WO1996021473A2 - Device and methods for plasma sterilization - Google Patents
Device and methods for plasma sterilization Download PDFInfo
- Publication number
- WO1996021473A2 WO1996021473A2 PCT/US1995/017071 US9517071W WO9621473A2 WO 1996021473 A2 WO1996021473 A2 WO 1996021473A2 US 9517071 W US9517071 W US 9517071W WO 9621473 A2 WO9621473 A2 WO 9621473A2
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- WO
- WIPO (PCT)
- Prior art keywords
- chamber
- gas
- electromagnetic radiation
- radiation energy
- water vapor
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Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/14—Plasma, i.e. ionised gases
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L11/00—Methods specially adapted for refuse
Definitions
- This invention relates generally to methods and apparatus for sterilizing articles, and in particular to methods and apparatus for sterilizing articles with a gas plasma generated from a gas mixture of oxidizing and reducing agents.
- this invention provides for the sterilization of articles with a gas plasma generated from water vapor.
- a variety of sterilization methods have been proposed for sterilizing a wide range of articles such as medical products, surgical instruments, pharmaceutical products, and the like.
- One common method is by subjecting the articles to a gas such as ethylene oxide or other disinfecting gases.
- Irradiation procedures have also been proposed for sterilizing articles such as medical products.
- One expectation for all sterilizing procedures is that they must effectively kill all organisms without damage to the articles or goods being sterilized.
- Sterilization gas procedures and irradiation procedures often expose workers and the environment to unacceptable safety standards. Such exposure is becoming increasingly more undesirable, particularly in light of state and federal legislation restricting the use of hazardous materials.
- Plasma sterilizers operate by injecting a gas into a chamber and applying electromagnetic radiation energy to the gas in the chamber which in turn ionizes the body of gas.
- the ionized gas shoul be highly reactive and reacts with microorganisms on the surface of the articles to be sterilized.
- the reactions between the ionized gas and the microorganisms should effectively destroy the microorganisms.
- Sterilizing plasmas have been generated with a wide variety of gases as set forth generally in U.S. Patent Application 5,184,046, the disclosure of which is herein incorporated by reference.
- the methods and apparatus should provide for plasma sterilization that is not corrosive to the articles and does not leave toxic residues on the articles.
- the methods and apparatus should not only be able to effectively destroy the microorganisms, but also to remove them from the articles.
- the methods and apparatus should provide for uniform plasma distribution, thereby insuring uniform sterilization regardless of the chamber geometry or the size and geometry of the articles to be sterilized. It would further be desirable to provide methods and apparatus for sterilizing articles within packaging suitable for delivery to an end user.
- U.S. Patent No. 4,207,286 describes a sterilization method using a continuous flow, low pressure gas plasma.
- the invention provides methods and apparatus for sterilizing articles using a gas plasma.
- an article is placed into a sterilization chamber and a vacuum is applied to the chamber to reduce the pressure within the chamber.
- water vapor is introduced into the chamber.
- the water vapor can be introduced alone or can optionally be introduced with a carrier gas.
- an electromagnetic radiation energy is applied to the chamber to produce a plasma.
- the electromagnetic radiation energy excites the water molecules and causes them to disassociate thereby creating reactive radicals.
- the reactive radicals vaporize and combine with the by-products of the spores and other microorganisms and to effectively destroy and remove the spores and other microorganisms from the articles, thereby sterilizing the articles.
- the carrier gas comprises air.
- the carrier gas can be a gas selected from the group consisting of argon, hydrogen, oxygen, nitrogen, helium, nitrogen tri-fluoride, and nitrous oxide.
- the electromagnetic radiation energy applied to the chamber is preferably in the range from about 5 KHz to 10 GHz, and more preferably at about 2.45 GHz. Such a wavelength is preferable because of its effectiveness in disassociating the hydrogen and oxygen atoms of the water vapor.
- the pressure within the chamber is preferably within the range from about 100 mTorr to 10 Torr.
- the temperature within the chamber is preferably in the range from about 25°C to 100°C.
- At least one article is placed into a sterilization chamber and a vacuum is applied to the chamber until a predetermined pressure is reached within the chamber. Once such a pressure is reached, application of the vacuum is ceased and a static condition is allowed to develop within the chamber. Once a static condition has been reached, an amount of gas is introduced into the chamber and is allowed to uniformly distribute throughout the chamber. Because of the static condition within the chamber, pressure is equal throughout the chamber allowing the concentration of the gas to readily become uniform throughout the entire volume of the chamber. In such a state, electromagnetic radiation energy is applied to the chamber to produce a plasma.
- the electromagnetic radiation power is ceased and any gases are exhausted from the chamber.
- One or more cycles can be applied.
- the gas introduced into the chamber is water vapor.
- the invention provides an apparatus for sterilizing articles which includes a sterilization chamber and both a vacuum pump and a gas source in communication with the chamber.
- the vacuum pump allows the pressure within the chamber to be reduced. Once the pressure is reduced, the gas source can be employed to introduce a gas into the chamber.
- the apparatus further includes an electromagnetic radiation energy source to produce a plasma from the gas within the chamber.
- a controller is provided for cyclically actuating the vacuum pump, the gas source, and the electromagnetic radiation energy source.
- the controller is configured so that the vacuum pump, the gas source, and the electromagnetic radiation energy source are actuated at separate times. In this way, the apparatus can be operated in a cyclical manner to continuously produce and exhaust a plasma. Operation in this manner allows the articles to be uniformly sterilized.
- the controller allows the vacuum pump to reduce the pressure in the chamber to a desired pressure.
- the controller stops the vacuum pump and allows the chamber to reach a static condition.
- the controller actuates the gas source to inject an amount of gas into the chamber. Since the chamber is in a static condition, the gas equally distributes throughout the chamber.
- the electromagnetic radiation energy source is actuated by the controller to produce a uniformly distributed plasma within the chamber for uniformly sterilizing the articles. After reaction of the plasma with the microorganisms on the articles, the resulting gases are exhausted and the controller sends a signal to repeat the cycle as often as is desired.
- the vacuum pump is connected to the sterilization chamber by a tube
- the controller includes a rotatable disk having an orifice that can be aligned with the tube as the disk is rotated. In this manner, each time the orifice comes in alignment with the tube, a vacuum is created within the chamber.
- the rotating disk also serves as a timer to actuate the injection of the gas and the application of the electromagnetic radiation energy.
- a sensor can be employed for sensing the degree of rotation of the disk so that a signal can be sent to actuate the gas source or the electromagnetic radiation energy source at the appropriate times. In this way, the cycle of the sterilizer is controlled by the rotation of the disk.
- the invention further provides a method an apparatus for sterilizing pre-packaged articles, with the packaging being suitable for delivery to an end user.
- the packaging includes a container constructed of a material transparent to electromagnetic radiation energy, such as plastic.
- a vacuum is applied to the chamber until a pressure in the range from about 1 mTorr to 100 mTorr is reached.
- the container is then back filled with water vapor to a pressure in the range from about 100 mTorr to 100 Torr.
- a carrier gas is used to introduce the water vapor.
- the container is then sealed and is subjected to electromagnetic radiation energy to form a highly energetic water vapor in the container.
- the electromagnetic radiation is then ceased and a static condition is allowed to develop in the container.
- the electromagnetic radiation energy is again reapplied until sterilization is complete.
- the articles then remain in a sterilized environment within the packaging until removed by the end user.
- FIG. 1 is a flow chart illustrating an exemplary method for sterilizing articles using a gas plasma according to the present invention.
- Fig. 2 illustrates a partially cut-away side view of a sterilization apparatus according to the present invention.
- Fig. 3 illustrates a top view of a rotating chopper valve for controlling the sterilization cycle of the apparatus of Fig. 2.
- This invention provides methods and apparatus for sterilizing articles, particularly by the use of a gas plasma generated from a gas mixture of oxidizing and reducing agents.
- the articles are sterilized with a gas plasma that is generated from water vapor.
- At least one article is introduced into a sterilization chamber.
- the article can be selected from any of a number of articles, such as surgical instruments, dental instruments, medical products, pharmaceutical products, and the like.
- a vacuum is applied to the chamber to reduce the pressure within the chamber to a pressure below atmospheric pressure.
- the pressure will be reduced until it is in the range from about 100 mTorr to 10 Torr.
- a water vapor is introduced into the chamber.
- the water vapor can be introduced into the chamber by a carrier gas.
- the carrier gas can be any one of a number of gases including such gases as air, argon, hydrogen, nitrogen, oxygen, helium, nitrogen tri-fluoride, nitrous-oxide, and the like, or any mixtures thereof.
- gases such gases as air, argon, hydrogen, nitrogen, oxygen, helium, nitrogen tri-fluoride, nitrous-oxide, and the like, or any mixtures thereof.
- air will be used as the carrier gas.
- carrier gases can conveniently be used to assist in introducing the water vapor into the chamber, a novel feature of the invention is that water vapor alone can be used to produce the plasma.
- Electromagnetic radiation energy as used herein includes all radio frequency energy and particularly any radio frequency energy having a wavelength in the range from about 5 KHz to 10 GHz, and also includes energy such as microwave, infrared light, visible light, ultraviolet light, laser, X-ray energy and gamma radiation.
- the radio frequency energy When the radio frequency energy is supplied, the water molecules are driven into a high energy state, causing the molecules to disassociate into reactive radicals and forming a plasma.
- Th radio frequency energy will preferably be at about 2.45 GHz which has proven to be effective in fractionating the water molecules.
- the reactive radicals then vaporize and combine with the by-products of spores or other microorganisms on the articles to sterilize the articles.
- the reactions of the radicals with the spores and other microorganisms produce water vapor, oxygen, nitrogen, and small amounts of carbon dioxide and carbon monoxide.
- a particular advantage in using water vapor to create the plasma is that when the reactive radicals combine with the spores and other microorganisms on the articles, they are effectively vaporized. In this way, the spores and other microorganisms are physically removed from the articles and converted to gas form which is then exhausted from the chamber.
- a further advantage in using water vapor to create the plasma is that the exhausted gases, i.e., water vapor, oxygen, nitrogen, and small amounts of carbon dioxide and carbon monoxide, can be safely exhausted into the atmosphere.
- the temperature within the chamber during the sterilization process can be in the range from about 25°C to 100°C. Such temperatures provide for a safe working environment and do no impose additional costs in constructing the sterilization apparatus.
- the invention further provides a method for uniformly sterilizing articles using a gas plasma.
- the method is set forth in the flow chart of Fig. 1.
- at least one article is placed into a sterilization chamber.
- the article can be of any size or geometry as long as it can fit within the sterilization chamber.
- a vacuum is applied to the chamber to reduce the pressure to a predetermined amount.
- application of the vacuum is ceased and a static condition is allowed to develop in the chamber, i.e., a condition where the pressure remains essentially constant and equal throughout the entire interior of the chamber.
- a static condition Once a static condition has been reached, a discrete amount of gas is introduced into the chamber. Because of the static condition within the chamber, the gas rapidly distributes itself uniformly throughout the entire volume of the chamber as dictated by Boyle's law. This removes gas flow dynamics from the equation.
- electromagnetic radiation and preferably radio frequency energy
- the gas can be any one of a number of gases capable of producing reactive radicals, but will preferably include water vapor.
- the radio frequency energy is applied for a time sufficient to allow the reactive radicals to react with the spores and other microorganisms on the articles. The amount of time the radio frequency energy is applied can be increased as desired to introduce a safety factor. After the plasma has had sufficient time to react, the radio frequency energy is ceased and the resultant gases are exhausted from the chamber.
- the cycle of applying a vacuum to the chamber, allowing a static condition to develop, introducing another amount of gas into the chamber, and applying radio frequency energy can again be repeated as necessary to ensure that the articles within the chamber are sufficiently sterilized.
- the apparatus 6 is conveniently placed on a table 8 for easier access.
- the apparatus 6 includes a view port 10 within a door 12.
- the door 12 is connected to a reaction chamber 14 via a flange 15.
- Visual access to the reaction chamber 14 is obtained through the view port 10, while physical access is gained by opening the door 12.
- the door 12 will be hingedly connected to the flange 15.
- the door 12, the flange 15, and the chamber 14 will preferably all be constructed of stainless steel.
- Use of stainless steel for these components is advantageous because the stainless steel does not sputter (i.e., the physical deposition of material on substrates) as would aluminum or aluminum oxide, causing damage and contamination to the articles being sterilized.
- the flange 38 is used to attach a material transparent to radio frequency energy, such as a glass or quartz plate seal 20 through which radio frequency energy is directed.
- a gas injection port 24 is provided. Gas is supplied to the injection port 24 through a gas line 26.
- the gas line 26 is in communication with a gas source 28.
- the gas source 28 can be configured to provide any one of a variety o gases, and will preferably be configured to provide water vapor as the gas.
- the gas source 28 includes a container 30 having an amount of water H 2 0. Placed in the water is a carrier gas delivery tube 32 for bubbling a carrier gas through the water. In this way, a the carrier gas is bubbled through the water, water vapor is produced which can be delivered to the reaction chamber 14 through the gas line 26.
- a gas injection valve 34 is provide for controlling injection of the gas into the reaction chamber 14.
- a gas metering valve 36 is provided to meter the amount of gas travelling through the gas line 26.
- the apparatus 6 can alternatively be provided with a plurality of gas injection ports disposed throughout the reaction chamber 14.
- a header can be provided to distribute the gas to the various gas injection ports around the reaction chamber 14.
- a radio frequency energy source 22 is provided for supplying radio frequency energy into the chamber at a wavelength in the range from about 5 KHz to 10 GHz.
- the radio frequency energy supplied by the generator source 22 will be at about 2.45 GHz.
- Such a wavelength is the same wavelength produced by most commercially available microwave ovens.
- the generator source 22 can be constructed from the power supply of a commercially available microwave oven.
- the radio frequency energy is directed through the plate seal 20 and into the reaction chamber 14.
- the plate seal 20 is constructed of a material transparent to radio frequency energy, and is preferably constructed of a glass or a quartz plate.
- the stainless steel flange 38 is provided to attach to the generator source 22 to the reaction chamber 14.
- the gas injected into the reaction chamber 14 is allowed to equally distribute itself throughout the entire interior volume of the reaction chamber 14. This is accomplished by sealing the chamber 14 after the gas is injected.
- the radio frequency generator source 22 can be actuated to direct energy through the plate seal 20 and into the reaction chamber 14. In this way, a plasma is produced when the gas is energized by the radio frequency energy.
- a diffuser plate 18 is held by a flange 16 and divides the reaction chamber 14 into two separate volumes.
- the volume adjacent the door 12 (volume A) is for holding the articles and the volume adjacent the generator source 22 (volume B) is for receiving the injected gas.
- the diffuser plate 18 contains at least one through hole so that the two volumes A, B can communicate. More than one through hole can be included for multiple point injection of the gas. As gas is injected into volume B adjacent the radio frequency generator source 22, this volume is immediately filled with gas. Volume A is also almost immediately filled with the gas through the through hole. The rate at which volume A is filled can be varied depending on the pressure difference between the volumes A, B and the size and quantity of through holes.
- plasma in volume B but not in volume A.
- plasma can alternatively be produced in both volume A and B in any proportion so that the articles in volume A can be exposed only to the reactive gases, or to any combination of reactive gases and ionic bombardment.
- a metallic cover is placed adjacent the plate 18 (o substituted for plate 18) to prevent radiation energy from entering volume A when the radio frequency generator 22 is actuated to produce a plasma in volume B.
- the articles in volume A receive no ionic bombardment and are onl exposed to the previously diffused reactive gases in volume A This procedure is particularly beneficial when sterilizing sensitive articles such as cameras, microscopes, optics, implantable sensors, lenses, and the like.
- a second metal gas diffusion plate with one or more through holes can be rotatably receive relative to the first plate. As the second plate is rotated relative to the first plate, the through holes come in and ou of alignment allowing for varying degrees of gas diffusion into volume A.
- the radio frequency generator source 22 can be actuated at different times relative to the injection of the gas into the volume B to vary the amount of plasma diffused into the volume A. If the radio frequency energy is actuated just as the gas is injected into the volume B, then a plasma will be created that can then be diffused into the volume A. If the generator source 22 is actuated well after the gas has diffused into the volume A, then virtually no plasma will be diffused into the volume A.
- the electromagnetic radiation energy can be inductively or capacity coupled through the glass or quartz plate 20 into the reaction chamber.
- an electrode can be employed and placed either inside or outside the reaction chamber 14. Use of the electrode inside the chamber 14 is useful when using electromagnetic radiation energy having a frequency of 10 MHz or less. Use of the electrodes outside the chamber is useful when using electromagnetic radiation energy having frequencies in the range from 10 MHz to 900 MHz.
- a copper tube preferably having a diameter in the range from 3/16" to 1/4" is arranged on the outside surface of the plate 20. Energy is supplied through the wire at a frequency in the range of about 10 MHz to 900 MHz and is coupled through the plate 20 to produce the plasma.
- the reaction chamber 14 can be constructed of any geometry, but will preferably be orthogonal or cylindrical in geometry.
- An orthogonal geometry is advantageous when using trays to carry the articles to be sterilized. Use of trays allows for easy arrangement of the articles within the chamber 14.
- a vacuum pump 40 is provided.
- the vacuum pump 40 can be any pump capable of reducing pressures within the reaction chamber 14 up to a pressure of about 10 mTorr.
- An exemplary vacuum pump 40 is one such as the Alcatel 1220, commercially available from Alcatel.
- the vacuum pump 40 also serves to exhaust gases from the reaction chamber 14 after sterilization has occurred.
- the vacuum pump 40 communicates with the reaction chamber 14 via an exhaust port 42.
- a uniformly distributed plasma within the chamber 14 regardless of the geometry of the reaction chamber 14 or the articles themselves.
- a static condition is created within the chamber 14 by ceasing the pumping.
- a discrete amount of gas can be injected into the reaction chamber 14 through the port 24 which is then closed.
- the gas is then allowed to equally distribute itself throughout the entire interior volume of the reaction chamber 14.
- Radio frequency energy from the generator source 22 is directed into the chamber 14 to create a uniform plasma, thereby allowing for uniform sterilization of the articles regardless of their geometry.
- the sterilizing procedure is accomplished with one or more sterilization cycles.
- the apparatus 6 includes a controller for controlling a repeating sterilization cycle.
- the controller separately and repeatedly actuates the vacuum, the gas injection, the radio frequency energy, and the exhausting of spent gases. In this way, the articles within the sterilization chamber are continually subjected to a series o uniformly distributed gas plasma.
- the controller can be any controller capable of separately actuating the vacuum pump 40, the gas injection valve 34, actuation of the generator source 22, and the exhaustion of gases through the exhaust port 42 in a systematic and controlled manner.
- An exemplary controller fo controlling a sterilization cycle as just described is illustrated in Figs. 2 and 3.
- the controller includes a rotating chopper valve 44 that is rotated by a chopper valve drive motor 46.
- a top view of the chopper valve 44 is shown in Fig. 3.
- the chopper valve 44 includes an orifice 46 that is alignable with the exhaust port 42. As the chopper valve 44 rotates, the orifice 46 passes in and out of alignment with exhaust port 42.
- the vacuum pump 40 is continuously actuated so that a vacuum will be applied to the reaction chamber 14 as the orifice 46 becomes aligned with the exhaust port 42.
- Disposed on the chopper valve 44 are a series of indicators which can be sensed by a sensor, such as an optical sensor (not shown) , and used to actuate the gas injection valve 34 and the generator source 22.
- a gas injection indicator 48 is provided for actuating the valve 34 to inject a gas through the gas injection port 24. Spaced- apart from the gas injection indicator 48 is a radio frequency "on” indicator 50. As the radio frequency "on” indicator passes the sensor, a signal is sent to actuate the radio frequency generator source 22. The radio frequency energy source 22 remains actuated until the sensor senses a radio frequency "off" indicator 52.
- the sensor will preferably be connected to a microprocessor or other controller for sending signals to actuate the generator source 22 and the gas injection valve 34 so that gas can be injected and radio frequency energy can be applied at the appropriate times.
- the chopper valve 44 acts as an event timer which controls a sterilization cycle capable of producing a series of uniformly distributed plasma treatments within the reaction chamber 14, regardless of its geometry.
- the orifice 46 comes into alignment with the exhaust port 42 thereby creating a vacuum within the chamber 14.
- the vacuum is stopped and a static condition is allowed to develop within the chamber 14.
- the sensor senses the gas injector indicator 48 which sends a signal to open the valve 34 and to inject gas into the reaction chamber 14 through the gas injection port 24.
- the gas uniformly distributes itself throughout the reaction chamber 14.
- the sensor senses the radio frequency "on” indicator and a signal is sent to the radio frequency generator source 22 to apply radio frequency energy to the gas and to produce a uniformly distributed gas plasma which reacts with the microorganisms on the articles.
- the sensor senses the radio frequency "off” indicator 52 and sends a signal to cease application of the radio frequency energy.
- the orifice 46 then comes back into alignment with the exhaust port 42 to exhaust the spent gases and to again create a vacuum within the chamber 14. The cycle is then repeated as often as necessary until the sterilization procedure is complete.
- the repetition rate of the cycle is a function of the rotational speed of the chopper valve 44, and the duration of any given event in the cycle is a function of the placement of the indicators 48-52 on the chopper valve 44.
- the cycle will be repeatable up to about 100 cycles per minute.
- the controller for controlling the sterilization cycle of the apparatus 6 has been described in connection with the chopper valve 44, any controller capable of separately actuating the events in the cycle can be employed.
- a personal computer could be configured to sequentially actuate the pump 44, the injection valve 34, and the generator source 22.
- the invention further provides a method and apparatus for sterilizing articles that are prepackaged in a container.
- articles When articles are manufactured, it is desirable to deliver them to the end user in a sterile protective package. This may require sterilizing the articles and then packaging them in a sterile environment.
- This invention eliminates such a procedure by sterilizing the articles while within their packaging materials.
- the invention employs a packaging container for prepackaging the articles.
- the container is constructed of a material transparent to electromagnetic radiation frequency energy, such as plastic.
- the articles are placed in the container, and before the container is sealed the container is pumped to a vacuum of about 1 mTorr to 100 mTorr.
- the container is then back-filled with water vapor to a pressure of about 100 mTorr to 100 Torr.
- a carrier gas is employed.
- the carrier gas is preferably air, but other gases can be employed such as argon, hydrogen, nitrogen, oxygen, helium, nitrogen tri-fluoride, nitrous oxide or mixtures thereof.
- the prepackaged articles are then sterilized by placing the container in close proximity to an electromagnetic radiation source.
- the energy source is activated for a predetermined time to form a highly energetic water vapor.
- the electromagnetic radiation energy is then ceased for a predetermined time so that a static condition can develop within the container. This allows the pressure to become equalized and the concentration of the gases to become uniform throughout the volume of the container.
- the electromagnetic radiation energy is then reactivated to produce a uniformly distributed plasma.
- the energy source remains on for a predetermined time and the cycle may be repeated as many times as needed to complete the sterilization process. During the process the reactive radicals in the plasma vaporize and combine with the by-products of spores or other microorganisms on the articles.
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- Veterinary Medicine (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
Abstract
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP95944755A EP0800406A4 (en) | 1994-12-29 | 1995-12-28 | Device and methods for plasma sterilization |
JP8521703A JPH11501530A (en) | 1994-12-29 | 1995-12-28 | Apparatus and method for plasma sterilization |
AU49625/96A AU4962596A (en) | 1994-12-29 | 1995-12-28 | Device and methods for plasma sterilization |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/365,666 | 1994-12-29 | ||
US08/365,666 US5633424A (en) | 1994-12-29 | 1994-12-29 | Device and methods for plasma sterilization |
Publications (3)
Publication Number | Publication Date |
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WO1996021473A2 true WO1996021473A2 (en) | 1996-07-18 |
WO1996021473A9 WO1996021473A9 (en) | 1996-10-10 |
WO1996021473A3 WO1996021473A3 (en) | 1997-01-16 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/US1995/017071 WO1996021473A2 (en) | 1994-12-29 | 1995-12-28 | Device and methods for plasma sterilization |
Country Status (6)
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US (3) | US5633424A (en) |
EP (1) | EP0800406A4 (en) |
JP (1) | JPH11501530A (en) |
AU (1) | AU4962596A (en) |
CA (1) | CA2208638A1 (en) |
WO (1) | WO1996021473A2 (en) |
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US6159422A (en) * | 1994-12-29 | 2000-12-12 | Graves' Trust Group | Methods and apparatus for the treatment of hazardous biological waste materials |
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KR101148276B1 (en) * | 1997-04-21 | 2012-05-24 | 브룩스 오토메이션 인코퍼레이티드 | Metered Gas Control in a Substrate Processing Apparatus |
WO2003090796A1 (en) * | 2002-04-23 | 2003-11-06 | Human Meditek Co., Ltd. | Plasma sterilizer apparatus |
WO2003105913A1 (en) * | 2002-06-17 | 2003-12-24 | Human Meditek Co., Ltd. | Plasma sterilizer having dehumidifier |
WO2004041316A1 (en) * | 2002-11-08 | 2004-05-21 | Human Meditek Co., Ltd. | Plasma treatment module-equipped sterilization apparatus and sterilization method |
WO2011138463A1 (en) * | 2010-05-07 | 2011-11-10 | Inp Greifswald - Leibniz-Institut Für Plasmaforschung Und Technologie E. V. | Plasma-generated gas sterilization method |
US9623132B2 (en) | 2010-05-07 | 2017-04-18 | Leibniz-Institut Fuer Plasmaforschung Und Technologie E.V., Inp Greifswald | Plasma-generated gas sterilization method |
US10039849B2 (en) | 2010-05-07 | 2018-08-07 | Leibniz-Institut fuer Plasmaforschung und Technologie e. V., INP Greifswald | Plasma-generated gas sterilization method and device |
Also Published As
Publication number | Publication date |
---|---|
US5920799A (en) | 1999-07-06 |
JPH11501530A (en) | 1999-02-09 |
AU4962596A (en) | 1996-07-31 |
US20010024887A1 (en) | 2001-09-27 |
CA2208638A1 (en) | 1996-07-18 |
US5633424A (en) | 1997-05-27 |
EP0800406A2 (en) | 1997-10-15 |
WO1996021473A3 (en) | 1997-01-16 |
EP0800406A4 (en) | 2000-07-12 |
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