US3825839A - Constant current field emission electron gun - Google Patents

Constant current field emission electron gun Download PDF

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US3825839A
US3825839A US00245328A US24532872A US3825839A US 3825839 A US3825839 A US 3825839A US 00245328 A US00245328 A US 00245328A US 24532872 A US24532872 A US 24532872A US 3825839 A US3825839 A US 3825839A
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emitter
anode
electron beam
voltage source
output signal
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T Goto
T Someya
N Kobayshi
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Jeol Ltd
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Jeol Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/06—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages the fastening being onto or by the lampholder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
    • H02H7/20—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electronic equipment

Definitions

  • a i ro ed field emission type electron gun is auto- 1 matically controlled so as to. generate a stable emis- 1 si'on current;
  • the preferred embodiment employs a v 315/307, 31 5/ 2 /1 detecting means for detecting the emission current j 'Z/ H021! /0 fluctuation. and a control means for controlling the [58 ⁇ Field of Search 315/106, 107, 175, 176, 1 electric field for field emission according tothe output 3 5/307, signal of said detecting means.
  • 111111 GENERATOR 1 COMPARISON TIMING MEANS 111611 VOLTAGE PMENTEuJummH CURRENT INTENSITY SHEET 1 OF '6 TIME CURRENT ⁇ NTENS ⁇ TY TlME 3 7 I J EMISSWN CURRENT I DETECTOR 9 STANDARD HEATING- 5 Sl TNAL.
  • VOLTAGE 6 SOURCE.
  • this type of gun ensures better image contrast than in the case of the thermionic emission type electron gun, as a result of improved coherency of electron beams.
  • the field' emission type electron gun possesses certain defects foremost of which is the fact that the current density of the electron beam gradually becomes unstable as a'result of contamination on the emitters'urface and also deformation of the emitter tip.
  • Various ways have been devised to counteract this instability.
  • a popular method although somewhat impractical due to high manufacturing costs and maintenance, is to maintain the gun chamber at a super-high vacuum, for example, on the order of-10' to 10* Torr. By so doing, the local work functions of the emitter remains stable since the emitter surface contamination is prevented.
  • FIGS. 12(a), 12(b) and 12(c) are schematic views of the various emitter tips.
  • FIGS. 1(a) and 1(b) are graphs showing the relationship between the electron beam current and elapsed time in a conventional field emission type gun.
  • the graded increaseof the electron beam current shown in FIG. 1(a) is due to crystal buildup but by weakening the electric field at the emitter tip at 1 the current intensity maybe reduced to its initial value. After remaining at this value for some time, the current intensity gradually decreases as shown in FIG. 1(5) and may be restored once more to its original value by intensifying the electricfield. Thus, by controlling the electric field, the current intensity of the electron beam can be kept stable.
  • FIG. 2 shows one embodiment of this invention.
  • Emitter 1 made of tungsten or the like, is heated to a suitable temperature, for example 1,600 C, by applying current from a heating current source 2.
  • the first anode3 is maintained at a potential positive to that of the emitter by' means of a variable DC voltage source 4.
  • A'second anode 5 is connected to the positive output terminal of a high voltage accelerating source 6, said terminal being maintained at ground potential.
  • the negative output terminal of the source 6 is connected to the emitter 1 via an emission current detector 7 which detects all the electrons emitted from saidemitter and converts them into an electrical signal.
  • the output signal from the emission current detector 7 is then above; causes the emitter tip to become soft which results in a gradual buildup of crystal planes on the surface of the emitter. This crystallineformation or buildup, if allowed to progress, would cause the electric field intensity at theemitter tip to increase locally and irregularly resulting in excess emissionand eventual damage to the emitter tip.
  • the field emission gun according to this invention is characterized by the provision of a device or circuit for detecting the electron beam current fluctuation and a device or circuit for controllingthe electric field in ac cordance with the output (feedback) signal of the detectiiig circuit.
  • an advantage of this invention is to control this so called buildup of crystals on theemitter surface.
  • a second advantage of this invention is to prevent the electron beam current from becoming unstable and to reform the emitter tip after deformationdue to crystal buildup.
  • FIGS. 1(a) and 1(b) are graphs showing the relationship betwee'nthe emission current and'elapsed time in a field emission type electron gun
  • FIGS. 2 to II and 13 are block diagrams of. the field emission type electron guns according to this invention.
  • a comparison circuit 8 where it is compared with a reference signal from a standard signal generator 9.
  • the compared signal is applied to the variable DC. voltage source 4, thereby controlling the potential of the first electrode 3 so as to keep the electron current constant.
  • the emitter can be used over a longperiod of time, because the potential of the first electrode 3 decreases so as to prevent an increase of emission current.
  • the emitter tips do not necessarily have to be exactly identical, in view of the fact that the constant electron beam current is obtained at all times, emitter exchange presents no problems.
  • FIG. 3T shows another embodiment of this inventionin which the emission current detector 7 is arranged between the variable D.C. voltage source 4 and the first electrode 3.
  • the control function of this embodiment is exactly the same as that in the embodiment shown in FIG. 2.
  • FIG. 5 shows a fourth embodiment of this invention in which a resistor 11 is connected between the variable D.C. voltage source 4 and the first anode 3' so as 1 to control the electric field automatically.
  • the resistor 11 has two functions, one being to detect the electron beam fluctuation and the other to control the electric field in accordance with said fluctuation.
  • the potential difference between the emitter 1 and the first anode 3 is equal to the sum of the output voltage V of source 4 and the voltage across the resistor 11, the polarity of which is opposite to that of the output voltage V,, (volt).
  • the reason for this is that the voltage across the resistor 11 (R ohm) is determined by the electron current Ie (ampere) flowing into the anode 3.
  • V V Ie-R voltage V V Ie-R is applied between the emitter l and the anode 3.
  • V decreases so as to reduce the electron current by weakening the electric field.
  • Ie decreases, V increases so as to increase the electron current by strengthening the electric field.
  • the stability of the electron beam current is improved. As a result, electron beam fluctuation due to the elapse of time or emitter exchange does not occur.
  • variable resistor is used instead of the fixed resistor 11
  • a simple constant voltage source can be used instead of the variable voltage source 4, because it would then be possible to vary voltage V by varying the variable resistor instead of varying the output of the voltage source 4.
  • FIG. 6 shows a fifth embodiment of this invention in which voltage V is obtained by dividing resistors 12 and 13 instead of voltage source 4. In this case, resistor 11 can be omitted without affecting the circuit functionally.
  • FIG. 7 shows a sixthembodiment of this invention in which a constant voltage element 14, for example, a Zener diode, and a resistor 15 are used instead of resistors 12 and 13.
  • a constant voltage element 14 for example, a Zener diode
  • a resistor 15 are used instead of resistors 12 and 13.
  • FIG. 8 shows a seventh embodiment of this invention in which the voltage V is obtained by a fixed resistor 16 and a variable resistor 17 through which the electron current flows from the first anode 3 to second anode 7.
  • FIG. 9 shows an eighth embodiment of this invention in which the intensity of the electric field between the emitter and the first anode is controlled intermittently by meansof an on-off" switch 18 connected in parallel with the variable voltage source 4.
  • the resultant output of the comparison circuit 8 causes the switch 18 to activate. In other words, it is changed from on" to of or vice versa. By so doing, the electron beam current is kept to within the set value, because crystal buildup on the emitter surface is prevented.
  • FIG. 10 is essentially the same as that shown in FIG. 9 but includes a warning device 19 (e.g., a buzzer) which is brought into operation when the output signal of the comparison circuit 8 reaches a certain intensity. As soon as the buzzer sounds, the switch is operated manually by the operator.
  • a warning device 19 e.g., a buzzer
  • FIG. 11 shows one embodiment capable of achieving this restoration.
  • a comparison circuit 20 f compares the output voltage of the'variablevoltage source 4 and the output voltage of the standard signal generator 21.
  • the comparison circuit is applied to the warning device 22.
  • a switching means 23 controls the potential of the first anode 3.
  • the heating current source 2 is designed to produce an output current capable of heating the emitter up to a sufficiently high temperature (for example about 2,000C).
  • (a) shows the shape of an unused emitter tip and (b) shows the change in the shape of the tip resulting from crystal buildup. If under the condition shown in (b), the electric field at the emitter is sufficiently weakened and the emitter is heated to a sufficientlyhigh temperature, the emitter can be restored to its original shape as shown in (c) by thermal surface tension.
  • the comparison circuit 20 in FIG. 11 is able to monitor the progress of the crystal buildup because as the buildup progresses, the electric field at the emitter tip becomes more intense which causes the output voltage of source 4 to decrease more or less proportionately in order to keep the electron beam current constant. Thus, the decrease in the output voltage of source 4 results in a corresponding decrease in the output of the comparison circuit 20, thereby monitoring the progress of crystal buildup accurately.
  • the comparison circuit 20 activates the warning device 22 which tells the operator to disengage switch 23. After which, the operator manually increases to output current of the current source 2 so as to increase the temperature of the emitter to a predetermined temperature thereby restoring the emitter tip to its original shape.
  • FIG. 13 shows an embodiment capable of automatically restoring the emitter tip to its original shape.
  • a timing circuit 24 which is activated by the output signal of comparison circuit 20.
  • the timing circuit 24 In the activated state the timing circuit 24 generates a signal, having a constant time interval, which in turn activates a control means 25 for controlling the switch 23 which remains disengaged during the time the signal is being generated.
  • said time signal activates the heating current source 2 so as to raise the temperature of the emitter to a point where it is restored to its original shape.
  • this invention is not limited to the above mentioned embodiments.
  • this invention can be applied to the so called cold emission type field emission gun which corresponds to the embodiments where the heating means 2 is omitted in FIGS. 2 to 10, in order to prevent the emission current fluctuation due to the contamination on the emitter surface.
  • a field emission type electron gun comprising:
  • said emitter a first voltage-source for generating a potential differi ff .e nce.' between; said first anode and'said emitter,
  • a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of electron beam fluctuation
  • a comparing means for comparing the output signal of said first detecting means with a reference signal and providing an output signal indicative of the comparison
  • control means for controlling the output voltage of said first voltage source in response to the output signal of said comparing means
  • a second detecting means for detecting the change in output voltage of said first voltage source providing an output signal indicative of the progress of crystal buildup on the emitter surface.
  • a field emission type electron gun according to claim 1 in which said second detecting meanscomprises a second comparison circuit for comparing the output voltage of said first voltage source and a reference signal voltage.
  • a first voltage source for generating a potential differ-- ence between said first anode and said emitter
  • a second high voltagesource forsupplying negative high potential to said emitter for accelerating said electron beam
  • a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of the electron beam fluctuation
  • a comparing means for comparing the output signal of said first detecting means with a reference signal and providing an output signal indicative of the comparison
  • control means for controlling the output voltageof said first voltage source in response to the output signal of said comparing means
  • a second detecting means for detecting the change in output voltage of said first voltage source
  • warning means for indicating the state of crystal buildup on the emitter surface, said warning means responsive to the ou-t'put signal of saidsecond detecting means.
  • a second high voltage source for supplying negative high potential to said emitter for accelerating said electron beam
  • a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of the electron beam fluctuation
  • a first comparing means for comparing the output signal of said first detecting means with a reference signal and providing a signal indicative of the comparison, V p
  • a first control means for controlling the output volt-' age of said first voltage source in response to the output signal of said first comparing means
  • a second detecting means for detecting the change in output voltage of said first voltage source and providing an output signal indicative thereof
  • a second control means for controlling said heating means in response to the output signal of said second detecting means to restore the emitter tip after deformation due to crystal buildup.
  • a field emission type electron gun according to claim 4 in which said second control means comprises a timing"circuit-for controlling the time during which the emitter is heated so as to restore the emitter tip after deformation due to crystal buildup.
  • a first voltage source for generating a potential difference between said first anode and said emitter
  • a second high ,voltage source for supplying negative high potential to said emitter for accelerating said electron beam
  • a first detecting means for detecting the electron
  • a comparing means for comparing the output signalof saidfirst detecting means with a reference signal and providing anoutput signal indicative of the comparison
  • a second detecting means for detecting the change in output voltage of said first voltage source and pro- 7 viding an output signal indicative thereof
  • a switching means arranged between said emitter and said first anode, said switching means controlled in response to the output signal of said second detecting means.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)

Abstract

An improved field emission type electron gun is automatically controlled so as to generate a stable emission current. The preferred embodiment employs a detecting means for detecting the emission current fluctuation and a control means for controlling the electric field for field emission according to the output signal of said detecting means.

Description

States Patent 11 1 1111 3,825,839 Someya et al. i July 23, 1974 CONSTANT CURRENT FIELD EMISSION 3,413,517 11/1968 Barber et a1 1. 315/106 L ON GU v3,689,798 I 9/1972 Brukovsley et a1. 315/106 ['75] Inventors: Teruo Someya} Nobuyuki Kobayshi; I s O H PUBLICATIONS I Toshinol'i G010, of Tokyo, p n Crewe, .HighResolution S.E.M., Scientific Ameri- 73 Assignee: Nihon Denshi Kabushiki'Kaisha, 1971 2645 Tokyo, Japan v I Primary Examiner-Rudolph V. Rolmec 1 FfledI P -1 1972 Assistant Examiner'--Wi1liam D. Larkins [211 App} N05 5 2 Attorney, Agent, or Firm'Webb, Burden, Robinson &
v Webb [30] Foreign Afiplicafiofil riority Feta g Apr. 30, 1971 dupe 11...", 46-28753 ABSTRACT July 12, 1971 Japan ..'..46-5 16' 16 A i ro ed field emission type electron gun is auto- 1 matically controlled so as to. generate a stable emis- 1 si'on current; The preferred embodiment employs a v 315/307, 31 5/ 2 /1 detecting means for detecting the emission current j 'Z/ H021! /0 fluctuation. and a control means for controlling the [58} Field of Search 315/106, 107, 175, 176, 1 electric field for field emission according tothe output 3 5/307, signal of said detecting means.
[56] References Cited I 1 1 1 1 I 6 I 141) F1 UNITED STATES PATENTS C aims rawmg gum 2,384,087 9/1945 GOOdI'iC1I 328/9 X 3,377,506 4/1968 Banas et a1". 315/106 X 7 E 0 111211 m/ .DETECTOR s 111111 111121 5 GENERATOR SOURCE L f COMPARISON 23 25 cuaourr CONTROL VARIABLE MEANS VOLTAGE 50111201:
111111 GENERATOR 1, g] COMPARISON TIMING MEANS 111611 VOLTAGE PMENTEuJummH CURRENT INTENSITY SHEET 1 OF '6 TIME CURRENT \NTENS\TY TlME 3 7 I J EMISSWN CURRENT I DETECTOR 9 STANDARD HEATING- 5 Sl TNAL. CURRENT GENERATOR S R E COMPAR\50N CIRCUIT VAR\ABLE QC. VOLTAGE 6 SOURCE.
H IFTH VOLTA G-E SOURCE SHEET 2 BF 6 9 z STANDARD HEATING- StGNAL CURRENT GENERATOR SOURCE EMlSSwN 7 cumem DETECTOR COMPARISON A cmcun' vAmAaLE VOLTAGE soureoE 5 HlG'H VOLTAGE sounca HEATING" CURRENT SOURCE STANDAR D SICTNAL GENERATOR COMPARISON CIRGUH' VAmA L VOLTAGE SOURCE H\GH VOLTAGE SouRcE PATENFEDJmzsam SHEET 3 BF 6 TING CURRENT SOURCE HEA \ VARIABLE 17.0. VOLTAGE SOURC E SOURC HIGH VOLT SOURC PMENTED wlzslm saw u 0F e HEATlNGr I 5 CURRENT sconce 1 NM/kw.
5 man VOLTAGE SOURCE 3 1.1 l 1 7 A j EMlssmN CURRENT DETECTOR HEAT-N6, CURRENT 5 CTENERAWR SOURCE l (9 coMPAmsoN 23 2;
cuaouw CONTROL VARiABLE MEANS VOLTAGE SOURCE EffiAi GENERATOR Z! I coMPAmsoN cuaourr Tum c MEANS KiH VOLTAGE SOURCE PAIENTEB M2319 SHEEI 5 DFG 2 HEATING- cuRmaNT SOURCE HIGH VOLTAGE SOURCE ms ION CURRENT DETECTOQ i k y 7 2 f 1 STANDARD HEATWG SKxNAL CURRENT 5 GENERATOR souraoe H a COMPARlSON CIRCUIT 4, 5
VARXABLE QQVOLTACTE sovrlcE WW GENERATOR COMPARISON WARNING cmcurr MEANS J l 20 a 33 men VOLTAGE SOURCE PMENTEB 1974 3.825.839
SHEU 8 OF 6 EMISSION; CURRENT DETECTOR 9 2 I STANDARD HEATING-- SKiNAL CURRENT I GENERATOR SOURCE H a, COMPAR\SON cmcmT i 16 rT c VAR\ABLE VOLTAGE 6 SOURCE I i HlGH VOLTAGE SOURCE f EMlSSwN CURRENT DETECTOR 9 Z 1 1 STANDARD HEAT\NGr SlCrNAL CURRENT GENERATOR SOURCE H f COMPARISON WARNING cmounr MEANS VARMBLE VOLTAGE. 6 SOURCE 4 1 HIGH VOLTAGE souRcE CONSTANT CURRENT FIELD EMISSION ELECTRON GUN I Such being the case, the field emission type electron gun, when used in a scanning type electron microscope,
' provides betterimage resolution than would be possi ble with the thermionic emission type electron gun. Also, when used in a transmission type electron microscope, this type of gun ensures better image contrast than in the case of the thermionic emission type electron gun, as a result of improved coherency of electron beams.
However, in spite of theaforementioned advantages, the field' emission type electron gun possesses certain defects foremost of which is the fact that the current density of the electron beam gradually becomes unstable as a'result of contamination on the emitters'urface and also deformation of the emitter tip. Various ways have been devised to counteract this instability. A popular method, although somewhat impractical due to high manufacturing costs and maintenance, is to maintain the gun chamber at a super-high vacuum, for example, on the order of-10' to 10* Torr. By so doing, the local work functions of the emitter remains stable since the emitter surface contamination is prevented.
- Another method is to maintain the emitter at a high temperature during field emission. By so doing, contamination is prevented and the electron beam current remains stable in spite of the comparatively low degree of vacuum. Heating the emitter, howe ver,'as described FIGS. 12(a), 12(b) and 12(c) are schematic views of the various emitter tips.
FIGS. 1(a) and 1(b) are graphs showing the relationship between the electron beam current and elapsed time in a conventional field emission type gun. The graded increaseof the electron beam current shown in FIG. 1(a) is due to crystal buildup but by weakening the electric field at the emitter tip at 1 the current intensity maybe reduced to its initial value. After remaining at this value for some time, the current intensity gradually decreases as shown in FIG. 1(5) and may be restored once more to its original value by intensifying the electricfield. Thus, by controlling the electric field, the current intensity of the electron beam can be kept stable. x Y
FIG. 2 shows one embodiment of this invention. Emitter 1, made of tungsten or the like, is heated to a suitable temperature, for example 1,600 C, by applying current from a heating current source 2. The first anode3 is maintained at a potential positive to that of the emitter by' means of a variable DC voltage source 4. A'second anode 5 is connected to the positive output terminal of a high voltage accelerating source 6, said terminal being maintained at ground potential. The negative output terminal of the source 6 is connected to the emitter 1 via an emission current detector 7 which detects all the electrons emitted from saidemitter and converts them into an electrical signal. The output signal from the emission current detector 7 is then above; causes the emitter tip to become soft which results in a gradual buildup of crystal planes on the surface of the emitter. This crystallineformation or buildup, if allowed to progress, would cause the electric field intensity at theemitter tip to increase locally and irregularly resulting in excess emissionand eventual damage to the emitter tip.
The field emission gun according to this invention is characterized by the provision of a device or circuit for detecting the electron beam current fluctuation and a device or circuit for controllingthe electric field in ac cordance with the output (feedback) signal of the detectiiig circuit.
Accordingly, an advantage of this invention is to control this so called buildup of crystals on theemitter surface. A second advantage of this invention is to prevent the electron beam current from becoming unstable and to reform the emitter tip after deformationdue to crystal buildup.
Further features and otherobjectsand advantages will become clear from a reading of the following. detailed description made with reference to the drawings in which: e
FIGS. 1(a) and 1(b) are graphs showing the relationship betwee'nthe emission current and'elapsed time in a field emission type electron gun;
FIGS. 2 to II and 13 are block diagrams of. the field emission type electron guns according to this invention;
and,
applied to a comparison circuit 8 where it is compared with a reference signal from a standard signal generator 9. The compared signal is applied to the variable DC. voltage source 4, thereby controlling the potential of the first electrode 3 so as to keep the electron current constant.
By so doing, even if the emitter tip is slightly deformed by a strong electric field, the emitter can be used over a longperiod of time, because the potential of the first electrode 3 decreases so as to prevent an increase of emission current. Again, since the emitter tips do not necessarily have to be exactly identical, in view of the fact that the constant electron beam current is obtained at all times, emitter exchange presents no problems.
FIG. 3Tshows another embodiment of this inventionin which the emission current detector 7 is arranged between the variable D.C. voltage source 4 and the first electrode 3. In this arrangement, the inflow of electrons to the first anode 3 is detected and since this inflow is proportional to the outflow of electrons from the emitter, the control function of this embodiment is exactly the same as that in the embodiment shown in FIG. 2.
plate or a converter for converting the electron beam into alight or X-ray, said light orX-ray then being converted into an electrical signal.
FIG. 5 shows a fourth embodiment of this invention in which a resistor 11 is connected between the variable D.C. voltage source 4 and the first anode 3' so as 1 to control the electric field automatically. The resistor 11 has two functions, one being to detect the electron beam fluctuation and the other to control the electric field in accordance with said fluctuation. In this embodiment, the potential difference between the emitter 1 and the first anode 3 is equal to the sum of the output voltage V of source 4 and the voltage across the resistor 11, the polarity of which is opposite to that of the output voltage V,, (volt). The reason for this is that the voltage across the resistor 11 (R ohm) is determined by the electron current Ie (ampere) flowing into the anode 3. Accordingly, voltage V V Ie-R is applied between the emitter l and the anode 3. In this case, if Ie increases, V decreases so as to reduce the electron current by weakening the electric field. Conversely, if Ie decreases, V increases so as to increase the electron current by strengthening the electric field. Thus, by utilizing this embodiment, the stability of the electron beam current is improved. As a result, electron beam fluctuation due to the elapse of time or emitter exchange does not occur.
If a variable resistor is used instead of the fixed resistor 11, a simple constant voltage source can be used instead of the variable voltage source 4, because it would then be possible to vary voltage V by varying the variable resistor instead of varying the output of the voltage source 4.
FIG. 6 shows a fifth embodiment of this invention in which voltage V is obtained by dividing resistors 12 and 13 instead of voltage source 4. In this case, resistor 11 can be omitted without affecting the circuit functionally.
FIG. 7 shows a sixthembodiment of this invention in which a constant voltage element 14, for example, a Zener diode, and a resistor 15 are used instead of resistors 12 and 13.
FIG. 8 shows a seventh embodiment of this invention in which the voltage V is obtained by a fixed resistor 16 and a variable resistor 17 through which the electron current flows from the first anode 3 to second anode 7.
FIG. 9 shows an eighth embodiment of this invention in which the intensity of the electric field between the emitter and the first anode is controlled intermittently by meansof an on-off" switch 18 connected in parallel with the variable voltage source 4. In this arrangement, if the electron beam current reaches a set value determined by the standard signal generator 9, the resultant output of the comparison circuit 8 causes the switch 18 to activate. In other words, it is changed from on" to of or vice versa. By so doing, the electron beam current is kept to within the set value, because crystal buildup on the emitter surface is prevented.
The embodiment shown in FIG. 10 is essentially the same as that shown in FIG. 9 but includes a warning device 19 (e.g., a buzzer) which is brought into operation when the output signal of the comparison circuit 8 reaches a certain intensity. As soon as the buzzer sounds, the switch is operated manually by the operator.
The various embodiments described thus far are all designed to prevent crystal buildup on the emitter surface. The remaining embodiments described below, on'
the other hand, are expressly designed to reform or restore the emitter tip to the original shape after-deformation due to crystal buildup.
FIG. 11 shows one embodiment capable of achieving this restoration. In, the figure a comparison circuit 20 f compares the output voltage of the'variablevoltage source 4 and the output voltage of the standard signal generator 21. The comparison circuit is applied to the warning device 22. A switching means 23 controls the potential of the first anode 3. In this embodiment the heating current source 2 is designed to produce an output current capable of heating the emitter up to a sufficiently high temperature (for example about 2,000C).
Referring to FIG. 12, (a) shows the shape of an unused emitter tip and (b) shows the change in the shape of the tip resulting from crystal buildup. If under the condition shown in (b), the electric field at the emitter is sufficiently weakened and the emitter is heated to a sufficientlyhigh temperature, the emitter can be restored to its original shape as shown in (c) by thermal surface tension.
The comparison circuit 20 in FIG. 11 is able to monitor the progress of the crystal buildup because as the buildup progresses, the electric field at the emitter tip becomes more intense which causes the output voltage of source 4 to decrease more or less proportionately in order to keep the electron beam current constant. Thus, the decrease in the output voltage of source 4 results in a corresponding decrease in the output of the comparison circuit 20, thereby monitoring the progress of crystal buildup accurately. When the output voltage of source 4 becomes less than that of the standard signal generator 21, the comparison circuit 20 activates the warning device 22 which tells the operator to disengage switch 23. After which, the operator manually increases to output current of the current source 2 so as to increase the temperature of the emitter to a predetermined temperature thereby restoring the emitter tip to its original shape.
FIG. 13 shows an embodiment capable of automatically restoring the emitter tip to its original shape. This is made possible by the provision of a timing circuit 24 which is activated by the output signal of comparison circuit 20. In the activated state the timing circuit 24 generates a signal, having a constant time interval, which in turn activates a control means 25 for controlling the switch 23 which remains disengaged during the time the signal is being generated. Simultaneously, said time signal activates the heating current source 2 so as to raise the temperature of the emitter to a point where it is restored to its original shape.
Additionally, this invention is not limited to the above mentioned embodiments. For example, this invention can be applied to the so called cold emission type field emission gun which corresponds to the embodiments where the heating means 2 is omitted in FIGS. 2 to 10, in order to prevent the emission current fluctuation due to the contamination on the emitter surface. I
Having thus described the invention with the detail and particularity as required by the Patent Laws, what is desired protected by Letters Patent is set forth in the following claims.
We claim:
I. A field emission type electron gun comprising:
an emitter for'emitting an electron beam,
a heating means for heating said emitter,
said emitter, a first voltage-source for generating a potential differi ff .e nce.' between; said first anode and'said emitter,
a first anodefor'generating a strong electric field at a second anode located behind the first anode maintained at ground potential, a second high voltagesource for supplying negative high potential to said emitter for accelerating said electron beam, I
a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of electron beam fluctuation,
a comparing means for comparing the output signal of said first detecting means with a reference signal and providing an output signal indicative of the comparison, v
a control means for controlling the output voltage of said first voltage source in response to the output signal of said comparing means, and
a second detecting means for detecting the change in output voltage of said first voltage source providing an output signal indicative of the progress of crystal buildup on the emitter surface. i
2. A field emission type electron gun according to claim 1 in which said second detecting meanscomprises a second comparison circuit for comparing the output voltage of said first voltage source and a reference signal voltage.
3. A field emission type electron gun comprising:
an emitter for emitting an electron beam,
a heating means for' heating said emitter,
a first anode for generating a strong electric field at said emitter, f
a first voltage source for generating a potential differ-- ence between said first anode and said emitter,
a second anode located behind the first anode maintained at ground potential,
a second high voltagesource forsupplying negative high potential to said emitter for accelerating said electron beam, f
a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of the electron beam fluctuation,
a comparing means for comparing the output signal of said first detecting means with a reference signal and providing an output signal indicative of the comparison,
a control means for controlling the output voltageof said first voltage source in response to the output signal of said comparing means,
a second detecting means for detecting the change in output voltage of said first voltage source, and
a warning means for indicating the state of crystal buildup on the emitter surface, said warning means responsive to the ou-t'put signal of saidsecond detecting means. p
4. A field emission type electron gun comprising:
'an emitter for emitting an electron beam,
a heating means for heating said emitter, v
a first anode for generating a strong electric fieldat said emitter, I
' a first voltage source for generating a potential difference between said first anode and said emitter,
a second anode located behind the first anode and maintained at ground potential,
a second high voltage source for supplying negative high potential to said emitter for accelerating said electron beam, b
a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of the electron beam fluctuation,
a first comparing means for comparing the output signal of said first detecting means with a reference signal and providing a signal indicative of the comparison, V p
a first control means for controlling the output volt-' age of said first voltage source in response to the output signal of said first comparing means,
a second detecting means for detecting the change in output voltage of said first voltage source and providing an output signal indicative thereof, and
a second control means for controlling said heating means in response to the output signal of said second detecting means to restore the emitter tip after deformation due to crystal buildup.
5. A field emission type electron gun according to claim 4 in which said second control means comprises a timing"circuit-for controlling the time during which the emitter is heated so as to restore the emitter tip after deformation due to crystal buildup.
6. A field emission type electron gun comprising:
an emitter for emitting an electron beam,
a heating means for heating said emitter,
a'first anode for generating'a strong electric field at said emitter,
a first voltage source for generating a potential difference between said first anode and said emitter,
asecond. anode located behind the first anode and maintained at ground potential,
a second high ,voltage source for supplying negative high potential to said emitter for accelerating said electron beam,
' a first detecting means for detecting the electron a comparing means for comparing the output signalof saidfirst detecting means with a reference signal and providing anoutput signal indicative of the comparison,
7 a first control means for controlling the output voltage of said first voltage source in response to the output signal of said comparing means,
a second detecting means for detecting the change in output voltage of said first voltage source and pro- 7 viding an output signal indicative thereof,
a second control means for controlling said heating means in response to the output signal of said second detecting means, and
a switching means arranged between said emitter and said first anode, said switching means controlled in response to the output signal of said second detecting means.

Claims (6)

1. A field emission type electron gun comprising: an emitter for emitting an electron beam, a heating means for heating said emitter, a first anode for generating a strong electric field at said emitter, a first voltage source for generating a potential difference between said first anode and said emitter, a second anode located behind the first anode maintained at ground potential, a second high voltage source for supplying negative high potential to said emitter for accelerating said electron beam, a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of electron beam fluctuation, a comparing means for comparing the output signal of said first detecting means with a reference signal and providing an output signal indicative of the comparison, a control means for controlling the output voltage of said first voltage source in response to the output signal of said comparing means, and a second detecting means for detecting the change in output voltage of said first voltage source providing an output signal indicative of the progress of crystal buildup on the emitter surface.
2. A field emission type electron gun according to claim 1 in which said second detecting means comprises a second comparison circuit for comparing the output voltage of said first voltage source and a reference signal volTage.
3. A field emission type electron gun comprising: an emitter for emitting an electron beam, a heating means for heating said emitter, a first anode for generating a strong electric field at said emitter, a first voltage source for generating a potential difference between said first anode and said emitter, a second anode located behind the first anode maintained at ground potential, a second high voltage source for supplying negative high potential to said emitter for accelerating said electron beam, a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of the electron beam fluctuation, a comparing means for comparing the output signal of said first detecting means with a reference signal and providing an output signal indicative of the comparison, a control means for controlling the output voltage of said first voltage source in response to the output signal of said comparing means, a second detecting means for detecting the change in output voltage of said first voltage source, and a warning means for indicating the state of crystal buildup on the emitter surface, said warning means responsive to the output signal of said second detecting means.
4. A field emission type electron gun comprising: an emitter for emitting an electron beam, a heating means for heating said emitter, a first anode for generating a strong electric field at said emitter, a first voltage source for generating a potential difference between said first anode and said emitter, a second anode located behind the first anode and maintained at ground potential, a second high voltage source for supplying negative high potential to said emitter for accelerating said electron beam, a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of the electron beam fluctuation, a first comparing means for comparing the output signal of said first detecting means with a reference signal and providing a signal indicative of the comparison, a first control means for controlling the output voltage of said first voltage source in response to the output signal of said first comparing means, a second detecting means for detecting the change in output voltage of said first voltage source and providing an output signal indicative thereof, and a second control means for controlling said heating means in response to the output signal of said second detecting means to restore the emitter tip after deformation due to crystal buildup.
5. A field emission type electron gun according to claim 4 in which said second control means comprises a timing circuit for controlling the time during which the emitter is heated so as to restore the emitter tip after deformation due to crystal buildup.
6. A field emission type electron gun comprising: an emitter for emitting an electron beam, a heating means for heating said emitter, a first anode for generating a strong electric field at said emitter, a first voltage source for generating a potential difference between said first anode and said emitter, a second anode located behind the first anode and maintained at ground potential, a second high voltage source for supplying negative high potential to said emitter for accelerating said electron beam, a first detecting means for detecting the electron beam emitted from said emitter and providing a signal indicative of electron beam fluctuation, a comparing means for comparing the output signal of said first detecting means with a reference signal and providing an output signal indicative of the comparison, a first control means for controlling the output voltage of said first voltage source in response to the output signal of said comparing means, a second detecting means for detecting the change in output voltage of said first voltage source anD providing an output signal indicative thereof, a second control means for controlling said heating means in response to the output signal of said second detecting means, and a switching means arranged between said emitter and said first anode, said switching means controlled in response to the output signal of said second detecting means.
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US3909662A (en) * 1973-05-22 1975-09-30 Leybold Heraeus Verwaltung Arrangement for regulating the operating parameters of an electron beam generator
US3909663A (en) * 1973-05-22 1975-09-30 Leybold Heraeus Verwaltung Arrangement for regulating the operating parameters of an electron beam generator
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US4525652A (en) * 1982-10-23 1985-06-25 Leybold-Heraeus Gmbh Auxiliary-voltage source for supplying electric circuits which are at a high potential
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US4687970A (en) * 1985-05-31 1987-08-18 Hughes Aircraft Company Digital cathode current control loop
US5401973A (en) * 1992-12-04 1995-03-28 Atomic Energy Of Canada Limited Industrial material processing electron linear accelerator
US6847164B2 (en) 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3909662A (en) * 1973-05-22 1975-09-30 Leybold Heraeus Verwaltung Arrangement for regulating the operating parameters of an electron beam generator
US3909663A (en) * 1973-05-22 1975-09-30 Leybold Heraeus Verwaltung Arrangement for regulating the operating parameters of an electron beam generator
US4090106A (en) * 1975-12-26 1978-05-16 Hitachi, Ltd. Field emision electron gun with controlled power supply
US4525652A (en) * 1982-10-23 1985-06-25 Leybold-Heraeus Gmbh Auxiliary-voltage source for supplying electric circuits which are at a high potential
EP0151588A1 (en) * 1983-06-15 1985-08-21 American Telephone & Telegraph Electron emission system.
EP0151588A4 (en) * 1983-06-15 1985-10-24 American Telephone & Telegraph Electron emission system.
US4687970A (en) * 1985-05-31 1987-08-18 Hughes Aircraft Company Digital cathode current control loop
US5401973A (en) * 1992-12-04 1995-03-28 Atomic Energy Of Canada Limited Industrial material processing electron linear accelerator
US6847164B2 (en) 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
EP1760761A1 (en) * 2005-09-05 2007-03-07 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Charged particle beam emitting device and method for operating a charged particle beam emitting device
US20070158588A1 (en) * 2005-09-05 2007-07-12 Fang Zhou Charged particle beam emitting device and method for operating a charged particle beam emitting device
EP1993119A1 (en) 2005-09-05 2008-11-19 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Charged particle beam emitting device and method for operating a charged particle beam emitting device
US7595490B2 (en) 2005-09-05 2009-09-29 Ict, Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh Charged particle beam emitting device and method for operating a charged particle beam emitting device
WO2022263153A1 (en) * 2021-06-18 2022-12-22 Asml Netherlands B.V. System and method for adjusting beam current using a feedback loop in charged particle systems

Also Published As

Publication number Publication date
DE221138C (en)
DE2221138A1 (en) 1972-11-23
FR2134396A1 (en) 1972-12-08
DE2221138B2 (en) 1976-06-16
DE2221138C3 (en) 1979-07-19
FR2134396B1 (en) 1976-08-06
GB1375789A (en) 1974-11-27

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