WO2009104821A1 - Oscillating structure and oscillator device using the same - Google Patents
Oscillating structure and oscillator device using the same Download PDFInfo
- Publication number
- WO2009104821A1 WO2009104821A1 PCT/JP2009/053625 JP2009053625W WO2009104821A1 WO 2009104821 A1 WO2009104821 A1 WO 2009104821A1 JP 2009053625 W JP2009053625 W JP 2009053625W WO 2009104821 A1 WO2009104821 A1 WO 2009104821A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- oscillating
- supporting member
- resilient supporting
- members
- resilient
- Prior art date
Links
- 230000003534 oscillatory effect Effects 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims description 55
- 238000003384 imaging method Methods 0.000 claims description 8
- 230000010355 oscillation Effects 0.000 description 33
- 239000000463 material Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000013461 design Methods 0.000 description 7
- 238000012937 correction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
- H03H9/02362—Folded-flexure
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
- H03H9/2457—Clamped-free beam resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18856—Oscillating to oscillating
Definitions
- This invention relates to an oscillating structure having a plurality of oscillating members and a plurality of resilient supporting members, an oscillator device using an oscillating structure, an optical deflecting device using an oscillator device, and an image forming apparatus using an optical deflecting device, for example.
- This optical deflecting device can be preferably used in an image forming apparatus such as a scanning display unit, a laser beam printer or a digital copying machine, for example .
- the resonance type optical deflecting devices have advantageous features such as: the optical deflecting device can made quite small in size; the power consumption is slow; there is theoretically no surface tilt of the mirror surface; and particularly the optical deflecting device made of Si monocrystal manufactured by semiconductor processes have theoretically no metal fatigue and have good durability (see U.S. Patent No. 4, 317, 611) .
- an image is formed by scanning a photosensitive member surface with a laser beam.
- the scan speed during the scan should desirably be made constant on the photosensitive member surface.
- optical scanning means to be used in the electrophotography after scanning the light beam by an optical deflecting device, optical correction is carried out.
- an imaging lens called an f ⁇ lens is used so as to convert a light beam reflectively deflected by a deflective reflection surface of the rotary polygonal mirror at a constant angular speed into a constant-speed scan beam upon the photosensitive member .
- an imaging lens called an arcsine lens is used to convert a light beam from a mirror having an angular speed changing sinusoidally into a constant-speed scan beam on a photosensitive member.
- a resonance type deflection device having oscillation modes of a fundamental frequency and a frequency three-fold of the fundamental frequency is used to accomplish approximately chopping wave driving (see U.S. Patent No. 4,859,846).
- a system comprising a nest type oscillating structure having a plurality of resilient supporting members and a plurality of oscillating members is used to accomplish approximately constant angular-speed driving (see International Publication No. WO2005/063613) .
- the present invention provides an oscillating structure and/or an oscillator device having the same by which the aforementioned inconveniences can be removed or reduced.
- an oscillating structure comprising: a supporting member; a first oscillating member; a second oscillating member; a first resilient supporting member configured to connect the supporting member and the first oscillating member and to support the first oscillating member for oscillatory motion around the supporting member as a central axis; and a second resilient supporting member configured to connect the first oscillating member and the second oscillating member and to support the second oscillating member movably relative to the first oscillating member; wherein the direction in which the first resilient supporting member extends from the supporting member to the first oscillating member and the direction in which the second resilient supporting member extends from the first oscillating member to the second oscillating member are opposite to each other.
- the first and second oscillating members and the first and second resilient supporting member may be made of a single piece of plate-like member. A portion of the first oscillating member and the first resilient supporting member, and the second oscillating member, the second resilient supporting member and a portion of the first oscillating member may be made from separate plate-like members, wherein the portions of the first oscillating member may be joined together.
- At least one of the first resilient supporting member and the second resilient supporting member may comprise a plurality of torsion springs.
- One of the first resilient supporting member and the second resilient supporting member which comprises a plurality of torsion springs may be configured to sandwich therein the other of the first resilient supporting member and the second resilient supporting member.
- the first resilient supporting member and the second resilient supporting member may- have a common torsion central axis.
- an oscillating structure comprising: a supporting member; a plurality of oscillating members; and a plurality of resilient supporting members; wherein, in an order from the supporting member, the resilient supporting members and the oscillating members are alternately connected, and wherein the direction in which an "n"th resilient supporting member connected to an "n"th oscillating member extends, where n is an integer not less than 1 as counted from the supporting member side, and the direction in which an "n+l"th resilient supporting member connected to an ⁇ n+l"th oscillating member extends are opposite to each other.
- an oscillator device comprising: an oscillating structure as recited above; and driving means configured to apply a torque to at least one of the first and second oscillating members of the oscillating structure.
- an optical deflecting device comprising: an oscillator device as recited above; and an optical deflection member disposed at least at the second oscillating member of the oscillator device.
- an image forming apparatus comprising: an optical deflecting device as recited above; a light source; an imaging optical system; and an object to be irradiated, wherein a light beam from the light source is scanned by the optical deflecting device and the scanned light is collected onto the obj ect .
- the overall size of the device can be made small yet it has a plurality of oscillating members.
- the number of products of oscillating structures obtainable from a single piece of wafer increases, and thus the cost of the oscillating structure decreases.
- an oscillator device using an oscillating structure of the present invention or an image forming apparatus such as a laser beam printer or a digital copying machine into which an optical deflecting device is incorporated can be made small in size.
- the oscillating structure of the present invention is comprised of a plurality of resilient supporting members and a plurality of oscillating members, it may have a plurality of oscillation modes.
- a resonance type oscillator device using the same a plurality of oscillation modes can be synthesized flexibly to produce a drive, in accordance with the application wherein the oscillator device is used. For example, it can produce in the oscillating member a desired oscillation around a central axis in which fluctuation of the angular speed is well suppressed.
- a resonance type oscillator device can be preferably used in an image forming apparatus such as a laser beam printer or a digital copying machine.
- FIG. IA and FIG. IB are diagrams illustrating an oscillating structure and an oscillator device according to a first embodiment of the present invention.
- FIG. 2A and FIG. 2B are diagrams illustrating a change with respect to time of the displacement angle of a sawtooth waveform and an approximately constant angular speed of an oscillating member according to the first embodiment of the present invention.
- FIG. 3A and FIG. 3B are diagrams illustrating a change with respect to time of the displacement angle of a chopping waveform and an approximately constant angular speed of an oscillating member according to a second embodiment of the present invention.
- FIG. 4A and FIG. 4B are diagrams illustrating an optical deflecting device according to an embodiment of the present invention .
- FIG. 5 is a diagram illustrating an image forming apparatus according an embodiment of the present invention.
- FIG. 6 is a plan view illustrating an oscillating structure according to a third embodiment of the present invention.
- FIG. 7 is a plan view illustrating an oscillating structure according to a fourth embodiment of the present invention.
- FIG. 8 is a perspective view illustrating an oscillating structure according to a fifth embodiment of the present invention.
- FIG. 9A and FIG. 9B are plan views illustrating a method of manufacturing an oscillating structure, according to an embodiment of the present invention.
- FIG. 1OA and FIG. 1OB are plan views illustrating a method of manufacturing an oscillating structure, according to another embodiment of the present invention.
- FIG. 1OC and FIG. 1OD are plan views illustrating a method of manufacturing an oscillating structure, according to another embodiment of the present invention.
- FIG. 11 is a plan view illustrating features of a method of manufacturing an oscillating structure in the present invention, in comparison with a comparative example.
- a basic structure of an oscillating structure may comprise a supporting member, a plurality of oscillating members and a plurality of resilient supporting members.
- a first resilient supporting member extending from the supporting member to the first oscillating member and a second resilient supporting member extending from the first oscillating member to the second oscillating member may extend in approximately opposite directions and may be folded back.
- the basic structure further comprises a third oscillating member, a third resilient supporting member extending from the second oscillating member to the third oscillating member and the second resilient supporting member extending from the first oscillating member to the second oscillating member may extend in approximately opposite directions and may be folded back again. If there is a necessary of providing a fourth oscillating member or more, such a folding structure may be repeated.
- a basic structure of an oscillating structure may comprise a supporting member, a plurality of oscillating members and a plurality of resilient supporting members, wherein, in an order from the supporting member, the resilient supporting members and the oscillating members may be connected alternately.
- the direction in which an ⁇ V n"th resilient supporting member connected to an ⁇ n"th oscillating member extends where n is an integer not less than 1 as counted from the supporting member side, and the direction in which an "n+l"th resilient supporting member connected to an ⁇ n+l"th oscillating member extends may be opposite to each other.
- a folding structure of a plurality of resilient supporting members as well as a structure of a plurality of resilient supporting members placed in series may be included.
- spacings should be held between adjacent oscillating members and resilient supporting members so that they do not contact each other during the operation.
- the ⁇ n"th resilient supporting member and the "n"th oscillating member may be considered as a pair, and all such pairs may be provided in the same plane. Alternatively, some pair or pairs may be provided in a separate plane which is perpendicularly spaced apart from a plane defined by the first resilient supporting member and the first oscillating member. If all the pairs of the resilient supporting members and the oscillating members are provided in the same plane, the spacings between them should be formed in the same plane. If there is a pair or pairs at a plane perpendicularly space apart, the spacings between the resilient supporting members and the oscillating members may be provided by the distance between the separate planes or by the spacings along the same plane. Alternatively, the spacings may be provided by both of them.
- the oscillating member may be supported for oscillatory motion (torsional oscillation) around the resilient supporting member.
- the resilient supporting member may function as a torsion spring.
- the size of the whole oscillating structure can be made small while a plurality of oscillating members are included.
- FIG. IA through FIG. 5 s first embodiment of an oscillating structure, an oscillator device, an optical deflecting device and an image forming apparatus according to the present invention will be described. First of all, using FIG-. IA through FIG. 3B, the structural features and the principle of operation of the oscillating structure and the oscillator device of the present embodiment will be explained.
- FIG. IA is a plan view showing an oscillating structure such as a small micro- oscillating structure, according to the present embodiment.
- This oscillating structure 106 comprises a pair of supporting members 101, a first oscillating member 102, a second oscillating member 103, a first torsion spring 104 which is comprised of a pair of springs (first resilient supporting members), and a second torsion spring 105 (second resilient supporting member) .
- Each spring of the first torsion spring 104 extends from a corresponding supporting member 101 to the first oscillating member 102, to support the first oscillating member 102 movably relative to the supporting member 101.
- the second torsion spring 105 which is a single piece of element extends from the first oscillating member 102 to the second oscillating member 103, to support the second oscillating member 103 movably relative to the first oscillating member 102.
- the first torsion spring 104 is configured so that, based on flexure of two spring elements, the oscillating structure produces torsional driving.
- the first torsion spring 104 and the second torsion spring 105 have a common axis X which is the center of torsional motion.
- various components of the device should preferably have a laterally symmetrical shape for stable operation. However, as a matter of course, depending on the application, the components may be formed to have a laterally asymmetrical shape.
- FIG. IB is a perspective diagram showing an oscillator device 110 of the present embodiment using an oscillating structure 106 mentioned above.
- the oscillator device is comprised of an oscillating structure 106 of FIG. IA having a rod-like permanent magnet 107 mounted thereon, the oscillating structure 106 being is attached to a support member 109 having an electromagnetic coil 108 mounted thereon.
- the permanent magnet 107 and the electromagnetic coil 108 constitute driving means for applying a torque to at least one of the first and second oscillating members.
- a pair of supporting members 101 of the oscillating structure 106 are attached to a pair of protrusions of the supporting member 109, respectively.
- the electromagnetic coil 108 on a planar member of the supporting member 109 is disposed near the permanent magnet 107 on the first oscillating member 102 of the oscillating structure 106.
- an electric current is applied to the electromagnetic coil 108 of the oscillator device 110 having the structure described above from drive control means for controlling the driving means, a repulsive force and an attraction force are produced between it and the permanent magnet 107.
- the magnetic poles of the permanent magnet 107 are so arranged to produce such repulsive force and attraction force, and the electric wiring of the electromagnetic coil 108 is set accordingly.
- a torque around the axis X acts on the oscillating structure 106, and thus the oscillating member is oscillated.
- a force couple is given to the permanent magnet 107 and it causes the oscillating structure 106 to produce oscillatory motion around the axis X.
- the frequency of the spacing of the electric current to be applied to the electromagnetic coil 108 is made approximately equal to the natural oscillation frequency of the natural oscillation mode of the oscillating structure 106 or to an n-fold of the same (n is an integer)
- the torsion angle (oscillation amplitude) of the oscillating structure 106 can be increased.
- the oscillating structure 106 of the present embodiment has a plurality of discrete natural oscillation modes. Then, in the discrete natural oscillation modes, a reference oscillation mode which is a natural oscillation mode of a reference frequency and an integral-multiple oscillation mode which is a natural oscillation mode of a frequency approximately n-fold the reference frequency (n is an integer) are included.
- a reference oscillation mode which is a natural oscillation mode of a reference frequency
- an integral-multiple oscillation mode which is a natural oscillation mode of a frequency approximately n-fold the reference frequency (n is an integer)
- the structure has various natural oscillation modes.
- the oscillating structure 106 of the present embodiment it has a mode in which the first torsion spring 104 and the second torsion spring 105 are twisted in the same direction around the axis X, and a mode in which they are twisted in an opposite direction.
- the oscillating structure 106 operates to produce torsional oscillation so that the torsional oscillations of the first oscillating member 102 and the second oscillating member 103 match a combination of A-C (combination of oscillations in the same direction) or, alternatively, a combination of B-C (combination of oscillations in opposite directions) .
- the combination of A-C will be referred to as a translational mode, while the combination of B-C will be referred to as a regress mode.
- a change with respect to time of the displacement angle of the oscillating member in the sawtooth waveform can be obtained. This is explained in Patent Document No. 1 mentioned hereinbefore.
- the shape of the device or the like can be designed so that the translational mode is produced at sin( ⁇ -t) and the regress mode is produced at sin(2- ⁇ -t) and, while multiplying them by respective predetermined coefficients, these are added to each other (equation 1) .
- the angular speed F(t) shown in FIG. 2B can be obtained.
- an approximately constant angular speed time 201 as well as an approximately constant angular speed range (speed variation tolerance range) 202 can be determined.
- the approximately constant angular speed range and the approximately constant angular speed time can be changed depending on the application or the design, For example, these can be changed by changing the value of 0.2 in equation (1) .
- the time in which the displacement angle of the second oscillating member 103 increases and the time in which the increased displacement angle decreases are different .
- the approximately constant angular speed range and the approximately constant angular speed time can be determined.
- the approximately constant angular speed range can be used promptly and repeatedly. This waveform is particularly suitable when a photosensitive member should be scanned by a laser beam, by one direction scan.
- the oscillating structure 106 of the present embodiment shown in FIG. IA has such shape that the first torsion spring 104 and the second torsion spring 105 extend in parallel to each other and then these are folded, the size thereof can be made particularly small. As a result, the manufacturing cost can be reduced, and the size of an image forming device having such optical deflecting device can be reduced as well.
- the first torsion spring 104 comprises a plurality of springs, and the second torsion spring 105 is sandwiched by the first torsion spring 104.
- the torsion central axes of these springs can be easily aligned with each other. With this structure, unwanted shift of the torsion center during the operation can be avoided, and stable oscillation of the oscillating structure is assured.
- the oscillating structure of the present embodiment will be explained furthermore.
- the oscillating structure 106 of the present embodiment shown in FIG. IA has two first torsion springs 104. These springs have a clearance between it and the second torsion spring 105, so that they do not contact with the second torsion spring 105 during the oscillation. If the stress to be applied to the spring is taken into account, it is desirable that the first torsion spring 104 is close to the second torsion spring 105.
- the first torsion spring 104 is formed in parallel to the second torsion spring 105. If it is desired to prolong the spring length from the standpoint of stress or frequency design, the first torsion spring 104 may be formed obliquely to the second torsion spring 105 or it may be formed in a meander shape.
- a fillet may be provided at the joint between the torsion spring 104, 105 and the oscillating member 102, 103 and the supporting member 101 as required. With the provision of such fillet, the stress at such portion can be dispersed, and a larger amplitude oscillation is enabled.
- the second torsion spring 105 is comprised of a single spring, it may be made of plural springs. This can be chosen based on the stress to the torsion spring, resonance mode, frequency design or the like.
- the oscillator device 110 of the present embodiment shown in FIG. IB is operated by an electromagnetic force. Furthermore, in FIG. IB, the permanent magnet 107 is comprised of a single piece. However, the oscillator device of the present embodiment is not limited to this. A plurality of permanent magnets may be mounted on both surface of the first oscillating member 102. Alternatively, a throughbore may be formed in a portion of the first oscillating member 102, and a permanent magnet may be fitted therein. The number of used permanent magnets as well as the placement of installation may be determined by the cost, influence on dynamic characteristic and necessary magnetic force, etc.
- an electromagnetic coil may be formed on the first oscillating member 102, and a magnet may be mounted at the position of the electromagnetic coil of FIG. IB.
- the driving means anything other than the electromagnetic force may be used.
- a piezoelectric member may be adhered at a suitable position (e.g., on the supporting member 109), and it may be used as a driving force source.
- an electrode of comb-tooth shape may be provided at a suitable position (e.g., the first oscillating member 102 or the first torsion spring 104), and the device is driven by an electrostatic attraction.
- FIG. 4A shows that an optical deflection member 401 is formed on the second oscillating member 103 of the oscillating structure 106 of the present embodiment.
- FIG. 4B is a perspective view showing an optical deflecting device 402 of the present embodiment using an oscillating structure 106.
- a rod-like permanent magnet 107 is attached to the first oscillating member 102 of the oscillating structure 106 of FIG. 4A, and this oscillating structure 106 is attached to the supporting member 109 having an electromagnetic coil 108 mounted thereon.
- the optical deflection member can be selected depending on the light source used in the image forming apparatus, for example.
- the optical deflection member is used to deflect light from a light source.
- the optical deflection member is formed on at least the second oscillating member 103.
- it may be formed to cover the first oscillating member 102, torsion springs 104 and 105 and the supporting member 101.
- the optical deflecting device 402 can be constituted by an oscillator device and an optical deflection member 401 disposed on at least the second oscillating member 103.
- the optical deflection member may be provided on both sides of the second oscillating member 103, if necessary. In that occasion, optical deflection can be done using both sides of the second oscillating member 103. This is suitable for a color image forming apparatus using a plurality of light sources.
- a laser beam 502 emitted from a light source 501 is deflected by an optical deflecting device 504, through an output optical system 503.
- the direction of deflection is determined by the operation of the optical deflecting device 504.
- the deflected light beam is collected on a photosensitive member 506 which is an object to be irradiated, through an imaging optical system 505.
- the laser light 502 is projected onto the photosensitive member 506 while being appropriately turned on or off in accordance with a desired image.
- an electric potential pattern is formed on the photosensitive member 506.
- toner particles are adhered to the photosensitive member 506 depending on the pattern, and the attached toner is transferred to a recording medium (not shown) through a transfer belt, as required.
- toner fixation and the like are carried out.
- the operation control of the oscillator device in the image forming apparatus of the present embodiment may be performed as follows, as an example.
- one or two beam detectors are provided in the vicinity of the opposite ends of the deflection range of the laser beam 502 and, by measuring the time when the light beam passes across the beam detector, the state of oscillation of the oscillating member is detected.
- the motion control is performed based on this.
- the position of the beam detector can be changed.
- the beam detector may be provided close to the optical deflecting device 504.
- an image forming apparatus can be constituted by an optical deflecting device 504, a light source 501 and and imaging optical system 508.
- the motion control can be done by providing a piezoresistance sensor in a portion of the torsion spring 104 or 105.
- the oscillation state of the oscillating member may be detected using an induced electromotive force which occurs in the electric coil, and the motion control can be done based on it.
- the size of the whole system can be made small while a plurality of oscillating members are included. Furthermore, if it is necessary to thicken the material so as to deal with a problem of dynamic flexure of the components all parts to meet higher-speed driving, even if the resilient supporting member is lengthened, the size of the whole oscillating structure can be made compact.
- a second embodiment will be explained.
- the basic structure is the same as the first embodiment. Referring to FIGS. 3A and 3B, the operation of the oscillator device of the second embodiment will be explained.
- a triangle waveform such as shown in FIG. 3A is accomplished.
- the shape of the device or the like can be designed so that the translational mode is produced at sin( ⁇ # t) and the regress mode is produced at sin(3- ⁇ -t+ ⁇ ) and, while multiplying them by respective predetermined coefficients, these are added to each other (equation 2).
- ⁇ 2- ⁇ -f
- f 1000 [Hz] is used here.
- equation (2) is differentiated, the angular speed F(t) shown in FIG. 3B can be obtained.
- an approximately constant angular speed time 301 as well as an approximately constant angular speed range (speed variation tolerance range) 302 can be determined.
- the approximately constant angular speed range and the approximately constant angular speed time can be changed depending on the application or the design For example, these can be changed by changing the value of 0.06 in equation (1) .
- the approximately constant angular speed range and the approximately constant angular speed time can be determined.
- the approximately constant angular speed range can be used promptly and repeatedly. This waveform is particularly suitable when a photosensitive member should be scanned by a laser beam, by reciprocal scan.
- FIG.6 is a plan view which shows an oscillating structure of the present embodiment.
- a first oscillating member 702 and a second oscillating member 703 are connected by use of two second torsion springs 705.
- the supporting member 701 and the first torsion spring 704 are sandwiched by two second torsion springs 705.
- the shape of the present embodiment is effective when deformation of the second oscillating member 703 during operation should be reduced.
- the second torsion spring 705 is comprised of a plurality of springs, and the first torsion spring 704 is sandwiched by the second torsion spring 705 consisting of a plurality of springs.
- the operation and advantageous features of the present embodiment are similar to that of the first embodiment.
- At least one of the first resilient supporting member and the second resilient supporting member can be comprised of a plurality of torsion springs. Furthermore, one of the first resilient supporting member and the second resilient supporting member which comprises a plurality of torsion springs, can be configured to sandwich therein the other of the first resilient supporting member and the second resilient supporting member.
- FIG.7 is a plan view which shows an oscillating structure of the present embodiment.
- a second oscillating member 803 is sandwiched by two first torsion springs 804.
- a supporting member 801 is connected to a first oscillating member 802 by means of two first torsion springs 804, and the first oscillating member 802 is connected to a second oscillating member 803 by means of a second torsion spring 805.
- the distance between the supporting member 801 and the first oscillating member 802 can be made relatively large.
- an electromagnetic coil is provided in the vicinities of the first oscillating member 802, for example, the position of installment thereof or the size thereof can be chosen relatively freely.
- the operation and advantageous features of the present embodiment as well are similar to that of the first embodiment.
- FIG.8 is s perspective view which shows an oscillating structure of the present embodiment.
- a portion of a first oscillating member 902 and a first torsion spring 904 and a supporting member 901 are made from a single piece of plate-like material.
- a second oscillating member 903 and a second torsion spring are made from a single piece of plate-like material.
- first oscillating member 902 905 and a portion of the first oscillating member 902 are made from a single piece of plate-like material. The aforementioned portions of the first oscillating member 902 are connected together.
- a spacer 905 and a portion of the first oscillating member 902 are made from a single piece of plate-like material. The aforementioned portions of the first oscillating member 902 are connected together.
- the first torsion spring and the second torsion spring 905 can be made as a single piece of torsion spring.
- the first torsion spring and the second torsion spring may be comprised of a plurality of torsion springs. If each torsion spring 904 or
- the oscillating members 901 and 903 can be oscillated only by the torsion (no flexure) of the torsion springs 904 and 905. Therefore, the air resistance of the spring can be almost disregarded, and there is almost no necessity of taking into account the jitter due to the air resistance of the spring, which is related to the instability of the oscillation.
- the oscillating structure is made from one piece of board material, if there is a defect in the torsion springs or the oscillating member, the oscillating structure itself becomes defective.
- the components are assembled into an oscillating structure as in the present embodiment, since only non-defective parts can be chosen and assembled, the waste is considerably reduced.
- first oscillating member and the first resilient supporting member and the second oscillating member and the second resilient supporting member and a portion of the first oscillating member are made from separate plate- like materials, and the portions of the first oscillating member are joined together.
- the operation and advantageous features of the present embodiment as well are similar to that of the first embodiment.
- FIG. 9A through 11 an example of a method of manufacturing an oscillating structure according to the present invention will be described.
- a board material which is the material for the oscillating structure is prepared.
- a metallic material or a metal oxide may be used.
- an oscillating structure such as a micro-oscillating structure which has superior mechanical characteristics can be produced.
- an oscillating structure having high Q-value e.g., large oscillation with low electric voltage
- having an oscillating member which less flexed during the oscillation can be produced.
- a semiconductor process can be used for processing the monocrystal silicon. Therefore, by processing and finishing monocrystal silicon at a micrometer order, an oscillating structure having a resonance frequency as approximately exactly as designed can be accomplished.
- a masking layer is formed on the board material, and an appropriate opening is formed in the masking layer. The portion of the board material being exposed through the opening is removed to form a throughbore 1002 there. By doing so, an oscillating structure 1001 before separation is obtained as shown in FIG. 9A.
- anyone may be chosen from processing methods such as laser machining, sand blast, dry etching and wet etching .
- the oscillating structure since the oscillating structure is made integrally, it can be manufactured very precisely. Particularly, this embodiment is suited to a case where the oscillating structure should be made exactly to have a target resonance frequency. In the manufacturing method shown in
- all the throughbores are a quadrangular hole 1100. This is particularly effective when the throughbore is formed using crystal anisotropy etching which is a wet etching process. This is because the quadrangular hole can be easily formed by the crystal anisotropy etching .
- the oscillating structure before separation is cut and disconnected along a cutting plane line shown in FIG. 1OB, and additional machining is done at additional processing portions 1101 shown in FIG. IOC.
- a laser processing machine may be used, for example, for this addition machining.
- an oscillating structure such as a micro-oscillating structure shown in FIG. 1OD is obtained.
- This oscillating structure is provided with a weight adjusting member 1107 for the first oscillating member 1103, and a weight adjusting member 1108 for the second oscillating member 1104. If the weight of each oscillating member or bilateral balance thereof across the torsion central axis should be adjusted, the weight adjusting member may be cut furthermore or, alternatively, a groove or hole may be formed.
- An additional weight adjusting member may be attached.
- the weight adjusting member may be provided at only one oscillating member.
- This oscillating structure as well comprises a pair of supporting members 1102, a first oscillating member 1103, a second oscillating member 1104, a first torsion spring 1105 which is comprised of a pair of springs (first resilient supporting members), and a second torsion spring 1106 which is the second resilient supporting member.
- FIG. 11 visually illustrates the increase of the number of product oscillating structures obtainable per a single wafer, in comparison with the case of an oscillating structure having a plurality of resilient supporting members disposed in series.
- serial disposition it is clear that there is one more oscillating structure at the zone where the area has increased and, thus, the number of the oscillating structures obtainable per a single wafer is necessarily decreased (in the illustrated example, the number becomes about a half) .
- a large amount of material has to be removed, resulting in a large waste.
- the number of the oscillating members and the number of the resilient supporting members are two. However, the number may be three or more. In that occasion, the number of natural oscillation modes can be increased as well, and a wider variety of mode combinations can be accomplished for the driving.
- the design of the oscillatory motion of the oscillating member can be made in various ways.
- the approximately constant speed region can be widened. As a result of this, the region out of the scan region which can be used for the approximately constant speed can be widened.
- the constant speed characteristics of the approximately constant speed can be improved as well. For example, the lens correction is facilitated furthermore.
- the second resilient supporting member 105 may be comprised of two springs and, between these two second resilient supporting members, a third resilient supporting member may be extended from the second oscillating member 103 while being turned around therefrom, and a third oscillating member may be provided at the tip end thereof.
- a third resilient supporting member comprised of two springs may be extended while being turned around from the second oscillating member 703, and a third oscillating member may be provided at the tip end thereof.
- the second resilient supporting member 805 may be comprised of two springs and, between these two second resilient supporting members, a third resilient supporting member may be extended while being turned around from the second oscillating member 803, and a third oscillating member may be provided at a tip end thereof.
- the second oscillating member 903 may have a structure such as the first oscillating member 902, and a third resilient supporting member may be extended while being turned around from the second oscillating member 903, and a third oscillating member may be provided at the tip end thereof.
- the structures described above may be combined in an appropriate way.
- the number of the oscillating member is three or more, the structure of FIG. 8 can be easily combined with other embodiments.
- an oscillating structure including three or more oscillating members and three or more resilient supporting members
- a structure having a plurality of resilient supporting members disposed in series may be included.
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Laser Beam Printer (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009801054932A CN101952764B (en) | 2008-02-20 | 2009-02-20 | Oscillating structure and oscillator device using the same |
US12/745,628 US20100302612A1 (en) | 2008-02-20 | 2009-02-20 | Oscillating structure and oscillator device using the same |
EP09711677A EP2245496A1 (en) | 2008-02-20 | 2009-02-20 | Oscillating structure and oscillator device using the same |
KR1020107020312A KR101109286B1 (en) | 2008-02-20 | 2009-02-20 | Oscillating structure, oscillator device using the same, optical deflecting device, and image forming apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008039002A JP5554895B2 (en) | 2008-02-20 | 2008-02-20 | Oscillator structure and oscillator device using the oscillator structure |
JP2008-039002 | 2008-02-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009104821A1 true WO2009104821A1 (en) | 2009-08-27 |
Family
ID=40637204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/053625 WO2009104821A1 (en) | 2008-02-20 | 2009-02-20 | Oscillating structure and oscillator device using the same |
Country Status (6)
Country | Link |
---|---|
US (1) | US20100302612A1 (en) |
EP (1) | EP2245496A1 (en) |
JP (1) | JP5554895B2 (en) |
KR (1) | KR101109286B1 (en) |
CN (1) | CN101952764B (en) |
WO (1) | WO2009104821A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5590036B2 (en) * | 2009-09-28 | 2014-09-17 | コニカミノルタ株式会社 | Interference optical system and spectroscope equipped with the same |
JP5264954B2 (en) * | 2011-03-30 | 2013-08-14 | 富士フイルム株式会社 | Mirror drive apparatus and method |
CN106324959B (en) * | 2015-07-01 | 2018-08-21 | 中强光电股份有限公司 | Vibrate lens module and projection arrangement |
KR102205570B1 (en) | 2018-09-12 | 2021-01-20 | 김홍기 | Root plant hydroponic cultivation sheet |
FR3089850B1 (en) * | 2018-12-18 | 2020-12-18 | Paris Sciences Lettres Quartier Latin | System for controlled depositing of a fluid on a substrate |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4859846A (en) * | 1988-07-21 | 1989-08-22 | Burrer Gordon J | Dual-mode resonant scanning system |
US6392776B1 (en) * | 1996-06-28 | 2002-05-21 | Olympus Optical Co., Ltd. | Optical scanner |
WO2005063613A1 (en) * | 2003-12-25 | 2005-07-14 | Canon Kabushiki Kaisha | Micro-oscillating member, light-deflector, and image-forming apparatus |
WO2008038649A1 (en) * | 2006-09-27 | 2008-04-03 | National Institute Of Advanced Industrial Science And Technology | Optical scanning device |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4317611A (en) * | 1980-05-19 | 1982-03-02 | International Business Machines Corporation | Optical ray deflection apparatus |
US6384406B1 (en) * | 1999-08-05 | 2002-05-07 | Microvision, Inc. | Active tuning of a torsional resonant structure |
JP2002023097A (en) * | 2000-07-10 | 2002-01-23 | Olympus Optical Co Ltd | Torsional oscillator |
JP2002202474A (en) | 2000-12-28 | 2002-07-19 | Victor Co Of Japan Ltd | Optical deflector |
US20050280879A1 (en) | 2004-02-09 | 2005-12-22 | Gibson Gregory T | Method and apparatus for scanning a beam of light |
JP4037394B2 (en) * | 2004-09-16 | 2008-01-23 | 株式会社東芝 | Micro mechanical devices |
JP4574396B2 (en) * | 2005-03-02 | 2010-11-04 | キヤノン株式会社 | Optical deflector |
JP2006309098A (en) | 2005-05-02 | 2006-11-09 | Advanced Numicro Systems Inc | Dimensional specification of mems scanning mirror with rib and tapered comb-teeth |
JP4193817B2 (en) * | 2005-06-22 | 2008-12-10 | セイコーエプソン株式会社 | Actuator |
JP5170983B2 (en) * | 2006-05-30 | 2013-03-27 | キヤノン株式会社 | Optical deflector and optical instrument using the same |
JP4285568B2 (en) * | 2007-01-10 | 2009-06-24 | セイコーエプソン株式会社 | Actuator, optical scanner and image forming apparatus |
JP5007648B2 (en) * | 2007-10-12 | 2012-08-22 | セイコーエプソン株式会社 | Actuator, optical scanner and image forming apparatus |
-
2008
- 2008-02-20 JP JP2008039002A patent/JP5554895B2/en not_active Expired - Fee Related
-
2009
- 2009-02-20 WO PCT/JP2009/053625 patent/WO2009104821A1/en active Application Filing
- 2009-02-20 EP EP09711677A patent/EP2245496A1/en not_active Withdrawn
- 2009-02-20 KR KR1020107020312A patent/KR101109286B1/en not_active IP Right Cessation
- 2009-02-20 CN CN2009801054932A patent/CN101952764B/en not_active Expired - Fee Related
- 2009-02-20 US US12/745,628 patent/US20100302612A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4859846A (en) * | 1988-07-21 | 1989-08-22 | Burrer Gordon J | Dual-mode resonant scanning system |
US6392776B1 (en) * | 1996-06-28 | 2002-05-21 | Olympus Optical Co., Ltd. | Optical scanner |
WO2005063613A1 (en) * | 2003-12-25 | 2005-07-14 | Canon Kabushiki Kaisha | Micro-oscillating member, light-deflector, and image-forming apparatus |
WO2008038649A1 (en) * | 2006-09-27 | 2008-04-03 | National Institute Of Advanced Industrial Science And Technology | Optical scanning device |
Non-Patent Citations (1)
Title |
---|
JAE-HYUK PARK ET AL: "Practical High-Speed Metal-Based Optical Microscanning Devices with Low Production Cost", MICRO ELECTRO MECHANICAL SYSTEMS, 2006. MEMS 2006 ISTANBUL. 19TH IEEE INTERNATIONAL CONFERENCE ON ISTANBUL, TURKEY 22-26 JAN. 2006, PISCATAWAY, NJ, USA,IEEE, 22 January 2006 (2006-01-22), pages 730 - 733, XP010914349, ISBN: 978-0-7803-9475-9 * |
Also Published As
Publication number | Publication date |
---|---|
KR101109286B1 (en) | 2012-01-31 |
EP2245496A1 (en) | 2010-11-03 |
JP2009198702A (en) | 2009-09-03 |
JP5554895B2 (en) | 2014-07-23 |
KR20100121658A (en) | 2010-11-18 |
US20100302612A1 (en) | 2010-12-02 |
CN101952764B (en) | 2013-01-02 |
CN101952764A (en) | 2011-01-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1708004B1 (en) | Light deflector | |
US7355774B2 (en) | Optical deflector and optical apparatus using the same | |
US7656570B2 (en) | Optical deflector and optical instrument using the same | |
KR101050915B1 (en) | Optical deflector and optical device using same | |
US7557972B2 (en) | Oscillator device, optical deflector and optical instrument using the same | |
JP2007322466A (en) | Optical deflector and optical equipment using the same | |
US20100150612A1 (en) | Oscillator device and method of manufacturing the same | |
JP5400925B2 (en) | Oscillator device, optical deflector, and optical apparatus using the same | |
US20100302612A1 (en) | Oscillating structure and oscillator device using the same | |
WO2009011405A1 (en) | Oscillator device and optical deflector using the same | |
JP2008191537A (en) | Vibrating element and light deflector equipped with the same | |
KR100939499B1 (en) | Oscillating device, light deflector, and image forming apparatus using the light deflector | |
JP2007171929A (en) | Oscillating device, optical deflector and optical instrument using the same | |
US8081366B2 (en) | Oscillating device, light deflector, and image forming apparatus using the same | |
KR20100058592A (en) | Oscillating body apparatus and manufacturing method thereof, optical deflector and image forming apparatus | |
JP2009258468A (en) | Rocking body apparatus, optical deflector and optical equipment using the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200980105493.2 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09711677 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12745628 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2009711677 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 20107020312 Country of ref document: KR Kind code of ref document: A |