Classifications

• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
  • H02K41/02—Linear motors; Sectional motors
  • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Definitions

• the present invention relates to a linear motor that is used in industrial equipment such as semiconductor-related manufacturing equipment, mounting machines, and processing machines.
• the present invention relates to a linear motor that is used in various industrial machines such as an electrical component mounting apparatus, a semiconductor-related apparatus, or a machine tool, and is suitable for driving a linear motion mechanism thereof, and includes a permanent magnet.
• a moving magnet type linear motor that uses a field as a mover and an armature with an armature coil as a stator, or a permanent magnet that uses an armature coil as a mover
• the present invention relates to a moving coil type linear motor configured as a child.
• FIG. Fig. 5 shows the prior art of a moving magnet type linear motor.
• A) is a plan view thereof
• (b) is a front sectional view taken along line B-B in (a)
• (a) is (b) arrow A force Corresponds to the perspective view.
• 21 is a fixed base
• 22 is a magnet track
• 23 is a field permanent magnet
• 24 is a field yoke
• 25 is a guide rail
• 26 is a guide block
• 27 is a sensor head
• 28 is a linear scale section
• 29 is Storno
• 30 is an armature
• 31 is an armature coil
• 32 is a wiring board.
• a field yoke 24 is provided on the back surface of the field permanent magnet 23, and the field yoke 24 serves both as a mover and a magnetic circuit.
• the armature 30 has a structure including a plurality of slotless armature coils 31 fixed on a wiring board 32, and a movable element and a magnetic gap are fixed on a fixed base 21 made of a solid magnetic member.
• the stator is arranged through the. Note that a plurality of Hall elements are embedded in the wiring board 32 to detect the magnetic poles so as to face the field permanent magnets 23.
• the hole element The child (not shown) detects the position of the field magnet facing the Hall element at the initial time when the power is turned on, and adjusts the drive current according to the detected position of the field magnet 23.
• a detection signal for flowing through the armature coil 31 is output (for example, see Patent Document 1).
• Parallel guide rails 25 are fixed on the fixed base 21 on both sides of the armature 30, and guide blocks 26 that slide on the rails are provided on the lower sides of both ends of the field yoke 24. It is fixed to.
• a magnetic linear scale 28 constituting a linear encoder is arranged on the side surface of the mover, and a sensor head that detects the linear scale 28 on the fixed base 21 so as to face the linear scale 28. 27 is arranged.
• a stopper 29 is provided between the ends of the two guide rails 25 to prevent the overrun of the mover!
• This linear motor has a magnetic circuit structure that is linked to the magnetic flux force fixed base 21 of the field permanent magnet 23, and when the armature coil 31 is excited, a moving magnetic field generated by the field and the armature.
• the mover moves linearly within a stroke that is the difference between the armature length and the mover length (see, for example, Patent Documents 1 and 2).
• Patent Document 1 JP-A-9 266659 (Specification, page 5, FIG. 3)
• Patent Document 2 JP 2002-10617 (Specifications, pages 7 to 9, FIG. 1, FIG. 3)
• FIG. 6 shows an example of a conventional three-phase AC linear motor, showing only the mover and stator.
• (A) is a plan view
• (b) is a front view seen from a direction (X direction) perpendicular to the traveling direction of the linear motor.
• this linear motor has a plurality (six in the figure) of permanent magnets 1 arranged in parallel in the X direction and in the Y direction, and a plurality (three in the figure) of coils 2 via magnetic gaps. Are arranged in parallel in the X direction and in the Y direction! / Speak.
• one of the permanent magnet 1 and the coil 2 may be a mover and the other may be a stator.
• the mover can move the distance A in the Y direction (up and down in the figure).
• the length of the permanent magnet 1 in the X direction is almost equal to or slightly smaller than the length of the coil 2 in the X direction.
• FIG. 7 shows an example of a conventional DC linear motor, and shows only a mover and a stator.
• A is A plan view
• (b) is a front view seen from a direction (X direction) perpendicular to the traveling direction of the linear motor.
• this linear motor has two permanent magnets 1 arranged in parallel to the X direction in the Y direction, and one coil 2 arranged in parallel to the X direction via a magnetic gap therebetween.
• either the permanent magnet 1 or the coil 2 may be a mover and the other may be a stator.
• the mover can move the distance A in the Y direction (up and down in the figure). If the stroke in the direction of thrust generation is short, it is advantageous to use such a simple DC linear motor.
• the length of the permanent magnet 1 in the X direction Is approximately equal to or slightly smaller than the length of coil 2 in the X direction.
• the lower linear motor needs to move while holding the entire upper linear motor, and the lower linear motor that moves while holding the entire linear motor.
• the motor was heavily loaded.
• the present invention has been made to solve such problems. Even if the linear motor is displaced in a non-thrust direction orthogonal to the original thrust generation direction of the linear motor, the desired propulsive force is maintained. It aims to provide a linear motor.
• the present invention is configured as follows.
• the invention of the linear motor according to claim 1 is composed of a permanent magnet that becomes a field magnet and a coil that is disposed opposite to the permanent magnet with a magnetic gap, and one of the permanent magnet and the coil is one of the permanent magnets.
• a linear motor that is a mover and the other is a stator
• the length of the permanent magnet in a direction orthogonal to the direction of thrust generation generated in the mover is not affected even if the mover is displaced in the orthogonal direction.
• the end portion in the orthogonal direction is a length that does not protrude from the end portion in the orthogonal direction of the permanent magnet.
• the invention of the linear motor according to claim 2 is composed of a permanent magnet that becomes a field magnet and a coil that is disposed opposite to the permanent magnet with a magnetic gap, and one of the permanent magnet and the coil is one of the permanent magnets.
• the permanent magnet has a length of the coil in a direction perpendicular to the direction of thrust generation generated in the mover even if the mover is displaced in the orthogonal direction.
• the end portion in the orthogonal direction of the coil has a length that does not protrude from the end portion in the orthogonal direction of the coil.
• the DC single-phase linear motor according to claim 3 is characterized by comprising a plurality of the permanent magnets according to claim 1 or 2 and one of the coils.
• the invention of an AC three-phase linear motor according to claim 4 is characterized by comprising a plurality of the permanent magnets according to claim 1 or 2 and a plurality of the coils.
• the lower linear motor does not need to move the entire upper linear motor, and even if only the upper linear motor mover is powered, it contributes to thrust generation. A change in the relative area of the permanent magnet and the coil does not cause a drop in thrust.
• the relative area of the permanent magnet and the coil that contributes to the generation of thrust does not change, and therefore the DC single-phase does not cause the thrust to decrease.
• Linear motors and AC three-phase linear motors can be obtained.
• FIG. 1 is a schematic configuration diagram of a three-phase AC linear motor according to Embodiment 1 of the present invention.
• FIG. 2 is a schematic configuration diagram of a three-phase AC linear motor according to Embodiment 2 of the present invention.
• FIG. 3 is a schematic configuration diagram of a single-phase DC linear motor according to Embodiment 3 of the present invention.
• FIG. 4 is a schematic configuration diagram of a single-phase DC linear motor according to Embodiment 4 of the present invention.
• FIG. 5 is a schematic configuration diagram of a conventional moving magnet type linear motor.
• FIG. 6 is a schematic configuration diagram of a conventional three-phase AC linear motor.
• FIG. 7 is a schematic configuration diagram of a conventional DC linear motor. Explanation of symbols
• FIG. 1 is an example of a three-phase AC linear motor according to Embodiment 1 of the present invention, and shows only a mover and a stator.
• (A) is a plan view
• (b) is a front view seen from a direction (X direction) perpendicular to the traveling direction of the linear motor.
• this linear motor has a plurality (six in the figure) of permanent magnets 1 arranged in parallel in the X direction and in the Y direction, and a plurality of (three in the figure) coils 2 via magnetic gaps. Are arranged in parallel in the X direction and in the Y direction!
• one of the permanent magnet 1 and the coil 2 may be a mover and the other may be a stator.
• this linear motor By energizing the coil, this linear motor generates thrust in the Y direction in the figure.
• the stroke in the thrust direction of this linear motor itself is A.
• the length of the permanent magnet 1 in the X direction is such that even if the mover is displaced in the X direction, the end of the coil 2 in the X direction is away from the end of the permanent magnet 1 in the X direction. Length that does not protrude (X direction Permanent magnet length >> x direction coin length)
• the lower linear motor (not shown) can reduce the load mass of the permanent magnet 1 that only needs to move the coil 2.
• the permanent magnet 1 is joined to an iron member in order to increase the magnetic flux density linked to the coil 2, and if this is included, the load will be greatly reduced. In this case, it is advantageous to use the coil 2 as a mover.
• FIG. 2 is an example of a three-phase AC linear motor according to Embodiment 2 of the present invention, and shows only a mover and a stator.
• (A) is a plan view
• (b) is a front view seen from a direction (X direction) perpendicular to the traveling direction of the linear motor.
• this linear motor has a plurality (six in the figure) of permanent magnets 1 arranged in parallel in the X direction and in the Y direction, and a plurality of (three in the figure) coils 2 via magnetic gaps. Are arranged in parallel in the X direction and in the Y direction!
• one of the permanent magnet 1 and the coil 2 may be a mover and the other may be a stator.
• this linear motor By energizing the coil, this linear motor generates thrust in the Y direction in the figure.
• the stroke in the thrust direction of this linear motor itself is A.
• the length of the coil 2 in the X direction is such that the end of the permanent magnet 1 protrudes from the end of the coil 2 in the X direction even when the mover is displaced in the X direction.
• the lower linear motor (not shown) can reduce the load mass of the coil 2 as long as only the permanent magnet 1 is movable. In this case, it is advantageous to use the permanent magnet 1 as a mover.
• FIG. 3 shows an example of a single-phase DC linear motor according to Embodiment 3 of the present invention. Only shows.
• (A) is a plan view
• (b) is a front view seen from a direction (X direction) perpendicular to the traveling direction of the linear motor.
• this linear motor has two permanent magnets 1 arranged in parallel in the X direction and in the Y direction, and one coil 2 is arranged in parallel in the X direction via a magnetic gap.
• one of the permanent magnet 1 and the coil 2 may be a mover and the other may be a stator.
• this linear motor By energizing the coil, this linear motor generates thrust in the Y direction in the figure.
• the stroke in the thrust direction of this linear motor itself is A.
• the length of the permanent magnet 1 in the X direction is such that the end of the coil 2 in the X direction is away from the end of the permanent magnet 1 in the X direction even when the mover is displaced in the X direction.
• the length does not protrude (permanent magnet length in the X direction >> length in the X direction).
• the lower linear motor (not shown) can reduce the load mass of the permanent magnet 1 that only needs to move the coil 2.
• the permanent magnet 1 is joined to an iron member in order to increase the magnetic flux density linked to the coil 2, and if this is included, the load will be greatly reduced.
• Such a simple single-phase DC linear motor is advantageous when the stroke in the thrust generation direction is short.
• FIG. 4 is an example of a single-phase DC linear motor according to Embodiment 4 of the present invention, and shows only a mover and a stator.
• (A) is a plan view
• (b) is a front view seen from a direction (X direction) perpendicular to the traveling direction of the linear motor.
• this linear motor has two permanent magnets 1 arranged in parallel in the X direction and in the Y direction, and one coil 2 is arranged in parallel in the X direction via a magnetic gap.
• RU magnetic gap
• one of the permanent magnet 1 and the coil 2 may be a mover and the other may be a stator.
• this linear motor By energizing the coil, this linear motor generates thrust in the Y direction in the figure.
• the stroke in the thrust direction of this linear motor itself is A.
• the length of the coil 2 in the X direction is such that the end of the permanent magnet 1 in the X direction protrudes from the end of the coil 2 in the X direction even when the mover is displaced in the X direction. Length (X direction coil length) X direction permanent magnet length).
• the lower linear motor (not shown) can reduce the load mass of the coil 2 as long as only the permanent magnet 1 is movable. In this case, it is advantageous to use the permanent magnet 1 as a mover.
• the present invention has the following effects.

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• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Chemical & Material Sciences (AREA)
• Combustion & Propulsion (AREA)
• Electromagnetism (AREA)
• Power Engineering (AREA)
• Linear Motors (AREA)

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Citations (2)

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• 2006
  • 2006-07-11 JP JP2006530016A patent/JPWO2007013289A1/ja active Pending
  • 2006-07-11 WO PCT/JP2006/313717 patent/WO2007013289A1/ja active Application Filing
  • 2006-07-24 TW TW095126963A patent/TW200711266A/zh not_active IP Right Cessation

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