WO1989004880A1 - High temperature thermoplastic substrate having a vacuum deposited solderable electrical circuit pattern and method of manufacture - Google Patents

High temperature thermoplastic substrate having a vacuum deposited solderable electrical circuit pattern and method of manufacture Download PDF

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Publication number
WO1989004880A1
WO1989004880A1 PCT/US1988/003920 US8803920W WO8904880A1 WO 1989004880 A1 WO1989004880 A1 WO 1989004880A1 US 8803920 W US8803920 W US 8803920W WO 8904880 A1 WO8904880 A1 WO 8904880A1
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WO
WIPO (PCT)
Prior art keywords
substrate
solderable
base layer
high temperature
chromium
Prior art date
Application number
PCT/US1988/003920
Other languages
French (fr)
Inventor
Dale W. Dorinski
Glenn F. Urbish
Anthony B. Suppelsa
Original Assignee
Motorola, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola, Inc. filed Critical Motorola, Inc.
Publication of WO1989004880A1 publication Critical patent/WO1989004880A1/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/14Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
    • H05K3/146By vapour deposition
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0129Thermoplastic polymer, e.g. auto-adhesive layer; Shaping of thermoplastic polymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09009Substrate related
    • H05K2201/09118Moulded substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/09Treatments involving charged particles
    • H05K2203/095Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer

Definitions

  • This invention pertains to printed circuits, and more particularly to a manufacturing process for producing printed circuits on high temperature thermoplastic substrates by vacuum deposition.
  • thermoplastic materials that can be molded or otherwise formed into shapes of printed circuit substrates.
  • the material must be able to withstand the temperatures that result from soldering.
  • the substrate When ordinary tin/lead solders are used, the substrate must be able to withstand temperatures in the region of 200°-230°C. If low temperature solders are used, however, the substrate needs to withstand slightly lower temperatures in the region of 170°- 200°C.
  • the term "high temperature thermoplastic” will be used throughout the specification to indicate thermoplastic materials that have a heat deflection temperature of 170°C or greater, as determined by the American Society of Testing and Materials (ASTM) standard test No. D648.
  • Such materials include polyetherimide (PEI) , polysulfone, polyethersulfone, polyamideimide, polyarylsulfone, polyarylate, polyetheretherketone, polybutyleneterephthalate, and blended combinations thereof.
  • thermoplastic materials have been used as printed circuit substrates.
  • a conductive foil is adhesively bonded to the substrate and an electrical circuit is formed from the foil by selective chemical etching.
  • the electrical circuit pattern is selectively plated on the surface of the substrate by an electroless plating process.
  • the surface of the substrate must be substantially flat and connections from one side of the substrate to the other via "through-holes" cannot be formed with this technique.
  • the primary disadvantage is time, which is typically on the order of several hours to plate-up an electrical circuit pattern of useable thickness.
  • Vacuum deposition of conductive materials has been previously used to form electrical circuit patterns on certain substrate materials, in particular, ceramic materials. Vacuum deposition has also been used to deposit certain materials over high temperature thermoplastics, for example, dichroic materials have been vacuum deposited over PEI to form reflectors for surgical lamps. Since vacuum deposition lacks the aforementioned disadvantages of the foil bonding and plating processes, it appears to be ideal for affixing solderable electrical circuit patterns to the surface of high temperature thermoplastic substrates. Unfortunately, when solderable materials are vacuum deposited onto unprepared high temperature thermoplastic substrates, the bond strength between the substrate and the solderable layer is so low that the vacuum deposited material simply peels away from the surface of the substrate when the substrate is exposed to soldering temperatures.
  • the invention is a process for vacuum depositing a solderable electrical conductor onto the surface of a high temperature thermoplastic substrate.
  • the surface of a high temperature thermoplastic substrate is first prepared by creating a reactive surface suitable for bonding a solderable electrical conductor to the substrate. Then, a solderable electrical conductor is vacuum deposited onto the reactive surface of the substrate.
  • Figs. 1A-1C are edge views of an electrical circuit being manufactured by the present process which illustrate the structure that results at various stages of the manufacturing process; more specifically: Fig. 1A illustrates a thermoplastic substrate wherein a solderable electrical conductor has been vacuum deposited onto a reactive surface of the substrate. Fig. IB illustrates the substrate after a photoresist layer has been applied over the solderable electrical conductor, and windows have been opened up in the photoresist layer into which additional conductive layers are plated. Fig. 1C illustrates the substrate after the photoresist layers have been removed, such that only a solderable electrical circuit pattern remains affixed to the reactive surface of the substrate.
  • the surface of the substrate must be properly prepared.
  • a wet and a dry process In both the wet and dry processes, the substrate is first cleaned in a detergent solution such as AlkanoxTM. In the wet process, the substrate is placed in boiling peroxide for approximately 15 minutes. Although hydrogen peroxide is preferred, other peroxides may also be suitable such as peroxides of sodium, potassium, calcium, magnesium, berylium, barium, lithium or strontium. The substrate is then removed from the peroxide, rinsed in dionized water and dried at 150°C for approximately 1 hour.
  • the substrate is rinsed in dionized water, dried at 130°C for approximately 4 hours and then sputter etched in an argon or argon/oxygen atmosphere for l minute at 500 Watts. Following either process, the substrate may be plasma cleaned, preferably in an oxygen environment for 10 minutes at 500 Watts.
  • a reactive surface (102A) suitable for bonding a solderable electrical conductor to the substrate.
  • solderable electrical conductor 104 is vacuum deposited onto the reactive surface 102A of the substrate 102, as illustrated in Fig. 1A.
  • Solderable electrical conductor 104 includes two layers, a base layer 106 and a solderable layer 108.
  • Base layer 106 which is sometimes referred to as a "glue" layer, is vacuum deposited onto the reactive surface 102A of substrate 102 to a thickness of 700-1000 Angstroms.
  • Base layer 106 is preferably an 80/20 nickel-chrome alloy, although nickel or chromium are also suitable. Vacuum deposition can be accomplished by sputtering or evaporation, though sputtering is preferred.
  • solderable layer 108 is vacuum deposited over base layer 106 to a thickness of approximately 4000 Angstroms.
  • Solderable layer 108 is preferably copper, although other solderable metals may also be suitable.
  • thermoplastic substrate having a modified surface onto which a solderable electrical conductor is vacuum deposited. Irrespective of the soldering technique, vapor phase reflow, infra-red, hot gas, conduction or otherwise, this electrical conductor can withstand repeated exposure to soldering temperatures without peeling away from the substrate.
  • the present process is not only suitable for depositing a conductor on flat surfaces, but can also be used with substrates having irregular or non-planar surfaces. This process can also be used to form conductors on both sides of a substrate, and conductive through-holes can easily be made by starting with a blank substrate with holes.
  • a photoresist layer 110 is first applied over conductive layer 104, as illustrated in Figure IB. By pattern exposing and developing the resist, a window 110A is opened up at a location where a conductive runner is desired. Next, copper or other solderable metal is electroplated over vacuum deposited copper layer 104 in window 110A. Plated copper layer 112 is typically plated to a thickness of 2.5 to 50 microns. A thin layer of gold 114 or other noble metal is then electroplated over plated copper layer 112.
  • the remaining photoresist is stripped away using a conventional photoresist stripper and the vacuum deposited copper layer 108, except the areas that underlie electroplated copper layer 112, is etched away using a solution of dilute nitric acid.
  • base layer 106 except the areas that underlie electroplated copper layer 112, are etched away using dilute hydrochloric acid.
  • the resulting electrical circuit is then rinsed and dried.
  • An electrical circuit manufactured by this technique is easily distinguished from a similar circuit manufactured by the foil bonding or plating processes. Even to the naked eye, one skilled in the art can easily determine the process that was used to apply the conductors. In particular, the plating process produces a rough textured surface while vacuum deposition produces a smoother surface.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

To manufacture an electrical circuit pattern on the surface (102A) of a high temperature thermoplastic (such as polyetherimide) substrate (102), the substrate is prepared by creating a reactive surface suitable for bonding an electrical conductor (104) to the surface of the substrate. There are two methods of surface preparation. In the wet method, the substrate is boiled in hydrogen peroxide, while in the dry method, the substrate is sputter etched in an argon or argon-oxygen atmosphere. A base layer (106) of nickel, chromium or nickel-chromium is then vacuum deposited over the reactive surface of the substrate. Next, a solderable layer (108) of copper is vacuum deposited over the base layer. An electrical circuit pattern is then formed from the base and solderable layers using photolithographic techniques.

Description

HIGH TEMPERATURE THERMOPLASTIC
SUBSTRATE HAVING A VACUUM
DEPOSITED SOLDERABLE ELECTRICAL
CIRCUIT PATTERN AND METHOD OF MANUFACTURE
BACKGROUND Of the INVENTION
This invention pertains to printed circuits, and more particularly to a manufacturing process for producing printed circuits on high temperature thermoplastic substrates by vacuum deposition.
There are a number of thermoplastic materials that can be molded or otherwise formed into shapes of printed circuit substrates. To be a suitable material for a printed circuit substrate, however, the material must be able to withstand the temperatures that result from soldering. When ordinary tin/lead solders are used, the substrate must be able to withstand temperatures in the region of 200°-230°C. If low temperature solders are used, however, the substrate needs to withstand slightly lower temperatures in the region of 170°- 200°C. Accordingly, the term "high temperature thermoplastic" will be used throughout the specification to indicate thermoplastic materials that have a heat deflection temperature of 170°C or greater, as determined by the American Society of Testing and Materials (ASTM) standard test No. D648. Such materials include polyetherimide (PEI) , polysulfone, polyethersulfone, polyamideimide, polyarylsulfone, polyarylate, polyetheretherketone, polybutyleneterephthalate, and blended combinations thereof.
In the past, some of these high temperature thermoplastic materials have been used as printed circuit substrates. There are two basic methods that have been used to affix an electrical circuit pattern to the surface of such a substrate. In the foil bonding method, a conductive foil is adhesively bonded to the substrate and an electrical circuit is formed from the foil by selective chemical etching. In the plating method, the electrical circuit pattern is selectively plated on the surface of the substrate by an electroless plating process. Unfortunately, there are disadvantages to both methods. In the foil bonding method, the surface of the substrate must be substantially flat and connections from one side of the substrate to the other via "through-holes" cannot be formed with this technique. Thus, if conductive through-holes are required on a foil bonded substrate, an additional plating process must also be included. In the electroless plating method, the primary disadvantage is time, which is typically on the order of several hours to plate-up an electrical circuit pattern of useable thickness.
Vacuum deposition of conductive materials has been previously used to form electrical circuit patterns on certain substrate materials, in particular, ceramic materials. Vacuum deposition has also been used to deposit certain materials over high temperature thermoplastics, for example, dichroic materials have been vacuum deposited over PEI to form reflectors for surgical lamps. Since vacuum deposition lacks the aforementioned disadvantages of the foil bonding and plating processes, it appears to be ideal for affixing solderable electrical circuit patterns to the surface of high temperature thermoplastic substrates. Unfortunately, when solderable materials are vacuum deposited onto unprepared high temperature thermoplastic substrates, the bond strength between the substrate and the solderable layer is so low that the vacuum deposited material simply peels away from the surface of the substrate when the substrate is exposed to soldering temperatures.
SUMMARY of the INVENTION Briefly, the invention is a process for vacuum depositing a solderable electrical conductor onto the surface of a high temperature thermoplastic substrate. In the process, the surface of a high temperature thermoplastic substrate is first prepared by creating a reactive surface suitable for bonding a solderable electrical conductor to the substrate. Then, a solderable electrical conductor is vacuum deposited onto the reactive surface of the substrate. BRIEF DESCRIPTION of the DRAWINGS
Figs. 1A-1C are edge views of an electrical circuit being manufactured by the present process which illustrate the structure that results at various stages of the manufacturing process; more specifically: Fig. 1A illustrates a thermoplastic substrate wherein a solderable electrical conductor has been vacuum deposited onto a reactive surface of the substrate. Fig. IB illustrates the substrate after a photoresist layer has been applied over the solderable electrical conductor, and windows have been opened up in the photoresist layer into which additional conductive layers are plated. Fig. 1C illustrates the substrate after the photoresist layers have been removed, such that only a solderable electrical circuit pattern remains affixed to the reactive surface of the substrate.
DESCRIPTION of the PREFERRED EMBODIMENT
Surface Preparation
To vacuum deposit a solderable conductor onto the surface of a high temperature thermoplastic substrate, the surface of the substrate must be properly prepared. There are two methods of surface preparation: a wet and a dry process. In both the wet and dry processes, the substrate is first cleaned in a detergent solution such as Alkanox™. In the wet process, the substrate is placed in boiling peroxide for approximately 15 minutes. Although hydrogen peroxide is preferred, other peroxides may also be suitable such as peroxides of sodium, potassium, calcium, magnesium, berylium, barium, lithium or strontium. The substrate is then removed from the peroxide, rinsed in dionized water and dried at 150°C for approximately 1 hour. In the dry process, the substrate is rinsed in dionized water, dried at 130°C for approximately 4 hours and then sputter etched in an argon or argon/oxygen atmosphere for l minute at 500 Watts. Following either process, the substrate may be plasma cleaned, preferably in an oxygen environment for 10 minutes at 500 Watts. The result of either the wet or dry process is the creation of a reactive surface (102A) suitable for bonding a solderable electrical conductor to the substrate.
Conductor Deposition
After plasma cleaning, a solderable electrical conductor 104 is vacuum deposited onto the reactive surface 102A of the substrate 102, as illustrated in Fig. 1A. Solderable electrical conductor 104 includes two layers, a base layer 106 and a solderable layer 108. Base layer 106, which is sometimes referred to as a "glue" layer, is vacuum deposited onto the reactive surface 102A of substrate 102 to a thickness of 700-1000 Angstroms. Base layer 106 is preferably an 80/20 nickel-chrome alloy, although nickel or chromium are also suitable. Vacuum deposition can be accomplished by sputtering or evaporation, though sputtering is preferred. Next, solderable layer 108 is vacuum deposited over base layer 106 to a thickness of approximately 4000 Angstroms. Solderable layer 108 is preferably copper, although other solderable metals may also be suitable.
This process results in a high temperature thermoplastic substrate having a modified surface onto which a solderable electrical conductor is vacuum deposited. Irrespective of the soldering technique, vapor phase reflow, infra-red, hot gas, conduction or otherwise, this electrical conductor can withstand repeated exposure to soldering temperatures without peeling away from the substrate. The present process is not only suitable for depositing a conductor on flat surfaces, but can also be used with substrates having irregular or non-planar surfaces. This process can also be used to form conductors on both sides of a substrate, and conductive through-holes can easily be made by starting with a blank substrate with holes.
Circuit Formation
The preferred process for forming an electrical circuit pattern from this vacuum deposited conductor is described below, although other photolithographic techniques may also be used. To form an electrical circuit pattern from solderable conductive layer 104, a photoresist layer 110 is first applied over conductive layer 104, as illustrated in Figure IB. By pattern exposing and developing the resist, a window 110A is opened up at a location where a conductive runner is desired. Next, copper or other solderable metal is electroplated over vacuum deposited copper layer 104 in window 110A. Plated copper layer 112 is typically plated to a thickness of 2.5 to 50 microns. A thin layer of gold 114 or other noble metal is then electroplated over plated copper layer 112.
Next, the remaining photoresist is stripped away using a conventional photoresist stripper and the vacuum deposited copper layer 108, except the areas that underlie electroplated copper layer 112, is etched away using a solution of dilute nitric acid. Finally, base layer 106, except the areas that underlie electroplated copper layer 112, are etched away using dilute hydrochloric acid. The resulting electrical circuit is then rinsed and dried. An electrical circuit manufactured by this technique is easily distinguished from a similar circuit manufactured by the foil bonding or plating processes. Even to the naked eye, one skilled in the art can easily determine the process that was used to apply the conductors. In particular, the plating process produces a rough textured surface while vacuum deposition produces a smoother surface. Obviously, an analysis of the cross-sections of two circuits, one manufactured by the present process and the other by one of the prior art techniques, would easily reveal the process used to manufacture the circuit since the present process includes a conductive base layer (106) and the other processes do not. Presumptively, an analysis of the surfaces of substrates manufactured by these different processes would also reveal a difference in their chemistries.

Claims

CLAIMSWe claim as our invention:
1. A process for vacuum depositing a solderable electrical conductor onto the surface of a high temperature thermoplastic substrate, comprising the steps of: preparing the surface of a high temperature thermoplastic substrate by creating a reactive surface suitable for bonding a solderable electrical conductor to said substrate; and vacuum depositing a solderable electrical conductor onto said reactive surface of said substrate.
2. The process of claim 1, wherein the step of preparing the surface of a high temperature thermo¬ plastic substrate includes placing said substrate in a solution of peroxide.
3. The process of claim 2, wherein said solution of peroxide is hydrogen peroxide.
4. The process of claim 2, wherein the step of vacuum depositing a solderable electrical conductor includes the steps of: vacuum depositing a base layer onto said reactive surface of said substrate; and vacuum depositing a solderable layer over said base layer.
5. The process of claim 4, wherein said base layer comprises nickel, chromium or nickel-chromium.
6. The process of claim 4, wherein said high temperature thermoplastic substrate comprises polyetherimide, polysulfone, polyethersulfone, polyamideimide, polyarylsulfone, polyarylate, polyetheretherketone, , or blends thereof.
7. The process of claim 1, wherein the step of preparing the surface of a high temperature thermo¬ plastic substrate includes sputter etching said surface of said substrate.
8. The process of claim 8, wherein said substrate is sputter etched in an argon or argon- oxygen atmosphere.
9. The process of claim 7, wherein the step of vacuum depositing a solderable electrical conductor includes the steps of: vacuum depositing a base layer onto said reactive surface of said substrate; and vacuum depositing a solderable layer over said base layer.
10. The process of claim 9, wherein said base layer comprises nickel, chromium or nickel-chromium.
11. The process of claim 9, wherein said high temperature thermoplastic substrate comprises polyetherimide, polysulfone, polyethersulfone, polyamideimide, polyarylsulfone, polyarylate, polyetheretherketone, polybutyleneterephthalate, or blends thereof.
12. The process of claim 1, wherein the step of vacuum depositing a solderable electrical conductor includes the steps of: vacuum depositing a base layer onto said reactive surface of said substrate; and vacuum depositing a solderable layer over said base layer.
13. The process of claim 12, wherein said base layer comprises nickel, chromium or nickel-chromium.
14. The process of claim 12, wherein said high temperature thermoplastic substrate comprises polyetherimide, polysulfone, polyethersulfone, polyamideimide, polyarylsulfone, polyarylate, polyetheretherketone, polybutyleneterephthalate, or blends thereof.
15. An electrical circuit, comprising in combination: a high temperature thermoplastic substrate having a reactive surface suitable for bonding a solderable conductor to said substrate; and a solderable electrical conductor vacuum deposited on said surface of said substrate.
16. The electrical circuit of claim 15 wherein said electrical conductor includes a base layer vacuum deposited on said reactive surface of said substrate and a solderable layer vacuum deposited over said base layer.
17. The electrical circuit of claim 16, wherein said base layer includes nickel, chromium or nickel- chromium.
PCT/US1988/003920 1987-11-16 1988-11-07 High temperature thermoplastic substrate having a vacuum deposited solderable electrical circuit pattern and method of manufacture WO1989004880A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12132587A 1987-11-16 1987-11-16
US121,325 1987-11-16

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0475145A1 (en) * 1990-09-13 1992-03-18 Sheldahl, Inc. Metal-film laminate resistant to delamination
US5137791A (en) * 1990-09-13 1992-08-11 Sheldahl Inc. Metal-film laminate resistant to delamination
DE4211956C1 (en) * 1992-04-09 1993-05-06 Multi-Arc Oberflaechentechnik Gmbh, 5060 Bergisch Gladbach, De
EP0647089A1 (en) * 1993-09-30 1995-04-05 Siemens Aktiengesellschaft Process for the manufacture of three dimensional plastic parts having integrated conductive tracks
EP0969703A2 (en) * 1998-06-30 2000-01-05 Deutsche Thomson-Brandt Gmbh Method for the production of an electrotechnical device
US6060175A (en) * 1990-09-13 2000-05-09 Sheldahl, Inc. Metal-film laminate resistant to delamination
EP1550176B1 (en) * 2002-10-08 2008-11-05 Leopold Kostal GmbH & Co. KG Electronic circuitry provided with an integrated antenna
CN114552198A (en) * 2022-04-25 2022-05-27 中国电子科技集团公司第二十九研究所 Precise preparation method of light high-performance circuit

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US4086128A (en) * 1976-03-04 1978-04-25 Mitsubishi Gas Chemical Company, Inc. Process for roughening surface of epoxy resin
US4269137A (en) * 1979-03-19 1981-05-26 Xerox Corporation Pretreatment of substrates prior to thin film deposition
US4604168A (en) * 1984-12-20 1986-08-05 General Motors Corporation Pretreatment for electroplating mineral-filled nylon

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Publication number Priority date Publication date Assignee Title
US4064030A (en) * 1975-04-14 1977-12-20 Nitto Electric Industrial Co., Ltd. Process for surface treating molded articles of fluorine resins
US4086128A (en) * 1976-03-04 1978-04-25 Mitsubishi Gas Chemical Company, Inc. Process for roughening surface of epoxy resin
US4269137A (en) * 1979-03-19 1981-05-26 Xerox Corporation Pretreatment of substrates prior to thin film deposition
US4604168A (en) * 1984-12-20 1986-08-05 General Motors Corporation Pretreatment for electroplating mineral-filled nylon

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6060175A (en) * 1990-09-13 2000-05-09 Sheldahl, Inc. Metal-film laminate resistant to delamination
US5480730A (en) * 1990-09-13 1996-01-02 Sheldahl, Inc. Metal-film laminate resistant to delamination
US5137791A (en) * 1990-09-13 1992-08-11 Sheldahl Inc. Metal-film laminate resistant to delamination
EP0475145A1 (en) * 1990-09-13 1992-03-18 Sheldahl, Inc. Metal-film laminate resistant to delamination
US5364707A (en) * 1990-09-13 1994-11-15 Sheldahl, Inc. Metal-film laminate resistant to delamination
US5112462A (en) * 1990-09-13 1992-05-12 Sheldahl Inc. Method of making metal-film laminate resistant to delamination
DE4211956C1 (en) * 1992-04-09 1993-05-06 Multi-Arc Oberflaechentechnik Gmbh, 5060 Bergisch Gladbach, De
EP0647089A1 (en) * 1993-09-30 1995-04-05 Siemens Aktiengesellschaft Process for the manufacture of three dimensional plastic parts having integrated conductive tracks
EP0969703A2 (en) * 1998-06-30 2000-01-05 Deutsche Thomson-Brandt Gmbh Method for the production of an electrotechnical device
US6668450B1 (en) 1998-06-30 2003-12-30 Thomson Licensing S.A. Method for the production of an electrotechnical device
EP0969703A3 (en) * 1998-06-30 2000-03-08 Deutsche Thomson-Brandt Gmbh Method for the production of an electrotechnical device
EP1550176B1 (en) * 2002-10-08 2008-11-05 Leopold Kostal GmbH & Co. KG Electronic circuitry provided with an integrated antenna
CN114552198A (en) * 2022-04-25 2022-05-27 中国电子科技集团公司第二十九研究所 Precise preparation method of light high-performance circuit
CN114552198B (en) * 2022-04-25 2022-07-08 中国电子科技集团公司第二十九研究所 Precise preparation method of light high-performance circuit

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