WO2001049599A3 - High yield vapor phase deposition method for large scale single walled carbon nanotube preparation - Google Patents

High yield vapor phase deposition method for large scale single walled carbon nanotube preparation Download PDF

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Publication number
WO2001049599A3
WO2001049599A3 PCT/US2001/000335 US0100335W WO0149599A3 WO 2001049599 A3 WO2001049599 A3 WO 2001049599A3 US 0100335 W US0100335 W US 0100335W WO 0149599 A3 WO0149599 A3 WO 0149599A3
Authority
WO
WIPO (PCT)
Prior art keywords
walled carbon
single walled
deposition method
vapor phase
phase deposition
Prior art date
Application number
PCT/US2001/000335
Other languages
French (fr)
Other versions
WO2001049599A2 (en
Inventor
Jie Liu
Original Assignee
Univ Duke
Jie Liu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Duke, Jie Liu filed Critical Univ Duke
Priority to AU52876/01A priority Critical patent/AU5287601A/en
Priority to EP01926332A priority patent/EP1252360A4/en
Priority to KR1020027008727A priority patent/KR20020084087A/en
Priority to CA002395807A priority patent/CA2395807A1/en
Priority to JP2001550143A priority patent/JP2003520176A/en
Publication of WO2001049599A2 publication Critical patent/WO2001049599A2/en
Publication of WO2001049599A3 publication Critical patent/WO2001049599A3/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/84—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/85—Chromium, molybdenum or tungsten
    • B01J23/88—Molybdenum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/84—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/85—Chromium, molybdenum or tungsten
    • B01J23/88—Molybdenum
    • B01J23/881—Molybdenum and iron
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/89—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with noble metals
    • B01J23/8906—Iron and noble metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/32—Freeze drying, i.e. lyophilisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/02—Single-walled nanotubes

Abstract

An improved vapor phase deposition method for the preparation of single walled carbon nanotubes on an aerogel supported metal catalyst. The total yield of single walled carbon monotubes often is at least about 100 % as shown by curves (a) and (b), based on the weight of the catalyst, for a reaction time of at least about 30 minutes.
PCT/US2001/000335 2000-01-07 2001-01-05 High yield vapor phase deposition method for large scale single walled carbon nanotube preparation WO2001049599A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AU52876/01A AU5287601A (en) 2000-01-07 2001-01-05 High yield vapor phase deposition method for large scale single walled carbon nanotube preparation
EP01926332A EP1252360A4 (en) 2000-01-07 2001-01-05 High yield vapor phase deposition method for large scale single walled carbon nanotube preparation
KR1020027008727A KR20020084087A (en) 2000-01-07 2001-01-05 High yield vapor phase deposition method for large scale single walled carbon nanotube preparation
CA002395807A CA2395807A1 (en) 2000-01-07 2001-01-05 High yield vapor phase deposition method for large scale single walled carbon nanotube preparation
JP2001550143A JP2003520176A (en) 2000-01-07 2001-01-05 High-yield vapor deposition method for large-scale single-walled carbon nanotube preparation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17487400P 2000-01-07 2000-01-07
US60/174,874 2000-01-07

Publications (2)

Publication Number Publication Date
WO2001049599A2 WO2001049599A2 (en) 2001-07-12
WO2001049599A3 true WO2001049599A3 (en) 2002-03-07

Family

ID=22637890

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/000335 WO2001049599A2 (en) 2000-01-07 2001-01-05 High yield vapor phase deposition method for large scale single walled carbon nanotube preparation

Country Status (7)

Country Link
EP (1) EP1252360A4 (en)
JP (1) JP2003520176A (en)
KR (1) KR20020084087A (en)
CN (1) CN1418260A (en)
AU (1) AU5287601A (en)
CA (1) CA2395807A1 (en)
WO (1) WO2001049599A2 (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020172767A1 (en) * 2001-04-05 2002-11-21 Leonid Grigorian Chemical vapor deposition growth of single-wall carbon nanotubes
JP4068056B2 (en) 2001-07-03 2008-03-26 ファキュルテ ユニヴェルシテール ノートル−ダム ド ラ ペ Catalyst support and carbon nanotubes produced thereon
GB0216654D0 (en) * 2002-07-17 2002-08-28 Univ Cambridge Tech CVD Synthesis of carbon nanoutubes
US6974492B2 (en) 2002-11-26 2005-12-13 Honda Motor Co., Ltd. Method for synthesis of metal nanoparticles
US7214361B2 (en) * 2002-11-26 2007-05-08 Honda Giken Kogyo Kabushiki Kaisha Method for synthesis of carbon nanotubes
US6974493B2 (en) 2002-11-26 2005-12-13 Honda Motor Co., Ltd. Method for synthesis of metal nanoparticles
GB2399092B (en) * 2003-03-03 2005-02-16 Morgan Crucible Co Nanotube and/or nanofibre synthesis
WO2006041170A1 (en) * 2004-10-15 2006-04-20 Ngk Insulators, Ltd. Method for producing porous structure
US7485600B2 (en) * 2004-11-17 2009-02-03 Honda Motor Co., Ltd. Catalyst for synthesis of carbon single-walled nanotubes
US7871591B2 (en) * 2005-01-11 2011-01-18 Honda Motor Co., Ltd. Methods for growing long carbon single-walled nanotubes
CA2500766A1 (en) 2005-03-14 2006-09-14 National Research Council Of Canada Method and apparatus for the continuous production and functionalization of single-walled carbon nanotubes using a high frequency induction plasma torch
EP1797950A1 (en) * 2005-12-14 2007-06-20 Nanocyl S.A. Catalyst for a multi-walled carbon nanotube production process
JP2009530214A (en) 2006-01-30 2009-08-27 本田技研工業株式会社 Catalyst for the growth of carbon single-walled nanotubes
JP5055520B2 (en) * 2006-02-24 2012-10-24 独立行政法人産業技術総合研究所 Porous structure and method for producing the same
US8951631B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused metal fiber materials and process therefor
US8951632B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused carbon fiber materials and process therefor
US9005755B2 (en) 2007-01-03 2015-04-14 Applied Nanostructured Solutions, Llc CNS-infused carbon nanomaterials and process therefor
WO2010141130A1 (en) * 2009-02-27 2010-12-09 Lockheed Martin Corporation Low temperature cnt growth using gas-preheat method
US20100224129A1 (en) 2009-03-03 2010-09-09 Lockheed Martin Corporation System and method for surface treatment and barrier coating of fibers for in situ cnt growth
WO2011017200A1 (en) 2009-08-03 2011-02-10 Lockheed Martin Corporation Incorporation of nanoparticles in composite fibers
CA2808242A1 (en) 2010-09-14 2012-03-22 Applied Nanostructured Solutions, Llc Glass substrates having carbon nanotubes grown thereon and methods for production thereof
CN103118975A (en) 2010-09-22 2013-05-22 应用奈米结构公司 Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof
JP6042314B2 (en) * 2012-12-04 2016-12-14 本田技研工業株式会社 Carbon nanotube growth substrate and manufacturing method thereof
JP6041775B2 (en) * 2013-09-13 2016-12-14 本田技研工業株式会社 Carbon nanotube growth substrate and manufacturing method thereof
CN111372681A (en) * 2017-09-18 2020-07-03 西弗吉尼亚大学 Catalyst and process for tunable substrate growth of multi-walled carbon nanotubes
CN112533868B (en) * 2018-07-31 2023-11-03 株式会社大阪曹達 Method for producing carbon nanotubes

Citations (5)

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US4916108A (en) * 1988-08-25 1990-04-10 Westinghouse Electric Corp. Catalyst preparation using supercritical solvent
US5439865A (en) * 1992-07-30 1995-08-08 Ngk Insulators, Ltd. Catalyst for exhaust gas purification and process for production thereof
US6004436A (en) * 1996-08-16 1999-12-21 The Regents Of The University Of California Processes for the chemical modification of inorganic aerogels
EP1061043A1 (en) * 1999-06-15 2000-12-20 Iljin Nanotech Co., Ltd. Low-temperature synthesis of carbon nanotubes using metal catalyst layer for decomposing carbon source gas

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4713233A (en) * 1985-03-29 1987-12-15 Allied Corporation Spray-dried inorganic oxides from non-aqueous gels or solutions
US4916108A (en) * 1988-08-25 1990-04-10 Westinghouse Electric Corp. Catalyst preparation using supercritical solvent
US5439865A (en) * 1992-07-30 1995-08-08 Ngk Insulators, Ltd. Catalyst for exhaust gas purification and process for production thereof
US6004436A (en) * 1996-08-16 1999-12-21 The Regents Of The University Of California Processes for the chemical modification of inorganic aerogels
EP1061043A1 (en) * 1999-06-15 2000-12-20 Iljin Nanotech Co., Ltd. Low-temperature synthesis of carbon nanotubes using metal catalyst layer for decomposing carbon source gas

Non-Patent Citations (4)

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CASSELL ET AL.: "Large scale CVD synthesis of single-walled carbon nanotubes", J. PHYS. CHEM. B, vol. 103, no. 31, 1999, pages 6484 - 6492, XP002941138 *
HAFNER ET AL.: "Catalytic growth of single-wall carbon nanotubes from metal particles", CHEMICAL PHYSICS LETTERS, vol. 296, 1998, pages 195 - 202, XP002941140 *
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SUH ET AL.: "Fast sol-gel synthetic route to high-surface-area alumina aerogels", CHEMISTRY OF MATERIALS, vol. 9, no. 9, September 1997 (1997-09-01), pages 1903 - 1905, XP002941139 *

Also Published As

Publication number Publication date
WO2001049599A2 (en) 2001-07-12
EP1252360A4 (en) 2006-07-26
KR20020084087A (en) 2002-11-04
CA2395807A1 (en) 2001-07-12
JP2003520176A (en) 2003-07-02
CN1418260A (en) 2003-05-14
EP1252360A2 (en) 2002-10-30
AU5287601A (en) 2001-07-16

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