WO2008114822A1 - シリコンインゴットの製造方法および製造装置 - Google Patents
シリコンインゴットの製造方法および製造装置 Download PDFInfo
- Publication number
- WO2008114822A1 WO2008114822A1 PCT/JP2008/055098 JP2008055098W WO2008114822A1 WO 2008114822 A1 WO2008114822 A1 WO 2008114822A1 JP 2008055098 W JP2008055098 W JP 2008055098W WO 2008114822 A1 WO2008114822 A1 WO 2008114822A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- silicon
- manufacturing
- silicon ingot
- alloy melt
- reduced
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 8
- 229910052710 silicon Inorganic materials 0.000 title abstract 8
- 239000010703 silicon Substances 0.000 title abstract 8
- 238000004519 manufacturing process Methods 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 4
- 229910045601 alloy Inorganic materials 0.000 abstract 3
- 239000000956 alloy Substances 0.000 abstract 3
- 230000005496 eutectics Effects 0.000 abstract 3
- 229910000676 Si alloy Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000007670 refining Methods 0.000 abstract 1
- 238000007711 solidification Methods 0.000 abstract 1
- 230000008023 solidification Effects 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
- C30B15/04—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt adding doping materials, e.g. for n-p-junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Photovoltaic Devices (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009505240A JP4337954B2 (ja) | 2007-03-19 | 2008-03-19 | シリコンインゴットの製造方法および製造装置 |
EP08722473A EP2138610A1 (en) | 2007-03-19 | 2008-03-19 | Method and apparatus for manufacturing silicon ingot |
US12/532,019 US20100143231A1 (en) | 2007-03-19 | 2008-03-19 | Method and Apparatus for Manufacturing Silicon Ingot |
CA002681353A CA2681353A1 (en) | 2007-03-19 | 2008-03-19 | Method and apparatus for manufacturing silicon ingot |
CN200880015497A CN101680111A (zh) | 2007-03-19 | 2008-03-19 | 硅锭的制造方法及制造装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-069741 | 2007-03-19 | ||
JP2007069741 | 2007-03-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008114822A1 true WO2008114822A1 (ja) | 2008-09-25 |
Family
ID=39765926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/055098 WO2008114822A1 (ja) | 2007-03-19 | 2008-03-19 | シリコンインゴットの製造方法および製造装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100143231A1 (ja) |
EP (1) | EP2138610A1 (ja) |
JP (2) | JP4337954B2 (ja) |
KR (1) | KR20100015652A (ja) |
CN (1) | CN101680111A (ja) |
CA (1) | CA2681353A1 (ja) |
WO (1) | WO2008114822A1 (ja) |
Cited By (4)
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CN101798705A (zh) * | 2010-03-12 | 2010-08-11 | 上海太阳能电池研究与发展中心 | 一种从低温熔体中连续拉晶提纯多晶硅的方法及专用装置 |
CN101812727A (zh) * | 2010-04-13 | 2010-08-25 | 上海太阳能电池研究与发展中心 | 一种直流电场下定向凝固提纯多晶硅的方法 |
WO2013111314A1 (ja) * | 2012-01-27 | 2013-08-01 | Kaneko Kyojiro | シリコン純化法 |
JP2016130200A (ja) * | 2015-01-14 | 2016-07-21 | 株式会社Sumco | シリコン単結晶の製造方法 |
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NO329987B1 (no) | 2009-02-26 | 2011-01-31 | Harsharn Tathgar | Halvkontinuerlig fremgangsmate for dannelse, separasjon og smelting av store, rene silisiumkrystaller |
JP5483591B2 (ja) * | 2010-10-08 | 2014-05-07 | 日鉄住金ファインテック株式会社 | 単結晶引上装置および坩堝支持装置 |
KR101690490B1 (ko) * | 2010-10-21 | 2016-12-28 | 에스케이이노베이션 주식회사 | 탄화규소 단결정의 제조방법 및 장치 |
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CN102311121A (zh) * | 2011-08-29 | 2012-01-11 | 大连理工大学 | 一种合金化分凝提纯工业硅的方法 |
KR101317198B1 (ko) * | 2011-10-24 | 2013-10-15 | 한국생산기술연구원 | 성장로 감시 장치 |
TWI627131B (zh) * | 2012-02-01 | 2018-06-21 | 美商希利柯爾材料股份有限公司 | 矽純化之模具及方法 |
CN102605424A (zh) * | 2012-03-06 | 2012-07-25 | 浙江宏业新能源有限公司 | 多晶硅铸锭炉控制***及控制方法 |
CN102786060B (zh) * | 2012-08-15 | 2016-08-17 | 大连理工大学 | 一种增强合金化分凝提纯多晶硅的方法 |
CN104635805B (zh) * | 2014-12-24 | 2017-05-17 | 湖南顶立科技有限公司 | 一种温度控制*** |
FR3052773B1 (fr) * | 2016-06-15 | 2020-10-30 | Snecma | Procede de fabrication d'une piece de turbomachine |
CN108018602A (zh) * | 2016-11-03 | 2018-05-11 | 上海新昇半导体科技有限公司 | 自动进料***及进料方法 |
CN108706590A (zh) * | 2018-07-07 | 2018-10-26 | 孟静 | 太阳能级多晶硅制备方法 |
CN108796606B (zh) * | 2018-07-07 | 2020-11-03 | 玉环市几偶孵化器有限公司 | 太阳能级多晶硅制备装置 |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58185496A (ja) * | 1982-04-20 | 1983-10-29 | Toshiba Ceramics Co Ltd | 単結晶シリコン引上げ用窒化珪素製治具の製造方法 |
JPH02267195A (ja) * | 1989-04-05 | 1990-10-31 | Nippon Steel Corp | 酸化膜耐圧特性の優れたシリコン単結晶及びその製造方法 |
JPH05208892A (ja) * | 1992-01-29 | 1993-08-20 | Shin Etsu Handotai Co Ltd | 単結晶シリコン棒の製造方法 |
JPH07133186A (ja) * | 1993-11-01 | 1995-05-23 | Komatsu Electron Metals Co Ltd | シリコン単結晶の製造装置および製造方法 |
JPH09263484A (ja) * | 1996-03-28 | 1997-10-07 | Sumitomo Sitix Corp | 単結晶引き上げ方法 |
JPH10273313A (ja) | 1997-03-28 | 1998-10-13 | Kawasaki Steel Corp | 多結晶シリコン鋳塊の製造方法 |
JP2002047095A (ja) | 2000-07-31 | 2002-02-12 | Shin Etsu Handotai Co Ltd | Gaドープシリコン単結晶の製造方法およびGaドープシリコン単結晶、並びにこれから作製されたシリコン単結晶太陽電池 |
JP3325900B2 (ja) | 1996-10-14 | 2002-09-17 | 川崎製鉄株式会社 | 多結晶シリコンの製造方法及び装置、並びに太陽電池用シリコン基板の製造方法 |
JP2003277040A (ja) | 2002-03-19 | 2003-10-02 | Sharp Corp | シリコンの精製方法および該方法により精製したシリコンを用いて製造する太陽電池 |
JP2003286024A (ja) | 2002-03-27 | 2003-10-07 | Mitsubishi Materials Corp | 一方向凝固シリコンインゴット及びこの製造方法並びにシリコン板及び太陽電池用基板及びスパッタリング用ターゲット素材 |
JP2004067452A (ja) * | 2002-08-07 | 2004-03-04 | Shin Etsu Handotai Co Ltd | 単結晶の引き上げ条件の設計方法 |
JP2004307305A (ja) * | 2003-04-10 | 2004-11-04 | Sumitomo Mitsubishi Silicon Corp | シリコン単結晶及び単結晶育成方法 |
JP2008069055A (ja) * | 2006-09-15 | 2008-03-27 | Covalent Materials Corp | シリコン単結晶の製造方法 |
-
2008
- 2008-03-19 US US12/532,019 patent/US20100143231A1/en not_active Abandoned
- 2008-03-19 KR KR1020097021676A patent/KR20100015652A/ko not_active Application Discontinuation
- 2008-03-19 CA CA002681353A patent/CA2681353A1/en not_active Abandoned
- 2008-03-19 EP EP08722473A patent/EP2138610A1/en not_active Withdrawn
- 2008-03-19 WO PCT/JP2008/055098 patent/WO2008114822A1/ja active Application Filing
- 2008-03-19 JP JP2009505240A patent/JP4337954B2/ja not_active Expired - Fee Related
- 2008-03-19 CN CN200880015497A patent/CN101680111A/zh active Pending
-
2009
- 2009-05-07 JP JP2009112633A patent/JP4358300B2/ja not_active Expired - Fee Related
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58185496A (ja) * | 1982-04-20 | 1983-10-29 | Toshiba Ceramics Co Ltd | 単結晶シリコン引上げ用窒化珪素製治具の製造方法 |
JPH02267195A (ja) * | 1989-04-05 | 1990-10-31 | Nippon Steel Corp | 酸化膜耐圧特性の優れたシリコン単結晶及びその製造方法 |
JPH05208892A (ja) * | 1992-01-29 | 1993-08-20 | Shin Etsu Handotai Co Ltd | 単結晶シリコン棒の製造方法 |
JPH07133186A (ja) * | 1993-11-01 | 1995-05-23 | Komatsu Electron Metals Co Ltd | シリコン単結晶の製造装置および製造方法 |
JPH09263484A (ja) * | 1996-03-28 | 1997-10-07 | Sumitomo Sitix Corp | 単結晶引き上げ方法 |
JP3325900B2 (ja) | 1996-10-14 | 2002-09-17 | 川崎製鉄株式会社 | 多結晶シリコンの製造方法及び装置、並びに太陽電池用シリコン基板の製造方法 |
JPH10273313A (ja) | 1997-03-28 | 1998-10-13 | Kawasaki Steel Corp | 多結晶シリコン鋳塊の製造方法 |
JP2002047095A (ja) | 2000-07-31 | 2002-02-12 | Shin Etsu Handotai Co Ltd | Gaドープシリコン単結晶の製造方法およびGaドープシリコン単結晶、並びにこれから作製されたシリコン単結晶太陽電池 |
JP2003277040A (ja) | 2002-03-19 | 2003-10-02 | Sharp Corp | シリコンの精製方法および該方法により精製したシリコンを用いて製造する太陽電池 |
JP2003286024A (ja) | 2002-03-27 | 2003-10-07 | Mitsubishi Materials Corp | 一方向凝固シリコンインゴット及びこの製造方法並びにシリコン板及び太陽電池用基板及びスパッタリング用ターゲット素材 |
JP2004067452A (ja) * | 2002-08-07 | 2004-03-04 | Shin Etsu Handotai Co Ltd | 単結晶の引き上げ条件の設計方法 |
JP2004307305A (ja) * | 2003-04-10 | 2004-11-04 | Sumitomo Mitsubishi Silicon Corp | シリコン単結晶及び単結晶育成方法 |
JP2008069055A (ja) * | 2006-09-15 | 2008-03-27 | Covalent Materials Corp | シリコン単結晶の製造方法 |
Non-Patent Citations (3)
Title |
---|
"the ratio of the impurity concentration in the liquid phase to that in the solid phase", THE SOURCE THEREOF IS AS FOLLOWS: ISIJ INTERNATIONAL, vol. 45, no. 7, 2005, pages 967 - 971 |
F. A. TRUMBORE, BELL SYSTEM TECHNICAL JOURNAL, vol. 39, 1960, pages 67 |
ISIJ INTERNATIONAL, vol. 45, no. 7, 2005, pages 967 - 971 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101798705A (zh) * | 2010-03-12 | 2010-08-11 | 上海太阳能电池研究与发展中心 | 一种从低温熔体中连续拉晶提纯多晶硅的方法及专用装置 |
CN101812727A (zh) * | 2010-04-13 | 2010-08-25 | 上海太阳能电池研究与发展中心 | 一种直流电场下定向凝固提纯多晶硅的方法 |
WO2013111314A1 (ja) * | 2012-01-27 | 2013-08-01 | Kaneko Kyojiro | シリコン純化法 |
JP2016130200A (ja) * | 2015-01-14 | 2016-07-21 | 株式会社Sumco | シリコン単結晶の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4358300B2 (ja) | 2009-11-04 |
JP4337954B2 (ja) | 2009-09-30 |
EP2138610A1 (en) | 2009-12-30 |
CA2681353A1 (en) | 2008-09-25 |
JPWO2008114822A1 (ja) | 2010-07-08 |
CN101680111A (zh) | 2010-03-24 |
US20100143231A1 (en) | 2010-06-10 |
KR20100015652A (ko) | 2010-02-12 |
JP2009167101A (ja) | 2009-07-30 |
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