WO2002057084A3 - Improved ink jet printheads and methods therefor - Google Patents
Improved ink jet printheads and methods therefor Download PDFInfo
- Publication number
- WO2002057084A3 WO2002057084A3 PCT/US2001/047666 US0147666W WO02057084A3 WO 2002057084 A3 WO2002057084 A3 WO 2002057084A3 US 0147666 W US0147666 W US 0147666W WO 02057084 A3 WO02057084 A3 WO 02057084A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ink
- vias
- silicon chip
- ink jet
- stop layer
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052710 silicon Inorganic materials 0.000 abstract 5
- 239000010703 silicon Substances 0.000 abstract 5
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005336 cracking Methods 0.000 abstract 1
- 238000001312 dry etching Methods 0.000 abstract 1
- 230000007774 longterm Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01994187A EP1339549A4 (en) | 2000-10-27 | 2001-10-22 | Improved ink jet printheads and methods therefor |
JP2002557783A JP2004517755A (en) | 2000-10-27 | 2001-10-22 | Improved inkjet printhead and method of manufacturing the same |
MXPA03003658A MXPA03003658A (en) | 2000-10-27 | 2001-10-22 | Improved ink jet printheads and methods therefor. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/698,765 | 2000-10-27 | ||
US09/698,765 US6402301B1 (en) | 2000-10-27 | 2000-10-27 | Ink jet printheads and methods therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002057084A2 WO2002057084A2 (en) | 2002-07-25 |
WO2002057084A3 true WO2002057084A3 (en) | 2002-09-19 |
Family
ID=24806574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/047666 WO2002057084A2 (en) | 2000-10-27 | 2001-10-22 | Improved ink jet printheads and methods therefor |
Country Status (5)
Country | Link |
---|---|
US (1) | US6402301B1 (en) |
EP (1) | EP1339549A4 (en) |
JP (1) | JP2004517755A (en) |
MX (1) | MXPA03003658A (en) |
WO (1) | WO2002057084A2 (en) |
Families Citing this family (57)
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US7527357B2 (en) | 1997-07-15 | 2009-05-05 | Silverbrook Research Pty Ltd | Inkjet nozzle array with individual feed channel for each nozzle |
US6557977B1 (en) * | 1997-07-15 | 2003-05-06 | Silverbrook Research Pty Ltd | Shape memory alloy ink jet printing mechanism |
US7661793B2 (en) * | 1997-07-15 | 2010-02-16 | Silverbrook Research Pty Ltd | Inkjet nozzle with individual ink feed channels etched from both sides of wafer |
US6971170B2 (en) * | 2000-03-28 | 2005-12-06 | Microjet Technology Co., Ltd | Method of manufacturing printhead |
US6852241B2 (en) * | 2001-08-14 | 2005-02-08 | Lexmark International, Inc. | Method for making ink jet printheads |
US6530649B1 (en) * | 2001-08-16 | 2003-03-11 | Hewlett-Packard Company | Hermetic seal in microelectronic devices |
ITTO20011019A1 (en) * | 2001-10-25 | 2003-04-28 | Olivetti I Jet | PERFECT PROCEDURE FOR THE CONSTRUCTION OF A SUPPLY DUCT FOR AN INK JET PRINT HEAD. |
US6626523B2 (en) * | 2001-10-31 | 2003-09-30 | Hewlett-Packard Development Company, Lp. | Printhead having a thin film membrane with a floating section |
KR100400015B1 (en) * | 2001-11-15 | 2003-09-29 | 삼성전자주식회사 | Inkjet printhead and manufacturing method thereof |
US6981759B2 (en) * | 2002-04-30 | 2006-01-03 | Hewlett-Packard Development Company, Lp. | Substrate and method forming substrate for fluid ejection device |
JP2004095849A (en) * | 2002-08-30 | 2004-03-25 | Fujikura Ltd | Method for manufacturing semiconductor substrate with through electrode, and method for manufacturing semiconductor device with through electrode |
JP2004327910A (en) * | 2003-04-28 | 2004-11-18 | Sharp Corp | Semiconductor device and its manufacturing method |
US6984015B2 (en) * | 2003-08-12 | 2006-01-10 | Lexmark International, Inc. | Ink jet printheads and method therefor |
EP1518681B1 (en) * | 2003-09-24 | 2007-11-28 | Hewlett-Packard Development Company, L.P. | Inkjet printhead |
US7041226B2 (en) * | 2003-11-04 | 2006-05-09 | Lexmark International, Inc. | Methods for improving flow through fluidic channels |
KR100517515B1 (en) * | 2004-01-20 | 2005-09-28 | 삼성전자주식회사 | Method for manufacturing monolithic inkjet printhead |
US7273266B2 (en) * | 2004-04-14 | 2007-09-25 | Lexmark International, Inc. | Micro-fluid ejection assemblies |
US6930055B1 (en) | 2004-05-26 | 2005-08-16 | Hewlett-Packard Development Company, L.P. | Substrates having features formed therein and methods of forming |
US7267431B2 (en) * | 2004-06-30 | 2007-09-11 | Lexmark International, Inc. | Multi-fluid ejection device |
KR100612326B1 (en) * | 2004-07-16 | 2006-08-16 | 삼성전자주식회사 | method of fabricating ink jet head |
US7767103B2 (en) * | 2004-09-14 | 2010-08-03 | Lexmark International, Inc. | Micro-fluid ejection assemblies |
US7413915B2 (en) * | 2004-12-01 | 2008-08-19 | Lexmark International, Inc. | Micro-fluid ejection head containing reentrant fluid feed slots |
US7202178B2 (en) * | 2004-12-01 | 2007-04-10 | Lexmark International, Inc. | Micro-fluid ejection head containing reentrant fluid feed slots |
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US20080055363A1 (en) * | 2006-09-06 | 2008-03-06 | Eastman Kodak Company | Large area array print head |
JP5102551B2 (en) * | 2006-09-07 | 2012-12-19 | 株式会社リコー | Droplet ejection head, liquid cartridge, droplet ejection apparatus, and image forming apparatus |
US7855151B2 (en) | 2007-08-21 | 2010-12-21 | Hewlett-Packard Development Company, L.P. | Formation of a slot in a silicon substrate |
JP5224771B2 (en) * | 2007-10-16 | 2013-07-03 | キヤノン株式会社 | Manufacturing method of recording head substrate |
US8778200B2 (en) | 2007-10-16 | 2014-07-15 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
US7845755B2 (en) * | 2008-03-17 | 2010-12-07 | Silverbrook Research Pty Ltd | Printhead integrated circuit attachment film having differentiated adhesive layers |
US7938513B2 (en) * | 2008-04-11 | 2011-05-10 | Lexmark International, Inc. | Heater chips with silicon die bonded on silicon substrate and methods of fabricating the heater chips |
US8459779B2 (en) | 2008-04-11 | 2013-06-11 | Lexmark International, Inc. | Heater chips with silicon die bonded on silicon substrate, including offset wire bonding |
JP5224929B2 (en) * | 2008-06-24 | 2013-07-03 | キヤノン株式会社 | Manufacturing method of liquid discharge recording head |
EP2346692A1 (en) * | 2008-10-30 | 2011-07-27 | Hewlett-Packard Development Company, L.P. | Thermal inkjet printhead feed transition chamber and method of cooling using same |
US20100116423A1 (en) * | 2008-11-07 | 2010-05-13 | Zachary Justin Reitmeier | Micro-fluid ejection device and method for assembling a micro-fluid ejection device by wafer-to-wafer bonding |
JP2009111433A (en) * | 2009-02-18 | 2009-05-21 | Fujikura Ltd | Manufacturing method of semiconductor substrate with penetrating electrode, and manufacturing method of semiconductor device with penetrating electrode |
JP2013500880A (en) | 2009-07-31 | 2013-01-10 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | Inkjet printhead and method using a central ink supply path |
US8425787B2 (en) * | 2009-08-26 | 2013-04-23 | Hewlett-Packard Development Company, L.P. | Inkjet printhead bridge beam fabrication method |
JP2011009781A (en) * | 2010-09-29 | 2011-01-13 | Fujikura Ltd | Manufacturing method of semiconductor device with through electrode |
US9079409B2 (en) * | 2011-06-30 | 2015-07-14 | Jiandong Fang | Fluid ejection devices |
US20130010036A1 (en) * | 2011-07-06 | 2013-01-10 | Conner Stephen A | Print heads and print head fluids |
EP3656570B1 (en) * | 2013-02-28 | 2022-05-11 | Hewlett-Packard Development Company, L.P. | Molded print bar |
KR20180086281A (en) | 2013-02-28 | 2018-07-30 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | Molded fluid flow structure |
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US10821729B2 (en) | 2013-02-28 | 2020-11-03 | Hewlett-Packard Development Company, L.P. | Transfer molded fluid flow structure |
US10632752B2 (en) | 2013-02-28 | 2020-04-28 | Hewlett-Packard Development Company, L.P. | Printed circuit board fluid flow structure and method for making a printed circuit board fluid flow structure |
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CN105189122B (en) | 2013-03-20 | 2017-05-10 | 惠普发展公司,有限责任合伙企业 | Molded die slivers with exposed front and back surfaces |
US9308728B2 (en) | 2013-05-31 | 2016-04-12 | Stmicroelectronics, Inc. | Method of making inkjet print heads having inkjet chambers and orifices formed in a wafer and related devices |
JP6188500B2 (en) * | 2013-09-05 | 2017-08-30 | キヤノン株式会社 | Liquid discharge head and manufacturing method thereof |
US9421772B2 (en) * | 2014-12-05 | 2016-08-23 | Xerox Corporation | Method of manufacturing ink jet printheads including electrostatic actuators |
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USD864968S1 (en) | 2015-04-30 | 2019-10-29 | Echostar Technologies L.L.C. | Smart card interface |
KR101774750B1 (en) * | 2016-06-24 | 2017-09-05 | 한국과학기술연구원 | A Fabrication Method of Print Head for Multiplex Chemotyping Microarray |
JP7297416B2 (en) * | 2018-09-07 | 2023-06-26 | キヤノン株式会社 | LIQUID EJECTION HEAD AND METHOD FOR MANUFACTURING LIQUID EJECTION HEAD |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6322198B1 (en) * | 1998-04-07 | 2001-11-27 | Minolta Co., Ltd. | Electrostatic inkjet head having spaced electrodes |
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US3958255A (en) | 1974-12-31 | 1976-05-18 | International Business Machines Corporation | Ink jet nozzle structure |
DE2604939C3 (en) | 1976-02-09 | 1978-07-27 | Ibm Deutschland Gmbh, 7000 Stuttgart | Method for producing at least one through hole, in particular a nozzle for inkjet printers |
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WO2000026956A1 (en) | 1998-11-04 | 2000-05-11 | Surface Technology Systems Limited | A method and apparatus for etching a substrate |
-
2000
- 2000-10-27 US US09/698,765 patent/US6402301B1/en not_active Expired - Lifetime
-
2001
- 2001-10-22 EP EP01994187A patent/EP1339549A4/en not_active Withdrawn
- 2001-10-22 MX MXPA03003658A patent/MXPA03003658A/en active IP Right Grant
- 2001-10-22 WO PCT/US2001/047666 patent/WO2002057084A2/en active Application Filing
- 2001-10-22 JP JP2002557783A patent/JP2004517755A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6322198B1 (en) * | 1998-04-07 | 2001-11-27 | Minolta Co., Ltd. | Electrostatic inkjet head having spaced electrodes |
Non-Patent Citations (1)
Title |
---|
See also references of EP1339549A4 * |
Also Published As
Publication number | Publication date |
---|---|
EP1339549A2 (en) | 2003-09-03 |
WO2002057084A2 (en) | 2002-07-25 |
EP1339549A4 (en) | 2004-12-08 |
US6402301B1 (en) | 2002-06-11 |
JP2004517755A (en) | 2004-06-17 |
MXPA03003658A (en) | 2004-05-04 |
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