WO2005019851A1 - 磁気センサ - Google Patents
磁気センサ Download PDFInfo
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- WO2005019851A1 WO2005019851A1 PCT/JP2004/011849 JP2004011849W WO2005019851A1 WO 2005019851 A1 WO2005019851 A1 WO 2005019851A1 JP 2004011849 W JP2004011849 W JP 2004011849W WO 2005019851 A1 WO2005019851 A1 WO 2005019851A1
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- current
- magnetic sensor
- magnetic
- detection coil
- groove
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/063—Magneto-impedance sensors; Nanocristallin sensors
Definitions
- the present invention relates to a high-precision magnetic sensor for measuring a minute magnetic field.
- a magnetic sensor using a magnetic impedance element there is a magnetic sensor in which a coil is wound around the outer periphery of an amorphous coil.
- a magnetic sensor for example, by extracting the first pulse of the vibration waveform induced in the coil when a pulse current having a rise time of 5 ns is applied to the amorphous wire, the first pulse is extracted in proportion to the external magnetic field H. Change to sensitivity ex
- Patent Document 1 See, for example, Patent Document 1).
- Patent Document 1 discloses that a feedback coil is wound around an amorphous wire and a feedback circuit is provided, and a negative feedback current proportional to the sensor output voltage is always supplied to the feedback coil to perform a negative feedback.
- a feedback coil is wound around an amorphous wire and a feedback circuit is provided, and a negative feedback current proportional to the sensor output voltage is always supplied to the feedback coil to perform a negative feedback.
- Patent Document 1 JP-A-2000-258517
- the conventional magnetic sensor has the following problems. That is, in the above-described conventional magnetic sensor, for example, the above-described feedback circuit or the like is required to improve the accuracy, and the circuit configuration may be complicated and the size may be increased. Further, for example, if the feedback circuit as described above is omitted, there is a problem that sufficient accuracy may not be obtained.
- the present invention provides a magnetic sensing element whose electromagnetic characteristics change due to the action of an external magnetic field, a drive circuit for supplying a current to the magnetic sensing element, a detection coil wound around the magnetic sensing element, And a sump-no-hold circuit for measuring an induced voltage value that is a magnitude of a voltage induced in the output coil,
- the magnetic sensor is characterized in that the sump-no-hold circuit is configured to measure the induced voltage value in synchronization with the interruption of the energizing current by the drive circuit.
- FIGS. 13A and 13B show an operation example of a magnetic detection unit in which a detection coil is wound around an amorphous wire when an external magnetic field that acts is +2 Gauss.
- FIG. 13A shows an example of a current waveform for driving an amorphous wire, in which a conduction time of 35 ns (nanosecond) is repeated at a predetermined cycle.
- FIG. 13B shows the voltage induced in the detection coil.
- the magnitude of the damped oscillation voltage and the positive and negative polarities are vector-wise determined by the relationship between the magnitude of the external magnetic field, the direction of the external magnetic field, and the angle formed by the axial direction of the amorphous wire. Therefore, the magnitude of the external magnetic field can be measured from the damped oscillation voltage.
- the maximum value of the damped oscillation voltage induced in the detection coil when the pulse current rises is The voltage of a certain pi changes as shown in FIG. As can be seen from the figure, there is an error of about 8% nonlinearity and about 6% hysteresis. Therefore, the method of measuring the external magnetic field, which measures the voltage pi at the rise of the pulse current, is inconvenient for azimuth measurement requiring high accuracy.
- the present inventors have eagerly studied the relationship between the voltage induced in the detection coil and the magnitude of the external magnetic field when the amorphous wire is driven by a pulse current (see FIGS. 13A and 13B).
- the research led to the following invention from the obtained knowledge.
- the present invention provides a magnetic sensor made of an amorphous wire through which a pulse current flows, a detection coil wound around the magnetic sensor, and a voltage induced in the coil in synchronization with the interruption of the pulse current. It is characterized by comprising a sump-no-hold circuit.
- FIG. 13 the present inventors have eagerly studied the relationship between the voltage induced in the detection coil and the magnitude of the external magnetic field when the amorphous wire is driven by a pulse current.
- the research led to the following invention from the obtained knowledge.
- the present invention provides a magnetic sensor made of an amorphous wire through which a pulse current flows, a detection coil wound around the magnetic sensor, and a voltage induced in the coil in synchronization with the interruption
- the damping oscillation voltage Q2 induced in the detection coil by the current change at the fall due to the interruption of the noise current flowing through the amorphous wire is detected by the sump-no-hold circuit.
- the non-linearity and hysteresis characteristics are improved, and the accuracy is improved.
- the magnetic sensor of the present invention for example, sufficient accuracy can be ensured even if the feedback circuit as described above is omitted. Therefore, with this magnetic sensor, the circuit configuration can be simplified, and the size and thickness can be reduced. Furthermore, power consumption can be suppressed by omitting the feedback circuit that needs to be constantly energized.
- FIG. 1 is a circuit diagram of a magnetic sensor according to a first embodiment.
- FIG. 2 is a characteristic diagram of an external magnetic field versus a maximum voltage value of a detection coil in Embodiment 1.
- FIG. 3 is a circuit diagram of a magnetic sensor according to a second embodiment.
- FIG. 4A is a graph showing the relationship between the time for supplying a pulse current and the current of an amorphous wire in Example 2.
- FIG. 4B is a characteristic diagram of the time of flowing a pulse current versus the voltage of a detection coil in Example 2.
- FIG. 5 is a characteristic diagram of an external magnetic field versus a maximum voltage value of a detection coil in Embodiment 2.
- FIG. 6A is a graph showing a time change of a pulse current in Example 3.
- FIG. 6B is a graph showing a change in voltage of a detection coil with respect to a pulse current in Example 3.
- FIG. 7 is a circuit diagram of a magnetic sensor according to a fourth embodiment.
- FIG. 8 is a graph showing a change in pulse current in Example 4.
- FIG. 9 is a front view of a magnetic impedance element according to a fifth embodiment.
- FIG. 10 is a conceptual cross-sectional view taken along line AA ′ of a diagram showing a magneto-impedance element in Example 5.
- FIG. 11 is a perspective view showing an arrangement of spiral detection coils in a groove according to a fifth embodiment.
- FIG. 12 is a characteristic diagram showing a relationship between an external magnetic field (G) and a maximum voltage value (V) of a detection coil in Example 5.
- FIG. 13A is a graph showing a time change of a conduction current of an amorphous wire.
- FIG. 13B is a graph showing the time change of the voltage of the detection coil when the external magnetic field acting on the magnetic detection unit is +2 G (Gauss).
- FIG. 14 is a characteristic diagram illustrating a relationship between an external magnetic field (G) and a maximum voltage value (V) of a detection coil measured in synchronization with a rise of a pulse current.
- FIG. 15 is a diagram illustrating an example of a conventional magnetic impedance element.
- the sump-no-hold circuit measures a temporally first peak value based on a damped oscillation waveform that is a temporal change of the induced voltage value due to the interruption of the energizing current. It is preferable that it is configured to be.
- the peak value p2 of the damped oscillation voltage Q2 can be detected as shown in FIG.13B, and the high sensitivity of the magnetic sensor Is possible.
- the sump-no-hold circuit has time storage means for storing a predetermined timing at which the drive circuit cuts off the energizing current.
- the induced voltage value is measured in synchronization with the predetermined timing.
- the predetermined timing is obtained by measuring the current flowing through the magnetosensitive material held in an external magnetic field having a magnetic field intensity of substantially zero.
- the induced voltage value that attenuates and oscillates is the first time when it crosses zero.
- zero crossing means that the induced voltage value that attenuates and oscillates reverses from a positive value (negative value) to a negative value (positive value).
- a voltage is induced in the detection coil when the current supplied to the magnetic sensing element is cut off.
- This induced voltage is due to electromagnetic induction or the like between the detection coil and the magnetic sensitive body, and is generated independently of an external magnetic field.
- the timing at which the induced voltage value that attenuates and vibrates at zero crossing is the timing at which the induced voltage value generated in the detection coil becomes zero irrespective of the external magnetic field.
- the timing at which the induced voltage value that attenuates and vibrates first zero-crosses in time is stored as the predetermined timing, and the sampler-hold circuit operates in synchronization with the predetermined timing. Then, the external magnetic field is measured. Therefore, a voltage component generated irrespective of an external magnetic field due to electromagnetic induction or the like between the detection coil and the magnetic sensitive body is less likely to be mixed as an error component. Therefore, according to the magnetic sensor, it is possible to measure the induced voltage value generated by the action of the external magnetic field with high accuracy.
- the time storage means can be configured as, for example, a delay circuit in which a coil, a resistor, and a capacitor are appropriately and selectively combined.
- the time storage means can be configured by using one function of a timer of a microcomputer or the like.
- the drive circuit stores a minimum voltage value which is the induced voltage value measured by the sample and hold circuit when an external magnetic field having a minimum magnetic field strength detected by the magnetic sensor acts on the magnetic sensitive body.
- a voltage storage means is provided, and the conduction current is cut off in a state where the induced voltage value converges to a voltage range of 5% or less of the minimum voltage value.
- the energizing current may be cut off. For example, thereafter, it is possible to accurately measure the induced voltage value using the sump-no-hold circuit.
- the state in which the induced voltage value converges refers to a state in which the damped oscillation voltage induced in the detection coil due to the rise of the conduction current falls within the voltage range.
- the induced voltage value is input to an envelope detection circuit in which a diode and a CR circuit are combined, and a threshold value is set as an output voltage value of the envelope detection circuit. It can be configured to check convergence by comparing with a value.
- One method is to add a second sample-and-hold circuit that samples and holds the peak value of the induced voltage value, and compare the voltage measured by the second sample-and-hold circuit with the threshold and value. Can be configured to check the convergence.
- the drive circuit is configured to apply a pulse-like current change as the energizing current to the magnetic sensing element, and it is necessary to increase the magnitude of the energizing current to a predetermined current value. It is preferable that the rise time is configured to be 3 times or more and 30 times or less of a cutoff time for cutting off the conduction current of the predetermined current value.
- the rise time at least three times the cutoff time, it is possible to suppress the induced voltage value caused by the rise of the conduction current as compared with the induced voltage value caused by the interruption of the conduction current. it can. If the induced voltage value at the time of rising is suppressed, the relative influence on the measured induced voltage value can be suppressed, and the measurement accuracy by the magnetic sensor can be improved.
- the rise time refers to the time required for the supplied current to rise from 10% to 90% of the predetermined current value
- the cutoff time refers to the time required for the supplied current to reach 90% of the predetermined current value. The time it takes to fall from 10% to 10%.
- the predetermined current value refers to the magnitude of the conducting current at the time of interruption.
- the drive circuit includes a capacitor for storing electric energy, which is a supply source of the conduction current, and an electronic switch disposed on an electric path between the capacitor and the magnetic sensitive body, And,
- the energizing current supplied from the capacitor to the magnetic sensitive body is supplied to the electronic switch.
- it is configured to be cut off using a switch.
- the current change rate when the pulse current of the magnetic sensitive body is cut off can be increased, and the detection sensitivity of the magnetic sensor can be further increased. It becomes possible.
- the magnetic sensor has an electrode wiring substrate having a groove extending in one direction, and the groove is configured to be filled with an insulator having electrical insulation.
- the magnetic sensing element is disposed so as to penetrate the insulator along a groove direction of the groove.
- the detection coil has one coil portion disposed on a groove surface that is an inner peripheral surface of the groove. It is preferable that a spiral electric path is formed by combining with the other coil portion provided on the upper surface of the groove, which is the outer surface of the insulator, which is the upper surface of the groove.
- the detection coil which combines one of the coil portions formed on the inner peripheral surface of the groove and the other coil portion formed on the upper surface of the groove, passes through the insulator in the groove.
- the magnetic sensitive body is an amorphous wire having a diameter of 1 ⁇ m or more and 30 ⁇ m or less, and the detection coil has a winding inner diameter of 200 ⁇ m or less.
- the gap between the amorphous wire skin and the detection coil can be reduced by setting the winding inner diameter of the detection coil to 200 ⁇ or less. If the gap is made small, the skin effect excitation of the magneto-sensitive body made of an amorphous wire can be used efficiently. Therefore, a large induced voltage value of the detection coil can be secured, and the sensitivity of the magnetic sensor can be increased.
- FIG. 1 is a circuit diagram of the magnetic sensor of the present example.
- a magnetic sensing unit 1 has a zero magnetostrictive amorphous wire 11 of a CoFeSiB-based alloy having a length of 2.5 mm as a magnetic sensitive material and a diameter of 30 / im, and is wound 40 times around the amorphous wire 11. It consists of a detection coil 12 and a current control resistor R11. The amorphous wire 11 is connected to the output terminal P2 of the pulse generator 2 via the resistor R11 in order to conduct a pulse current.
- the detection coil 12 is connected to an input terminal P 3 of an electronic switch of the sample and hold circuit 3 so as to output a voltage based on an induced voltage generated in response to an external magnetic field when the pulse current is cut off. I have.
- the pulse generator 2 includes a multivibrator including CMOS inverter elements L21 and L22, a resistor R21 and a capacitor C21, and a waveform shaping circuit including a CMOS inverter element L23 including a differentiating circuit including a capacitor C22 and a resistor R22.
- the multivibrator is electrically connected to the waveform shaping circuit.
- the wave-forming circuit When the multivibrator generates a square wave having a frequency of 1 MHz, the wave-forming circuit generates a pulse voltage having a period of 35 ns (nanosecond) with a logic level of "1" at a repetition frequency of 1 MHz, This pulse voltage is output to the output terminal P2.
- the sample and hold circuit 3 includes a sample and hold unit B31 including an electronic switch S31, a capacitor C32, a resistor R32, a resistor R33, and a high input resistance amplifier A31, and a resistor R31 connected to a control terminal of the electronic switch S31. And a delay circuit with a capacitor C31.
- the other terminal of the delay circuit is connected to the output terminal P2 of the pulse generator.
- the delay circuit delays the logic level of the control terminal of the electronic switch S31 to "1" by a predetermined time determined by the resistor R31 and the capacitor C31.
- the electronic switch S31 is in the “closed” state, and the induced voltage of the detection coil 12 is applied to the capacitor C32.
- the pulse of the output terminal P2 falls, the error is detected.
- the current flowing through the morphus wire 11 is cut off, and the electronic switch S31 is opened after a predetermined time ⁇ t determined by the resistor R31 and the capacitor C31.
- the delay time At is equal to the maximum voltage p2 of the damped oscillation voltage Q2 applied to the detection coil 12 after the current of the amorphous wire 11 is cut off (time 1).
- the high input resistance amplifier A31 outputs a voltage corresponding to the magnitude of the external magnetic field to the output terminal P4 by converting the voltage of the detection coil to a DC voltage. It keeps outputting that voltage until it is newly updated by the pulse.
- FIG. 2 shows the results when the magnetic field applied to the magnetic detection unit was changed in a range of ⁇ 3 G.
- the figure shows the result obtained by DC-converting the voltage of p2, which is the maximum value of the damped oscillation voltage induced in the detection coil 12 when the pulse current is cut off, by the sump-no-hold circuit.
- the non-linearity and the hysteresis are both less than 2%, and practical accuracy has been achieved in azimuth measurement.
- the circuit of the magnetic sensor of the present example it is not necessary to use a negative feedback circuit. Therefore, the necessity of constantly flowing a negative feedback current to the negative feedback circuit can be eliminated, and power consumption can be reduced.
- FIG. 3 is a circuit diagram of the magnetic sensor of the present example.
- the circuit diagram of FIG. 3 shows the first embodiment.
- a driving circuit 4 for supplying a pulse current to the amorphous wire 11 is newly added to the circuit diagram of FIG.
- the other circuits in FIG. 3 are the same as those in FIG. Therefore, the drive circuit 4 will be described.
- the drive circuit 4 includes a delay circuit including a capacitor C41 charged to a voltage Vdd (connected to a stabilized power supply circuit not shown), an electronic switch S41, a resistor R41, and a capacitor C42.
- the drive circuit 4 supplies a current from the capacitor C41 to the resistor R11 of the magnetic detection unit 1 and the amorphous wire 11 when the electronic switch S41 is "closed".
- the control terminal of the electronic switch S 41 is delayed by a predetermined time by a delay circuit including a resistor R 41 and a capacitor C 42.
- the state of the logic level “0" becomes the state of "1". Thereafter, after a lapse of 35 ns, the state returns to "0" again with the fall of the pulse voltage.
- the delay circuit including the resistor R41 and the capacitor C42 is for adjusting the operation timing of the electronic switch S31 with respect to the interruption of the current flowing through the amorphous wire 11.
- the delay time of the delay circuit is set such that the electronic switch S31 of the sump-no-hold circuit is opened at the timing when the damped oscillation voltage induced in the detection coil 12 becomes the maximum value. is there.
- FIG. 4A shows the behavior of the current of the amorphous wire 11 when a pulse current (35 ns) is applied to the amorphous wire 11, and
- FIG. 4B shows the behavior of the voltage of the detection coil.
- the gradient k2 which is the current change rate when the pulse current of the amorphous wire 11 is cut off, is twice as large as the gradient kl driven by the CMOS inverter element shown in FIG.13A. I have.
- the magnitude of the maximum value p3 of the damped oscillation voltage induced in the detection coil 12 is also increased about twice as large as p2 in FIG. 13B.
- FIG. 5 shows the maximum value p3 of the damped oscillation voltage induced in the detection coil when the external magnetic field acting on the magnetic detection unit 1 is changed within a range of ⁇ 3G.
- the sensitivity that is, the output voltage per unit magnetic field intensity is 0.037 VZG, which is about 2.5 times higher than the sensitivity of Example 1 shown in FIG. I have.
- the drive circuit 4 is provided to supply a pulse current to the amorphous wire 11.
- the drive circuit 4 uses the electronic switch to conduct and cut off the current supplied from the charged capacitor to the magnetic sensing element. This makes it possible to increase the rate of change over time with respect to the pulse current flowing through the amorphous wire, thereby further increasing the sensitivity of the magnetic sensor.
- This embodiment is an example in which the delay time of the delay circuit is changed based on the first embodiment. This will be described with reference to FIGS. 1, 6A and 6B.
- FIG. 6A shows a current change when the pulse current supplied to the amorphous wire 11 is cut off.
- FIG. 6B shows a change in voltage induced in the detection coil of the magnetic detection unit (reference numeral 1 in FIG. 1).
- the voltage change indicated by reference numeral V0 in Fig. 6B is when the external magnetic field acting on the magnetic detection unit is substantially zero.
- the voltage change indicated by the reference numeral VI is that when the magnetic field strength is S1 gauss of the external magnetic field acting along the axial direction of the amorphous wire of the magnetic detection unit.
- the voltage change indicated by the symbol V2 indicates that the magnetic field strength of the external magnetic field acting along the axial direction of the amorphous wire of the magnetic detection section is 2 ga. It is when you are.
- the voltage induced in the detection coil is constant.
- a damped oscillation voltage having a small amplitude is generated in the detection coil.
- the damped oscillation voltage V0 induced in the detection coil by electromagnetic induction or the like between the amorphous wire and the detection coil is likely to be superimposed on the damped oscillation voltage VI or V2 when measuring an external magnetic field. . That is, a voltage generated due to electromagnetic induction between the amorphous wire and the detection coil or the like is highly likely to contribute to a measurement error of the magnetic sensor.
- the delay time of the delay circuit of the first embodiment It is set to the time until the first zero crossing zl of the voltage V0 appears. Therefore, the electronic switch S31 is opened when the first zero cross zl appears. On the other hand, the capacitor C32 holds the voltage of the detection coil immediately before the electronic switch S31 is opened.
- the high input resistance amplifier converts the voltage of the detection coil into a DC voltage, and outputs a voltage corresponding to the magnitude of the external magnetic field to the output terminal P4.
- the delay time of the delay circuit is set to the timing at which the zero crossing zl (see FIG. 6B) of the damped oscillation voltage of the detection coil appears under an external magnetic field of approximately zero. Therefore, in the measurement of the external magnetic field by the magnetic sensor of this example, it is possible to suppress an error due to electromagnetic induction or the like generated between the amorphous coil and the detection coil. Furthermore, the delay time is that of the first zero cross zl in time. Therefore, by setting the delay time, it is possible to measure the voltage P 5 size close to Gotogu maximum voltage p4 shown in FIG. 6B as voltage prior Symbol detection coil.
- the magnetic sensor of this example it is possible to suppress errors due to electromagnetic induction between the amorphous wire and the detection coil or the like, and perform measurement with high accuracy.
- Example 4 This embodiment is an example in which the configuration of the drive circuit is changed based on the second embodiment. This content will be described with reference to FIGS.
- the drive circuit 4 of the present embodiment is such that the inductance L41 is connected between the capacitor C41 and the electronic switch S41 based on the drive circuit of the second embodiment as shown in FIG.
- a saw-tooth wave current can be generated by a first-order lag characteristic based on a time constant determined by the inductance L41 and the resistance R11.
- a diode D41 is connected in parallel with the inductance L41. The diode D41 absorbs a surge voltage when the electronic switch S41 is opened.
- the drive circuit 4 when the electronic switch S41 is closed as shown in FIG. 8, that is, when the current flowing through the amorphous wire rises, the sawtooth having a gentle rise as described above. A wave current can be generated.
- the electronic switch S41 becomes "open", that is, when the conduction current to the amorphous wire is cut off, the conduction current can be decreased more rapidly than the above-described rising force S. Then, in this example, a pulse current close to the sawtooth wave current is supplied to the amorphous wire.
- the rise time Tu is set to 20 ns
- the cutoff time Td is set to 3 ns. That is, the rise time Tu of this example is about seven times the cutoff time Td.
- the conduction time Tw from the rise to the cutoff is set to about 25 ns.
- the rise time Tu refers to the time required for the current to rise from 10% to 90% of the steady-state value
- the cut-off time Td refers to the time required for the current to flow from 90% to 10% of the steady-state value. The time it takes to fall.
- the energization time Tw is determined so that the following requirement is satisfied.
- this requirement means that the magnitude of the attenuation oscillation voltage induced in the detection coil with the rise of the energizing current is 5% or less of the minimum voltage value described below when the energizing current is cut off.
- the minimum voltage value is a magnitude of the induced voltage value measured by the sample-hold circuit when an external magnetic field having a minimum magnetic field strength detected by the magnetic sensor acts on the magnetic sensitive body.
- the pulse-shaped energizing current is applied to the amorphous wire.
- the current slowly raise the current.
- power consumption can be suppressed and an energy saving effect can be obtained as compared with a case where a nearly complete pulse current is supplied (dotted line dl).
- the current change rate at the time of the rise of the current flowing through the amorphous wire is made small (slowly rises), the amplitude of the oscillation voltage generated in the detection coil can be suppressed.
- the current flowing through the amorphous wire is interrupted while the amplitude of the oscillating voltage of the detection coil is small, the voltage generated according to the external magnetic field can be measured with high accuracy.
- the oscillating voltage caused by the rise of the energizing current converges early, so that the energizing current can be immediately cut off and the external magnetic field can be measured. Therefore, the power-saving time can be reduced and the power saving effect can be obtained.
- the saw-tooth wave current is used, but an incomplete pulse-like current having a longer rise time than the cut-off time may be used instead.
- This incomplete panelless current can be realized by adjusting the time constant of the drive circuit 4 of the present embodiment. For example, if the rise time is set to be 3 times or more and 30 times or less of the cutoff time, the operation effect of this example can be obtained.
- a magnetic impedance element composed of a magnetic sensing element made of an amorphous wire for supplying a pulse current and a detection coil wound around the magnetic sensing element constituting a magnetic detecting section will be described with reference to FIGS. Will be explained.
- a magnetic sensitive body 20 for detecting a magnetic field on the electrode wiring board 10 and only an insulator 40 is interposed between the magnetic sensitive body 20 and the detection coil 30.
- a detection coil 30 having a winding inner diameter of 200 / im or less is arranged on the outer periphery of the insulator 40.
- the terminals of the magnetic sensitive body 20 and the detection coil 30 are connected to the respective electrodes 51 and 52 on the electrode wiring board 10.
- the magneto-impedance element supplies a panel current to the magnetic sensing element 20 via the electrodes 51 and 52, and outputs a voltage generated in the detection coil 30 at that time.
- the inner diameter of the winding can be reduced to 200 zm or less.
- the winding inner diameter is a circle-equivalent inner diameter corresponding to the diameter of a circle having the same area as the groove cross-sectional area formed by the height and width shown in FIG. If the winding inside diameter is large, the gap between the magnetic sensing element and the detection coil In this example, the inner diameter of the winding is set to 200 ⁇ m or less in view of the fact that high sensitivity cannot be obtained due to the expansion of the magnetic field and the need for downsizing the magnetic impedance element.
- the magnetic sensitive body 20 is a magnetic amorphous wire of a CoFeSiB-based alloy having a diameter of 10 to 30 ⁇ m and having conductivity.
- the diameter of the magnetic amorphous wire is preferably set to 10 to 30 zm, from the viewpoint of manufacturing.
- the electrode wiring board 10 has a groove 90 with a depth of 40 200 zm.
- the detection coil 30 has one side 31 (coil portion 31) of the detection coil arranged along the groove surface 91 and one side 32 (coil portion 32) of the detection coil arranged on the upper surface 92 of the groove. It has a two-layer structure composed of 31 and a coil part 32.
- the size of the electrode wiring board 10 of this example is 0.5 mm in width, 0.5 mm in height, and 1.5 mm in length.
- the magnetic susceptor is an amorphous wire 20 having a diameter of 20 zm using a CoFeSiB-based alloy.
- the groove 90 on the electrode wiring board 10 has a depth of 50 zm, a width of 70 x m, and a length of 1.5 mm.
- the detection coil 30 has a two-layer structure including a coil part 31 formed on a groove surface 91 and a coil part 32 formed on a groove upper surface 92.
- the coil portion 31 formed on the groove surface 91 was formed by vapor deposition on the entire surface of the groove surface 91 of the groove 90 and on the upper surface of the electrode wiring board 11 in the vicinity of the groove 90.
- the conductive metal thin film is selectively removed.
- the coil portion 31 is provided with a gap portion in the gap between the spiral metal thin films so that the metal thin film remains in a spiral shape by using a selective etching technique.
- the coil piece 312 is composed of a third coil piece 311 facing the second coil piece 311 adjacent to the first coil piece 311 in the groove direction, and the first coil piece 311. It is formed so as to be connected to the coil piece 311. Thereby, the coil part 311 formed by combining the coil part 311 and the coil part 312 forms a spiral shape as a whole.
- the coil portion 32 of the groove upper surface 92 (the coil portion 32 formed on the upper surface 41 of the resin 40 having an insulating property) includes the groove upper surface 92 in the longitudinal direction of the electrode wiring board 10. It consists of a conductive metal thin film deposited over a wide area.
- the coil portion 32 was formed by applying a selective etching technique to the film. Specifically, by removing a part of the metal thin film by a selective etching method, a plurality of strip-shaped metal thin films along the width direction of the groove 90 were provided. In this example, the coil portion 32 was formed so as to connect the coil pieces 311 facing each other. Note that a protective film may be formed on the upper surface of the coil part 32 as necessary.
- the inner diameter of the winding of the detection coil 30 of the present example is 66 ⁇ m in an inner diameter equivalent to a circle.
- the winding interval of the detection coil is 50 x m and 20 turns.
- a resin 40 having an insulating property is filled between the amorphous wire 20 and the detection coil 30 to keep electrical insulation between the conductive magnetic amorphous wire 20 and the detection coil 30.
- the size of the magneto-impedance element of this example is almost the same as the size of the electrode wiring board.
- FIG. 15 shows an example.
- the substrate 110 has a width of 1.0 mm, a height of 0.5 mm, and a length of 2.5 mm.
- An amorphous wire 120 having a diameter of 30 ⁇ m and having a CoFeSiB-based alloy strength is placed on a substrate 110, protected with a gel resin, and a detection coil 130 is wound.
- the winding frame 160 and the electrode 150 have insulating properties. Therefore, it is considered that the above-mentioned high sensitivity (0.076 V / G) is caused by reducing the distance between the amorphous wire of the magnetic sensitive body and the detection coil for detecting the output.
- the downsized and thinner magnetic sensor can be achieved by the downsized magnetic impedance element.
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Abstract
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Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2004800004469A CN1697980B (zh) | 2003-08-25 | 2004-08-18 | 磁性传感器 |
JP2005513288A JP3801194B2 (ja) | 2003-08-25 | 2004-08-18 | 磁気センサ |
US10/522,753 US7026812B2 (en) | 2003-08-25 | 2004-08-18 | Magnetic sensor |
EP04771810A EP1528402B1 (en) | 2003-08-25 | 2004-08-18 | Magnetic sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003208682 | 2003-08-25 | ||
JP2003-208682 | 2003-08-25 |
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JP (1) | JP3801194B2 (ja) |
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JP2009133789A (ja) * | 2007-11-30 | 2009-06-18 | Fujikura Ltd | 磁気センサを用いた外部磁界の測定方法 |
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Also Published As
Publication number | Publication date |
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EP1528402B1 (en) | 2011-08-10 |
KR20060025113A (ko) | 2006-03-20 |
JPWO2005019851A1 (ja) | 2006-10-19 |
US7026812B2 (en) | 2006-04-11 |
KR100666292B1 (ko) | 2007-01-11 |
CN1697980A (zh) | 2005-11-16 |
CN1697980B (zh) | 2010-04-28 |
US20060038561A1 (en) | 2006-02-23 |
TWI285747B (en) | 2007-08-21 |
EP1528402A4 (en) | 2008-07-16 |
EP1528402A1 (en) | 2005-05-04 |
JP3801194B2 (ja) | 2006-07-26 |
TW200510749A (en) | 2005-03-16 |
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