal flange portion 12a are pressed against the lower surface of the electrode side holding body 52 and the upper surface of the land side holding body 55 by the repulsive force of the spring 13, respectively. It is a guess.
- the cylindrical rod 11h is inserted into a hole formed in the cylindrical rod 12h, and a spring 13 is disposed on the outer periphery of the cylindrical rod 11h and the cylindrical rod 12h.
- the electrode-side contact terminal 11 and the land-side contact terminal 12 are electrically connected by at least one of the columnar bar 11h, the cylindrical bar 12h, or the spring 13.
- the configuration of the contact probe 20 is the same as the configuration of the contact probe 10 described above, the first character “1” of the reference character composed of three characters is set to “2”, and the second character and the third character. Are illustrated using the same characters, and the description is omitted.
- the contact probes 10 and 20 are arranged so that the electrode-side inclined surface 11f and the electrode-side inclined surface 21f face opposite sides, and the land-side inclined surface 12f and the land-side inclined surface. It arrange
- the tops of the electrode-side inclined surfaces 11f and 21f come close to each other and come into contact with the solder ball 61.
- the distance between these tops can be set to about 0.08 millimeters.
- the tops of the land-side inclined surfaces 12f and 22f are separated from each other and come into contact with the lands 71 and 72, respectively.
- the distance between these tops can be set to about 0.6 mm.
- the housing 51 is made of an electrically insulating material, and has a through hole 51a for holding the contact probe 10 and a through hole 51b for holding the contact probe 20 (FIG. 3B).
- An electrode side holding body 52 made of an electrically insulating material is disposed on the upper surface of the casing 51.
- a pressing plate 53 for fixing the electrode side holding body 52 is provided on the upper surface of the electrode side holding body 52, and the pressing plate 53 is fixed to the housing 51 by screws 54.
- the electrode-side holder 52 has through holes 52a and 52b that are semicircular when viewed from above (FIG. 3A).
- the planes corresponding to the straight portions of the through holes 52a and 52b are formed so as to face the rotation preventing surfaces 11c and 21c, respectively. With this configuration, the rotation preventing surfaces 11c and 21c can prevent the electrode side contact terminals 11 and 21 from rotating around the central axis.
- a land side holding body 55 made of an electrically insulating material is disposed on the lower surface of the housing 51.
- the land side holding body 55 is fixed to the housing 51 by screws 56.
- the land-side holding body 55 is formed with through holes 55a and 55b having a rectangular shape when viewed from below (FIG. 3C).
- the through holes 55a and 55b have opposing surfaces that oppose the rotation preventing surfaces 12c and 22c, respectively. With this configuration, the rotation preventing surfaces 12c and 22c can prevent rotation of the land-side contact terminals 12 and 22 around the central axis.
- the assembly process of the Kelvin inspection jig 100 will be briefly described.
- the contact probes 10 and 20 are inserted in the through-holes 51a and 51b, respectively.
- the land side contact terminals 12 and 22 are inserted into the through holes 55a and 55b, respectively, so that the land side inclined surface 12f of the contact probe 10 and the land side inclined surface 22f of the contact probe 20 face each other.
- the orientations of the electrode side inclined surfaces 11f and 21f are adjusted so that the electrode side inclined surface 11f of the contact probe 10 and the electrode side inclined surface 21f of the contact probe 20 face in opposite directions.
- the electrode side holding body 52 and the presser plate 53 are sequentially arranged on the upper surface of the housing 51, and the presser plate 53 is fixed to the housing 51 using the screws 54.
- the contact probes 30 and 40 are assembled in the same manner as the contact probes 10 and 20.
- the electrodes of the IC 60 have been described as the solder balls 61 and 62, but the present invention is not limited to this, and the present invention can be applied even when the IC 60 has planar electrodes with a narrow pitch.
- the electrode-side inclined surface 11f and the electrode-side inclined surface 21f are arranged so as to face opposite sides.
- the electrode-side inclined surfaces 11f and 21f can be surely brought into contact with the solder ball 61 even when the diameters of 62 and 62 are narrow pitches of about 0.26 millimeters and the distance between them is about 0.5 millimeters.
- the electrode-side inclined surface 11f and the electrode-side inclined surface 21f are arranged so as to face each other, when the IC 60 is mounted, a moment in a direction in which the electrode-side contact terminals 11 and 21 approach each other acts. As a result, the cylindrical rods 11h and 21h come into reliable contact with the cylindrical rods 12h and 22h of the land-side contact terminals 12 and 22.
- the land-side inclined surface 12f and the land-side inclined surface 22f are arranged so as to face each other, and therefore, the lands 71 to 74 of the circuit board 70 and the lands 71 to 74 are connected to them. There is no need to narrow the wiring pattern to be narrowed.
- the Kelvin inspection jig 100 can cope with the narrowing of the electrode pitch regardless of the electrode shape of the object to be inspected, and can avoid the increase in the manufacturing cost of the circuit board 70.
- the electrode-side contact terminal 14 shown in FIG. 4 has a V-shaped groove 14i formed at the top of the electrode-side inclined surface 14f, and has two apexes 14j and 14k.
- the electrode side contact terminal 14 applied to the contact probe 20 side is called an electrode side contact terminal 24
- the electrode side contact terminals 14 and 24 are in contact with the solder balls 61 as shown in FIG.
- FIG. 5 (a) is a view of the electrode side contact terminals 14 and 24 as viewed from the solder ball 61 side
- FIG. 5 (b) shows an A arrow view and a B arrow view in FIG. 5 (a).
- the four apexes 14j, 14k, 24j, and 24k are in contact with the solder ball 61, and a more stable contact state is obtained.
- channel formed in each top part of the electrode side contact terminals 14 and 24 is not limited to a V-shaped groove
- the contact probes 10A and 20A shown in FIG. 6 include land-side contact terminals 15 and 25, respectively.
- the land side contact terminal 15, the land-side inclined surface 15f 1 and 15f 2 are formed.
- the land side contact terminal 25, the land-side inclined surface 25f 1 and 25f 2 are formed.
- Land side inclined surface 15f 1 is not parallel to the electrode-side inclined surface 11h, also the land-side inclined surface 25f 1 is not parallel configuration the electrode side inclined surface 21f.
- the electrode-side contact terminal 11 the configuration of the land-side inclined surface 15f 1 and 15f 2, the configuration of the land-side inclined surface 25f 1 and 25f 2 on the electrode side contact terminal 21, may be applied, respectively.
- the contact probes 10B and 20B shown in FIG. 7 include land-side contact terminals 16 and 26, respectively.
- the tip end portion of the land side contact terminal 16 protrudes from a through hole 57a formed in the land side holding body 57, and a conical land side inclined surface 16f is formed at the tip end.
- the tip end portion of the land side contact terminal 26 protrudes from a through hole 57b formed in the land side holding body 57, and a conical land side inclined surface 26f is formed at the tip end.
- means for preventing rotation of the land side contact terminals 16 and 26 around the central axis is unnecessary.
- FIG. 8 (Other aspect 4) Furthermore, a configuration as shown in FIG.
- the contact probes 10C and 20C shown in FIG. 8 have the same components as the contact probes 10 and 20 shown in FIG. 3, but the directions of the land-side inclined surfaces 12f and 22f are different.
- the land side contact terminal 12 of the contact probe 10C is obtained by rotating the land side contact terminal 12 shown in FIG. 3 by 90 degrees counterclockwise when viewed from the lower surface side. is there. Further, the land-side contact terminal 22 of the contact probe 20C is obtained by rotating the land-side contact terminal 22 shown in FIG. 3 90 degrees clockwise as viewed from the lower surface side.
- the rotation angle of the land side contact terminals 12 and 22 is not limited to 90 degrees.
- the land-side holding body 55 is formed with a rectangular through hole 55c when viewed from below.
- the through hole 55c has a facing surface that faces the rotation preventing surfaces 12c and 22c. With this configuration, the rotation preventing surfaces 12c and 22c can prevent rotation of the land-side contact terminals 12 and 22 around the central axis.
- FIG. 9 is a view showing a Kelvin inspection jig 200 in the second embodiment of the present invention.
- the Kelvin inspection jig 200 in this embodiment includes a housing 81 and a holding body 82.
- the housing 81 is formed with a through hole 81a for holding the contact probes 10 and 20.
- the holding body 82 is integrally molded using an electrically insulating material.
- the holding body 82 includes an electrode side holding body 82a, a land side holding body 82b, and a connecting portion 82c that connects the electrode side holding body 82a and the land side holding body 82b.
- the electrode-side holder 82a has through holes 82d and 82e that are semicircular when viewed from above (FIG. 9A). With this configuration, the rotation preventing surfaces 11b and 21b can prevent the electrode side contact terminals 11 and 21 from rotating around the central axis.
- the land side holding body 82b has a rectangular shape when viewed from below. With this configuration, the rotation prevention surfaces 12c and 22c prevent rotation of the land-side contact terminals 12 and 22 around the central axis (FIG. 9C).
- the contact probes 10 and 20 are assembled into the holding body 82. Specifically, the electrode side contact terminal 11 of the contact probe 10 is inserted into the through hole 82d, and the land side surface 12b of the land side contact terminal 12 is placed on the upper surface of the land side holding body 82b while compressing the spring 13. Similarly, the contact probe 20 is incorporated in the holding body 82. As a result, the electrode-side inclined surface 11f and the electrode-side inclined surface 21f are configured to face opposite sides. Further, the land-side inclined surface 12f and the land-side inclined surface 22f are configured to face each other.
- the contact probe 10 and 20 incorporated in the holding body 82 is referred to as a “contact probe assembly”.
- the contact probe assembly is inserted into the through hole 81a from the upper surface side of the housing 81.
- the presser plate 53 is disposed on the upper surface of the housing 81, and the presser plate 53 is fixed to the housing 81 using the screws 54.
- the Kelvin inspection jig 200 has a configuration in which the contact probe assembly is manufactured in advance and incorporated in the housing 81, so that the assembly work is facilitated.
- FIG. 10 is a view showing a Kelvin inspection jig 300 in the third embodiment of the present invention.
- the Kelvin inspection jig 300 in this embodiment includes a housing 91 and a holding body 92.
- the housing 91 is formed with a through hole 91a for holding the contact probes 10 and 20, a receiving surface 91b for receiving a land side holding body 92b described later, and a through hole 91c for penetrating the land side contact terminals 12 and 22. ing.
- the holder 92 is formed using an electrically insulating material.
- the holding body 92 has a two-body structure, and includes an integrated electrode side holding body 92a, a connecting portion 92c and a cover member 92d, and a separate land side holding body 92b.
- the cover member 92d covers the outer periphery of the contact probes 10 and 20.
- the electrode-side holder 92a has through holes 92e and 92f that are semicircular when viewed from above (FIG. 10A).
- the through holes 92e and 92f have opposing surfaces that oppose the rotation preventing surfaces 11c and 21c, respectively. With this configuration, the rotation preventing surfaces 11c and 21c can prevent the electrode side contact terminals 11 and 12 from rotating around the central axis.
- the land-side holding body 92b is formed with through holes 92g and 92h having a rectangular shape when viewed from below (FIG. 10C).
- the through holes 92g and 92h have opposing surfaces that oppose the rotation preventing surfaces 12c and 22c, respectively. With this configuration, the rotation preventing surfaces 12c and 22c can prevent rotation of the land-side contact terminals 12 and 22 around the central axis.
- the contact probes 10 and 20 are assembled into the holding body 92. Specifically, the electrode side contact terminal 11 of the contact probe 10 is inserted into the through hole 92e, and the electrode side contact terminal 21 of the contact probe 20 is inserted into the through hole 92f. As a result, the electrode-side inclined surface 11f and the electrode-side inclined surface 21f are configured to face opposite sides.
- the directions of the land-side inclined surfaces 12f and 22f are adjusted so that the land-side inclined surface 12f of the contact probe 10 and the land-side inclined surface 22f of the contact probe 20 face each other.
- the land-side holding body 92b is attached to the connecting portion 92c and the cover member 92d while compressing the springs 13 and 23, and is bonded and fixed, for example, with an adhesive.
- This bonded and fixed contact probe assembly is inserted into the through hole 91a from the upper surface side of the housing 91.
- the presser plate 53 is arranged on the upper surface of the casing 91, and the presser plate 53 is fixed to the casing 91 using the screws 54.
- the Kelvin inspection jig 300 has a configuration in which the contact probe assembly is manufactured in advance and incorporated in the housing 91, so that the assembling work is facilitated.
- the Kelvin contact probe according to the present invention and the Kelvin inspection jig provided with the probe can cope with the narrow pitch of the electrodes regardless of the electrode shape of the object to be inspected, and increase the manufacturing cost of the circuit board. It is useful as a Kelvin contact probe used when inspecting the resistance value between the electrodes of the semiconductor integrated circuit, a Kelvin inspection jig equipped with the same, and the like.
- Rotation Prevention surface 11h, 21h columnar bar 12,15,16,22,25,26 land side contact terminals 12f, 15f 1, 15f 2, 16f, 22f, 25f 1, 26f 2 land side inclined surface 12h, 22h cylindrical rod 14i V-shaped groove 14j, 14k Vertex 51, 81, 91 Housing 51a, 51b, 81a, 91a Through hole 52, 82a, 92a Electrode side holding body 52a, 52b, 82d, 82e, 92e, 92f Through hole 53 Presser plate 54, 56 Screw 55 , 57, 82b, 92b Land side holding body 55a, 55b, 55c, 57a, 57b, 91c, 92g, 92h Through hole 60
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Abstract
Description
図1に示すように、本実施形態におけるケルビン検査治具100は、BGA(Ball Grid Array)タイプのIC60を被検査体とし、IC60の下面に設けられた半田ボール61と62との間の抵抗をケルビン接続により検査するものである。ケルビン検査治具100の下面側には、電流供給回路や電圧測定回路からの配線(図示省略)が接続される回路基板70が配置されている。回路基板70の上面にはランド71~74が形成されている。
この結果、円柱棒11hおよび21hはランド側接触端子12および22の円筒棒12hおよび22hと確実に接触することとなる。
本発明は前述の実施形態に限定されず様々な変形態様が可能である。例えば、前述の電極側接触端子11に代えて図4に示す構成とすることもできる。
また、前述の実施形態では、電極側傾斜面11fとランド側傾斜面12fとが互いに平行で、電極側傾斜面21fとランド側傾斜面22fとが互いに平行である構成例で説明したが、図6に示すような構成とすることもできる。
さらに、図7に示すような構成とすることもできる。図7に示したコンタクトプローブ10Bおよび20Bは、それぞれ、ランド側接触端子16および26を備える。ランド側接触端子16の先端部は、ランド側保持体57に形成された貫通孔57aから突出しており、先端に円錐状のランド側傾斜面16fが形成されている。同様に、ランド側接触端子26の先端部は、ランド側保持体57に形成された貫通孔57bから突出しており、先端に円錐状のランド側傾斜面26fが形成されている。この構成では、ランド側接触端子16および26の中心軸まわりの回転を防止する手段は不要である。
さらに、図8に示すような構成とすることもできる。図8に示したコンタクトプローブ10Cおよび20Cは、図3に示したコンタクトプローブ10および20に対して、構成要素はそれぞれ同じであるがランド側傾斜面12fおよび22fの向きが異なっている。
図9は、本発明の第2実施形態におけるケルビン検査治具200を示す図である。
図10は、本発明の第3実施形態におけるケルビン検査治具300を示す図である。
10A、10B、10C、20A、20B、20C コンタクトプローブ
11、14、21、24 電極側接触端子
11f、14f、21f、24f 電極側傾斜面
11c、12c、21c、22c 回転防止面(回転防止手段)
11h、21h 円柱棒
12、15、16、22、25、26 ランド側接触端子
12f、15f1、15f2、16f、22f、25f1、26f2 ランド側傾斜面
12h、22h 円筒棒
14i V字溝
14j、14k 頂点
51、81、91 筐体
51a、51b、81a、91a 貫通孔
52、82a、92a 電極側保持体
52a、52b、82d、82e、92e、92f 貫通孔
53 押え板
54、56 ねじ
55、57、82b、92b ランド側保持体
55a、55b、55c、57a、57b、91c、92g、92h 貫通孔
60 IC
61、62 半田ボール
70 回路基板
71~74 ランド
82、92 保持体
82c、92c 連結部
91b 受け面
92d カバー部材
100、200、300 ケルビン検査治具
Claims (5)
- 被検査体に設けられた1つの電極と回路基板に設けられた2つのランドのそれぞれとを電気的に接続する2本のコンタクトプローブからなり、一方のコンタクトプローブと他方のコンタクトプローブとが相互に軸平行に配置されたケルビンコンタクトプローブであって、
前記一方および前記他方のコンタクトプローブは、前記電極側に設けられ、前記電極に接触する電極側接触端子と、前記ランド側に設けられ、前記ランドに接触するランド側接触端子と、を備え、
前記一方および前記他方のコンタクトプローブは、前記電極に接触する電極側接触端子と、前記ランドに接触するランド側接触端子と、前記電極側接触端子と前記ランド側接触端子の間に設けられる金属製ばねとで構成され、
前記電極側接触端子は、円板状の電極側接触端子フランジ部と、前記電極側接触端子フランジ部の前記電極側面から延伸し、平面状の電極側接触端子回転防止面と半円弧面状の電極側接触端子半円弧面とからなる電極側接触端子回転防止部と、前記電極側接触端子半円弧面の先端中央から前記電極側接触端子フランジ部に向かって傾斜した面である電極側傾斜面部と、前記電極側接触端子フランジ部の前記ランド側面の中心から延伸する前記電極側接触端子フランジ部より小径の円柱棒とを有し、
前記ランド側接触端子は、円板状のランド側接触端子フランジ部と、前記ランド側接触端子フランジ部の前記ランド側面から延伸し、平面状のランド側接触端子回転防止面と半円弧面状のランド側接触端子半円弧面とからなるランド側接触端子回転防止部と、前記ランド側接触端子半円弧面の先端中央から前記ランド側接触端子フランジ部に向かって傾斜した面であるランド側傾斜面部と、前記ランド側接触端子フランジ部の前記電極側面の中心から延伸する前記ランド側接触端子フランジ部より小径であり前記円柱棒が挿入される円筒棒とを有し、
前記金属ばねは、前記電極側接触端子フランジ部の前記ランド側面と前記ランド側接触端子フランジ部の前記電極側面との間に設置され、
前記一方のコンタクトプローブと前記他方のコンタクトプローブとが、前記各電極側傾斜面が互いに反対側を向くように配置され、かつ、前記各ランド側傾斜面が互いに対向するように配置されたケルビンコンタクトプローブ。 - 前記各電極側接触端子は、前記電極側傾斜面の頂部に、少なくとも1つの溝が形成されて設けられた複数の頂点を有する請求項1に記載のケルビンコンタクトプローブ。
- 請求項1または請求項2に記載のケルビンコンタクトプローブを備えたケルビン検査治具であって、
前記一方および前記他方のコンタクトプローブを保持する貫通孔が形成された筐体と、
前記電極側接触端子を保持する電極側保持体と、
前記ランド側接触端子を保持するランド側保持体と、を備えたケルビン検査治具。 - 前記一方のコンタクトプローブと前記他方のコンタクトプローブとの間に設けられ、前記電極側保持体と前記ランド側保持体とを連結する連結部を備えた請求項3に記載のケルビン検査治具。
- 前記一方および前記他方のコンタクトプローブの外周を覆うカバー部材を備えた請求項4に記載のケルビン検査治具。
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PCT/JP2012/002639 WO2013157033A1 (ja) | 2012-04-17 | 2012-04-17 | ケルビンコンタクトプローブおよびそれを備えたケルビン検査治具 |
JP2014510955A JP6009544B2 (ja) | 2012-04-17 | 2012-04-17 | ケルビンコンタクトプローブおよびそれを備えたケルビン検査治具 |
MYPI2014703048A MY168477A (en) | 2012-04-17 | 2012-04-17 | A kelvin contact probe structure and a kelvin inspection fixture provided with the same |
KR1020147030029A KR101838347B1 (ko) | 2012-04-17 | 2012-04-17 | 켈빈 접촉 프로브 및 이를 포함하는 켈빈 검사 지그 |
US14/395,343 US9476912B2 (en) | 2012-04-17 | 2012-04-17 | Kelvin contact probe structure and a Kelvin inspection fixture provided with the same |
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US11971320B2 (en) * | 2019-09-30 | 2024-04-30 | Mitsubishi Electric Corporation | Inspection jig |
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US20230258688A1 (en) * | 2022-02-07 | 2023-08-17 | Johnstech International Corporation | Spring probe assembly for a kelvin testing system |
WO2024006449A1 (en) * | 2022-06-30 | 2024-01-04 | Microfabrica Inc. | Compliant probes including dual independently operable probe contact elements including at least one spring |
JP2024010473A (ja) * | 2022-07-12 | 2024-01-24 | 山一電機株式会社 | コンタクトピン及び検査用ソケット |
JP2024010472A (ja) * | 2022-07-12 | 2024-01-24 | 山一電機株式会社 | コンタクトピン及び検査用ソケット |
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JP6009544B2 (ja) | 2016-10-19 |
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US9476912B2 (en) | 2016-10-25 |
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