WO2008111410A1 - 基板搬送ロボット - Google Patents
基板搬送ロボット Download PDFInfo
- Publication number
- WO2008111410A1 WO2008111410A1 PCT/JP2008/053622 JP2008053622W WO2008111410A1 WO 2008111410 A1 WO2008111410 A1 WO 2008111410A1 JP 2008053622 W JP2008053622 W JP 2008053622W WO 2008111410 A1 WO2008111410 A1 WO 2008111410A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- linear motion
- section
- motion mechanism
- belt
- end effector
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
コンパクトな直動軸で搬送軌跡精度を向上させたロボットを提供すること。 エンドエフェクタ(94)を最先端のアーム(37)に対して直線状に駆動する直動機構部(93)を備え、アーム部(92)と直動機構部(93)を駆動して基板(95)を所望の位置に搬送する搬送ロボット(90)において、直動機構部(93)が、最先端のアーム(37)に搭載される第1及び第2のプーリ(34)、(37)と、第1及び第2のプーリ(34)、(37)に巻装されるベルト(36)と、ベルト(36)の近傍に設置される案内ガイド(39)と、案内ガイド(39)とベルト(36)に連結されるとともに、エンドエフェクタ(94)を搭載するエンドエフェクタ搭載部(40)と、から構成され、第1または第2のプーリ(34)、(37)を回転させる直動機構駆動用モータ(5)を、本体部(91)に設けるよう構成した。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009503967A JP5195745B2 (ja) | 2007-03-14 | 2008-02-29 | 基板搬送ロボット |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007064481 | 2007-03-14 | ||
JP2007-064481 | 2007-03-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008111410A1 true WO2008111410A1 (ja) | 2008-09-18 |
Family
ID=39759353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/053622 WO2008111410A1 (ja) | 2007-03-14 | 2008-02-29 | 基板搬送ロボット |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5195745B2 (ja) |
TW (1) | TW200849450A (ja) |
WO (1) | WO2008111410A1 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011069409A1 (zh) * | 2009-12-10 | 2011-06-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种机械手臂装置及包括该机械手臂装置的基片处理*** |
CN104260108A (zh) * | 2014-09-09 | 2015-01-07 | 上海浩淼自动化设备有限公司 | Scara型机械手臂 |
CN106003009A (zh) * | 2016-06-15 | 2016-10-12 | 广东工业大学 | 一种隔轴同步驱动机械手 |
KR20180061393A (ko) * | 2015-10-23 | 2018-06-07 | 어플라이드 머티어리얼스, 인코포레이티드 | 로봇 조립체들, 기판 프로세싱 장치, 및 전자 디바이스 제조에서 기판들을 운송하기 위한 방법들 |
CN108789399A (zh) * | 2017-05-05 | 2018-11-13 | 沈阳新松机器人自动化股份有限公司 | 一种轻惯量机械手臂 |
CN112635378A (zh) * | 2020-12-25 | 2021-04-09 | 上海广川科技有限公司 | 一种晶圆传输*** |
CN112744311A (zh) * | 2020-12-04 | 2021-05-04 | 北京理工大学 | 腿部平衡结构及包含该腿部平衡结构的仿生机器人 |
CN113021324A (zh) * | 2019-12-09 | 2021-06-25 | 宁波智能制造技术研究院有限公司 | 一种机器人用阶梯式同轴传动机构 |
CN114851216A (zh) * | 2022-04-18 | 2022-08-05 | 湖南宁庆航空航天智能装备有限公司 | 一种多自由度取料机械手 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6499826B2 (ja) * | 2014-01-29 | 2019-04-10 | 日本電産サンキョー株式会社 | 産業用ロボット |
CN105479451B (zh) * | 2015-12-29 | 2017-06-20 | 哈尔滨工业大学 | 一种平面冗余度机器人 |
CN109760036A (zh) * | 2019-03-22 | 2019-05-17 | 中国电子科技集团公司第三十八研究所 | 基于同步带轮传动的仿人双臂协作机器人 |
CN109760029B (zh) * | 2019-03-22 | 2020-09-01 | 中国电子科技集团公司第三十八研究所 | 基于同步带轮传动的扁平型单臂机器人 |
CN111823216A (zh) * | 2020-07-22 | 2020-10-27 | 广州大学 | 一种机器人实验平台 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0492446A (ja) * | 1990-08-07 | 1992-03-25 | Plasma Syst:Kk | 基板搬送ロボット |
JPH106267A (ja) * | 1996-06-20 | 1998-01-13 | Tokico Ltd | 工業用ロボット |
JP2001148410A (ja) * | 1999-09-06 | 2001-05-29 | Tokyo Electron Ltd | 半導体処理用の搬送装置及び収容装置、並びに半導体処理システム |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4302693B2 (ja) * | 2003-05-30 | 2009-07-29 | 東京エレクトロン株式会社 | 真空処理室の蓋体開閉機構および蓋体開閉方法 |
-
2008
- 2008-02-29 WO PCT/JP2008/053622 patent/WO2008111410A1/ja active Application Filing
- 2008-02-29 JP JP2009503967A patent/JP5195745B2/ja not_active Expired - Fee Related
- 2008-03-12 TW TW97108748A patent/TW200849450A/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0492446A (ja) * | 1990-08-07 | 1992-03-25 | Plasma Syst:Kk | 基板搬送ロボット |
JPH106267A (ja) * | 1996-06-20 | 1998-01-13 | Tokico Ltd | 工業用ロボット |
JP2001148410A (ja) * | 1999-09-06 | 2001-05-29 | Tokyo Electron Ltd | 半導体処理用の搬送装置及び収容装置、並びに半導体処理システム |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011069409A1 (zh) * | 2009-12-10 | 2011-06-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种机械手臂装置及包括该机械手臂装置的基片处理*** |
CN104260108A (zh) * | 2014-09-09 | 2015-01-07 | 上海浩淼自动化设备有限公司 | Scara型机械手臂 |
KR20180061393A (ko) * | 2015-10-23 | 2018-06-07 | 어플라이드 머티어리얼스, 인코포레이티드 | 로봇 조립체들, 기판 프로세싱 장치, 및 전자 디바이스 제조에서 기판들을 운송하기 위한 방법들 |
KR102182483B1 (ko) | 2015-10-23 | 2020-11-24 | 어플라이드 머티어리얼스, 인코포레이티드 | 로봇 조립체들, 기판 프로세싱 장치, 및 전자 디바이스 제조에서 기판들을 운송하기 위한 방법들 |
CN106003009A (zh) * | 2016-06-15 | 2016-10-12 | 广东工业大学 | 一种隔轴同步驱动机械手 |
CN106003009B (zh) * | 2016-06-15 | 2018-05-18 | 广东工业大学 | 一种隔轴同步驱动机械手 |
CN108789399A (zh) * | 2017-05-05 | 2018-11-13 | 沈阳新松机器人自动化股份有限公司 | 一种轻惯量机械手臂 |
CN113021324A (zh) * | 2019-12-09 | 2021-06-25 | 宁波智能制造技术研究院有限公司 | 一种机器人用阶梯式同轴传动机构 |
CN112744311A (zh) * | 2020-12-04 | 2021-05-04 | 北京理工大学 | 腿部平衡结构及包含该腿部平衡结构的仿生机器人 |
CN112635378A (zh) * | 2020-12-25 | 2021-04-09 | 上海广川科技有限公司 | 一种晶圆传输*** |
CN112635378B (zh) * | 2020-12-25 | 2023-05-16 | 上海广川科技有限公司 | 一种晶圆传输*** |
CN114851216A (zh) * | 2022-04-18 | 2022-08-05 | 湖南宁庆航空航天智能装备有限公司 | 一种多自由度取料机械手 |
Also Published As
Publication number | Publication date |
---|---|
JP5195745B2 (ja) | 2013-05-15 |
TW200849450A (en) | 2008-12-16 |
JPWO2008111410A1 (ja) | 2010-06-24 |
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