WO2007130990A2

WO2007130990A2 - Measurement of linear and circular diattenuation in optical elements

Info

Publication number: WO2007130990A2
Application number: PCT/US2007/067949
Authority: WO
Inventors: Baoliang Wang
Original assignee: Hinds Instruments, Inc.
Priority date: 2006-05-01
Filing date: 2007-05-01
Publication date: 2007-11-15
Also published as: CN101449134B; EP2013594A2; EP2013594B1; CN101449134A; US9019497B2; US20090323064A1; EP2013594A4; WO2007130990A3

Abstract

A system for measuring linear or circular diattenuation in an optical element includes a sample rotation stage for securing an optical element sample; a light source module for generating a source light beam and a detector module. The light source module and detector module are arranged with the sample rotation stage between them, thereby permitting the source light beam to propagate through a sample that may be secured in the sample stage and to the detector module. Linear motion control of the light source module and the detector module, as well as tilt control of the light source module, the sample rotation stage and the detector module is provided, thereby to facilitate detection, by the detector module of the modulated light intensity information corresponding to a diattenuation characteristic of the optical sample secured in the sample stage.

Description

MEASUREMENT OF LINEAR AND CIRCULAR DIATTENUATION

IN OPTICAL ELEMENTS

Technical Field

[0001] This application relates to precise measurement of linear and circular diattenuation in optical elements.

Background and Summary

[0002] Many optical elements display a property known as diattenuation, whereby the intensity transmittance of a beam that exits an optical element or sample is a function of the polarization state of the incident beam. The intensity transmittance is a maximum T_max for one polarization state of the incident beam, and a minimum T_m1n for the orthogonal polarization state for that beam.

[0003] Linear diattenuation needs two parameters to describe it: (1) angle θ which is the angle of the maximum transmission axis for linearly polarized light; and (2) magnitude Ld, which is defined as (T_max - T_min)/( T_max + T_1111n).

[0004] What follows is a description of a system for measuring, in addition to linear birefringence of an optical element, the linear and circular diattenuation properties of that element.

Brief Description of Drawings

[0005] Fig. 1 is a diagram of one embodiment of the instrumentation used with the present invention, including a light source module, an optical element or sample, and a detector module.

[0006] Fig. 2 is a block diagram of a preferred version of a light source module.

[0007] Fig. 3 is a diagram for illustrating motion controllers used with the instrument.

[0008] Fig. 4 is a diagram showing the use of visible laser light as a guide for the actual beam used in the measurement calculations.

[0009] Fig. 5 is diagram illustrating a variable aperture for use in a detector module in instances where the source light beam collimation is modified by the sample. [0010] Fig. 6 is a diagram showing the use of a re-collimating lens and fixed aperture for use in a detector module in instances where the light beam collimation is modified by the sample.

Description of Preferred Embodiments

[0011] One preferred embodiment of the present invention includes (see Figs. 1 and 2) a light source module 20 that contains a deuterium lamp 22 (30 W), a wavelength selecting device 24

(narrow band filter) and light collimating lenses 26.

[0012] Polarizers, such as Rochon polarizers are located in the source module 20 and detector module 40 as shown. The source module polarizer 28 is oriented at 45 degrees, and the detector module polarizer 30 is oriented at 0 degrees.

[0013] A photoelastic modulator (PEM) 32 is located in the source module with its optic axis at 0 degrees. The PEM 32 modulates the polarization of the source light beam "B." A second

PEM 34 is in the path of the beam "B" and is oriented at 45 degrees. The optical element of interest (hereafter sample 36) is located between the source and detector modules, hence between the two PEMs 32, 34. The two PEMs have different frequencies (for example, 50

KHz and 60 KHz, respectively).

[0014] The detector 42 may be a photomultiplier tube (PMT).

[0015] The instrument illustrated in Fig. 1 is essentially a polarimeter specifically designed for determining linear retardation (both magnitude and angle of fast axis) linear diattenuation

(both magnitude and angle of maximum transmission axis) circular retardation and circular diattenuation in a sample. To measure both the birefringence and diattenuation of a sample, only one optical configuration, as shown in Fig. 1, is required. There is no need to rotate the source and detector modules or associated optical components.

[0016] The results of theoretical analysis using Mueller matrices for the dual PEM-single detector configuration shown in Fig. 1 are provided next.

The variables δl and δ2 are the time varying phase retardation of the respective PEMs 32, 34

(δl = δl_osincϋit and δ2 = δ2₀sincϋ2t); and cϋi and ω₂ are the PEM modulating frequencies of the respective PEMs 32, 34; and δl₀ and δ2₀ being the peak retardation amplitudes of the respective PEMs 32, 34. [0017] If the sample exhibits both linear retardation and linear diattenuation, the corresponding DC signal at the detector 42, while δlo = δ2o = 2.405 radians (0.3828 waves), is:

KT V_DC = -^- Eqn. (1).

[0018] The useful AC terms for determining linear retardation (both magnitude and angle) and linear diattenuation (both magnitude and angle) in a sample can be obtained using the Bessel function expansions:

sin Sl = sin(δl₀ sin(<sy)) = ∑ 2 J_2k+l (Sl₀ ) sin((2£ + l)ω_xt) Eqn_. (2)

2k+l cos Sl =

= J₀ (Sl₀ ) + ∑ 2J_2lc (Sl₀ ) cos((2k)ω_xt) Eqn. (3)

2k and similar expansions of sinδ2 and cosδ2, where k is either "0" or a positive integer that represent the order of the Bessel function.

[0019] For measuring linear birefringence below a quarter of the wavelength of the light source, the useful terms are the (2(D₁ + ω₂) and ((D₁ + 2ω₂) terms:

KI ^V _2o^_oh = ^~γ ²M^δlo) - ^2Ji (S2₀) cos(2p) sin S Eqn. (4.1)

KI₁

V_{2oh + Oh} = ^2J₂(Sl₀) . 2J₁(Sl₀) Un(Ip) Un S Eqn. (4.2)

[0020] In order to eliminate the effect of light intensity variations due to light source fluctuations and the absorption, reflection and scattering from the sample and other optical components, the ratios of the AC signals to the DC signal are used. The ratios of AC signals to the DC signal for the (2(D₁ + ω₂) and ((D₁ + 2ω₂) terms are represented in equations (5.1) and (5.2):

V₁ L C,O₁ + U)₂

= 2J₂ (Sl₀) - 2J₁ (S2₀) cos(2p) sin S Eqn_. (5_.1) * DC K 2a>₂ + o\ = 2J₁ (S2₀) • 2J₁ (Sl₀) sin(2yø) sin S Eqn. (5.2)

DC

[0021] Defining R₁ and R₂ as corrected ratios, equations (5.1) and (5.2) become:

K 2o\ + (O₂ = R₁ = cos(2/}) sin S

V_DC 2J₂(Sl₀) - 2J₁(Sl₀) Eqn. (6.1)

V 2ι»2 + °\ = R₂ = sin(2/}) sin S

V_DC 2 J₂ (S2₀) - 2 J₁ (Sl₀) Eqn. (6.2)

[0022] Rearranging equations (6.1) and (6.2), we can express the retardation magnitude and angle of fast axis of the sample as:

[0023] where δ, represented in radians, is a scalar. When measured at a specific wavelength (i.e. 193 nm), it can be converted to retardation in "nm" (δ_nm = δ_rad-193/(2π)).

[0024] For measuring linear diattenuation, the useful terms are the 2ωl and 2ω2 terms:

KL

K 2_^ω_λ = 2J₂(Sl₀) - Ld - sin(2<9) Eqn. (8.1)

KL

* 2 ω, ^~~ 2 J₂2 V(S—l 0₀)/ • L ^d" • c —os( V2—6>) J Eqn. (8.2)

[0025] where θ is the angle of the maximum transmission axis for linearly polarized light, Ld is defined as (T_maχ - T_min)/( T_max + Tm_1n), where T_max and T_min are the maximum and minimum intensities of transmission for linearly polarized light. [0026] The ratios of the AC signals to the DC signal are:

V 2ω_x

= 2 J₂ (Sl₀) - Ld - sin(20)

V Eqn. (9.1)

D₁ C

V 2 «2 = 2JJSl₀) - Ld - cos(2<9)

V₁ Eqn. (9.2)

DC

[0027] Defining LR₁ and LR₂ as corrected ratios for linear diattenuation, we have:

V 2 ω_x

= LR₁ = Ld - sin(26>)

V_DC - 2J₂ (Sl₀ ) Eqn. (10.1)

V 2 ω₂ = LR₂ = Ld ^• cos(2<9)

V_DC . 2J₂(S2₀) Eqn. (10.2)

[0028] Rearranging equations (10.1) and (10.2), we can express the retardation magnitude and angle of fast axis of the sample as:

Eqn. (11.2) [0029] For measuring circular diattenuation, the useful terms are the GO₁ and ω₂ terms:

V C_nO_x =

2J₁(Sl₀) - Cd Eqn. (12.2)

[0030] where the circular diattenuation (Cd) is defined as (TR_CP - TL_CP)/( TR_CP + TL_CP), where

T_RCP and T_LCP ^are the intensities of transmission for right and left circularly polarized light, respectively.

[0031] The ratios of the AC signals to the DC signal are:

= 2J₁ (Sl₀) - Cd Eqn. (13.1)

' DC

V O⁾ ₂ = 2J₁(SIz) - Cd Eqn. (13.2)

V ^r DDCC or

V

[0032] This instrument also provides the measurements of circular brief (optical rotation). Turning to a preferred implementation of the present invention, wavelength selection can be performed using a narrow band optical filter 24 (Fig. 2) (e.g. 193 nm) instead of a monochromator. This minimizes the size and weight of the source module 20 and optimize light delivery but possibly limit the wavelength resolution. Alternatively, one may use a simplified monochromator (grating at a fixed position) for selecting 193 nm light only. [0033] The system of the present invention also includes semi-automated system with software MACROs to reduce motion complexity. Five motion controls are employed (Fig. 3). The source module includes a linear translation stage 52 and a tilt stage 54. The sample 36 (in this instance, a lens of varying power and thickness) includes a rotation stage 56. The detector module includes a linear translation stage 58 and a tilt stage 60. Accordingly, the system includes five motion controllers. [0034] The operation of the system (reference Fig. 3) includes the steps of

• manually generate measurement coordinates of the five motion controls for the first sample 36; • manually align source module 20 to the sample (eg, a lens) by adjusting linear motion control 52 and tilting motion control 54;

• manually align detector module 40 to receive optimized light intensity by adjusting linear motion control 58 and tilting motion control 60;

• Due to the symmetry of the lens sample, once the coordinates of linear motion control 52, tilting control 54, linear motion control 58 and tilting control 60 are chosen, all coordinates of the remaining (sample) rotational control 56 can be generated by rotating the lens sample one full turn; (Alternatively, the sample could be held stationary and the modules 20, 40 rotated instead.)

• Create software instructions (MACRO) based on the manually generated coordinates

• Use MACRO for automation in subsequent measurements of the same type of lenses. [0035] The aligning steps noted above can be assisted by using two or more visible lasers as guides as shown at "VL" in Fig. 4. The lines inside of the visible laser light "VL" enclose the source light beam, which may have a wavelength of 193 nanometers, and is difficult to observe with the naked eye.

[0036] Finer motion control, if needed, can be included on one of the modules to get optimal light intensity delivery.

[0037] The advantages of using PEMs for lens measurement system include a large useful aperture and acceptance angle.

[0038] As respects the treatment of a non-collimated beam exiting the (lens) sample 36 one could use aperture diameter control 62 (represented by the opposed arrows in Fig. 5), which, like the motion controllers discussed above, may be computer controlled. The diameter of the aperture is related to the amount of convergence or divergence of the light beam introduced by the sample 36, which, as noted can be a lens of varying optical power.

[0039] Alternatively, one could use a re-collimating lens 64 and a fixed aperture 66 in front of active area of the detector (see Fig. 6). The focused or diverged beam B emanating from the sample lens under measurement is directed to that re-collimating lens 64 before passing through the fixed aperture 66. [0040] While the present invention has been described in terms of preferred embodiments, it will be appreciated by one of ordinary skill in the art that modifications may be made without departing from the teachings and spirit of the foregoing.

Claims

CLAIMS:

1. A system for measuring diattenuation in an optical element comprising: a sample rotation stage for securing an optical element sample; a light source module for generating a source light beam; a detector module; the light source module and detector module being arranged with the sample rotation stage between them, thereby permitting the source light beam to propagate through a sample that may be secured in the sample stage and to the detector module; linear motion means for controlled linear motion of the light source module and the detector module; and rotation means for controlled tilt of the light source module, the sample rotation stage and the detector module, thereby to facilitate detection, by the detector module, of light intensity information corresponding to diattenuation characteristics of the optical sample secured in the sample stage.

2. The system of claim 1 wherein the light source module and the detector module each include a polarization modulator.

3. The system of claim 1 wherein the light source module is configured to generate in addition to the source light beam an alignment beam of visible light thereby to facilitate alignment of the light source module and the detector module.

4. The system of claim 3 wherein the light source beam has a wavelength of about 193 nanometers.

5. The system of claim 1 including a sample having a varying thickness and power that causes the source light beam to converge, and wherein the detector module includes an active area for receiving light; and aperture means associated with the detector module for effectively changing the active area of the detector module by an amount related to the amount of convergence caused by the sample.

6. The system of claim 1 including a sample having a varying thickness and power that causes the source light beam to diverge, and wherein the detector module includes an active area for receiving light; and aperture means associated with the detector module for effectively changing the active area of the detector module by an amount related to the amount of divergence caused by the sample.

7. The system of claim 1 including a sample having a varying thickness and power; and wherein the detector module includes an active area for receiving light; and aperture means associated with the detector module for effectively changing the active area of the detector module.

8. The system of claim 1 including a sample having a varying thickness and power; and wherein the detector module includes an active area for receiving light; and a collimating lens disposed between the sample and the active area of the detector module.

9. The system of claim 1 wherein the light source beam is polarized and modulated, and the modulated light intensity information corresponds to the linear and circular diattenuation characteristics of the optical sample.

10. A method of measuring diattenuation in an optical element comprising the steps of: securing an optical element sample in a rotatable stage; generating a polarized and modulated source light beam; directing the source beam through the sample; arranging the active area of a detector to detect the source light beam after it propagates through the sample; and determining, from the detected source light, information corresponding to a diattenuation characteristic of the optical sample secured in the sample stage.

11. The method of claim 10 including the step of modulating the polarization of the source light beam before and after the light beam propagates through the sample.

12. The method of claim 10 wherein the determining step includes translating and tilting the source light beam and the detector.

13. The method of claim 12 wherein the determining step also includes rotating the sample stage.

14. The method of claim 10 wherein the arranging step includes the step of generating in addition to the source light beam an alignment beam of visible light thereby to facilitate alignment of the source light beam and the detector.

15. The method of claim 14 including the step of selecting the source light beam to have a wavelength of about 193 nanometers.

16. The method of claim 10 wherein the arranging step includes the step of effectively changing the active area of the detector by an amount corresponding to the degree with which the sample converges or diverges the source light beam.

17. The method of claim 10 wherein the arranging step includes the step of collimating the source light beam after that beam propagates through the sample.

18. The method of claim 10 wherein the determining step includes determining the circular diattenuation of the optical sample.