WO2006054439A1 - 真空環境用運動案内装置 - Google Patents
真空環境用運動案内装置 Download PDFInfo
- Publication number
- WO2006054439A1 WO2006054439A1 PCT/JP2005/019982 JP2005019982W WO2006054439A1 WO 2006054439 A1 WO2006054439 A1 WO 2006054439A1 JP 2005019982 W JP2005019982 W JP 2005019982W WO 2006054439 A1 WO2006054439 A1 WO 2006054439A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- clearance
- clearance seal
- rolling
- guide device
- track
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
- F16C29/06—Ball or roller bearings in which the rolling bodies circulate partly without carrying load
- F16C29/0633—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides
- F16C29/0635—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end
- F16C29/0638—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end with balls
- F16C29/0642—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end with balls with four rows of balls
- F16C29/0647—Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end with balls with four rows of balls with load directions in X-arrangement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/76—Sealings of ball or roller bearings
- F16C33/80—Labyrinth sealings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/08—Arrangements for covering or protecting the ways
- F16C29/084—Arrangements for covering or protecting the ways fixed to the carriage or bearing body movable along the guide rail or track
- F16C29/086—Seals being essentially U-shaped, e.g. for a U-shaped carriage
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/08—Arrangements for covering or protecting the ways
- F16C29/084—Arrangements for covering or protecting the ways fixed to the carriage or bearing body movable along the guide rail or track
- F16C29/088—Seals extending in the longitudinal direction of the carriage or bearing body
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/66—Special parts or details in view of lubrication
- F16C33/6603—Special parts or details in view of lubrication with grease as lubricant
Definitions
- the present invention relates to a motion guide device such as a reduction guide, a ball spline, and a ball screw in which rolling elements such as balls and rollers are interposed between a raceway member and a moving member, and more particularly, a vacuum used in a vacuum environment.
- the present invention relates to an environmental exercise guidance device.
- a motion guide device that performs a guide function by rolling motion of a rolling element via a rolling element such as a ball or a roller has been used at a guide portion of a moving object that performs linear motion.
- a rolling element such as a ball or a roller
- Such motion guide devices are often used in a tailored environment, such as semiconductor's liquid crystal manufacturing devices and medical devices.
- processes in a vacuum atmosphere are indispensable for semiconductor production lines.
- an object of the present invention is to provide a motion guide device for a vacuum environment that can suppress the base oil of the grease from vaporizing and leaking to the outside in a vacuum environment, and that does not generate dust.
- the invention of claim 1 is a motion guide device used in a vacuum environment, and includes a raceway member (1) having a rolling element rolling part (la), and the rolling element.
- a motion guide device for a vacuum environment characterized by comprising a clearance seal (5, 6, 31, 33) that closes the clearance between (2) and (2).
- the vacuum means a space whose pressure is lower than that of the atmosphere.
- the invention according to claim 2 is the movement guide device for vacuum environment according to claim 1, wherein a surface of the clearance seal (5, 31, 33) facing the track rail (1) has an uneven shape. It is characterized by being formed.
- the invention of claim 3 is the movement guide device for vacuum environment according to claim 1 or 2, wherein the clearance between the clearance seal (5, 6, 31, 33) and the track rail (1). Is characterized in that the clearance seal (5, 6, 31, 33) is set to 0.25 mm or less at the portion closest to the track rail (1).
- the invention of claim 4 is a motion guide device used in a vacuum environment, wherein the rolling element rolling section
- a rolling member circulation path including a raceway member (1) having (la) and a loaded rolling element rolling portion (2a) facing the rolling element rolling portion (la), and the raceway member (1) has Can move relative to A movable member (2), a plurality of rolling elements (3) arranged in the rolling element circulation path, and a cross section of the raceway member (1) provided at an end of the moving member (2) in the moving direction.
- an end clearance seal (5) in which openings (9a, 10a) that match the shape are formed, and the end clearance seal (5) does not contact the raceway member (1) and A vacuum environment characterized in that a clearance between the end clearance seal (5) and the track member (1) is smaller than a clearance between the moving member (2) and the track member (1).
- the invention of claim 5 is the movement guide device for vacuum environment according to claim 4, wherein a surface of the end clearance seal (5) facing the track rail (1) is formed in an uneven shape. It is characterized by that.
- the invention of claim 6 is the movement guide device for vacuum environment according to claim 5, wherein the end clearance seal (5) is a plurality of thin plate-like first plates ( 9) and a plurality of thin plate-like second plates (10), and the first plate (9) and the second plate (10) have the shape of the raceway member (1).
- a combined opening (9a, 10a) is formed, and the raceway member (1) of the end clearance seal (5) is formed in a state where the first plate (9) and the second plate (10) are laminated.
- the clearance (j8) between the second plate (10) and the raceway member (1) is such that the opposing plate is formed with irregularities, so that the first plate (9) and the raceway member are It is characterized by being larger than the clearance (a) between (1).
- the invention of claim 7 is a motion guide device used in a vacuum environment, and has a raceway member (1) having an upper surface and a side surface and formed with a rolling element rolling part (la) extending along a longitudinal direction. ), A central portion (4a) facing the upper surface of the raceway member (1), and a leg portion (4b) facing the side surface, and the whole is formed in a bowl shape, and the rolling element rolling A moving member (2) having a rolling element circulation path including a loaded rolling element rolling part (2a) facing the part (la) and movable relative to the race member (1); A plurality of rolling elements (3) arranged in the rolling element circulation path and the leg (4b) of the moving member (3) are provided at one end of the moving member (3) in the moving direction.
- the invention of claim 8 is the motion guide device for vacuum environment according to claim 7, wherein the motion guide device for vacuum environment is further provided at an end of the moving member (2) in the moving direction.
- the invention of claim 9 is the movement guide device for vacuum environment according to claim 7 or 8, wherein the surface (31a, 33a) of the side clearance seal (31, 33) facing the raceway member is provided. A plurality of grooves (32, 34) extending in the moving direction of the moving member are formed.
- the clearance seal is provided on the moving member, it is possible to suppress the lubricant inside the motion guide device from vaporizing and leaking to the outside. Therefore, the life of the lubricant can be extended and the external environment can be prevented from being contaminated. Also, since the clearance seal and the raceway member are in contact with each other, dust is not generated due to wear.
- the surface of the clearance seal that faces the raceway member is formed in an uneven shape, so that when the gas in which the lubricant has evaporated flows between the raceway member and the clearance seal, A larger resistance is generated as compared with the case of forming a shape. Therefore, it is possible to further suppress the lubricant inside the motion guide device from vaporizing and leaking outside.
- the amount of leakage to the outside can be effectively reduced by setting the clearance to 0.25 mm or less.
- the end clearance seal provided on the moving member suppresses the lubricant inside the motion guide device from vaporizing and leaking outside.
- the concave and convex shape can be formed by overlapping the thin first and second plates.
- the side clearance seal provided on the moving member suppresses the lubricant inside the motion guide device from vaporizing and leaking outside.
- the end clearance seal and the side clearance seal can surround the clearance generated between the bowl-shaped moving member and the raceway member.
- the raceway member and the side clearance are compared with the case where it is formed in a planar shape. Greater resistance is created when a gas with evaporated lubricant flows between it and the seal. Therefore, it is possible to further suppress the lubricant inside the motion guide device from vaporizing and leaking outside.
- FIG. 1 is a perspective view of a motion guide device according to an embodiment of the present invention.
- FIG. 6 Diagram showing stacked end clearance seals (Fig. (A) shows a front view, Fig. (B) shows a cross-sectional view along line B-B in (A), and Fig. (C) shows a diagram in (A). C--C cross-sectional view is shown, and Figure (D) shows a detailed view of part D of (C))
- FIG. 8 Diagram showing a schematic diagram of the flow when a vacuum vessel and a vacuum pump are connected by a passage.
- FIG. 9 Diagram showing the difference in conductance when the side of the passage is made straight and triangular (Fig. (A) shows a perspective view of the passage, and Figs. (B) and (C) are along the passage. (Cross section of the aisle is shown)
- FIG.11 Perspective view of side clearance seal
- FIG.12 Diagram showing the size of the clearance between the side clearance seal and the track rail
- FIG. 14 is a perspective view showing another example of the side clearance seal.
- FIG.15 Front view showing another example of side clearance seal (including partially enlarged view)
- FIG. 16 is a perspective view showing still another example of the side clearance seal.
- FIGS. 1 to 3 show a vacuum environment motion guide device (hereinafter simply referred to as a single unit) according to an embodiment of the present invention. Shows a motion guide device).
- the motion guide device is used in a vacuum environment, specifically in a space where the pressure is lower than the atmosphere.
- FIG. 1 is a perspective view of the motion guide device
- FIG. 2 is a side view
- FIG. 3 is a front view (including a partial cross section).
- the motion guide device of this embodiment is called a linear guide, and is movably assembled to a track rail 1 as a linearly extending track member and a plurality of balls 3 as rolling elements on the track rail 1. And a moving member 2.
- ball rolling grooves la are formed as rolling element rolling portions extending along the longitudinal direction.
- the ball rolling groove la has an arc shape in cross section, and has a radius of curvature slightly larger than the radius of the ball 3.
- a total of four ball rolling grooves la are provided on the left and right side surfaces of the track rail 1, two on the top and bottom, but of course the number and arrangement of the strips are variously set according to the load load.
- the moving member 2 includes a moving block 4 in which a ball circulation path including a loaded ball rolling groove 2a facing the ball rolling groove la is formed, and clearance seals 5 and 6 attached to the moving block 4. Composed.
- the clearance seal is divided into an end clearance seal 5 attached to both end faces in the moving direction of the moving block and a side clearance seal 6 attached to the side of the moving block.
- the entire moving block 4 is formed in a bowl shape, and extends downward from both the left and right sides of the central portion 4a and a central portion 4a facing the upper surface of the rail 1 and the rail 1 Leg portions 4b opposite to the left and right sides of the.
- a plurality of balls 3 are interposed between the ball rolling groove la of the track rail 1 and the loaded ball rolling groove 2 a of the moving block 4.
- a preload is applied to the ball 3 rolling on the loaded ball rolling groove between the ball rolling groove la and the loaded ball rolling groove 2a.
- End plates 7 (see FIG. 1) on which U-shaped direction change paths are formed are attached to both ends of the moving block 4 in the moving direction.
- the ball 3 rolled while receiving a load to one end of the loaded ball rolling path of the moving block 4 enters a U-shaped direction changing path provided on the end plate 7.
- the ball After passing through the U-shaped direction change path, the ball enters the unloaded ball return path 8 (see Fig. 3) extending parallel to the load ball rolling path.
- the ball 3 that has passed through the unloaded ball return passage 8 passes through the direction change path of the opposite end plate 7 and then again. Enter the load ball rolling path.
- a circuit-shaped ball circulation path is formed by the straight loaded ball rolling path, the U-shaped direction changing path, and the straight unloaded ball return path 8.
- the material of the track rail 1, the moving block 4, and the end plate 7 is made of metal, specifically stainless steel so that gas is hardly generated in a vacuum environment or so as not to generate soot. .
- the end plate 7 is made of a resin such as a trembling force. However, if this is done, the resin retains moisture, and gas (water vapor) is generated from the end plate in a vacuum environment. This problem can be solved by using stainless steel. Instead of stainless steel, fluorine resin, PEEK material, or the like that does not easily retain moisture even with resin may be used.
- end clearance seals 5 as clearance seals are attached to both end surfaces of the movement block 4 in the movement direction.
- the end clearance seal 5 includes a plurality of thin plate-like first and second plates 9 and 10 that are alternately stacked, and a pressing plate 11 to which the first and second plates 9 and 10 are attached.
- the end clearance seal 5 is formed with openings 9a and 10a that match the outer shape of the track rail 1.
- FIG. 4 is a front view of the motion guide apparatus to which the end clearance seal 5 is attached.
- the end clearance seal 5 openings 9 a and 10 a that match the outer shape of the track rail 1 are formed.
- a small gap 12 along the track rail 1 is vacated. For this reason, the end clearance seal 5 moves along the track rail 1 while maintaining a slight clearance without contacting the track rail 1. Details of the clearance 12 will be described later.
- FIG. 5 shows an exploded perspective view of the end clearance seal 5.
- the first plate 9 is manufactured by punching a metal (for example, stainless steel) thin plate with a press.
- the first plate 9 is formed in a substantially rectangular shape, and has an opening 9 a that matches the cross-sectional shape of the track rail 1 in the central portion below the first plate 9.
- the shape of the opening 9a is slightly larger than the cross-sectional shape of the track rail 1 .
- a through hole 9b through which a screw 13 and the like for attaching the first plate 9 and the second plate 10 to the holding plate 11 is formed.
- through holes 9c through which screws 14 (see FIG. 1) for attaching the end clearance seal 5 to the moving block 4 and the like are formed on both sides of the through hole 9b above the opening 9a of the first plate.
- a triangular notch 9e is formed on the side surface of the first plate 9.
- the second plate 10 is also formed in a substantially rectangular shape, and an opening 10a having a shape matched to the cross-sectional shape of the track rail 1 is formed in the lower central portion.
- the shape of the opening 10a of the second plate 10 is slightly larger than the shape of the opening 9a of the first plate 9. For this reason, when the first plate 9 and the second plate 10 are laminated, an uneven shape is formed in the opening.
- a through hole 1 Ob through which the screw 13 or the like passes is also formed around the opening 10a of the second plate 10.
- the second plate 10 is also manufactured by punching a metal thin plate such as stainless steel with a press.
- a triangular notch 10e is formed on the side surface of the second plate 10 so as to be shifted from the first plate 9 in the upward and downward direction, whereby the first plate 9 and the second plate 10 are formed. And can be distinguished from the outside after assembling. If the first plate 9 and the second plate 10 are made by laser machining or wire force instead of punching out with a press, the dimensional accuracy of the first plate 9 and the second plate 10 can be increased. .
- the first plate 9 and the second plate 10 be thinner. Further, in order to prevent deformation when tightened with the screw 13, it is desirable that the first plate 9 and the second plate 10 have a certain thickness. From these requirements, the thicknesses of the first plate 9 and the second plate 10 are set to about 0.2 mm, for example. Of course, any other thickness may be set according to the size of the moving block 4 and the like.
- the presser plate 11 is formed to be thicker than the first and second plates 9 and 10.
- the presser plate 11 is also formed with an opening 11 a that matches the shape of the track rail 1.
- a female screw portion l ib that is screwed into the screw 13 is formed around the opening 11a.
- the first plate 9, the second plate 10 and the presser plate 11 are abutted against the assembly jig, and in a state where they are positioned, they are coupled by screws 13.
- FIG. 6 shows the end clearance seal 5 in a laminated state.
- the shape of the opening 10 a of the second plate 10 is slightly larger than the shape of the opening 9 a of the first plate 9. For this reason, as shown in FIGS.
- the surface of the end clearance seal 5 that faces the track rail 1 is formed in an uneven shape (see also FIG. 7).
- 8 between the second plate 10 and the track rail 1 is between the first plate 9 and the track rail 1.
- the clearance is larger than ⁇ .
- An uneven shape can be formed on the end clearance seal 5 by forming a plurality of grooves in an integral member without alternately laminating a plurality of first and second plates. However, in this case, the processing becomes more difficult as the number of repetitions of unevenness increases. If you can solve the problem of processing, you can form multiple grooves in a single member.
- the clearance ⁇ between the first plate 9 and the track rail 1 is such that the first plate 9 is closest to the track rail 1.
- the position is set to 0.25 mm or less.
- the tolerance of the track rail 1 is ⁇ 0.
- the tolerance of the clearance seal 1 is ⁇ 0.05mm
- the change amount of the clearance ⁇ due to the load applied to the device in the motion plan is 0.02-0.03mm.
- the height difference ⁇ (step) between the first plate 9 and the second plate 10 is substantially equal to the thickness t of the first and second plates 9 and 10.
- it is set to about 0.2 mm.
- the thickness ⁇ and the difference in height ⁇ are not limited to 0.2 mm, but can be appropriately set to 0.1 mm, 0.3 mm, or the like.
- Lubricating oil such as grease is supplied to the moving block 4.
- Lubricating oil is applied to the balls 3 of the moving block through, for example, an oil supply nipple and a lubricating oil supply path. While ball 3 moves, the lubricant The whole, the ball rolling groove la, and the loaded ball rolling groove 2a are supplied.
- the lubricating oil is placed in a vacuum environment, the base oil of the lubricating oil evaporates into a gas.
- the end clearance seal 5 moves without contacting the track rail 1.
- the clearance 12 between the inside of the end clearance seal 5 and the track rail 1 is made as small as possible, and the surface facing the track rail 1 of the end clearance seal 5 is also formed in an uneven shape. For this reason, when gas flows through the passage between the end clearance seal 5 and the track rail 1, a large resistance is generated.
- FIG. 8 shows a schematic diagram of the flow when the vacuum vessel 21 and the vacuum pump 22 are connected by the passage 23 (conductance C).
- the conductance C m 3 • s 1
- P P
- FIG. 9 shows the difference in conductance when the side surface shape of the passage 23 is a straight shape and a triangular shape.
- Fig. (A) shows a perspective view of the passage 23 used in the calculation
- Figs. (B) and (C) show sectional views of the passage 23 along the passage 23.
- Fig. (B) shows the case where a triangular shape appears repeatedly on the side surface of the passage 23 as an uneven shape
- Fig. (C) shows the case where the side surface of the passage 23 has a straight shape.
- a and b represent the vertical and horizontal dimensions of the cross-sectional shape of the passage
- L represents the length in the depth direction.
- k represents the correction factor due to unevenness
- C 1 represents the conductance of the orifice with cross-sectional area ab.
- Equation 2 Comparing Equation 2 and Equation 3, it can be seen that when the cross-sectional shape of the passage 23 is triangular, the conductance is reduced to 41% as in the straight shape. In other words, the conductance is smaller when the side surface of the passage 23 is triangular rather than straight.
- the first plate and the second plate that have been press-molded are laminated to form a concavo-convex shape, and thus the concavo-convex shape is necessarily a quadrangular shape.
- the conductance in the case of a quadrangular shape is not calculated, but it is assumed that it will be smaller as in the case of a triangular shape.
- Equations 2 and 3 above assume that the passage 23 shown in FIG. 9 is assumed and the conductance is reduced when the passage 23 is triangular.
- the end clearance seal 5 of the present embodiment is different in the clearance shape from the passage 23 shown in FIG. The trial calculation of the conductance of the end clearance seal 5 will be described in the following example.
- the conductance decreases as the number of repetitions of the unevenness increases.
- the length L in the depth direction can be shortened.
- FIGS. 10 and 11 show the side clearance seal 6 attached to the moving block 4.
- the moving block 4 is formed in a bowl shape as a whole, and has a central portion 4a facing the upper surface of the track rail 1 and a leg portion 4b facing the side surface of the track rail 1.
- Side clearance seal 6 is attached to the lower end of leg 4b.
- the side clearance seal 6 is elongated in the moving direction of the moving block 4, and both ends of the side clearance seal 6 are in contact with the end clearance seal provided on the moving block. Therefore, the periphery of the clearance between the moving block 4 and the track rail 1 is covered with a pair of end clearance seals 5 provided at both ends of the moving block 4 and a pair of side clearance seals on the side of the moving block.
- the side clearance seal 6 protrudes from the flat plate portion 6b for attaching the side clearance seal 6 to the moving block 4 and the track rail 1, and narrows the clearance between the side clearance seal 6 and the track rail 1. Projecting portion 6a.
- the flat plate portion 6b is provided with a hole 6c for connecting the side clearance seal 6 to the moving block by a connecting means such as a screw 19 (see FIG. 3).
- the protrusion 6a is matched to the shape of the side surface of the track rail 1, and a slight gap 20 is formed between the track rail 1 and the protrusion 6a.
- a groove including a bottom 24c and side walls 24a and 24b is formed on the side surface of the track rail 1.
- a lower ball rolling groove 1a is formed on one side wall 24b.
- the protrusion 6a approaches the bottom 24c and the side wall 24a of the groove.
- the clearance S 1 between the protrusion 6a and the bottom 24c is smaller than the clearance S 2 between the protrusion 6a and the side wall 24a. This is because the tolerance of the bottom 24c of the track rail 1 is smaller than the intersection of the side wall 24a. In this way, the tolerance of the track rail 1 is small! /,
- the portion is large, and the clearance can be set smaller than the portion.
- the size of the clearances S I and S2 is set to 0.02 to 0.25 mm, preferably 0.05 to 0.15 mm for the f clearance as in the case of the above-mentioned end clearance scenery 5.
- the side clearance seal 6 may be made of a resin such as fluorine resin or PEEK material or a metal such as stainless steel.
- the surface 6f of the protrusion 6a facing the track rail 1 is formed in a flat surface that is not uneven.
- the side clearance seal 6 is made of grease, as shown in Fig. 11, the thickness of the grease is almost constant at each part other than the surface 6f facing the track rail 1 of the protrusion 6a.
- the meat cutting portion 6d is formed.
- the side clearance seal 6 The law shifts. By providing the fore-wall portion 6d, it is possible to prevent the dimensions of the side clearance seal 6 from shifting.
- the side clearance seal 6 attached to the moving block 4 moves without contacting the track rail 1.
- the clearance 20 between the side clearance seal 6 and the track rail 1 is made as small as possible. For this reason, when a gas flows downward along the track rail 1 through the passage 23 between the side clearance seal 6 and the track rail 1, a large resistance is generated.
- the side clearance seal 6 also has a function of preventing the ball 3 from dropping from the moving block 4 when the moving block 4 is removed from the track rail 1.
- the distance between the upper end 6e of the side clearance seal 6 and the upper end 25 of the loaded ball rolling groove 2a is smaller than the diameter of the ball 3 as shown in FIG.
- a ball holding member 26 that prevents the ball 3 rolling the upper loaded ball rolling groove 2a from dropping from the moving block 4 is also provided on the lower surface of the central portion 4a of the moving block 4.
- FIGS. 13 to 15 show other examples of the side clearance seal.
- a groove 32 is formed on the surface 31a of the side clearance seal 31 facing the track rail 1, thereby forming an uneven shape on the surface 31a.
- the groove 32 extends parallel to the direction in which the side clearance seal 31 extends (the moving direction of the moving block 4).
- the cross-sectional shape of the groove 32 is triangular as shown in FIG.
- the side clearance seal 31 is the same as the side clearance seal 6 shown in FIG. 12 in that it has a flat plate portion and a protruding portion, and also has a ball holding function.
- 16 and 17 show still another example of the side clearance seal.
- a groove 34 having a square cross section is formed on the surface 33a of the side clearance seal 33 facing the track rail 1.
- the cross-sectional shape of the groove 34 is the square shape shown in this example.
- the motion guide device of the present invention is applied to a ball spline, a ball screw, etc. in addition to a linear guide. can do.
- a ball spline a cylindrical track shaft is used as the track member, and a cylindrical outer tube that fits the track shaft is used as the moving member.
- a screw shaft is used as the race member, and a nut that fits into the screw shaft is used as the moving member.
- Rollers can be used instead of balls for rolling elements.
- the solid line in the figure shows the change in pressure when the motion guide is not placed in the vacuum chamber, that is, the performance of the vacuum chamber itself. It can be seen that the pressure decreases as the evacuation time elapses and eventually reaches equilibrium.
- the broken line in the figure indicates that a motion guide device that is not supplied with grease is placed in a vacuum chamber. Shows the change in pressure when. In this case, it can be seen that the value is close to the pressure of the empty vacuum chamber. The reason for the slight increase is that a slight amount of gas is generated from the metal parts of the motion guide device.
- a two-dot chain line in the figure shows a change in pressure when the motion guide device supplied with grease is placed in the vacuum chamber.
- This motion guide device is not provided with a clearance seal, and the grease inside the motion guide device is vaporized and easily leaks to the outside.
- the pressure is increased as much as the grease vaporizes and leaks to the outside.
- the alternate long and short dash line indicates the change in pressure when the motion guide device to which the clearance seal is attached is placed in the vacuum chamber.
- Grease is supplied to this motion guide device, and an end clearance seal and a side clearance seal are attached as clearance seals.
- the clearance seal By installing the clearance seal, it is possible to prevent the grease from evaporating and leaking to the outside. As a result, the pressure is almost equal to that of the broken line in which no grease is supplied.
- a three-dot chain line in the figure shows a change in pressure when a standard product of a motion guide device (a general-purpose product having an end plate made of a resin not used in a vacuum environment) is placed in a vacuum chamber.
- Grease force A large amount of gas is generated from the end plate made of resin together with the generated gas, so the pressure is an order of magnitude higher than other motion guide devices.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/719,821 US8033729B2 (en) | 2004-11-22 | 2005-10-31 | Movement guiding device for vacuum environment |
JP2006544841A JP5069470B2 (ja) | 2004-11-22 | 2005-10-31 | 真空環境用運動案内装置 |
EP05800468A EP1830079A4 (en) | 2004-11-22 | 2005-10-31 | MOTION GUIDE FOR VACUUM ENVIRONMENT |
CN200580039660XA CN101084383B (zh) | 2004-11-22 | 2005-10-31 | 真空环境用运动导向装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004337045 | 2004-11-22 | ||
JP2004-337045 | 2004-11-22 | ||
JP2005315300 | 2005-10-28 | ||
JP2005-315300 | 2005-10-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006054439A1 true WO2006054439A1 (ja) | 2006-05-26 |
Family
ID=36406984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/019982 WO2006054439A1 (ja) | 2004-11-22 | 2005-10-31 | 真空環境用運動案内装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8033729B2 (ja) |
EP (1) | EP1830079A4 (ja) |
JP (1) | JP5069470B2 (ja) |
KR (1) | KR101268210B1 (ja) |
CN (1) | CN101084383B (ja) |
TW (1) | TWI352170B (ja) |
WO (1) | WO2006054439A1 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012111052A1 (ja) * | 2011-02-18 | 2012-08-23 | 日本精工株式会社 | 直動案内装置 |
JP2013221565A (ja) * | 2012-04-16 | 2013-10-28 | Canon Inc | 案内装置、露光装置および物品の製造方法 |
JP2014001818A (ja) * | 2012-06-20 | 2014-01-09 | Nsk Ltd | ボールねじ、直動案内装置 |
WO2014020649A1 (ja) | 2012-08-01 | 2014-02-06 | 日本精工株式会社 | 直動装置 |
JP2015211152A (ja) * | 2014-04-28 | 2015-11-24 | 日新イオン機器株式会社 | 真空処理システム、真空処理装置、潤滑剤供給装置および潤滑剤供給方法 |
US9261178B2 (en) | 2011-06-07 | 2016-02-16 | Nsk Ltd. | Linear device |
JP2016138661A (ja) * | 2016-04-07 | 2016-08-04 | キヤノン株式会社 | 案内装置、露光装置および物品の製造方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5720142B2 (ja) * | 2010-08-19 | 2015-05-20 | 日本精工株式会社 | リニアガイド装置 |
JP5673688B2 (ja) * | 2010-11-18 | 2015-02-18 | 日本精工株式会社 | 直動案内軸受装置及びそれに用いられるシール部材 |
CN103363052B (zh) * | 2012-03-31 | 2016-01-27 | 陈艳 | 滚珠式往复运动机构 |
CN103375487B (zh) * | 2012-04-26 | 2015-08-19 | 直得科技股份有限公司 | 线性滑轨的运动件结构 |
CN103869163B (zh) * | 2012-12-12 | 2017-03-08 | 中国科学院声学研究所 | 一种在非消声水池中测量换能器阵列互辐射阻抗的方法及其*** |
CN103047385B (zh) * | 2013-01-03 | 2016-01-20 | 雁峰集团有限公司 | 一种滚珠式往复运动机构 |
US9163665B2 (en) * | 2013-09-27 | 2015-10-20 | Ome Technology Co., Ltd. | Linear guideway |
US9222515B2 (en) * | 2014-02-19 | 2015-12-29 | Hiwin Technologies Corp. | Lubricating structure for linear motion guide apparatus |
JP6211669B2 (ja) * | 2015-11-30 | 2017-10-11 | Thk株式会社 | 運動案内装置およびアクチュエータ |
TWI642857B (zh) * | 2018-01-24 | 2018-12-01 | 上銀科技股份有限公司 | 防止漏油的線性滑軌 |
RU2753970C1 (ru) * | 2020-12-08 | 2021-08-24 | федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н.Туполева - КАИ" | Устройство измерения напряжения пьезоэлектрического эффекта в полимерах |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6293425U (ja) * | 1985-12-03 | 1987-06-15 | ||
JPH02146217U (ja) * | 1989-05-17 | 1990-12-12 | ||
JPH08168202A (ja) * | 1994-12-16 | 1996-06-25 | Toshiba Corp | 軸受潤滑油漏出防止装置 |
JP2000027873A (ja) * | 1998-07-08 | 2000-01-25 | Nippon Steel Corp | 熱間搬送テーブル用軸受箱 |
JP2001165162A (ja) * | 1999-09-29 | 2001-06-19 | Nsk Ltd | 直動案内装置 |
JP2002122135A (ja) * | 2000-08-11 | 2002-04-26 | Nsk Ltd | リニアガイド装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2715489B2 (ja) * | 1988-11-28 | 1998-02-18 | いすゞ自動車株式会社 | パティキュレートトラップの再燃焼装置 |
JP2526061Y2 (ja) * | 1990-06-20 | 1997-02-12 | 日本精工株式会社 | リニアガイド装置の防塵装置 |
JPH06346919A (ja) * | 1993-06-07 | 1994-12-20 | Nippon Seiko Kk | リニアガイドのシール装置 |
JP3308944B2 (ja) * | 1998-12-04 | 2002-07-29 | テイエチケー株式会社 | 案内装置の防塵構造 |
US6510614B1 (en) * | 1999-09-29 | 2003-01-28 | Nsk Ltd. | Linear guide apparatus |
US7306372B2 (en) * | 2000-08-11 | 2007-12-11 | Nsk Ltd. | Table device |
JP2002357221A (ja) | 2001-05-31 | 2002-12-13 | Nsk Ltd | 直動案内軸受装置 |
-
2005
- 2005-10-31 WO PCT/JP2005/019982 patent/WO2006054439A1/ja active Application Filing
- 2005-10-31 CN CN200580039660XA patent/CN101084383B/zh active Active
- 2005-10-31 EP EP05800468A patent/EP1830079A4/en not_active Withdrawn
- 2005-10-31 JP JP2006544841A patent/JP5069470B2/ja active Active
- 2005-10-31 KR KR1020077014016A patent/KR101268210B1/ko active IP Right Grant
- 2005-10-31 US US11/719,821 patent/US8033729B2/en active Active
- 2005-11-17 TW TW094140396A patent/TWI352170B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6293425U (ja) * | 1985-12-03 | 1987-06-15 | ||
JPH02146217U (ja) * | 1989-05-17 | 1990-12-12 | ||
JPH08168202A (ja) * | 1994-12-16 | 1996-06-25 | Toshiba Corp | 軸受潤滑油漏出防止装置 |
JP2000027873A (ja) * | 1998-07-08 | 2000-01-25 | Nippon Steel Corp | 熱間搬送テーブル用軸受箱 |
JP2001165162A (ja) * | 1999-09-29 | 2001-06-19 | Nsk Ltd | 直動案内装置 |
JP2002122135A (ja) * | 2000-08-11 | 2002-04-26 | Nsk Ltd | リニアガイド装置 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012111052A1 (ja) * | 2011-02-18 | 2012-08-23 | 日本精工株式会社 | 直動案内装置 |
JP2012172711A (ja) * | 2011-02-18 | 2012-09-10 | Nsk Ltd | 直動案内装置 |
CN102792038A (zh) * | 2011-02-18 | 2012-11-21 | 日本精工株式会社 | 直动引导装置 |
US8894283B2 (en) | 2011-02-18 | 2014-11-25 | Nsk Ltd. | Linear guide device |
US9261178B2 (en) | 2011-06-07 | 2016-02-16 | Nsk Ltd. | Linear device |
JP2013221565A (ja) * | 2012-04-16 | 2013-10-28 | Canon Inc | 案内装置、露光装置および物品の製造方法 |
US9373532B2 (en) | 2012-04-16 | 2016-06-21 | Canon Kabushiki Kaisha | Guide apparatus, exposure apparatus, and method of manufacturing article |
JP2014001818A (ja) * | 2012-06-20 | 2014-01-09 | Nsk Ltd | ボールねじ、直動案内装置 |
WO2014020649A1 (ja) | 2012-08-01 | 2014-02-06 | 日本精工株式会社 | 直動装置 |
JP2015211152A (ja) * | 2014-04-28 | 2015-11-24 | 日新イオン機器株式会社 | 真空処理システム、真空処理装置、潤滑剤供給装置および潤滑剤供給方法 |
JP2016138661A (ja) * | 2016-04-07 | 2016-08-04 | キヤノン株式会社 | 案内装置、露光装置および物品の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR101268210B1 (ko) | 2013-05-27 |
US8033729B2 (en) | 2011-10-11 |
EP1830079A1 (en) | 2007-09-05 |
JPWO2006054439A1 (ja) | 2008-05-29 |
TWI352170B (en) | 2011-11-11 |
US20090148083A1 (en) | 2009-06-11 |
CN101084383B (zh) | 2010-05-12 |
EP1830079A4 (en) | 2011-08-31 |
CN101084383A (zh) | 2007-12-05 |
JP5069470B2 (ja) | 2012-11-07 |
KR20070091149A (ko) | 2007-09-07 |
TW200624687A (en) | 2006-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2006054439A1 (ja) | 真空環境用運動案内装置 | |
JP4927564B2 (ja) | 運動案内装置及び運動案内装置の潤滑方法 | |
WO2014020649A1 (ja) | 直動装置 | |
JP2003161319A (ja) | 直線案内滑り軸受 | |
JP2003314545A (ja) | 直動案内滑り軸受装置 | |
JP5786356B2 (ja) | 直動案内装置 | |
JP3194680U (ja) | リニアガイドウェー用潤滑構造 | |
JP2003278752A (ja) | ローラ間にセパレータを介在させた直動案内ユニット | |
EP1840396A2 (en) | Lubricant supply apparatus | |
JP2008194778A (ja) | マニピュレータ及びこれを用いた成膜装置 | |
JP2003314546A (ja) | 直動案内滑り軸受装置 | |
JP2006046529A (ja) | 直動案内軸受装置 | |
JP2014088886A (ja) | 直動装置 | |
US20090161996A1 (en) | Motion guide device, table apparatus, and damping method for motion guide device | |
JPH0320575Y2 (ja) | ||
JP2013100919A (ja) | 転がり軸受、搬送ロボット及びフィルム搬送装置 | |
JP2012255457A (ja) | 直動装置 | |
JP4415534B2 (ja) | 運動案内装置 | |
EP3181929A1 (en) | Sliding bearing | |
JP2012077781A (ja) | 直動案内ユニット | |
US20180328411A1 (en) | Lubricating oil supply device | |
JP2004225758A (ja) | リニアガイド装置 | |
JP4273743B2 (ja) | 位置決め装置 | |
JP2008069872A (ja) | リニアガイド装置 | |
TW202102786A (zh) | 具儲油功能的滾子式滑軌及其儲油配件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KN KP KR KZ LC LK LR LS LT LU LV LY MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2006544841 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 200580039660.X Country of ref document: CN Ref document number: 11719821 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2005800468 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020077014016 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 2005800468 Country of ref document: EP |