WO2004055375A1 - Vacuum pumping arrangement - Google Patents

Vacuum pumping arrangement Download PDF

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Publication number
WO2004055375A1
WO2004055375A1 PCT/GB2003/005370 GB0305370W WO2004055375A1 WO 2004055375 A1 WO2004055375 A1 WO 2004055375A1 GB 0305370 W GB0305370 W GB 0305370W WO 2004055375 A1 WO2004055375 A1 WO 2004055375A1
Authority
WO
WIPO (PCT)
Prior art keywords
pumping mechanism
pumping
rotor
arrangement
turbomolecular
Prior art date
Application number
PCT/GB2003/005370
Other languages
French (fr)
Inventor
Nigel Paul Schofield
Original Assignee
The Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Boc Group Plc filed Critical The Boc Group Plc
Priority to DE60313493T priority Critical patent/DE60313493T2/en
Priority to JP2004559871A priority patent/JP4667043B2/en
Priority to EP03786099A priority patent/EP1573204B1/en
Priority to US10/536,781 priority patent/US8727751B2/en
Priority to AU2003295099A priority patent/AU2003295099A1/en
Publication of WO2004055375A1 publication Critical patent/WO2004055375A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/12—Light metals
    • F05D2300/121—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the present invention relates to a vacuum pumping arrangement
  • a known vacuum pumping arrangement comprises a turbomolecular
  • a backing pump is generally provided
  • the arrangement may be of any suitable type such as a regenerative pump or claw pump.
  • the turbomolecular pumping mechanism comprises one or more
  • the molecular drag pumping mechanism comprises
  • a rotor which may comprise a hollow cylinder in a Holweck type pumping
  • the cylinder of a Holweck type pumping mechanism extends
  • the present invention provides a pumping arrangement comprising a
  • turbomolecular pumping mechanism and a molecular drag pumping mechanism connected in series, a rotor of the molecular drag pumping
  • Figure 1 is a cross-sectional view of a vacuum pumping arrangement
  • Figure 2 is a perspective view from above and one side of a rotor of a
  • Figure 3 is a perspective view from below and one side of the rotor in
  • Figure 4 is an elevation of the rotor in Figure 2;
  • Figure 5 is a plan of the rotor in Figure 2.
  • Figure 6 is a cross-sectional view of another vacuum pumping
  • vacuum pumping arrangement 10 is shown
  • the molecular pumping mechanism 12 comprises a molecular pumping mechanism 12 and a backing pumping mechanism 14.
  • the molecular pumping mechanism 12 comprises a
  • turbomolecular pumping mechanism 16 and a molecular drag, or friction, pumping mechanism 18 connected in series.
  • the backing pumping mechanism 14 comprises a regenerative pumping mechanism, which as
  • a- backing pump may be provided as a .
  • drag pumping mechanism 20 may be provided between molecular drag
  • drag pumping mechanism 20 comprises three drag pumping stages in series,
  • molecular drag pumping mechanism 18 comprises two drag pumping
  • Vacuum pumping arrangement 10 comprises a housing in three
  • Parts 22 and 24 may form the inner surfaces of the
  • Part 26 may form the stator of the regenerative
  • Part 26 defines a counter-sunk recess 28 which receives a lubricated
  • Bearing 30 for supporting a drive shaft 32.
  • Bearing 30 may be lubricated, for
  • arrangement may be in fluid connection with a semiconductor processing
  • Drive shaft 32 is driven by motor 34 which as shown is supported by
  • the motor may be supported at any convenient position in the vacuum pumping arrangement.
  • Motor 34 is adapted to be able to power the regenerative pumping mechanism 14,
  • a regenerative pumping mechanism requires more power for-- >./ * «, operation than a molecular pumping mechanism, the regenerative pumping
  • a turbomolecular pumping mechanism operating at pressures close to atmosphere where windage and air resistance is relatively high.
  • a turbomolecular pumping mechanism or
  • molecular drag pumping mechanism requires relatively less power for
  • Regenerative pumping mechanism 14 comprises a rotor fixed relative
  • the regenerative pumping mechanism 14 comprises three pumping stages, and for each stage, a circumferential array of
  • rotor blades 38 extends substantially orthogonally from one surface of the
  • the rotor body 36 The rotor blades 38 of the three arrays extend axially into
  • part 26 which constitutes the stator of the regenerative pumping mechanism
  • drive shaft 32 rotates rotor body 36 which causes the
  • the drag cylinders 46 are made from carbon fibre composite
  • molecular drag pumping mechanism is in operation. Accordingly, the speed of the molecular drag pumping mechanism is easier to control.
  • the molecular drag pumping mechanism 20 shown schematically is a
  • the molecular pumping mechanism 12 is driven at an end of drive
  • a magnetic bearing 54 is
  • a passive magnetic bearing is shown in which like poles of a
  • a circumferential array of angled rotor blades 58 extend radially outwardly from rotor body 52. At approximately half way along the radial
  • annular support ring 60 is provided, to which is fixed the drag cylinder, or rotor, 62 of molecular drag pumping mechanism
  • pumping "mechanism' --18 comprises' two -drag -stages in parallel- with. ⁇ a- single-.-. drag cylinder 62, one stage being radially inward thereof and one stage being
  • Each of the stages comprise stator portions 64 with
  • An outlet 68 is provided to exhaust gas from the molecular drag
  • FIGS 2 to 5 show the rotor of the turbomolecular pumping mechanism 16 in more detail.
  • the rotor comprises the rotor body 52 which
  • annular ring 60 which is provided at a central radial portion of -the -r ⁇ tor blades, or about half way along their length.
  • molecular drag pumping mechanism is fixed to the annular ring by any
  • inlet 70 of pump arrangement 10 is
  • Motor 34 rotates drive shaft 32 which in turn drives rotor body 36 and rotor
  • turbomolecular pumping mechanism 16 where it is urged by the rotor blades 58 along both parallel drag pumping stages 18 and through outlet 68. Gas is
  • Figure 6 shows a vacuum pumping arrangement 100 in which the
  • molecular pumping mechanism 12 comprises a turbomolecular pumping mechanism 16 having two pumping stages in series. Two arrays of angled rotor blades 58 extend radially outwardly from the hub of the rotor body 52
  • the rotor of the molecular drag pumping mechanism and are provided with the annular ring 60 to which the rotor of the molecular drag pumping mechanism
  • drag pumping mechanism 18 comprises more than one drag cylinder, or rotor,
  • the turbo blades may therefore be provided with radially
  • molecular pumping mechanism 12 is driven by a common shaft with regenerative pumping mechanism 14 and which together form one pumping unit
  • the present invention is not restricted in this way.
  • the molecular pumping mechanism may form a pumping unit separate from the regenerative pumping mechanism, both of which are driven by separate motors and separate drive shafts.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

A vacuum pumping arrangement comprises a turbomolecular pumping mechanism and a molecular drag pumping mechanism connected in series. A rotor of the molecular drag pumping mechanism is supported by the rotor blades of the turbomolecular pumping mechanism.

Description

VACUUM PUMPING ARRANGEMENT
The present invention relates to a vacuum pumping arrangement
comprising a turbomolecular pumping mechanism and a molecular drag
pumping mechanism connected in series.
A known vacuum pumping arrangement comprises a turbomolecular
pumping mechanism connected in series with a molecular drag pumping "
mechanism, the latter of which can be of any suitable type such as a Holweck or a Gaede type pumping mechanism. A backing pump is generally provided
to reduce pressure at the exhaust of the arrangement and may be of any suitable type such as a regenerative pump or claw pump.
The turbomolecular pumping mechanism comprises one or more
circumferential arrays of angled blades supported at a generally cylindrical rotor body." During normal -operation, the rotor, -which is coupled to a-- drive
shaft, is rotated between 20,000 and 200,000 revolutions per minute, during
which time the rotor blades collide with molecules in a gas urging them
towards the pump outlet. The molecular drag pumping mechanism comprises
a rotor, which may comprise a hollow cylinder in a Holweck type pumping
mechanism, coupled to the drive shaft for simultaneous rotation with the
turbomolecular pumping mechanism. Rotation of the molecular drag
pumping mechanism imparts a velocity to gas molecules entering it from the
exhaust of the turbomolecular pumping mechanism tangentially to the circumference of the cylinder and along spiral channels formed between a
stator and the cylinder towards the drag outlet.
The cylinder of a Holweck type pumping mechanism extends
generally axially with a circumference about the axis of the drive shaft, and is
supported by an apertured plate extending radially from the drive shaft
between the turbomolecular pumping mechanism and the cylinder. Therefore,
in use,' gas passes from the outlet of the turbomolecular pumping mechanism,
through the apertured plate and into the molecular drag pumping mechanism.
It is desirable to provide an improved vacuum pumping arrangement. The present invention provides a pumping arrangement comprising a
turbomolecular pumping mechanism and a molecular drag pumping mechanism connected in series, a rotor of the molecular drag pumping
mechanism being supported by the rotor blades of the turbomolecular pumping mechanism.
Other aspects of the present invention are defined in the accompanying
claims.
In order that the present invention may be well understood, two
embodiments thereof, which are given by way of example only, will now be
described with reference to the accompanying drawings, in which:
Figure 1 is a cross-sectional view of a vacuum pumping arrangement
shown schematically;
Figure 2 is a perspective view from above and one side of a rotor of a
turbomolecular pumping mechanism; Figure 3 is a perspective view from below and one side of the rotor in
Figure 2;
Figure 4 is an elevation of the rotor in Figure 2;
Figure 5 is a plan of the rotor in Figure 2; and
Figure 6 is a cross-sectional view of another vacuum pumping
arrangement shown schematically.
' Referring to Figure 1, vacuum pumping arrangement 10 is shown,
which comprises a molecular pumping mechanism 12 and a backing pumping mechanism 14. The molecular pumping mechanism 12 comprises a
turbomolecular pumping mechanism 16 and a molecular drag, or friction, pumping mechanism 18 connected in series. The backing pumping mechanism 14 comprises a regenerative pumping mechanism, which as
shown is provided and driven on the same drive shaft as the molecular pumping mechanism. Alternatively • a- backing pump may be provided as a .•*->
separate unit from the molecular pumping mechanism. A further molecular
drag pumping mechanism 20 may be provided between molecular drag
pumping mechanism 18 and regenerative pumping mechanism 14. Molecular
drag pumping mechanism 20 comprises three drag pumping stages in series,
whereas molecular drag pumping mechanism 18 comprises two drag pumping
stages in parallel.
Vacuum pumping arrangement 10 comprises a housing in three
separate parts 22, 24, 26. Parts 22 and 24 may form the inner surfaces of the
molecular pumping mechanism 12 and the molecular drag pumping mechanism 20, as shown. Part 26 may form the stator of the regenerative
pumping mechanism 14.
Part 26 defines a counter-sunk recess 28 which receives a lubricated
bearing 30 for supporting a drive shaft 32. Bearing 30 may be lubricated, for
instance with grease, because it is in a part of the pumping arrangement 10
distal from the inlet of the pumping arrangement. The inlet of the pumping
arrangement may be in fluid connection with a semiconductor processing
chamber in which a clean or oil free environment is required.
Drive shaft 32 is driven by motor 34 which as shown is supported by
parts 22 and 24 of the housing. The motor may be supported at any convenient position in the vacuum pumping arrangement. Motor 34 is adapted to be able to power the regenerative pumping mechanism 14,
molecular drag pumping mechanism 20 and molecular pumping mechanism
12. -Generally, a regenerative pumping mechanism- requires more power for-- >./*«, operation than a molecular pumping mechanism, the regenerative pumping
mechanism operating at pressures close to atmosphere where windage and air resistance is relatively high. A turbomolecular pumping mechanism, or
molecular drag pumping mechanism requires relatively less power for
operation, and therefore, a motor selected for powering a regenerative pump is
also generally suitable for powering a turbomolecular pumping mechanism or
molecular drag pumping mechanism.
Regenerative pumping mechanism 14 comprises a rotor fixed relative
to drive shaft 32. As shown, the regenerative pumping mechanism 14 comprises three pumping stages, and for each stage, a circumferential array of
rotor blades 38 extends substantially orthogonally from one surface of the
rotor body 36. The rotor blades 38 of the three arrays extend axially into
respective circumferential pumping channels 40 disposed concentrically in
part 26 which constitutes the stator of the regenerative pumping mechanism
14. During operation, drive shaft 32 rotates rotor body 36 which causes the
rotor blades 38 to travel along the pumping channels, pumping gas from inlet 42 in sequence along the radially outer pumping channel, radially middle
pumping channel and radially inner pumping channel where it is exhausted from exhaust 44 at pressures close to or at atmospheric pressure.
Extending orthogonally from the rotor body 36 are two cylindrical drag cylinders 46 which together form the rotors of molecular drag pumping mechanism 20. The drag cylinders 46 are made from carbon fibre composite
'material' which- is> both str©ng»and light. 'The reduction in mass when- using* >',«. '
carbon fibre composite material drag cylinders produces less inertia when the
molecular drag pumping mechanism is in operation. Accordingly, the speed of the molecular drag pumping mechanism is easier to control.
The molecular drag pumping mechanism 20 shown schematically is a
Holweck type drag pump in which stator portions 48 define a spiral channel
between the inner surface of housing part 24 and the drag cylinders 46. Three
drag stages are shown, each of which provides a spiral path for gas flow
between the rotor and the stator. The gas flow follows a tortuous path flowing
consecutively through the drag stages in series. The molecular pumping mechanism 12 is driven at an end of drive
shaft 32 distal from the regenerative pumping mechanism 14. The drive shaft
32 may optionally be supported by back up bearing. A magnetic bearing 54 is
provided between rotor body 52 and a cylindrical portion 56 fixed relative to
the housing 22. A passive magnetic bearing is shown in which like poles of a
magnet repel each other resisting radial movement of rotor body 52 relative to
the central axis A. Other types of suitable bearings may be used as required.
A circumferential array of angled rotor blades 58 extend radially outwardly from rotor body 52. At approximately half way along the radial
length of the rotor blades, an annular support ring 60 is provided, to which is fixed the drag cylinder, or rotor, 62 of molecular drag pumping mechanism
18, so that the rotor blades of the turbomolecular pumping mechanism support the rotor of the molecular drag pumping mechanism. Molecular drag
pumping "mechanism' --18 comprises' two -drag -stages in parallel- with. <a- single-.-. drag cylinder 62, one stage being radially inward thereof and one stage being
radially outward thereof. Each of the stages comprise stator portions 64 with
tapered inner walls 66 of the housing 22 forming a spiral molecular gas flow
channel. An outlet 68 is provided to exhaust gas from the molecular drag
pumping mechanism 18.
The use of the rotor blades of the turbomolecular pumping mechanism
16 for supporting the rotor of the molecular drag pumping mechanism 18
avoids the need to provide a separate support plate for the rotor of the
molecular drag pumping mechanism as used in the prior art described above. Therefore, the molecular pumping mechanism is less complicated and more
compact than in the prior art. Also, it will be appreciated that the support
plate, albeit an apertured support plate, will to some extent reduce the flow of
gas between the turbomolecular pumping mechanism and the molecular drag
pumping mechanism and therefore, act as an impediment to efficiency. There
is no such impediment with the arrangement of Figure 1 where gas is allowed
to flow freely from the turbomolecular pumping mechanism to the molecular
drag pumping mechanism.
Figures 2 to 5 show the rotor of the turbomolecular pumping mechanism 16 in more detail. The rotor comprises the rotor body 52 which
forms a hub for coupling to the drive shaft 32 (not shown in these Figures). Extending radially outwardly from the rotor body 52 are the plurality of angled rotor blades 58. Integrally formed with the rotor blades 58 is the
annular ring 60 which is provided at a central radial portion of -the -røtor blades, or about half way along their length. The rotor, or cylinder, of the
molecular drag pumping mechanism is fixed to the annular ring by any
suitable method so that the rotor blades can support the rotor of the molecular
drag pumping mechanism.
During normal operation, inlet 70 of pump arrangement 10 is
connected to a chamber, the pressure of which it is desired to be reduced.
Motor 34 rotates drive shaft 32 which in turn drives rotor body 36 and rotor
body 52. Gas in molecular flow conditions is drawn in through inlet 70 to the
turbomolecular pumping mechanism 16 where it is urged by the rotor blades 58 along both parallel drag pumping stages 18 and through outlet 68. Gas is
then drawn through the three stages in series of the molecular drag pumping
mechanism 20 and into the regenerative pumping mechanism through inlet 42.
Gas is exhausted at atmospheric pressure or thereabouts through exhaust port
44.
There now follows a description of a further embodiment of the
present invention. For brevity,' the further embodiment will be discussed' only
in relation to the parts thereof which are different to the first embodiment and like reference numerals will be used for like parts.
Figure 6 shows a vacuum pumping arrangement 100 in which the
molecular pumping mechanism 12 comprises a turbomolecular pumping mechanism 16 having two pumping stages in series. Two arrays of angled rotor blades 58 extend radially outwardly from the hub of the rotor body 52
with a< stator' 'formation ; 72 - betwee • the • arrays.-- ■■• -The- • rotor blades ■■■ok-j&e downstream or last stage of the turbomolecular pumping mechanism support
the rotor of the molecular drag pumping mechanism and are provided with the annular ring 60 to which the rotor of the molecular drag pumping mechanism
is fixed.
In a modification of the embodiments described above, the molecular
drag pumping mechanism 18 comprises more than one drag cylinder, or rotor,
62 supported by the rotor blades 38 of the turbomolecular pumping
mechanism 16. The turbo blades may therefore be provided with radially
spaced annular rings to which are fixed respective drag pump rotors. With this arrangement, for example, if there are three drag pump rotors, there can be up to six parallel drag pump stages, with two parallel pumping paths radially inwardly and radially outwardly of each rotor.
Although the present invention has been described with reference to Figures 1 and 6 in which molecular pumping mechanism 12 is driven by a common shaft with regenerative pumping mechanism 14 and which together form one pumping unit, the present invention is not restricted in this way. Alternatively, the molecular pumping mechanism may form a pumping unit separate from the regenerative pumping mechanism, both of which are driven by separate motors and separate drive shafts.

Claims

1. A vacuum pumping arrangement comprising a turbomolecular
pumping mechanism and a molecular drag pumping mechanism connected in
series, a rotor of the molecular drag pumping mechanism being supported by
the rotor blades 'of the turbomolecular pumping mechanism.
2. A vacuum pumping arrangement as claimed in claim 1, wherein the rotor blades are provided with an annular ring to which said rotor of the molecular drag pumping mechanism is fixed.
3. A vacuum pumping arrangement as claimed in claim 2, wherein the
turbomolecular -pumping mechanism has a lurality of stages - and- -he røJor- blades of at least the last stage are provided with said annular ring.
4. A vacuum pumping arrangement as claimed in any one of the
preceding claims, wherein the rotor of the molecular drag pumping
mechanism is supported approximately half way along the radial length of the
rotor blades of the turbomolecular pumping mechanism.
5. A vacuum pumping arrangement as claimed in claim 1, wherein the
molecular drag pumping mechanism has a plurality of rotors supported by said
rotor blades of said turbomolecular pumping mechanism.
6. A vacuum pumping arrangement as claimed in claim 5, wherein the
plurality of rotor blades are fixed to respective radially spaced annular rings
provided with the rotor blades of the turbomolecular pumping mechanism.
7. A vacuum pumping arrangement as claimed in any one of the preceding claims, wherein the or each rotor of the molecular drag pumping
mechanism has associated therewith two parallel pumping paths comprising a pumping path radially inwardly of the or each rotor and a pumping path
radially outwardly of the or each rotor.
8. A vacuum pumping arrangement as claimed in any one of the
preceding claims, wherein the molecular drag pumping mechanism is of a holweck type.
9. A vacuum pumping arrangement as claimed in any one of the
preceding claims, further comprising a second molecular drag pumping
mechanism the rotor of which is supported by the rotor of a regenerative
pumping exhausting mechanism.
10. A vacuum pumping arrangement as claimed in any one of the
preceding claims, wherein the rotor of the or each molecular drag pumping
mechanism is made from carbon fibre composite material.
11. A vacuum pumping arrangement as claimed in any one of the
preceding claims, wherein the rotor blades of the turbomolecular pumping
mechanism are made from aluminium.
12. A vacuum pumping arrangement as claimed in claim 2, wherein the annular ring is made from aluminium.
PCT/GB2003/005370 2002-12-17 2003-12-09 Vacuum pumping arrangement WO2004055375A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE60313493T DE60313493T2 (en) 2002-12-17 2003-12-09 VACUUM PUMP
JP2004559871A JP4667043B2 (en) 2002-12-17 2003-12-09 Vacuum pump discharge device
EP03786099A EP1573204B1 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement
US10/536,781 US8727751B2 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement
AU2003295099A AU2003295099A1 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0229355.3 2002-12-17
GBGB0229355.3A GB0229355D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement

Publications (1)

Publication Number Publication Date
WO2004055375A1 true WO2004055375A1 (en) 2004-07-01

Family

ID=9949816

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2003/005370 WO2004055375A1 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement

Country Status (9)

Country Link
US (1) US8727751B2 (en)
EP (1) EP1573204B1 (en)
JP (1) JP4667043B2 (en)
AT (1) ATE360756T1 (en)
AU (1) AU2003295099A1 (en)
DE (1) DE60313493T2 (en)
GB (1) GB0229355D0 (en)
TW (1) TWI335959B (en)
WO (1) WO2004055375A1 (en)

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DE102005008643A1 (en) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck vacuum pump has shoulders on rotor side of vanes of vane disc to support supporting ring
WO2014125238A1 (en) * 2013-02-15 2014-08-21 Edwards Limited Vacuum pump
EP2933497A3 (en) * 2014-04-17 2015-12-02 Pfeiffer Vacuum GmbH Vacuum pump
GB2568581A (en) * 2017-09-20 2019-05-22 Edwards Ltd A set of vacuum pumps including a drag pump
GB2601313A (en) * 2020-11-25 2022-06-01 Edwards Ltd Drag pumping mechanism for a turbomolecular pump

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GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US7140847B2 (en) * 2004-08-11 2006-11-28 The Boc Group, Inc. Integrated high vacuum pumping system
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DE102008024764A1 (en) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Multi-stage vacuum pump
DE102009035812A1 (en) * 2009-08-01 2011-02-03 Pfeiffer Vacuum Gmbh Turbo molecular pump rotor
JP5786639B2 (en) * 2011-10-24 2015-09-30 株式会社島津製作所 Turbo molecular pump
DE102012003680A1 (en) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh vacuum pump
DE102013207269A1 (en) * 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Stator element for a Holweckpumpstufe, vacuum pump with a Holweckpumpstufe and method for producing a stator element for a Holweckpumpstufe
US10393124B2 (en) * 2015-06-08 2019-08-27 Leybold Gmbh Vacuum-pump rotor
GB2579665B (en) * 2018-12-12 2021-05-19 Edwards Ltd Multi-stage turbomolecular pump

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US8727751B2 (en) 2014-05-20
ATE360756T1 (en) 2007-05-15
JP4667043B2 (en) 2011-04-06
JP2006509951A (en) 2006-03-23
DE60313493T2 (en) 2008-01-03
US20060140795A1 (en) 2006-06-29
EP1573204B1 (en) 2007-04-25
AU2003295099A1 (en) 2004-07-09
TW200419074A (en) 2004-10-01
DE60313493D1 (en) 2007-06-06
TWI335959B (en) 2011-01-11
EP1573204A1 (en) 2005-09-14

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