WO2003032409A3 - Temperature calibration of piezoelectric transducers - Google Patents
Temperature calibration of piezoelectric transducers Download PDFInfo
- Publication number
- WO2003032409A3 WO2003032409A3 PCT/IL2002/000814 IL0200814W WO03032409A3 WO 2003032409 A3 WO2003032409 A3 WO 2003032409A3 IL 0200814 W IL0200814 W IL 0200814W WO 03032409 A3 WO03032409 A3 WO 03032409A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- parameter
- piezoelectric transducers
- temperature calibration
- piezoelectric
- determining
- Prior art date
Links
- 230000001419 dependent effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/101—Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US32729001P | 2001-10-09 | 2001-10-09 | |
US60/327,290 | 2001-10-09 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2003032409A2 WO2003032409A2 (en) | 2003-04-17 |
WO2003032409A8 WO2003032409A8 (en) | 2003-08-21 |
WO2003032409A3 true WO2003032409A3 (en) | 2003-11-13 |
Family
ID=23275944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IL2002/000814 WO2003032409A2 (en) | 2001-10-09 | 2002-10-07 | Temperature calibration of piezoelectric transducers |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2003032409A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020212853A1 (en) * | 2020-10-12 | 2022-04-14 | Carl Zeiss Smt Gmbh | Method and device for measuring actuators in a projection exposure system for semiconductor lithography |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06148231A (en) * | 1992-11-11 | 1994-05-27 | Aisin Seiki Co Ltd | Temperature compensating method and apparatus of yaw rate sensor |
EP1138906A1 (en) * | 2000-04-01 | 2001-10-04 | Robert Bosch GmbH | Optimization of injection systems having piezoelectric elements by compensating for temperature dependence |
-
2002
- 2002-10-07 WO PCT/IL2002/000814 patent/WO2003032409A2/en not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06148231A (en) * | 1992-11-11 | 1994-05-27 | Aisin Seiki Co Ltd | Temperature compensating method and apparatus of yaw rate sensor |
EP1138906A1 (en) * | 2000-04-01 | 2001-10-04 | Robert Bosch GmbH | Optimization of injection systems having piezoelectric elements by compensating for temperature dependence |
Non-Patent Citations (3)
Title |
---|
KRISHNAMURTHY K ET AL: "Effects of temperature on the electrical impedance of piezoelectric sensors", SMART STRUCTURES AND INTEGRATED SYSTEMS, SAN DIEGO, CA, USA, 26 - 29 FEBRUAR 1996, vol. 2717, 1996, Proceedings of the SPIE, pages 302 - 310, XP009016358, ISSN: 0277-786X * |
NEMIROVSKY Y ET AL: "Design of a novel thin-film piezoelectric accelerometer", SENSORS AND ACTUATORS A, vol. 56, no. 3, 1 September 1996 (1996-09-01), pages 239 - 249, XP004049699, ISSN: 0924-4247 * |
PATENT ABSTRACTS OF JAPAN vol. 018, no. 450 (P - 1790) 22 August 1994 (1994-08-22) * |
Also Published As
Publication number | Publication date |
---|---|
WO2003032409A8 (en) | 2003-08-21 |
WO2003032409A2 (en) | 2003-04-17 |
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