WO2001057471A1 - Capteur visuel a deplacement - Google Patents
Capteur visuel a deplacement Download PDFInfo
- Publication number
- WO2001057471A1 WO2001057471A1 PCT/JP2001/000656 JP0100656W WO0157471A1 WO 2001057471 A1 WO2001057471 A1 WO 2001057471A1 JP 0100656 W JP0100656 W JP 0100656W WO 0157471 A1 WO0157471 A1 WO 0157471A1
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- image
- measurement
- visual
- measurement target
- sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Definitions
- the present invention relates to a novel visual displacement sensor using a line beam as a measurement light and a two-dimensional image sensor as an image sensor, and in particular, arbitrarily limits the field of view of an image sensor from which measurement point coordinates are extracted. It relates to a visual displacement sensor that has been made possible. Background art
- the basic configuration of this type of visual displacement sensor consists of a light emitting element (for example, a laser diode) for irradiating a line beam at a predetermined angle to the object to be measured, and a different angle between the object to which the line beam is irradiated and another object.
- a two-dimensional image sensor for example, a two-dimensional CCD for capturing images from the camera, and measurement point coordinate determination means for determining measurement point coordinates based on a line beam irradiation light image in an image captured by the two-dimensional image sensor
- displacement measuring means for measuring a target displacement based on the determined measurement point coordinates.
- the line beam appearing in the field of view of the two-dimensional imaging device is a predetermined number determined by the number of laminated transparent plates, the number of steps, and the like.
- the displacement measurement algorithm that measures the target displacement based on the determined measurement point coordinates operates normally only when the sensor is placed in the planned measurement environment. Is measured. In other words, if the number of irradiation light images of the line beam appearing in the field of view of the two-dimensional image sensor is not the expected number, it may be assumed that the measurement of the target measurement displacement may be hindered.
- the present invention is made by paying attention to the above problems in a visual displacement sensor using a line beam as a measurement light and using a two-dimensional image sensor as an image sensor for measurement.
- a light image similar to the line beam irradiation light image caused by disturbance light appears in the field of view of the two-dimensional image sensor, and the number of measurement point coordinates exceeds the expected number.
- the operator only needs to perform a simple support operation and use the displacement measurement algorithm built into the sensor.
- Another object of the present invention is to provide a visual displacement sensor capable of returning a target displacement to a state where it can be measured normally.
- Another object of the present invention is that a metal film having a high reflectance is applied to the rear surface of a transparent plate to be measured, such as a glass plate of a cathode ray tube or a glass plate of a liquid crystal panel. Even if the automatic density adjustment function is activated, the density of the line beam irradiation light image that appears in the field of view of the two-dimensional image sensor at intervals in the displacement measurement direction is within the specified range for all light images. Even if the operation becomes impossible, the operator can perform simple support operations to measure the part of the line beam irradiating light image where the density deviates from the default value using the measurement point coordinate determination algorithm built into the sensor.
- An object of the present invention is to provide a visual displacement sensor capable of determining point coordinates and, as a result, returning a target displacement to a state where it can be measured normally.
- a visual displacement sensor viewed from one side, captures a light emitting element for irradiating a line beam at a predetermined angle to an object to be measured and an object to be measured irradiated with the line beam from another angle Image sensor for measurement, measurement target area setting means capable of setting one or more measurement target regions within the field of view of the two-dimensional image sensor, and an image captured by the two-dimensional image sensor Measuring point coordinates determining means for determining one or more measuring point coordinates included in the set measurement target area; and And displacement measuring means for measuring the displacement.
- the measurement point coordinate determination means masks an image of an area other than the set one or two or more measurement target areas from the entire image captured by the two-dimensional image sensor. One or more measurement point coordinates may be determined based on the extracted image. In a preferred embodiment of the present invention, the measurement point coordinate determination means temporarily determines one or more measurement point coordinates based on the entire image captured by the two-dimensional image sensor, and the temporarily determined coordinates are determined. One or more measurement point coordinates are finally determined by comparing one or more measurement point coordinates with corresponding ones of the set one or more measurement target areas. Good.
- a mask extracted by masking a region other than a measurement target region set from a raw image captured by a two-dimensional image sensor is provided.
- the information corresponding to the state of the masked image may be the masked image itself and / or the line-bright waveform corresponding to the masked image.
- a monitor image editing means for displaying, on a screen of an image monitor, information corresponding to a measurement target area set in the field of view of the two-dimensional image sensor. You may. At this time, the information corresponding to the measurement target area may be a boundary position of the measurement target area on the raw image or the masked image and / or a numerical value indicating the boundary.
- a monitor image editing means for displaying information corresponding to the measurement point coordinates determined in the visual field of the two-dimensional image sensor on the screen of the image monitor.
- the information corresponding to the measurement point coordinates may be a position of the measurement point coordinates on the raw image or the masked image and / or a numerical value indicating the measurement point coordinates.
- a graphical user for enabling setting, changing settings, canceling settings, and the like of a measurement target area within a field of view of a two-dimensional image sensor by performing operations on an image monitor screen. It may have an interface (GUI).
- GUI interface
- an area automatic follower for moving at least one measurement target area in a displacement measurement direction by following a fluctuation of a measurement displacement on a reference plane of the measurement target object.
- Area determination for determining one or more measurement point coordinates based on an image captured by the two-dimensional image sensor and a measurement point coordinate determination means with density adjustment function; and determining one or more measurement point coordinates.
- a displacement measuring means for measuring a target displacement based on the information.
- the measurement point coordinates can be determined by the incorporated measurement point coordinate determination algorithm, and as a result, the target displacement can be returned to a state where it can be measured normally.
- the upper surface and the lower surface that constitute the step are different from each other.
- Measuring point coordinate determining means for determining one or more measuring point coordinates included in the set measurement target area based on the determined one or more measuring point coordinates based on the determined one or more measuring point coordinates
- a displacement measuring means for measuring the displacement to be measured, and at least one of the set one or more measurement target areas are moved based on information determined from an image captured by the two-dimensional image sensor. It characterized by comprising a constant region moving means.
- the displacement threshold value may be set to follow the measurement value of the reference step surface forming the step.
- FIG. 18 is the figure when setting the area.
- Fig. 19 is an explanatory diagram of the monitor screen (part 2).
- Fig. 19 is an explanatory diagram of the monitor screen when setting the area (part 3).
- Fig. 20 is an illustration of the measurement after setting the two areas.
- Fig. 21 is an explanatory diagram of the monitor screen during the measurement. Fig. 21 illustrates the problem of the measurement point extraction processing using the mask image.
- FIG. 22 is a diagram for explaining a second embodiment of the measurement point coordinate extraction processing.
- FIG. 23 is a block diagram conceptually showing the internal configuration of the sensor main body.
- FIG. 24 is a diagram showing the mode of the vertical movement of the measurement point, and FIG.
- FIG. 25 is a time chart showing the process of following the vertical movement of the measurement point in the set area.
- Fig. 26 is an explanatory diagram showing the state of the monitor screen before and after the vertical fluctuation of the measurement point
- Fig. 27 is a diagram showing the positional relationship between the sensor and the object to be measured during the step measurement
- FIG. 28 is an explanatory view showing a monitor screen at the time of measuring a level difference
- FIG. 29 is an explanatory view showing a problem at the time of lateral displacement of an object at the time of measuring a level difference.
- Fig. 31 is an explanatory diagram of the lateral deviation tracking control at the time of measuring the level difference.
- Fig. 31 is a diagram illustrating the lateral deviation tracking control at the time of measuring the level difference.
- Fig. 38 is an explanatory view (part 2) of the screen for transparent body thickness calculation calibration operation
- Fig. 39 is an explanatory view of the screen for transparent body thickness calculation calibration operation (part 3).
- FIG. 40 is an explanatory view (part 4) of a screen for the transparent body thickness calculation calibration operation
- FIG. 41 is an explanatory view of the screen for the transparent body thickness calculation calibration operation (part 4).
- Fig. 42 is a screen explanatory diagram (part 6) for the transparent body thickness calculation calibration operation
- Fig. 43 is an explanation of the algorithm of the transparent body thickness calculation calibration.
- FIG. 44 is an explanatory view of the reason why the calibration is required for measuring the thickness of the transparent body of the visual displacement sensor.
- FIG. 1 is a block diagram showing the entire electrical configuration of a visual displacement sensor according to an embodiment of the present invention.
- the visual displacement sensor 100 includes a sensor head 1, a sensor main body 2, an image monitor 6, and a console unit 7.
- the sensor body 2 is used to determine the desired displacement (movement amount) from the light image position of the line beam in the image obtained from the sensor head 1 according to a predetermined ranging principle (for example, triangulation). And dimensions, etc.), and output them as displacement measurement values.
- a predetermined ranging principle for example, triangulation. And dimensions, etc.
- FIG. 2 shows an example of the internal configuration of the sensor head unit 1 in detail.
- LD drive circuit 111 LD 112, light emitting lens
- LD 112 light emitting lens
- the light receiving system elements light receiving lens 121, CCD 122, amplifying circuit 123, HP F 124, P / H circuit 125, receiving light reflected from the object 3) 80 ⁇ amplifier circuit 126).
- a linear light image (irradiation light image of a line beam) is formed on the surface of the measurement target object 3 by the irradiation of the measurement light.
- the light receiving system elements will be described.
- the line beam (reflected light 5) reflected by the object 3 to be measured is incident on a CCD two-dimensional image sensor (hereinafter simply referred to as CCD) 122 as an image sensor through a light receiving lens 121.
- CCD CCD two-dimensional image sensor
- the LD 11 is adjusted so that the irradiation light image position of the line beam on the light receiving surface of the CCD 122 changes according to the target displacement (for example, the distance between the sensor head 1 and the object 3 to be measured). 2.
- the positional relationship between the CCD 122, the projecting lens 113, and the receiving lens 121 is determined. In order to determine the positional relationship, for example, a light cutting method using a triangulation method is used.
- the video signal output from the CCD 122 is amplified by the amplifier circuit 123 for each pixel, and then interpolated between the pixels by the high-pass filter (HPF) 124 and the peak hold (P / H) circuit 125.
- HPF high-pass filter
- P / H peak hold circuit 125.
- the fluctuation of the zero-level signal appearing in is removed, and each pixel signal is adjusted so as to correctly represent the amount of received light. Thereafter, the magnitude of the signal value is appropriately controlled by the AGC amplifier circuit 126, and is sent to the sensor body 2 as the video signal Vs.
- the driving mode of the CCD 122 including one hour of shirt evening is controlled via the CCD control circuit 13 1 by the pulse signal P 2 sent from the evening timing signal generation circuit 101.
- high-pass fill time (HPF) 124 fill time, peak hold circuit (P / H) 125 peak hold time, AGC amplifier circuit 1 by pulse signals P3 to P5 The gain of 26 and its switching are controlled.
- the photographing condition storage section 141 stores a plurality of patterns of photographing conditions, including the CCD shirt hour, LD emission time, LD peak power, and gain of the AGC amplifier circuit, and receives light from the sensor body 2. Optimal imaging conditions for measurement are selected by the quantity control signal CONT.
- FIG. 3 shows a block diagram (part 1) schematically showing the internal configuration of the sensor main body.
- the sensor main body (first embodiment) includes an A / D converter 201, an area determining unit 202, a display synthesizing unit 204, and 0/8
- the CPU 250 is mainly composed of a microprocessor, and in this example, three functions are mainly realized in software. One of them is an area setting unit 25 1.
- the area setting section 251 in response to a predetermined operation of the console unit 7 connected to the console interface 200, responds to a predetermined operation of the two-dimensional CCD 122 constituting the sensor head section 1. It has a function to set the measurement target area in the field of view Z.
- the measurement target area limits an image of an area to be measured among all images captured by the two-dimensional CCD 122.
- the measurement target area set by the area setting section 25 1 is notified to the area determination section 202 and is used as a reference for the area determination processing.
- a measurement target area can be set with an arbitrary spread width in any of the Xy directions of the two-dimensional CCD 122. That is, in the displacement sensor using the two-dimensional CCD 122 of this type, the displacement measurement direction X is set along the longitudinal direction of the rectangular view Z in the two-dimensional CCD 122, while The direction of the irradiating light image of the line beam is assigned in a direction perpendicular to the direction of the line beam, and the height or displacement of each point can be measured even along the extending direction Y of the irradiating light image of the line beam.
- the measurement target region can be set in both the longitudinal direction X and the direction Y orthogonal to the above-described rectangular region.
- the total The number of measurement target areas can be set to one or more than two, which makes it possible to set discretely multiple areas of any size within the entire pixel area as measurement target areas. Has been made possible.
- K211 and K221 are two measurement target areas whose positions and lengths are set in both the displacement measurement direction X and the line direction Y.
- the position and length in the displacement measurement direction X are the same for K 221 and K 221.
- K01 and ⁇ 02 are two measurement target areas whose positions and lengths are set in both the displacement measurement direction X and the line direction ⁇ . Note that, in this example, both the displacement measurement direction X and the line direction ⁇ differ between K01 and ⁇ 02.
- 0 1, K 0 2, and 0 3 are three measurement target areas whose positions and lengths are set in both the displacement measurement direction X and the line direction ⁇ . is there.
- the measurement target areas shown in Fig. 4 (a) to Fig. 4 (h) are set based on, for example, the CCD pixel number for the displacement measurement direction X, and the CCD horizontal scanning line number for the line direction Y. be able to.
- the area determination unit 202 the digital video transmitted from the sensor head 1 via the A / D converter 201 corresponding to the area set by the area setting unit 25 1 The signal is selectively gated. In other words, when one or more set measurement target areas exist on the screen, the pixel output of the measurement target area is performed by passing the digital video signal at the timing of those measurement target areas. Generates an extracted image by extracting only the columns. The extracted image obtained in this way is sent from the area determination unit 202 to the display synthesis unit 204.
- the extracted image from the region determination unit 202 is combined with the graphic image indicating the boundary line of the measurement target region sent from the region setting unit 251, and the display combining unit 204, and thus obtained.
- the synthesized image is sent to the image monitor 6 via the D / A converter 205, and is captured on the screen of the image monitor 6 by the two-dimensional CCD 122, and in the area determination unit 202. It is displayed together with the raw image data that has been subjected to the masking process and the line brightness waveform that indicates the density distribution (luminance distribution) of a specific horizontal scanning line. Note that these display modes will be described later in detail with reference to screen explanatory diagrams.
- the displacement, the displacement position supplied from the concentration extraction unit 206, and the concentration data are used for their calculation. That is, in the pixel / mm conversion operation unit, the actual displacement is obtained in mm units from the displacement position. In the measurement processing calculation section, the corresponding measurement value is obtained by the maximum, minimum, peak hold, and various other standard measurement calculation processing based on the obtained displacement amount of one or more.
- the pass / fail judgment unit judges pass / fail of the product to be inspected by comparing the displacement and various measured values obtained in the above-described processing with a preset allowable value.
- the display processing unit edits the measurement result, displacement amount, pass / fail conversion result, and the like obtained as described above into image data for display, and passes through the display synthesis unit 204 and the D / A converter 205. And send it out to image monitor 6.
- the displacement and the density data obtained by the density extraction unit 206 (for example, the density of the line beam irradiation light image of the specific horizontal scanning line) are supplied to the sensitivity determination unit 253 for sensitivity determination calculation.
- data CONT for controlling the amount of received light of the sensor head 1 is generated, and the imaging conditions of the sensor head 1 are changed by the control data CONT.
- the density of the line beam irradiation light image in the video signal is automatically controlled to a value suitable for measurement.
- FIG. 5 is a general chart showing the displacement measurement operation in the sensor body 2.
- an image captured by the CCD 122 in the sensor head 1 is taken into the sensor main body 2 (step 501).
- FIG. 6 is an explanatory diagram of an image captured by the CCD 122 in the sensor head unit 1.
- the CCD 122 built in the sensor head unit 1 has an elongated rectangular field of view 122a.
- the X direction along the long side of the field of view 122a is the displacement measurement direction
- the Y direction along the short side is the line direction.
- the line beam irradiation light image A1 is drawn in the sensor's field of view 122a as a zigzag straight line (corresponding to the presence of irregularities on the surface of the measurement object).
- the left side in the figure is the direction close to the sensor head
- the right side is the direction far from the sensor head.
- a feature point extraction process within the measurement range is executed (step 502).
- An explanatory diagram of the measurement point extraction processing within the measurement range is shown in FIG.
- a measurement target area A4 is indicated in the sensor's field of view 122a by two parallel dotted lines A2 and A3 extending in the left-right direction in the figure.
- a predetermined feature point extraction algorithm is used in the measurement target area A4 to obtain the peak position (Px, Py) and the bottom position (Bx, Bx). y) is extracted.
- the start point A 2 and the end point A 3 for specifying the measurement target area A 4 are set in advance by a user through a predetermined operation of a GUI (Graphical User 'Interface) and the console unit 7. .
- GUI Graphic User 'Interface
- FIG. 8 is an explanatory diagram showing the relationship between the image captured by the CCD and the line bright waveform.
- the light receiving luminance of each pixel is extracted on a line A6 including a peak position indicated by a dashed line in the figure, and this is arranged in the displacement measurement direction.
- a line bright waveform A5 shown in the figure is generated.
- this line-bright waveform A5 is drawn on rectangular coordinates with the horizontal axis representing the displacement measurement direction and the vertical axis representing the gradation (density).
- the measurement point coordinates on the line-light waveform are extracted according to a predetermined algorithm (step 504).
- the extraction of the measurement point coordinates is performed through a threshold value determination process and a measurement point coordinate determination process.
- FIG. 9 illustrates an example of the threshold value determination process.
- An explanatory diagram of the measurement point coordinate determination processing is shown in FIG. In this example, three types of modes, ie, a center of gravity mode, an edge center mode, and a one-sided edge mode, are prepared for the measurement point coordinate extraction processing.
- the measurement point coordinates are obtained as the gray-scale center of gravity of the portion exceeding the threshold value TH indicated by hatching in the figure.
- the edge center mode as shown in FIG. 10 (b)
- a measurement point is obtained as the center of two edges, which is the intersection of the line bright waveform and the threshold value TH.
- the measurement point coordinates are obtained as a one-sided edge between the line brightness waveform and the threshold value TH.
- the displacement is calculated from the coordinates of the measurement point. (Step 505).
- X is the displacement measurement direction coordinate
- A, B, and C are constants determined by the optical system.
- the obtained displacement amount (judgment output if necessary) is output to the image monitor 4 and the external device 6 (step 506).
- FIG. 1 An explanatory diagram of a method of generating an image on a monitor screen is shown in FIG. As shown in the figure, in this embodiment, four (layer) image memories (0) to (3) are used. Among them, image memory
- image memory (2) stores the line brightness waveform and measured value
- image memory (3) stores the displacement amount and the judgment standard. It has been made possible. Then, the data on these image memories (0) to (3) are read out, superimposed, arranged side by side, or independently, by the action of a CRT controller or the like, and displayed on the screen of the image monitor 6. Is done.
- the measurement point coordinates are extracted only in the measurement target area A4. Therefore, measurement Even if an erroneous light image based on disturbance light exists in an area other than the target area A4, accurate measurement can be performed by accurately extracting the measurement point coordinates without being disturbed by the erroneous light image.
- the image data to be calculated for the measurement point extraction is limited to those in the measurement target area A4, the calculation time is shortened accordingly, and the sensor response speed is increased. Is done.
- the image of the area other than the measurement target area A4 is not displayed on the image monitor as hatched as the mask areas Ml and M2, it is possible to understand the irradiation position of the line beam from the monitor screen. There is also an easy advantage.
- the present inventors solved the above-mentioned problem by using a new method called density adjustment processing for each area.
- FIG. 13 is a time chart showing the density adjustment processing for each area.
- the displacement sensor of this embodiment when one or two or more measurement target areas are set in the field of view of the two-dimensional CCD, the beam irradiation point in each measurement target area is set. The density for the light image is automatically adjusted to a density suitable for measurement at all times.
- the feature point extraction calculation shown in Fig. 15 calculates the left and right edges by comparing the density value of each pixel with a specified threshold value, and determines the measurement point as the center position of the left and right edges calculated up to the sub-pixel. The coordinates are determined.
- the area limiting function of the present invention is not always performed for each peak image. As shown in FIG. 14, two or more peak images (mount 1, mountain 2) are included in one measurement target area. ) May be included
- a glass plate 70 with a metal coating 70c on the back surface 70b As shown in Fig. 16 (a), even if the front surface 70a is bare glass, there is often a glass plate 70 with a metal coating 70c on the back surface 70b.
- a glass plate examples include a glass plate used for a cathode ray tube of a television and a glass plate of a liquid crystal display panel. If such a glass plate 70 is to be measured with the sensor head 1 of the visual displacement sensor, the reflectance difference between the front surface 70a and the back surface 70b is too large. When the optical image density is taken as an appropriate value for measurement, the displacement of the backside is 7 O b It is known that it interferes with measurement.
- the surface irradiation light image 702 having a normal density is displayed as a thin image, but the backside irradiation light image 701 having a saturated density is displayed. Is indicated by a thick image.
- a front surface line waveform 704 and a back surface line waveform 703 are displayed. Since the top of the back surface line brightness waveform 703 reaches the gradation 25 5 line 7 13, As is clear, the backside illuminated light image 701 is too high in density to be suitable for measurement. More specifically, as an algorithm for measuring the coordinates of the measurement points, it is not possible to obtain the appropriate coordinates of the measurement points even if the feature extraction calculation described above with reference to FIG. 15 is performed.
- an area designation window 711 is displayed on the monitor screen as shown by a dotted rectangular frame in the figure.
- This area designation window 7 1 1 It is possible to make large and small reductions, which makes it possible to specify a predetermined area along the displacement direction.
- Fig. 18 (a) the right vertical line of the area designation window 7 1 1 is moved to the left as shown by arrow Z1 in the figure, and the surface irradiation light image 7 0 It is located close to the right next to 2.
- the left vertical line indicated by the arrow Z2 in the figure is fixed at the same position, and a predetermined fixing operation is performed. This completes the setting operation of area 0 as shown in FIG. 18 (b).
- the designation of the measurement area of the area 1 is started according to a predetermined guide, and the left and right vertical lines constituting the area designation window 7 1 1 1 1 1 1 Complete the setting of measurement area 1 by surrounding 70 1.
- the captured images of region 0 and region 1 are displayed separately on the monitor screen in the upper and lower two rows, and at the same time, the time of Fig. 13 is first displayed for each region.
- the time-division automatic adjustment process is performed, and the backside illuminated light image 70 1 and the front side illuminated light image 70 2 are both set to appropriate densities as shown by narrow images. Is done. Note that the density of the beak waveform does not saturate and is automatically adjusted to a value suitable for measurement, as is clear from the backside line brightness waveform 703 drawn over the backside illuminated light image 700. .
- a peak display and a sensitivity display are performed for area 0 and area 1, respectively.
- the sensitivity is “13” and the peak level is “200” for area 0, and the sensitivity is “6” and the peak level is “150” for area 1. Is understood.
- the area determination unit 202 extracts displacement and density based on the extracted image obtained as a result of the mask processing. Not something.
- FIG. 21 is a diagram for explaining the problem of the measurement point coordinate extraction process using the mask image
- FIG. 22 is a diagram for explaining the second embodiment of the measurement point coordinate extraction process. I have.
- PR2 is a right edge of the same
- PM2 is a measurement point coordinate extracted from the mask image using an edge center algorithm.
- the white image appears in Fig. 21 (b).
- the light image component outside the measurement target area located on the left side of the left boundary line L 1 is excluded from the line beam irradiation light image. Therefore, the masked image and the threshold TH
- the measurement point coordinates PM2 (see Fig. 21 (b)) calculated by the edge center algorithm based on the left and right edges PL2 and PR2 that are the intersections of the left and right edges PL2 and PR2 are the intersections of the input image and the threshold TH.
- the measurement point coordinates PM 1 (see Fig. 21 (a)) calculated by the edge-centered algorithm based on PL 1 and PR 1 no longer match. In the illustrated example, the measurement point coordinates PM2 are moved to the right side of the measurement point coordinates PM1.
- the coordinates of each measurement point are determined using the raw image before passing through the mask processing, and these are determined temporarily, and then The coordinates of the measurement point and the measurement target area are compared, and those that are compared with each other may be finally determined as the measurement point coordinates.
- a normal light image due to line beam irradiation and a light image due to disturbance light irradiation are present in the field of view of the CCD. It is assumed that the light image due to disturbance light is located outside the measurement target area while the light image exists inside the measurement target area in the vicinity of the line L1.
- the present invention first extracts the measurement point coordinates PM11 and PM12 from the light image itself (not the mask image) using an edge center algorithm, and measures the coordinates. Temporarily determined as point coordinates.
- LI and L2 are the left and right boundaries of the measurement area
- TH is the threshold
- PL11 and PR11 are the left and right where the threshold and the normal light image intersect.
- the edges, PL12 and PR12 are the left and right edges where the threshold and the disturbance light image intersect.
- the two provisionally determined measurement point coordinates PM11 and PM12 are compared. , Those existing inside the measurement target area Only the actual measurement point coordinates are determined, and the others are excluded from the true measurement point coordinates. Specifically, in the case of FIG. 22, only the measurement point coordinates PM 11 are determined to be the true measurement point coordinates, and the measurement point coordinates PM 12 are excluded from the subject of the final determination. .
- the raw image itself or the line-bright waveform extracted from the raw image is displayed on the screen of the image monitor as it is, while the displacement and density extracted by the displacement and density extraction unit 210 are For the first time, the area determination section 211 determines whether the area is appropriate.
- the level of the front surface 70a of the glass plate 70 which is the measurement object, may be higher or lower due to various causes. Then, it was found that some inconvenience would occur if the positions of the two regions were fixed.
- the glass plate 70 moves vertically up and down, or as shown in Fig. 24 (b). This occurs, for example, when the glass plate 70 flowing on the conveyor in the direction of arrow A2 is warped or bent.
- a typical example of warped or curved glass is a CRT.
- the measured value of the surface 70a is constantly monitored. According to the amount of fluctuation, the position of the measurement target area corresponding to the back surface 70b is controlled so as to follow this. That is, as shown in FIG. 25, in the present embodiment, the setting area is alternately switched every two consecutive vertical periods.
- the displacement (height) of the 0th area corresponding to the front surface 70a is obtained in the cycle before the two consecutive vertical cycles, and if there is a change in this, the backside 7 is obtained in the subsequent cycle.
- the position of the region corresponding to O b is recalculated on the assumption that the glass thickness is constant. As a result, in the setting for the next area 1, Since the position of the corresponding region 1 also follows the fluctuation, it is possible to avoid the inconvenience that the position of the back surface deviates from the measurement target region when the back surface is measured, and the automatic concentration adjustment process does not work well.
- the measurement and the display update are repeated alternately in the area 0 and the area 1 every other cycle.
- the region calculation shown in Fig. 25 (e) the range of region 1 is recalculated based on the displacement measurement value of region 0. The recalculated area 1 range is reflected in the area 1 setting process in the next cycle.
- an appropriate imaging condition is read from the imaging condition storage unit 141 in the sensor head 1. This is realized by controlling the light projecting system and the light receiving system circuit via the timing signal generating circuit 101.
- the area setting processing shown in FIG. 25 (c) is realized by the area determining unit 202 executing the mask processing based on the area set by the area setting unit 251.
- the area calculation processing shown in FIG. 25 (e) is realized by the area setting unit 251 recalculating the range of the area 1 based on the displacement measurement value of the area 0.
- the measurement display processing shown in FIG. 25 (f) is realized by the operation of the pixel no mm conversion processing, the measurement processing, the pass / fail processing, and the display processing in the calculation unit 255.
- (b) shows an example where the height of the glass plate fluctuates for various reasons.
- the front measurement area 7 13 and the back measurement area 7 14 are set normally, the front irradiation light image 7 02 and the back irradiation light image 7 While the width is maintained, if the glass plate to be measured moves up and down for some reason, if the backside measurement area 7 14 remains fixed, the backside illuminated light image 7 01 , The back side image cannot be recognized and measurement becomes impossible.
- the backside measurement area 714A is recalculated and set appropriately, as shown in the lower part of Fig. 26 (b).
- the backside illuminated light image 701A fits into the newly created backside measurement area 714A, even if the transparent plate moves up and down, its thickness measurement can be stably maintained. it can.
- the present invention by setting one or two or more measurement target areas in the field of view of the two-dimensional CCD, which is a two-dimensional image sensor, a peak waveform based on disturbance light is masked or a high reflectance is obtained.
- the density of the saturated image corresponding to the surface it is possible to always perform optimal high-precision displacement measurement.
- a plurality of areas can be set in the line direction of the line beam, that is, a direction orthogonal to the measurement direction, and the density can be adjusted for each area.
- FIGS. 27 and 28 show such examples.
- reference numeral 1 denotes a sensor head
- reference numeral 801 denotes a measurement target object
- reference numeral 802 denotes a step on the measurement target object
- reference numeral 803 denotes a step.
- the step 803 can be measured by setting the line beam 804 emitted from the sensor head 1 so as to straddle the step 802. At this time, if there is a large difference in reflectance between the upper surface and the lower surface constituting the step portion 802, the amount of received light is saturated on one of the surfaces and measurement becomes impossible as before. May fall.
- the amount of reflected light is automatically adjusted to an appropriate value, making measurement impossible or large measurement error. Can be reliably avoided.
- FIG. 805 A is area 0 sensitivity
- 806 A is area 0 peak level
- 805 B is area 1 sensitivity
- 806 B is area 1 peak level
- 80 7 is the first display area
- 808 is the second display area
- 807A surrounded by a wavy line is the measurement target area in the first display area
- 808A surrounded by a wavy line is the second display area.
- Measurement area 809: display of step measurement result
- 810 line-bright waveform of upper-stage reflected light
- 811 line-bright waveform of lower-stage reflected light
- 812 upper-stage reflected light
- 8A is an optical image of the upper-stage surface reflected light after density adjustment
- 813 is an optical image of the lower-stage surface reflected light.
- the second display area 808 of the same screen is set.
- the line-bright waveforms 8 10 and 8 11 corresponding to the upper reflected light and the lower reflected light are both controlled to appropriate densities, and both surfaces are reliably measured. can do. That is, each horizontal scanning line output from the two-dimensional CCD Of the image output, an appropriate density control is performed on the area corresponding to the area 808 A, and at the same time, an appropriate density adjustment is performed on the horizontal scan line output from the area corresponding to the area 807 A.
- FIG. 29 c An explanatory diagram of the problem at the time of lateral displacement of the object in the step measurement is shown in Fig. 29 c
- reference numeral 800 denotes an object to be measured
- 802 denotes a stepped portion
- 803 denotes a step
- 8 04 is a line beam.
- the two measurement target areas A and B set in the line direction are the lower surface and the upper surface constituting the step 803. It is positioned with the surface.
- the step portion 8002 enters the measurement target area A, which hinders the step measurement. Will come.
- This problem can be solved by moving the measurement target areas A and B in the horizontal direction by following the lateral displacement of the measurement target body 801.
- FIG. 30 is an explanatory diagram of the lateral displacement follow-up control at the time of measuring the level difference
- FIG. 31 is a time chart showing a processing flow in the control.
- a step for extracting the reference line 821 as a displacement value is performed.
- a threshold value TH0 is set, and an intersection point 8222 with the line 820, which is a measurement result of all lines in the measurement image, is set as a reference line 8221 position.
- a general edge detection method can be applied as a method for calculating the reference line 8221.
- the target object 801 being measured moves in the line direction
- the height of the measurement target object 801 is measured along the irradiation line of the line beam 804.
- the position where the threshold value TH0 corresponding to the predetermined height is reached is recognized as the step portion 802, and the measurement target area is appropriately separated on both sides with reference to the position of the step portion 802. 0 and 1 are set again.
- the lighting of the laser, the shirt time of the CCD, and the sensitivity adjustment performed by controlling the AGC amplifier circuit are the same as those in FIG. 25.
- An image generated by turning on the laser in the 0th cycle is acquired as a measurement image in the 1st cycle.
- displacement measurement is performed on the area 0 measurement image, and a reference line 8 21 is calculated based on the set threshold value TH 0, and the area is measured.
- the area range of the areas 0 and 1 to be used for the next measurement is recalculated from the reference line 8 21. Based on this recalculation, the contour display positions of the area 0 range and the area 1 range are changed in the fourth cycle and the fifth cycle.
- the threshold value TH 0 used for detecting the position of the reference line 8 21 may be a fixed value, but either the upper surface or the lower surface of the step (a predetermined one is referred to as a reference surface). If the threshold value TH0 itself is followed so that the difference between the distance measurement value corresponding to This method has the advantage that it can follow not only fluctuations in the reference direction but also displacements in the distance direction of the reference plane (vertical fluctuations of the stepped object as a whole).
- the measurement target area is set by arbitrarily determining the width and position in the displacement measurement direction and the direction orthogonal thereto.
- the influence of disturbance light or the like is eliminated, and the part included in the measurement target area is not only used for the measurement process but also its density is automatically adjusted appropriately.
- the density can be automatically adjusted in a time-sharing manner for any light image.
- the coordinates of the measurement point can be determined with certainty. For this reason, according to the present invention, it is practically very suitable for measuring the environment where disturbance light exists, a glass plate on which a metal film is formed, and a step between two surfaces having greatly different reflectances. It becomes something.
- FIG. 32 the image memory stores the measured image as a background.
- the graphic memory (0 to 4) Is stored. That is, the graphic memory (0) stores a line blood guide, a setting menu, and a sensitivity information guide [white, do not update drawing].
- the measurement result [white] is stored in the graphic memory (1).
- the line memory, LV, and PEAK [yellow] are stored in the graphic memory (2).
- the measurement point [red] is stored in the graphic memory (3).
- the measurement area [green] is stored in the graphic memory (4).
- FIG. 33 the contents stored in these memories are overwritten and added to each other, edited into a display image for the image monitor 6, and displayed in color on the screen of the image monitor 6.
- Step 3404 the front side is specified (Step 3404), the completion is instructed (Step 3405), and the back side area is further specified (Step 3406), and the completion is instructed.
- Step 3407 "ENT" measurement of the surface P1 (mm) (before calibration) is performed (Step 3501).
- the operator simply sets an independent measurement target area in each line beam irradiation light image, and the line beam irradiation light image part whose density deviates from the default value also Determine the measurement point coordinates using the measurement point coordinate determination algorithm built in As a result, the target displacement can be returned to a state where it can be measured normally.
- a large reflectivity is formed on an upper surface and a lower surface constituting the step. Due to the existence of the difference, even if the automatic density adjustment function is activated, the density of the line beam irradiation light image that appears at intervals in the direction perpendicular to the displacement measurement direction in the field of view of the two-dimensional image sensor If the light image can no longer be kept within the specified range, the operator simply sets separate measurable areas on the lower surface and the upper surface, and the line beam whose density deviates from the default value For the illuminated light image, the measurement point coordinates can be determined by the measurement point coordinate determination algorithm built into the sensor, and as a result, the target displacement can be measured normally. It can be returned to the state.
- the measurement target area follows the movement. As a result, it is possible to prevent measurement failure.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE60139047T DE60139047D1 (de) | 2000-01-31 | 2001-01-31 | Optischer verschiebungssensor |
EP01902697A EP1167918B1 (en) | 2000-01-31 | 2001-01-31 | Optical displacement sensor |
US09/937,480 US6724491B2 (en) | 2000-01-31 | 2001-01-31 | Visual displacement sensor |
JP2001556274A JP3797422B2 (ja) | 2000-01-31 | 2001-01-31 | ビジュアル式変位センサ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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JP2000-27429 | 2000-01-31 | ||
JP2000027429 | 2000-01-31 | ||
JP2000-393787 | 2000-11-19 | ||
JP2000393787 | 2000-11-19 |
Publications (2)
Publication Number | Publication Date |
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WO2001057471A1 true WO2001057471A1 (fr) | 2001-08-09 |
WO2001057471B1 WO2001057471B1 (fr) | 2004-03-11 |
Family
ID=26584858
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Application Number | Title | Priority Date | Filing Date |
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PCT/JP2001/000656 WO2001057471A1 (fr) | 2000-01-31 | 2001-01-31 | Capteur visuel a deplacement |
Country Status (5)
Country | Link |
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US (1) | US6724491B2 (ja) |
EP (1) | EP1167918B1 (ja) |
JP (1) | JP3797422B2 (ja) |
DE (1) | DE60139047D1 (ja) |
WO (1) | WO2001057471A1 (ja) |
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WO2022185743A1 (ja) * | 2021-03-01 | 2022-09-09 | オムロン株式会社 | 変位センサ及び状態監視方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1167918B1 (en) | 2009-06-24 |
US20020154318A1 (en) | 2002-10-24 |
EP1167918A1 (en) | 2002-01-02 |
DE60139047D1 (de) | 2009-08-06 |
WO2001057471B1 (fr) | 2004-03-11 |
JPWO2001057471A1 (ja) | 2004-08-26 |
EP1167918A4 (en) | 2006-11-22 |
US6724491B2 (en) | 2004-04-20 |
JP3797422B2 (ja) | 2006-07-19 |
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