WO2003032409A3 - Temperature calibration of piezoelectric transducers - Google Patents

Temperature calibration of piezoelectric transducers Download PDF

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Publication number
WO2003032409A3
WO2003032409A3 PCT/IL2002/000814 IL0200814W WO03032409A3 WO 2003032409 A3 WO2003032409 A3 WO 2003032409A3 IL 0200814 W IL0200814 W IL 0200814W WO 03032409 A3 WO03032409 A3 WO 03032409A3
Authority
WO
WIPO (PCT)
Prior art keywords
parameter
piezoelectric transducers
temperature calibration
piezoelectric
determining
Prior art date
Application number
PCT/IL2002/000814
Other languages
French (fr)
Other versions
WO2003032409A8 (en
WO2003032409A2 (en
Inventor
Avner Adoram
Benny Pesach
Original Assignee
Glucon Inc
Avner Adoram
Benny Pesach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glucon Inc, Avner Adoram, Benny Pesach filed Critical Glucon Inc
Publication of WO2003032409A2 publication Critical patent/WO2003032409A2/en
Publication of WO2003032409A8 publication Critical patent/WO2003032409A8/en
Publication of WO2003032409A3 publication Critical patent/WO2003032409A3/en

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/101—Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

A method of determining a first parameter, characteristic of a piezoelectric transducer, which first parameter is dependent on a piezoelectric constant of a material from which the transducer is formed, the method comprising: determining a value for a second parameter that is a function of the dielectric constant of the piezoelectric material; and determining a value for the first parameter from the second parameter responsive to known dependencies of the dielectric constant and the piezoelectric constant on temperature.
PCT/IL2002/000814 2001-10-09 2002-10-07 Temperature calibration of piezoelectric transducers WO2003032409A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32729001P 2001-10-09 2001-10-09
US60/327,290 2001-10-09

Publications (3)

Publication Number Publication Date
WO2003032409A2 WO2003032409A2 (en) 2003-04-17
WO2003032409A8 WO2003032409A8 (en) 2003-08-21
WO2003032409A3 true WO2003032409A3 (en) 2003-11-13

Family

ID=23275944

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2002/000814 WO2003032409A2 (en) 2001-10-09 2002-10-07 Temperature calibration of piezoelectric transducers

Country Status (1)

Country Link
WO (1) WO2003032409A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020212853A1 (en) * 2020-10-12 2022-04-14 Carl Zeiss Smt Gmbh Method and device for measuring actuators in a projection exposure system for semiconductor lithography

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06148231A (en) * 1992-11-11 1994-05-27 Aisin Seiki Co Ltd Temperature compensating method and apparatus of yaw rate sensor
EP1138906A1 (en) * 2000-04-01 2001-10-04 Robert Bosch GmbH Optimization of injection systems having piezoelectric elements by compensating for temperature dependence

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06148231A (en) * 1992-11-11 1994-05-27 Aisin Seiki Co Ltd Temperature compensating method and apparatus of yaw rate sensor
EP1138906A1 (en) * 2000-04-01 2001-10-04 Robert Bosch GmbH Optimization of injection systems having piezoelectric elements by compensating for temperature dependence

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
KRISHNAMURTHY K ET AL: "Effects of temperature on the electrical impedance of piezoelectric sensors", SMART STRUCTURES AND INTEGRATED SYSTEMS, SAN DIEGO, CA, USA, 26 - 29 FEBRUAR 1996, vol. 2717, 1996, Proceedings of the SPIE, pages 302 - 310, XP009016358, ISSN: 0277-786X *
NEMIROVSKY Y ET AL: "Design of a novel thin-film piezoelectric accelerometer", SENSORS AND ACTUATORS A, vol. 56, no. 3, 1 September 1996 (1996-09-01), pages 239 - 249, XP004049699, ISSN: 0924-4247 *
PATENT ABSTRACTS OF JAPAN vol. 018, no. 450 (P - 1790) 22 August 1994 (1994-08-22) *

Also Published As

Publication number Publication date
WO2003032409A8 (en) 2003-08-21
WO2003032409A2 (en) 2003-04-17

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