US20170366775A1 - Photoelectric conversion apparatus, photoelectric conversion system, and driving method for the photoelectric conversion apparatus - Google Patents
Photoelectric conversion apparatus, photoelectric conversion system, and driving method for the photoelectric conversion apparatus Download PDFInfo
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- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/75—Circuitry for providing, modifying or processing image signals from the pixel array
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- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
- H04N25/771—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising storage means other than floating diffusion
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Definitions
- the present invention relates to a photoelectric conversion apparatus, a photoelectric conversion system, and a driving method for the photoelectric conversion apparatus.
- a pixel of a photoelectric conversion apparatus disclosed in Japanese Patent Laid-Open No. 2013-131900 includes a so-called MIS-type photoelectric conversion unit constituted by a metal, an insulating film, and a semiconductor.
- the photoelectric conversion unit accumulates signal carriers.
- the pixel further includes an amplification transistor configured to output a signal based on the signal carriers accumulated by the photoelectric conversion unit.
- the MIS-type photoelectric conversion unit disclosed in Japanese Patent Laid-Open No. 8-116044 includes a first electrode, a second electrode provided on a substrate side with respect to the first electrode, and a photoelectric conversion layer arranged between the first electrode and the second electrode.
- Japanese Patent Laid-Open No. 8-116044 discloses that, after a magnitude relationship between potentials of the first electrode and the second electrode is set to be reversed from that at the time of the accumulation of the signal carriers to discharge the accumulated signal carriers from the photoelectric conversion layer, the magnitude relationship is returned to be the same as that at the time of the accumulation of the signal carriers again.
- a photoelectric conversion apparatus including: a photoelectric conversion unit; an amplification unit; a signal line; and an output control unit, in which the photoelectric conversion unit includes a first electrode, a second electrode, a photoelectric conversion layer that is arranged between the first electrode and the second electrode and accumulates signal carriers, and an insulating layer arranged between the photoelectric conversion layer and the second electrode, an optical signal based on the accumulated signal carriers is output to an input node of the amplification unit, an output node of the amplification unit is connected to the signal line, a magnitude relationship between a potential applied to the first electrode and a potential applied to the second electrode is a first relationship in a first period during which the photoelectric conversion layer accumulates the signal carriers, and the magnitude relationship is a second relationship that is opposite to the first relationship in a second period during which the signal carriers are discharged from the photoelectric conversion layer while the second electrode is applied with a potential having a different value from the potential applied in the first period, and the output control
- a driving method for a photoelectric conversion apparatus including a photoelectric conversion unit, an amplification unit, a signal line, the photoelectric conversion unit including a first electrode, a second electrode, a photoelectric conversion layer that is arranged between the first electrode and the second electrode and accumulates signal carriers, and an insulating layer arranged between the photoelectric conversion layer and the second electrode, the driving method including: setting a magnitude relationship between a potential applied to the first electrode and a potential applied to the second electrode to be a first relationship in a first period during which the photoelectric conversion layer accumulates the signal carriers; setting the magnitude relationship to be a second relationship that is opposite to the first relationship in a second period during which the signal carriers are discharged from the photoelectric conversion layer while the second electrode is applied with a potential having a different value from the potential applied in the first period; and restricting a potential range of the signal line to be within a predetermined range narrower than a potential range of an output of the amplification unit in at least
- FIG. 1A illustrates an example configuration of a photoelectric conversion apparatus
- FIG. 1B illustrates an example configuration of a column signal processing unit.
- FIGS. 2A to 2D illustrate an example operation by a photoelectric conversion unit.
- FIG. 3 illustrates an example operation by the photoelectric conversion apparatus.
- FIG. 4 illustrates an example configuration of the photoelectric conversion apparatus.
- FIG. 5 illustrates an example of the photoelectric conversion apparatus.
- FIG. 6 illustrates an example of the photoelectric conversion apparatus.
- FIG. 7A illustrates an example operation by the photoelectric conversion apparatus
- FIG. 7B illustrates an example configuration of a capacitance element.
- FIG. 8 illustrates an example of the photoelectric conversion apparatus.
- FIG. 9 illustrates an example configuration of a photoelectric conversion system.
- FIG. 10 illustrates an example operation by the photoelectric conversion apparatus.
- a potential supplied to a second electrode is changed from a first potential to a second potential. According to this, a potential of an input node of an amplification transistor electrically connected to the second electrode is also changed from the first potential to the second potential. Therefore, a signal level of a signal output by the amplification transistor is changed. Thereafter, a potential supplied to the second electrode is changed from the second potential to the first potential. According to this, the potential of the input node of the amplification transistor turns to a potential based on an optical signal from the second potential.
- a circuit in a following stage of the amplification transistor may hold the signal output by the amplification transistor in some cases. In this case, a situation occurs that an accuracy of the signal held by the circuit in the following stage of the amplification transistor is decreased.
- a photoelectric conversion apparatus 10 illustrated in FIG. 1A includes a pixel cell 1000 , a capacitance driving unit 12 , a vertical signal line 17 , a current source 18 , and a column signal processing unit 20 .
- the photoelectric conversion apparatus 10 also includes a power source unit 30 a.
- the pixel cell 1000 includes a unit pixel 10 a, a reset unit 14 , and a pixel output unit 16 .
- FIG. 1A illustrates the single pixel cell 1000 , which corresponds to one of a plurality of pixel cells 1000 arranged across a plurality of rows and a plurality of columns.
- FIG. 1A also illustrates one each of the vertical signal lines 17 , the current sources 18 , and the column signal processing units 20 . These respectively correspond to one of the vertical signal lines 17 on the plurality of columns, the current sources 18 on the plurality of columns, and the column signal processing units 20 on the plurality of columns which are provided while corresponding to the respective columns where the plurality of pixel cells 1000 are arranged.
- the unit pixel 10 a includes a photoelectric conversion unit 101 a.
- the photoelectric conversion unit 101 a includes a first electrode 201 , a blocking layer 203 , a photoelectric conversion layer 205 , an insulating layer 207 , and a second electrode 209 .
- the blocking layer 203 is provided between the first electrode 201 and the photoelectric conversion layer 205
- the photoelectric conversion layer 205 is provided between the blocking layer 203 and the insulating layer 207 .
- the insulating layer 207 is provided between the photoelectric conversion layer 205 and the second electrode 209 .
- the first electrode 201 is constituted by a conductive member having a high transmittance with respect to light in a wavelength band in which the photoelectric conversion layer 205 has sensitivity.
- a compound containing indium and/or tin such as indium tin oxide (ITO) or a compound such as ZnO is used as a material of the first electrode 201 .
- the photoelectric conversion layer 205 according to the present exemplary embodiment can obtain more light than a case where an opaque electrode such as copper is used as the first electrode 201 .
- the first electrode 201 according to the present exemplary embodiment may be formed of polysilicon or metal having a thickness to an extent that a predetermined amount of light transmits.
- the blocking layer 203 suppresses injection into the photoelectric conversion layer 205 of electric carriers having a same conductive type as signal carriers accumulated by the photoelectric conversion layer 205 from the first electrode 201 to the photoelectric conversion layer 205 .
- the photoelectric conversion layer 205 is depleted by a potential difference between a potential Vs applied to the first electrode 201 and a potential of the second electrode 209 .
- a gradient of the potential of the photoelectric conversion layer 205 is inverted in accordance with a relationship between the potential Vs applied to the first electrode 201 and the potential of the second electrode 209 .
- the photoelectric conversion layer 205 can perform the accumulation of the signal carriers and discharge of the accumulated signal carriers. An operation by the photoelectric conversion unit 101 a will be described below.
- a power source voltage supplied to the first electrode 201 is the potential Vs supplied from the power source unit 30 a.
- the photoelectric conversion layer 205 is formed of intrinsic amorphous silicon (hereinafter, will be referred to as a-Si), low concentration P-type a-Si, low concentration N-type a-Si, or the like.
- the photoelectric conversion layer 205 may be formed of a compound semiconductor.
- the compound semiconductor includes a group III-V compound semiconductor such as BN, GaAs, GaP, AlSb, or GaAlAsP, a group II-VI compound semiconductor such as CdSe, ZnS, or HdTe, or a group IV-VI compound semiconductor such as PbS, PbTe, or CuO.
- the photoelectric conversion layer 205 may be formed of an organic material.
- fullerene, coumarin 6 (C6), rhodamine 6G (R6G), zinc phthalocyanine (ZnPc), quinacridone, phthalocyanine compounds, naphthalocyanine compounds, or the like can be used.
- a quantum dot film constituted by including the above-described compound semiconductor can be used can be used as the photoelectric conversion layer 205 .
- the photoelectric conversion layer 205 is constituted by a semiconductor
- an impurity concentration of this semiconductor may be low, or this semiconductor may be intrinsic. According to the above-described configuration, since the depletion layer can be sufficiently extended in the photoelectric conversion layer 205 , it is possible to attain advantages such as the increase in the sensitivity and the noise reduction.
- An N-type or P-type semiconductor using the same material as the semiconductor used for the photoelectric conversion layer 205 and also having a higher impurity concentration than the semiconductor used for the photoelectric conversion layer 205 can be used for the blocking layer 203 .
- a-Si is used for the photoelectric conversion layer 205
- an N-type a-Si into which impurity is doped or a P-type a-Si into which impurity is doped is used for the blocking layer 203 . Since a position of a Fermi level varies depending on a difference of the impurity concentration, the blocking layer 203 functions as a potential barrier with respect to only one of the electron and the hole.
- the photoelectric conversion layer 205 includes the quantum dot film
- using the same material as the semiconductor used for the quantum dot film and also having the blocking layer 203 of a conductivity type opposite to that of the quantum dot film may be provided.
- the blocking layer 203 may be N-type PbS. Even in the case of the blocking layer 203 using the same material as the quantum dot film and having the same conductivity type, it is sufficient when the impurity concentration of the quantum dot film is set to be different from that of the blocking layer 203 .
- the blocking layer 203 can be constituted by a material different from that of the photoelectric conversion layer 205 . According to the above-described configuration, a hetero junction is formed. Since a bandgap varies depending on a difference of the materials, the potential barrier can be formed with respect to only one of the electron and the hole.
- the photoelectric conversion layer 205 contains the quantum dot film
- PbS may be used for the quantum dot film
- ZnO may be used for the blocking layer 203 .
- the insulating layer 207 is arranged between the photoelectric conversion layer 205 and the second electrode 209 .
- amorphous silicon oxide hereinafter, will be referred to as a-SiO
- a-SiN amorphous silicon nitride
- an organic material is used as a material of the insulating layer 207 .
- a thickness of the insulating layer 207 may be set as a thickness to an extent that signal carriers do not transmit by a tunnel effect. With the above-described configuration, the leak current can be reduced, and the noise can be reduced. Specifically, it is sufficient when the thickness of the insulating layer 207 may be 50 nm or higher.
- the second electrode 209 is constituted by a conductive member such as metal.
- a same material as a conductive material constituting a conductive line or a conductive material constituting a pad electrode for a connection to an external part is used for the second electrode 209 .
- the photoelectric conversion unit 101 a according to the present exemplary embodiment can be formed at the same time as the second electrode 209 and the conductive material constituting the conductive line or the pad electrode. Therefore, the photoelectric conversion unit 101 a according to the present exemplary embodiment can be manufactured in a more simplified manufacturing process as compared with a case where the second electrode 209 is formed of a material different from that of the conductive material constituting the conductive line or the pad electrode.
- the first electrode 201 of the photoelectric conversion unit 101 a is electrically connected to the power source unit 30 a.
- the power source unit 30 a supplies the potential Vs to the first electrode 201 .
- the reset unit 14 includes a reset transistor 14 a. In the reset transistor 14 a, one of a source and a drain is supplied with a reset voltage Vres, and the other one of the source and the drain is electrically connected to a node FD.
- the reset voltage Vres is a potential lower than the potential Vs. According to the present exemplary embodiment, the potential Vs is set as 5 V, and the reset voltage Vres is set as 2 V.
- a signal ⁇ Res is input to a gate of the reset transistor 14 a from a vertical scanning circuit that is not illustrated in the drawing.
- the capacitance driving unit 12 includes a buffer circuit 12 a and a capacitance element 12 b.
- a first node corresponding to one node of the capacitance element 12 b is electrically connected to the node FD corresponding to a third node. Furthermore, the first node of the capacitance element 12 b is electrically connected to the second electrode 209 of the photoelectric conversion unit 101 a.
- a second node corresponding to the other node of the capacitance element 12 b is electrically connected to the buffer circuit 12 a.
- a signal ⁇ Vp is input to the buffer circuit 12 a from a timing generator that is not illustrated in the drawing.
- the buffer circuit 12 a supplies a potential obtained by buffering a potential of the signal ⁇ Vp to the capacitance element 12 b.
- the timing generator is a capacitance potential supply unit configured to supply the signal ⁇ Vp having a different potential to the capacitance element 12 b via the buffer circuit 12 a.
- the capacitance element 12 b is electrically connected to the node FD.
- the capacitance element 12 b includes, for example, two electrodes facing each other.
- the two electrodes are formed of a material such as polysilicon or a metal.
- the capacitance element 12 b is constituted by including a semiconductor region and a gate electrode arranged on the semiconductor region.
- the photoelectric conversion apparatus controls the potential of the node FD.
- the potential of the second electrode 209 of the photoelectric conversion unit 101 a changes in accordance with a ratio of the capacitance element 12 b to a combined capacitance of a gate capacitance of an amplification transistor 16 a connected by the node FD and a capacitance value of a capacitance component between the first electrode 201 and the second electrode 209 (hereinafter, will be referred to as capacitance value of the photoelectric conversion unit 101 a ).
- capacitance value of the photoelectric conversion unit 101 a This is because the capacitance element 12 b and the combined capacitance can be regarded as two capacitance connected in series.
- the changing quantity of the potential of the second electrode 209 when the signal ®Vp is changed becomes higher.
- the capacitance element 12 b is electrically connected to the node FD.
- a node of the capacitance element 12 b to which the potential of the signal ⁇ Vp is input is electrically separated from the node FD.
- the changing quantity of the potential of the second electrode 209 when the potential of the node FD is changed becomes higher.
- the capacitance element 12 b is electrically connected to the node FD. Therefore, when the potential of the second electrode 209 is controlled to read out the optical signal from the photoelectric conversion unit 101 a, it is possible to apply a large potential difference between the first electrode 201 and the second electrode 209 . According to this, since the photoelectric conversion apparatus according to the present exemplary embodiment can easily deplete the photoelectric conversion layer 205 , it is possible to reduce the noise included in the optical signal.
- the pixel output unit 16 includes the amplification transistor 16 a and a selection transistor 16 b.
- a gate corresponding to an input node of the amplification transistor 16 a is electrically connected to the node FD.
- a potential Vdd is input to one of a source and a drain of the amplification transistor 16 a, and the other one of the source and the drain is electrically connected to one of a source and a drain of the selection transistor 16 b.
- the other one of the source and the drain of the selection transistor 16 b are electrically connected to the vertical signal line 17 .
- a signal ⁇ Sel is input to a gate of the selection transistor 16 b from the vertical scanning circuit that is not illustrated.
- the amplification transistor 16 a corresponding to an amplification unit outputs a signal obtained by amplifying the signal output from the second electrode 209 .
- a node connected to the vertical signal line 17 of the selection transistor 16 b is an output node of the amplification unit.
- the current source 18 is electrically connected to the selection transistor 16 b via the vertical signal line 17 .
- the selection transistor 16 b is turned on, the amplification transistor 16 a and the current source 18 constitute a source follower circuit.
- the signal output from the amplification transistor 16 a via the selection transistor 16 b to the vertical signal line 17 is input to the column signal processing unit 20 .
- the column signal processing unit 20 outputs a signal based on the signal output from the amplification transistor 16 a to the vertical signal line 17 .
- FIG. 1B illustrates a configuration of the column signal processing unit 20 .
- the column signal processing unit 20 includes a column amplification unit 21 and an analog-to-digital (AD) conversion unit 22 .
- the column amplification unit 21 includes a capacitance element CO, a capacitance element C 1 , a switch SW 1 , and an amplifier 23 .
- An operation by the switch SW 1 is controlled by a signal ⁇ C 0 output from the timing generator that is not illustrated.
- a signal output from the amplification transistor 16 a via the capacitance element C 0 to the vertical signal line 17 is input to an inverting input node of the amplifier 23 .
- a reference voltage Vref is input to a non-inverting input node of the amplifier 23 .
- a signal Vamp output from the amplifier 23 is a signal obtained by inverting and amplifying the signal input to the inverting input node of the amplifier 23 .
- An amplification factor of the amplifier 23 is k that is a negative value.
- the AD conversion unit 22 includes a comparison unit 25 and a memory 27 .
- the signal Vamp is input from the amplifier 23 to the comparison unit 25 .
- the comparison unit 25 compares a potential of a ramp signal Ramp input from an external part of the column signal processing unit 20 with a potential of the signal Vamp.
- the ramp signal Ramp is a signal in which a potential monotonically changes depending on time.
- the signal output from the comparison unit 25 to the memory 27 is a signal indicating a result of a comparison between the potential of the ramp signal Ramp and the potential of the signal Vamp.
- the memory 27 holds a signal with which time from a timing when the ramp signal Ramp starts the change of the potential until the signal level of the comparison result signal changes is counted. This signal held by the memory 27 is a digital signal based on the signal Vamp.
- the digital signal held by the memory 27 in each of the column signal processing units 20 on the plurality of columns is output sequentially for each column to an external part of the photoelectric conversion apparatus by a horizontal scanning circuit that is not illustrated in the drawing.
- FIGS. 2A to 2D schematically illustrates energy bands in the photoelectric conversion unit 101 a.
- FIGS. 2A to 2D illustrates the energy bands of the first electrode 201 , the blocking layer 203 , the photoelectric conversion layer 205 , the insulating layer 207 , and the second electrode 209 .
- a vertical axis of FIGS. 2A to 2D represents a potential with respect to an electron. The higher the vertical axis of FIGS. 2A to 2D , the higher the potential to the electron. Therefore, the lower the vertical axis of FIGS. 2A to 2D , the lower the potential to the electron.
- a Fermi level is indicated.
- a band cap between an energy level of a conduction band and an energy level of a valence band are indicated.
- the following steps (1) to (5) are repeatedly performed: (1) Reset of the input node of the amplification unit, (2) read of a noise signal, (3) transfer of the signal carriers from photoelectric conversion unit, (4) read of the optical signal, and (5) accumulation of the signal carriers.
- steps (1) to (5) are repeatedly performed: (1) Reset of the input node of the amplification unit, (2) read of a noise signal, (3) transfer of the signal carriers from photoelectric conversion unit, (4) read of the optical signal, and (5) accumulation of the signal carriers.
- FIG. 2A illustrates a state of the photoelectric conversion unit 101 a in step (1) to step (2).
- the first electrode 201 is supplied with the potential Vs.
- the first potential Vs is, for example, 3 V. Holes indicated by white circles are accumulated as signal carriers generated during an exposure period in the photoelectric conversion layer 205 .
- a surface potential on the insulating layer 207 side of the photoelectric conversion layer 205 changes in accordance with an amount of accumulated holes.
- the buffer circuit 12 a supplies a first potential Vd 1 to the capacitance element 12 b.
- the first potential Vd 1 is, for example, 0 V.
- the reset transistor 14 a is turned on in this state. According to this, the potential of the node including the second electrode 209 , that is, the node FD, is reset to the reset voltage Vres.
- the reset voltage Vres is, for example, 1 V.
- the node FD is connected to the gate corresponding to the input node of the amplification transistor 16 a. For that reason, reset of the input node of the amplification unit is performed.
- reset transistor 14 a is turned off. According to this, the node FD becomes electrically floating. At this time, reset noise by reset transistor 14 a (noise kTC 1 in FIGS. 2A to 2D ) may be generated. At this time, the holes of the signal carriers remain to be accumulated in the photoelectric conversion layer 205 .
- the amplification transistor 16 a When the selection transistor 16 b is turned on, the amplification transistor 16 a outputs the noise signal including the reset noise.
- FIGS. 2B and 2C illustrate states of the photoelectric conversion unit 101 a in step (3).
- the buffer circuit 12 a supplies a second potential Vd 2 to the capacitance element 12 b. Since holes are used as the signal carriers, the second potential Vd 2 is a potential higher than the first potential Vd 1 .
- the second potential Vd 2 is, for example, 5 V.
- the potential of the second electrode 209 (node FD) changes towards the same direction as the change of the potential supplied by the buffer circuit 12 a.
- the changing quantity of the potential dVB of the second electrode 209 is determined in accordance with a ratio of a capacitance value C 1 of the capacitance element 12 b electrically connected to the node FD to a capacitance value C 2 of the photoelectric conversion unit 101 a.
- dVB is represented as follows.
- the changing quantity dVB is represented as follows.
- the changing quantity of the potential dVB of the second electrode 209 is sufficiently higher than a difference (Vs ⁇ Vres) between the potential Vs of the first electrode 201 and the reset voltage Vres. For that reason, the potential of the second electrode 209 becomes lower than the potential of the first electrode 201 , and the gradient of the potential of the photoelectric conversion layer 205 is inverted. According to this, electrons indicated by black circles are injected from the first electrode 201 into the photoelectric conversion layer 205 . In addition, a part or all of the holes accumulated in the photoelectric conversion layer 205 move towards the blocking layer 203 as the signal carriers. The moved holes are coupled again with a large number of carriers of the blocking layer 203 and disappear. As a result, the holes of the photoelectric conversion layer 205 are discharged from the photoelectric conversion layer 205 . In a case where the entirety of the photoelectric conversion layer 205 is to be depleted, all the holes accumulated as the signal carriers are discharged.
- the buffer circuit 12 a supplies the first potential Vd 1 to the capacitance element 12 b.
- the gradient of the potential of the photoelectric conversion layer 205 is inverted again.
- the electrons injected into the photoelectric conversion layer 205 in the state illustrated in FIG. 2B are discharged from the photoelectric conversion layer 205 .
- the injection of the holes from the first electrode 201 into the photoelectric conversion layer 205 is suppressed by the blocking layer 203 . Therefore, the potential of the node FD changes by a potential Vsig in accordance with the amount of disappearing holes from the reset state. That is, the potential Vsig in accordance with the amount of holes accumulated as the signal carriers appear at the node FD.
- the potential Vsig in accordance with the amount of accumulated holes will be referred to as optical signal component.
- the selection transistor 16 b is turned on in the state illustrated in FIG. 2C .
- the amplification transistor 16 a outputs the optical signal.
- a difference between the noise signal read out in step (2) and the optical signal read out in step (4) is a signal based on the potential Vsig in accordance with the accumulated signal carriers.
- FIG. 2D illustrates a state of the photoelectric conversion unit 101 a in step (5).
- the first electrode 201 is supplied with the potential Vs, and the node FD is supplied with the reset voltage Vres. Since the reset voltage Vres is lower than the potential Vs of the first electrode 201 , the electrons of the photoelectric conversion layer 205 are discharged to the first electrode 201 .
- the holes of the photoelectric conversion layer 205 move towards an interface between the photoelectric conversion layer 205 and the insulating layer 207 . However, since the holes are not moved to the insulating layer 207 , the holes are accumulated in the photoelectric conversion layer 205 .
- a potential Vch is a changing potential of the second electrode 209 on the basis of the holes accumulated in the photoelectric conversion layer 205 .
- the second potential Vd 2 is set as a potential lower than the first potential Vd 1 .
- the conductive type of the blocking layer 203 may be set to be opposite to the conductive type of the blocking layer 203 according to the present exemplary embodiment. For that reason, the gradient of the potential in FIGS. 2A to 2D is inverted. The other operations are the same.
- FIG. 3 illustrates an operation by the photoelectric conversion apparatus illustrated in FIG. 1A .
- the reset transistor 14 a and the selection transistor 16 b illustrated in FIG. 1A are respectively on in sequence when a signal ⁇ Res and the signal ⁇ Sel are at a Hi level (hereinafter, will be referred to as Hi) are respectively off when the signals are at a Lo level (hereinafter, will be referred to as Lo).
- a period T 1 is a reset period of the node FD
- a period T 2 is a period during which the node FD is in the floating state
- a period T 3 is a refresh period of the photoelectric conversion unit 101 a
- a period T 4 is a signal carrier holding period of the node FD.
- the photoelectric conversion apparatus sets the amplification transistor 16 a to be in a non-operating state in a period from a time t 3 to a time t 4 .
- the photoelectric conversion unit 101 a starts new photoelectric conversion from the time t 4 after the refresh operation.
- VFD the potential of the node FD
- Vline the potential of the vertical signal line 17
- the photoelectric conversion unit 101 a accumulates the signal carriers.
- the vertical scanning circuit that is not illustrated sets the signal level of the signal ⁇ Res from Lo to Hi. According to this, the reset transistor 14 a is turned on, and both the second electrode 209 and the node FD are reset to the reset voltage Vres.
- the vertical scanning circuit sets the signal ⁇ Sel from Lo to Hi. According to this, the selection transistor 16 b is turned on. According to this, since the current is supplied from the current source 18 to the amplification transistor 16 a, the amplification transistor 16 a is put into the operating state.
- the timing generator that is not illustrated sets the signal level of the signal C 0 to Hi. According to this, the electric carriers of the capacitance element C 1 are reset.
- the vertical scanning circuit sets the signal level of the signal ⁇ Res to Lo. According to this, the node FD is put into the floating state.
- a floating potential V 21 of the node FD at this time is referred to as reset FD potential.
- the amplification transistor 16 a outputs a signal based on this reset FD potential to the vertical signal line 17 .
- An operation in the period T 1 from the time t 1 to the time t 2 is an operation corresponding to the above-described (2).
- the timing generator sets the signal level of the signal ⁇ C 0 to Lo. According to this, the capacitance element C 0 holds the signal based on the reset FD potential that is output from the amplification transistor 16 a to the vertical signal line 17 .
- the signal Vamp at a time t 22 is a signal mainly containing an offset component of the column amplification unit 21 . This signal will be referred to as offset signal.
- the ramp signal Ramp performs change of the potential depending on the time.
- This period from the time t 22 to the time t 23 is a period during which the offset signal is converted into a digital signal by the AD conversion unit 22 .
- This period is referred to as N-AD period in FIG. 3 .
- the digital signal based on the offset signal which is obtained by the AD conversion unit 22 is referred to as digital N signal.
- the vertical scanning circuit sets the signal ⁇ Sel to Lo. According to this, since the current from the current source 18 to the amplification transistor 16 a is interrupted, the amplification transistor 16 a is put into the non-operating state.
- the timing generator that is not illustrated sets the signal level of the signal ⁇ Vp from Lo to the potential Vp 1 corresponding to the Hi signal level.
- the potential Vp 1 is 10 V
- the signal level of the signal ⁇ Vp at Lo is 0 V.
- the timing generator sets the signal ⁇ Vp to Lo. According to this, as illustrated in FIG. 2C , the optical signal is output to the second electrode 209 . Thus, the node FD becomes the potential based on the optical signal.
- This operation corresponds to the above-described step (3). It is noted that FIG. 3 illustrates a case where light hardly streams onto the photoelectric conversion unit 101 a. Therefore, the potential of the node FD remains at the reset FD potential.
- the vertical scanning circuit sets the signal level of the signal ⁇ Sel from Lo to Hi. According to this, the current is supplied to the amplification transistor 16 a again from the current source 18 . Thus, the amplification transistor 16 a is put into the operating state.
- the node FD has the potential based on the optical signal.
- the amplification transistor 16 a outputs the signal based on the optical signal to the vertical signal line 17 .
- the signal Vamp of the column amplification unit 21 becomes a potential of a signal (hereinafter, will be referred to as amplified optical signal) obtained by amplifying the signal based on the optical signal output by the amplification transistor 16 a.
- the ramp signal Ramp performs change of the potential depending on the time.
- This period from the time t 41 to the time t 42 is a period during which the amplified optical signal is converted into a digital signal by the AD conversion unit 22 .
- This period is referred to as S-AD period in FIG. 3 .
- the digital signal based on the amplified optical signal which is obtained by the AD conversion unit 22 is referred to as digital S signal.
- the memory 27 on each column holds the digital N signal and the digital S signal.
- the horizontal scanning circuit that is not illustrated sequentially reads out the digital N signal and the digital S signal from the memory 27 on each column to be output to the external part of the photoelectric conversion apparatus.
- the amplification transistor 16 a is set to be in the non-operating state. An effect attained by this operation will be described.
- a waveform indicated by a broken line in the potential Vline of FIG. 3 represents the potential Vline of the vertical signal line 17 in a case where the amplification transistor 16 a is set to be in the operating state in the period from the time t 3 to the time t 4 for comparison.
- the signal level of the signal ⁇ Vp turns to Hi at the time t 31
- the vertical signal line 17 corresponding to the load of the amplification transistor 16 a starts to be charged rapidly.
- the AD conversion unit 22 performs the AD conversion of the amplified optical signal having the decreased accuracy.
- the signal accuracy of the digital S signal is decreased.
- the signal accuracy of the amplified optical signal is largely decreased. This is because it takes much time until the potential Vline of the potential of the vertical signal line 17 is statically determined since the potential Vline of the vertical signal line 17 is decreased from the potential V 32 to the potential V 22 .
- the decrease in the signal accuracy of the digital S signal in a case where the image is generated by using the signal output by the photoelectric conversion apparatus or a case where the light does not stream onto the photoelectric conversion unit 101 a causes a decreased in a quality of a generated image. Since the image generated by using this digital S signal having the decreased signal accuracy turns to an image having an increased luminance of a part that is to be imaged as black, the decrease in the image quality is easily recognized by human eyes. In a case where a time constant fluctuates for each vertical signal line 17 among the plurality of vertical signal lines 17 , the discharge amount varies for each vertical signal line 17 . According to this, vertical streak patterns are generated in the generated image.
- the photoelectric conversion apparatus sets the amplification transistor 16 a to be in the non-operating state in the period from the time t 3 to the time t 4 .
- the potential Vline of the vertical signal line 17 remains at the potential of the signal based on the reset FD potential. According to this, it is possible to shorten the period since the signal level of the signal ⁇ Vp turns to Lo at the time t 32 until the potential Vline of the potential of the vertical signal line 17 is statically determined.
- the photoelectric conversion apparatus according to the present exemplary embodiment can realize the speeding-up of the photoelectric conversion apparatus.
- the photoelectric conversion apparatus according to the present exemplary embodiment can suppress the decrease in the signal accuracy of the signal based on the potential Vline of the vertical signal line 17 in a case where the optical signal of the photoelectric conversion unit is small.
- the photoelectric conversion apparatus sets the amplification transistor 16 a to be in the non-operating state.
- the magnitude relationship between the potential Vs of the first electrode 201 and the potential of the second electrode 209 is the first electrode 201 ⁇ the second electrode 209 corresponding to a first relationship.
- the magnitude relationship between the potential Vs of the first electrode 201 and the potential of the second electrode 209 is the first electrode 201 >the second electrode 209 corresponding to a second relationship opposite to the first relationship.
- the magnitude relationship between the potential Vs of the first electrode 201 and the potential of the second electrode 209 is the first electrode 201 ⁇ the second electrode 209 that is the same as the first relationship.
- the photoelectric conversion apparatus sets the amplification transistor 16 a to be in the non-operating state in the period from the time t 31 to the time t 32 during which the magnitude relationship between the first electrode 201 and the potential of the second electrode 209 is the second relationship. According to this, the potential Vline of the vertical signal line 17 is restricted within a predetermined range.
- the output control unit that puts the amplification transistor 16 a into the non-operating state according to the present exemplary embodiment is the selection transistor 16 b that interrupts the supply of the current from the current source 18 to the amplification transistor 16 a.
- the potential of the node FD at the period T 4 becomes a potential obtained by adding the potential VS (FD) corresponding to the potential based on the signal carriers to the potential V 21 as indicated by a chain dot line in FIG. 3 .
- This potential obtained by the potential V 21 +VS is described as an example as a potential close to a potential V 31 to facilitate the understanding in FIG. 3 .
- a potential of the signal output by the amplification transistor 16 a corresponds to a potential obtained by the potential V 22 +VS (SF) in the vicinity of the potential V 32 .
- the amplification transistor 16 a when the amplification transistor 16 a is set to be in the non-operating state from the time t 3 to the time t 4 , it takes time until the potential Vline of the vertical signal line 17 reaches the potential V 22 +VS (SF) from the potential V 22 .
- the AD conversion unit 22 starts the AD conversion before the potential Vline of the vertical signal line 17 is statically determined, the decrease in the signal accuracy of the digital S signal occurs.
- the decrease in the luminance of the high luminance part is more difficult to be recognized by the human eyes than the increase in the luminance of the part that is to be imaged as black.
- the example in which the column signal processing unit 20 includes the AD conversion unit 22 has been illustrated.
- the AD conversion unit may be provided in the external part of the photoelectric conversion apparatus.
- the column signal processing unit 20 includes a signal holding unit that holds both the offset signal and the amplified optical signal output by the amplifier 23 .
- the horizontal scanning circuit that is not illustrated sequentially scans the signal holding unit on each of the columns, and the offset signal and the amplified optical signal are both read out from the signal holding unit on each of the columns.
- the photoelectric conversion apparatus outputs both the offset signal and the amplified optical signal or outputs a signal of a difference between the amplified optical signal and the offset signal to the AD conversion unit provided in the external part of the photoelectric conversion apparatus.
- the AD conversion unit converts the signal output from the photoelectric conversion unit into a digital signal.
- the amplification unit is the amplification transistor 16 a
- the amplification unit may be a differential amplifier or a circuit that outputs a signal obtained by amplifying the optical signal like a grounded source circuit.
- the output control unit may set the amplitude of the signal that is output to the vertical signal line 17 to be smaller than a case where the amplification unit outputs the signal on the basis of the potential of the second electrode 209 or may put the amplification unit into the non-operating state.
- the differential amplifier may be put into the non-operating state by turning off the current source that supplies the current to a differential pair of the differential amplifier.
- the circuit that turns off the current source of the differential pair is the output control unit.
- the amplification unit is the grounded source circuit
- a switch that interrupts the power source voltage supplied to the grounded source circuit may be provided on an electric path between the supply unit of the power source voltage and the grounded source circuit as the output control unit.
- the photoelectric conversion unit 101 a may be a Schottky-type photoelectric conversion unit.
- the example in which the pixel output unit 16 outputs the signal to the vertical signal line 17 provided in each column has been described.
- a processing unit having the function of the column signal processing unit 20 is provided in a pixel cell 1000 , and the pixel output unit 16 may output the signal to this processing unit.
- an electric path between the pixel output unit 16 and the processing unit is a signal line where the potential is controlled by the output control unit in the second period.
- the photoelectric conversion apparatus puts the amplification transistor 16 a into the non-operating state in the second period during which the signal ⁇ Vp is at Hi.
- the present exemplary embodiment is not limited to this example, and the output control unit may put the amplification transistor 16 a into the non-operating state at a part of the second period. In this case too, as compared with a case where the amplification transistor 16 a is set to be in the operating state over the entire second period, it is possible to reduce the fluctuation of the potential Vline of the vertical signal line 17 while the amplification transistor 16 a is set to be in the non-operating state at the part of the second period.
- FIG. 4 illustrates a part of a configuration of the photoelectric conversion apparatus according to the present exemplary embodiment.
- components having the same functions as the components illustrated in FIGS. 1A and 1B are assigned with the same reference symbols assigned in FIGS. 1A and 1B .
- FIG. 4 illustrates a configuration in which the pixel output unit 16 is omitted from the pixel cell 1000 .
- the other configurations of the pixel cell 1000 are the same as the configurations of the pixel cell 1000 illustrated in FIGS. 1A and 1B .
- the photoelectric conversion apparatus includes a switch SW 0 on an electric path between the current source 18 and the selection transistor 16 b.
- the switch SW 0 is on when a signal level of a signal ⁇ Isel output from the timing generator that is not illustrated is at Hi and is off when the signal level is at Lo.
- the operation by the photoelectric conversion apparatus according to the present exemplary embodiment is the same as the operation illustrated in FIG. 3 except for the signal level of the signal ⁇ Sel from the time t 3 to the time t 4 and the signal ⁇ Isel.
- the signal level of the signal ⁇ Sel remains to Hi in the period from the time t 3 to the time t 4 too.
- the timing generator sets the signal level of the signal ⁇ Isel to Lo in the period from the time t 3 to the time t 4 to turn the switch SW 0 off in the photoelectric conversion apparatus according to the present exemplary embodiment.
- the timing generator sets the signal level of the signal ⁇ Isel to Hi to turn the switch SW 0 on. According to this, in the other periods, while the signal ⁇ Sel is at Hi, the amplification transistor 16 a is supplied with the current from the current source 18 .
- the amplification transistor 16 a can be put into the non-operating state in the second period described in the first exemplary embodiment. Therefore, the potential Vline of the vertical signal line 17 is restricted within the predetermined range. According to this, the same effect described in the first exemplary embodiment can be also attained by the photoelectric conversion apparatus according to the present exemplary embodiment.
- the period during which the signal level of the signal ⁇ Isel is set to Lo may be at least the period from the time t 31 to the time t 32 during which the signal level of the signal ⁇ Vp is at Hi.
- the output control unit according to the present exemplary embodiment which puts the amplification transistor 16 a into the non-operating state is the switch SW 0 that interrupts the supply of the current from the current source 18 to the amplification transistor 16 a.
- FIG. 5 illustrates a part of a configuration of the photoelectric conversion apparatus according to the present exemplary embodiment.
- components having the same functions as the components illustrated in FIG. 5 are assigned with the same reference symbols assigned in FIGS. 1A and 1B .
- FIG. 5 illustrates a configuration in which the pixel output unit 16 is omitted from the pixel cell 1000 .
- the other configurations of the pixel cell 1000 are the same as the configurations of the pixel cell 1000 illustrated in FIGS. 1A and 1B .
- the photoelectric conversion apparatus includes the switch SW 1 electrically connected to the vertical signal line 17 and a potential supply unit 35 .
- the switch SW 1 is on when a signal level of a signal ⁇ Csel output from the timing generator that is not illustrated is at Hi and is off when the signal level is at Lo.
- the potential supply unit 35 is a circuit that supplies a potential to the vertical signal line 17 such that the potential Vline of the vertical signal line 17 does not become higher than or equal to a predetermined potential.
- the operation by the photoelectric conversion apparatus according to the present exemplary embodiment is the same as the operation illustrated in FIG. 3 except for the signal level of the signal ⁇ Sel from the time t 3 to the time t 4 and the signal ⁇ Csel.
- the signal level of the signal ⁇ Sel remains at Hi in the period from the time t 3 to the time t 4 too.
- the timing generator sets the signal level of the signal ⁇ Csel to Hi in the period from the time t 3 to the time t 4 to turn the switch SW 1 on in the photoelectric conversion apparatus according to the present exemplary embodiment.
- the potential Vline of the vertical signal line 17 is clipped at the potential output by the potential supply unit 35 .
- the potential Vline of the vertical signal line 17 becomes a potential having a smaller amplitude than the signal that is output by the amplification transistor 16 a on the basis of the potential V 31 of the node FD.
- the timing generator sets the signal level of the signal ⁇ Csel to Lo to turn the switch SW 1 off.
- the photoelectric conversion apparatus can set the potential Vline of the vertical signal line 17 in the second period described in the first exemplary embodiment to be the potential having the smaller amplitude than the potential of the signal output by the amplification transistor 16 a. That is, the output control unit sets a range of the amplitude in which the potential Vline of the vertical signal line 17 is changed to be smaller than a range of the amplitude that can be output by the amplification transistor 16 a. That is, the potential Vline of the vertical signal line 17 is restricted within the predetermined range.
- the photoelectric conversion apparatus according to the present exemplary embodiment can also attain the same effect as the photoelectric conversion apparatus according to the first exemplary embodiment.
- the period during which the signal level of the signal ⁇ Csel is set to Lo may be at least the period from the time t 31 to the time t 32 during which the signal level of the signal ⁇ Vp is at Hi.
- the potential supplied by the potential supply unit 35 when the signal level of the signal ⁇ Csel is at Hi may be higher than or equal to the potential V 22 and also lower than the potential V 32 .
- the potential supplied by the potential supply unit 35 is the potential V 22 .
- the timing generator sets the signal ⁇ Csel to Lo in the period after the time t 4 during which the amplification transistor 16 a outputs the signal based on the optical signal.
- the timing generator may set the signal ⁇ Csel to Hi.
- the potential supply unit 35 may be operated to suppress the potential Vline of the vertical signal line 17 so as not to become higher than or equal to a predetermined potential.
- the output control unit in which the amplification transistor 16 a sets the amplitude of the signal that is output to the vertical signal line 17 to be smaller than that in a case where the signal is output on the basis of the potential of the second electrode 209 is the potential supply unit 35 .
- FIG. 6 illustrates a configuration of the photoelectric conversion apparatus according to the present exemplary embodiment.
- components having the same functions as the components illustrated in FIG. 6 are assigned with the same reference symbols assigned in FIGS. 1A and 1B .
- the unit pixel 10 a includes the photoelectric conversion unit 101 a and a transfer transistor 15 a.
- a unit pixel 10 b includes a photoelectric conversion unit 101 b and a transfer transistor 15 b.
- the photoelectric conversion unit 101 a includes the first electrode 201 , the blocking layer 203 , the photoelectric conversion layer 205 , the insulating layer 207 , and the second electrode 209 .
- the blocking layer 203 is provided between the first electrode 201 and the photoelectric conversion layer 205
- the photoelectric conversion layer 205 is provided between the blocking layer 203 and the insulating layer 207 .
- the insulating layer 207 is provided between the photoelectric conversion layer 205 and the second electrode 209 .
- the configuration of the photoelectric conversion unit 101 b is the same as the configuration of the photoelectric conversion unit 101 a.
- Each of the transfer transistors 15 a and 15 b is provided so as to correspond to each of the plurality of photoelectric conversion units 101 a and 101 b.
- Each of the transfer transistors 15 a and 15 b is a transfer unit that transfers the optical signal of each of the plurality of photoelectric conversion units 101 a and 101 b to the amplification transistor 16 a corresponding to the amplification unit.
- the transfer transistor 15 a is electrically connected to the second electrode 209 of the photoelectric conversion unit 101 a.
- the transfer transistor 15 b is electrically connected to a second electrode of the photoelectric conversion unit 101 b.
- a signal ⁇ T 1 is input to a gate of the transfer transistor 15 a from the vertical scanning circuit that is not illustrated.
- a signal ⁇ T 2 is input to a gate of the transfer transistor 15 b from the vertical scanning circuit that is not illustrated.
- a power source unit 30 b supplies the potential Vs to a first electrode of the photoelectric conversion unit 101 b.
- FIG. 7A illustrates an operation by the photoelectric conversion apparatus illustrated in FIG. 6 .
- the optical signals of both the two photoelectric conversion units 101 a and 101 b are added at the node FD to each other.
- the amplification transistor 16 a outputs a signal to the vertical signal line 17 on the basis of the potential of the node FD that has a potential of this added optical signal.
- the vertical scanning circuit sets the signal level of the signal ⁇ T 1 to Hi in a period from the time t 1 to a time t 6 .
- the vertical scanning circuit also sets the signal level of the signal ⁇ T 1 to Hi and the signal level of the signal ⁇ T 2 to Hi in the period from the time t 1 to the time t 6 .
- the vertical scanning circuit sets the signal level of the signal ⁇ Vp to Hi in the period from the time t 31 to the time t 32 . According to this, the optical signal is output from both the two photoelectric conversion units 101 a and 101 b to the node FD. At the node FD, the optical signals of these two photoelectric conversion units 101 a and 101 b are added to each other.
- the vertical scanning circuit sets the signal level of the signal ⁇ Sel to Lo in the period from the time t 3 to the time t 4 including the period from the time t 31 to the time t 32 . According to this, since the current from the current source 18 to the amplification transistor 16 a is interrupted, the amplification transistor 16 a is put into the non-operating state.
- the vertical scanning circuit sets the signal level of the signal ⁇ Sel to Hi. According to this, the amplification transistor 16 a is supplied with the current again from the current source 18 . Thus, the amplification transistor 16 a is put into the operating state.
- the node FD has the potential based on the optical signal.
- the amplification transistor 16 a outputs a signal based on the potential of the signal obtained by adding the optical signals of the photoelectric conversion units 101 a and 101 b to each other to the vertical signal line 17 .
- the photoelectric conversion apparatus can also attain the same effect as the first exemplary embodiment.
- the output control unit according to the present exemplary embodiment which puts the amplification transistor 16 a into the non-operating state is the selection transistor 16 b that interrupts the supply of the current from the current source 18 to the amplification transistor 16 a.
- the potential Vp 1 according to the present exemplary embodiment corresponding to the Hi signal level of the signal ⁇ Vp is 3/2 times the Hi signal level of the potential Vp 1 according to the first exemplary embodiment when the capacitance values of the photoelectric conversion units 101 a and 101 b are the same.
- the changing quantity of the potential dVB of the second electrode 209 which is represented by the above-described Expression (1) is represented as follows while a capacitance value of the photoelectric conversion unit 101 b is set as C 3 in the operation illustrated in FIG. 7A .
- dVB ( Vd 2 ⁇ Vd 1) ⁇ C 1/( C 1+ C 2+ C 3) (3)
- the potential Vp 1 is set as 15 V.
- the potential Vp 1 is multiplied by 3/2 in a case where the optical signals are read out at the same time from the two photoelectric conversion units 101 a and 101 b as in FIG. 7A .
- the potential Vp 1 is set to be the same in a case where the optical signals are individually read out from the photoelectric conversion unit 101 a and the photoelectric conversion unit 101 b and a case where the optical signals are read out at the same time from the photoelectric conversion units 101 a and 101 b.
- the capacitance value of the capacitance element 12 b is doubled in a case where the optical signals are read out at the same time from the two photoelectric conversion units 101 a and 101 b as compared with a case where the optical signals are individually read out from the photoelectric conversion unit 101 a and the photoelectric conversion unit 101 b.
- FIG. 7B illustrates a configuration of the capacitance element 12 b in which the capacitance value is variable as described above.
- the capacitance element 12 b includes capacitance elements C 11 and C 12 and a switch SW 3 . Capacitance values of the capacitance elements C 11 and C 12 are set to be equal to each other.
- the timing generator sets the signal level of the signal ⁇ Csel to Lo to turn the switch SW 3 off. According to this, the buffer circuit 12 a does not supply the signal ⁇ Vp to the capacitance element C 12 but supplies the signal ⁇ Vp to the capacitance element C 11 .
- the timing generator sets the signal level of the signal ⁇ Csel to Hi.
- the buffer circuit 12 a supplies the signal ⁇ Vp to both the capacitance elements C 11 and C 12 .
- the capacitance value of the capacitance element 12 b in FIG. 7B can be doubled in a case where the optical signals are read out at the same time from the two photoelectric conversion units 101 a and 101 b as compared with a case where the optical signals are individually read out from the photoelectric conversion unit 101 a and the photoelectric conversion unit 101 b.
- the switch SW 0 may be provided on the electric path between the current source 18 and the selection transistor 16 b as in the photoelectric conversion apparatus according to the second exemplary embodiment.
- the potential supply unit 35 that supplies the potential to the vertical signal line 17 and the switch SW 1 that switches a conductive state and a non-conductive state of the electric path between the potential supply unit 35 and the vertical signal line 17 may be provided as in the photoelectric conversion apparatus according to the third exemplary embodiment.
- the photoelectric conversion apparatus may combine the operation of individually reading out the optical signal from each of the plurality of photoelectric conversion units with the operation of reading out the signal obtained by adding the optical signals of the plurality of photoelectric conversion units to each other illustrated in FIG. 7A .
- An example of the above-described operation will be illustrated in FIG. 10 .
- a period from the time t 21 to a time t 26 is a period during which an operation related to the reading of the noise signal and the optical signal of the photoelectric conversion unit 101 a is performed.
- a period from a time t 27 to the time t 31 is a period during which an operation related to the reading of the signal obtained by adding the optical signals of the photoelectric conversion unit 101 a and the photoelectric conversion unit 101 b to each other is performed.
- the signal holding unit holds an A signal corresponding to a signal obtained by amplifying the optical signal of the photoelectric conversion unit 101 a by the amplification transistor 16 a and an amplifier 19 at the time t 26 .
- the signal holding unit holds an A+B signal corresponding to a signal obtained by amplifying the signal, which is obtained by adding the optical signals of the photoelectric conversion unit 101 a and the photoelectric conversion unit 101 b to each other, by the amplification transistor 16 a and the amplifier 19 .
- the photoelectric conversion apparatus outputs both the A signal and the A+B signal to the external part of the photoelectric conversion apparatus.
- the output signal processing unit provided in the external part of the photoelectric conversion apparatus can obtain a B signal by subtracting the A signal from the A+B signal.
- the B signal generated by the output signal processing unit is a signal equivalent to the signal obtained by amplifying the optical signal of the photoelectric conversion unit 101 b by the amplification transistor 16 a and the amplifier 19 .
- the photoelectric conversion apparatus further includes a micro lens array in which a plurality of micro lenses are provided, and one micro lens is provided to each of the photoelectric conversion units 101 a and 101 b is conceivable.
- the output signal processing unit can detect a phase difference between the light incident on the photoelectric conversion unit 101 a and the light incident on the photoelectric conversion unit 101 b by the B signal generated by the output signal processing unit and the A signal output by the photoelectric conversion apparatus.
- the photoelectric conversion system including the photoelectric conversion apparatus and the output signal processing unit can perform focus detection based on a phase difference detection system.
- the output signal processing unit can generate an image by using the A+B signal output from the photoelectric conversion apparatus.
- the configuration has been described in which the two photoelectric conversion units 101 a and 101 b share the single capacitance element 12 b and the single amplification transistor 16 a. It is sufficient when a plurality of photoelectric conversion units are shared by the single capacitance element 12 b and the single amplification transistor 16 a.
- the plurality of photoelectric conversion units 101 commonly electrically connected to the node FD in a case where the number of the optical signals read out at the same time to the node FD is M that is higher than N (N is an integer higher than or equal to 1), the Hi signal level of the signal ⁇ Vp is set to be still higher as compared with a case where the above-described number of the optical signals is N.
- the single capacitance element 12 b and the single amplification transistor 16 a may be shared by the plurality of photoelectric conversion units on which the color filters of the same color are arranged.
- each of the plurality of amplification transistors 16 a is provided to each of the plurality of photoelectric conversion units 101 a and 101 b.
- each of the plurality of pixel cells 1000 includes the same number of the amplification transistors 16 a as the number of photoelectric conversion units provided in each of the pixel cells 1000 .
- a configuration in which the pixel cells 1000 belonging to a same row share the single capacitance element 12 b may be adopted.
- each of the plurality of buffer circuits 12 a is provided so as to correspond to each of the plurality of capacitance elements 12 b. Since the buffer circuit 12 a is provided so as to correspond to the capacitance element 12 b in the above-described manner, it is possible to reduce the load on the capacitance potential supply unit.
- FIG. 8 illustrates a configuration of the photoelectric conversion apparatus according to the present exemplary embodiment.
- the photoelectric conversion apparatus according to the present exemplary embodiment includes a transistor 40 between the node FD and the input node of the amplification transistor 16 a.
- the transistor 40 is on when a signal level of a signal ⁇ T 3 output from the vertical scanning circuit is at Hi and is off when the signal level of the signal ⁇ T 3 is at Lo. That is, the transistor 40 is a second switch that switches a conductive state and a non-conductive state of the electric path between the node FD corresponding to a third node where the second electrode 209 is electrically connected to the capacitance element 12 b and the input node of the amplification transistor 16 a.
- the operation by the photoelectric conversion apparatus according to the present exemplary embodiment is the same as the operation of FIG. 7A described in the fourth exemplary embodiment except for the signal ⁇ Sel and the signal ⁇ T 3 .
- the vertical scanning circuit sets the signal level of the signal ⁇ Sel to Hi in the period from the time t 3 to the time t 4 too.
- the vertical scanning circuit sets the signal level of the signal ⁇ T 3 to Lo in the period from the time t 3 to the time t 4 .
- the vertical scanning circuit sets the signal level of the signal ⁇ T 3 to Hi in a period other than the period from the time t 3 to the time t 4 .
- the photoelectric conversion apparatus according to the present exemplary embodiment can also attain the same effect as the photoelectric conversion apparatus according to the fourth exemplary embodiment.
- the output control unit which sets the amplitude of the signal that is output to the vertical signal line 17 to be smaller as compared with a case where the amplification transistor 16 a outputs the signal on the basis of the potential of the second electrode 209 is the transistor 40 .
- the photoelectric conversion apparatus can be applied to various photoelectric conversion systems.
- Examples of the photoelectric conversion system include a digital still camera, a digital camcorder, a monitoring camera, and the like.
- FIG. 9 is a schematic diagram of the photoelectric conversion system in which the photoelectric conversion apparatus according to any one of the first to fifth exemplary embodiments of the first to fifth exemplary embodiments is applied to the digital still camera as an example of the photoelectric conversion system.
- the photoelectric conversion system exemplified in FIG. 9 includes a photoelectric conversion apparatus 154 , a barrier 151 that projects a lens, a lens 152 that forms an optical image of a subject onto the photoelectric conversion apparatus 154 , and a diaphragm 153 that sets the quantity of light that passes through the lens 152 to be variable.
- the lens 152 and the diaphragm 153 are an optical system in which light is focused on the photoelectric conversion apparatus 154 .
- the photoelectric conversion system exemplified in FIG. 9 also includes an output signal processing unit 155 that performs processing on an output signal that is output from the photoelectric conversion apparatus 154 .
- the output signal processing unit 155 performs AD conversion for converting an analog signal output by the photoelectric conversion apparatus 154 into a digital signal. In addition, the output signal processing unit 155 also performs operation of outputting image data while various corrections and compressions are performed when necessary.
- the photoelectric conversion system exemplified in FIG. 9 further includes a buffer memory unit 156 that temporarily stores the image data and an external interface unit (external I/F unit) 157 that establishes a communication with an external computer or the like.
- the photoelectric conversion system further includes a recording medium 159 such as a semiconductor memory for performing recording or reading of picked-up image data and a recording medium control interface unit (recording medium control I/F unit) 158 for performing recording or reading in the recording medium 159 . It is noted that the recording medium 159 may be built in the photoelectric conversion system or may be detachably attached.
- the photoelectric conversion system further includes an overall control/calculation unit 1510 that controls various calculations and the entire digital still camera and a timing generation unit 1511 that outputs various timing signals to the photoelectric conversion apparatus 154 and the output signal processing unit 155 .
- the timing signals or the like may be output from an external part, and it is sufficient when the photoelectric conversion system includes at least the photoelectric conversion apparatus 154 and the output signal processing unit 155 that processes the output signal that is output from the photoelectric conversion apparatus 154 .
- the photoelectric conversion system according to the present exemplary embodiment can perform image pickup operation.
- the output signal processing unit 155 may also perform the phase difference detection by using the signal output by the photoelectric conversion apparatus 154 as described in the fourth exemplary embodiment.
- the speeding-up of the photoelectric conversion apparatus and the improvement in the accuracy of the signal based on the optical signal in a case where the signal level of the optical signal is small can be realized.
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Abstract
An output control unit configured to set an amplitude of a signal output to a signal line to be smaller as compared with a case where an amplification unit outputs a signal on the basis of a potential of the input node or put the amplification unit into a non-operating state is provided.
Description
- This application is a Continuation of U.S. application Ser. No. 14/814058, filed Jul. 30, 2015, which claims priority from Japanese Patent Application No. 2014-156784, filed Jul. 31, 2014, which are hereby incorporated by reference herein in their entireties.
- The present invention relates to a photoelectric conversion apparatus, a photoelectric conversion system, and a driving method for the photoelectric conversion apparatus.
- A pixel of a photoelectric conversion apparatus disclosed in Japanese Patent Laid-Open No. 2013-131900 includes a so-called MIS-type photoelectric conversion unit constituted by a metal, an insulating film, and a semiconductor. The photoelectric conversion unit accumulates signal carriers. The pixel further includes an amplification transistor configured to output a signal based on the signal carriers accumulated by the photoelectric conversion unit.
- The MIS-type photoelectric conversion unit disclosed in Japanese Patent Laid-Open No. 8-116044 includes a first electrode, a second electrode provided on a substrate side with respect to the first electrode, and a photoelectric conversion layer arranged between the first electrode and the second electrode. Japanese Patent Laid-Open No. 8-116044 discloses that, after a magnitude relationship between potentials of the first electrode and the second electrode is set to be reversed from that at the time of the accumulation of the signal carriers to discharge the accumulated signal carriers from the photoelectric conversion layer, the magnitude relationship is returned to be the same as that at the time of the accumulation of the signal carriers again.
- According to an aspect of the present invention, there is provided a photoelectric conversion apparatus including: a photoelectric conversion unit; an amplification unit; a signal line; and an output control unit, in which the photoelectric conversion unit includes a first electrode, a second electrode, a photoelectric conversion layer that is arranged between the first electrode and the second electrode and accumulates signal carriers, and an insulating layer arranged between the photoelectric conversion layer and the second electrode, an optical signal based on the accumulated signal carriers is output to an input node of the amplification unit, an output node of the amplification unit is connected to the signal line, a magnitude relationship between a potential applied to the first electrode and a potential applied to the second electrode is a first relationship in a first period during which the photoelectric conversion layer accumulates the signal carriers, and the magnitude relationship is a second relationship that is opposite to the first relationship in a second period during which the signal carriers are discharged from the photoelectric conversion layer while the second electrode is applied with a potential having a different value from the potential applied in the first period, and the output control unit restricts a potential range of the signal line to be within a predetermined range narrower than a potential range of an output of the amplification unit in at least a part of the second period, or the output control unit puts the amplification unit into a non-operating state in at least a part of the second period.
- In addition, according to another aspect of the present invention, there is provided a driving method for a photoelectric conversion apparatus including a photoelectric conversion unit, an amplification unit, a signal line, the photoelectric conversion unit including a first electrode, a second electrode, a photoelectric conversion layer that is arranged between the first electrode and the second electrode and accumulates signal carriers, and an insulating layer arranged between the photoelectric conversion layer and the second electrode, the driving method including: setting a magnitude relationship between a potential applied to the first electrode and a potential applied to the second electrode to be a first relationship in a first period during which the photoelectric conversion layer accumulates the signal carriers; setting the magnitude relationship to be a second relationship that is opposite to the first relationship in a second period during which the signal carriers are discharged from the photoelectric conversion layer while the second electrode is applied with a potential having a different value from the potential applied in the first period; and restricting a potential range of the signal line to be within a predetermined range narrower than a potential range of an output of the amplification unit in at least a part of the second period or putting the amplification unit into a non-operating state in at least a part of the second period.
- Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
-
FIG. 1A illustrates an example configuration of a photoelectric conversion apparatus, andFIG. 1B illustrates an example configuration of a column signal processing unit. -
FIGS. 2A to 2D illustrate an example operation by a photoelectric conversion unit. -
FIG. 3 illustrates an example operation by the photoelectric conversion apparatus. -
FIG. 4 illustrates an example configuration of the photoelectric conversion apparatus. -
FIG. 5 illustrates an example of the photoelectric conversion apparatus. -
FIG. 6 illustrates an example of the photoelectric conversion apparatus. -
FIG. 7A illustrates an example operation by the photoelectric conversion apparatus, andFIG. 7B illustrates an example configuration of a capacitance element. -
FIG. 8 illustrates an example of the photoelectric conversion apparatus. -
FIG. 9 illustrates an example configuration of a photoelectric conversion system. -
FIG. 10 illustrates an example operation by the photoelectric conversion apparatus. - In a case where accumulated signal carriers are discharged from an MIS photoelectric conversion layer, a potential supplied to a second electrode is changed from a first potential to a second potential. According to this, a potential of an input node of an amplification transistor electrically connected to the second electrode is also changed from the first potential to the second potential. Therefore, a signal level of a signal output by the amplification transistor is changed. Thereafter, a potential supplied to the second electrode is changed from the second potential to the first potential. According to this, the potential of the input node of the amplification transistor turns to a potential based on an optical signal from the second potential. In a case where a signal level of the optical signal is small, it takes time until the signal output by the amplification transistor settles down from the signal level output when the potential of the input node is the second potential to the signal level based on the optical signal. Therefore, a situation may occur that this time spent until the signal output by the amplification transistor settles down to the signal level based on the optical signal hinders speeding-up of a photoelectric conversion apparatus.
- In addition, before the signal output by the amplification transistor settles down from the signal level output when the potential of the input node is the second potential to the signal level based on the optical signal, a circuit in a following stage of the amplification transistor may hold the signal output by the amplification transistor in some cases. In this case, a situation occurs that an accuracy of the signal held by the circuit in the following stage of the amplification transistor is decreased.
- Hereinafter, photoelectric conversion apparatuses according to the respective exemplary embodiments will be described with reference to the drawings.
- A
photoelectric conversion apparatus 10 illustrated inFIG. 1A includes apixel cell 1000, acapacitance driving unit 12, avertical signal line 17, acurrent source 18, and a columnsignal processing unit 20. Thephotoelectric conversion apparatus 10 also includes apower source unit 30 a. - The
pixel cell 1000 includes aunit pixel 10 a, areset unit 14, and apixel output unit 16. -
FIG. 1A illustrates thesingle pixel cell 1000, which corresponds to one of a plurality ofpixel cells 1000 arranged across a plurality of rows and a plurality of columns.FIG. 1A also illustrates one each of thevertical signal lines 17, thecurrent sources 18, and the columnsignal processing units 20. These respectively correspond to one of thevertical signal lines 17 on the plurality of columns, thecurrent sources 18 on the plurality of columns, and the columnsignal processing units 20 on the plurality of columns which are provided while corresponding to the respective columns where the plurality ofpixel cells 1000 are arranged. - The
unit pixel 10 a includes aphotoelectric conversion unit 101 a. Thephotoelectric conversion unit 101 a includes afirst electrode 201, ablocking layer 203, aphotoelectric conversion layer 205, aninsulating layer 207, and asecond electrode 209. Theblocking layer 203 is provided between thefirst electrode 201 and thephotoelectric conversion layer 205, and thephotoelectric conversion layer 205 is provided between theblocking layer 203 and theinsulating layer 207. Theinsulating layer 207 is provided between thephotoelectric conversion layer 205 and thesecond electrode 209. - The
first electrode 201 is constituted by a conductive member having a high transmittance with respect to light in a wavelength band in which thephotoelectric conversion layer 205 has sensitivity. For example, a compound containing indium and/or tin such as indium tin oxide (ITO) or a compound such as ZnO is used as a material of thefirst electrode 201. According to this, thephotoelectric conversion layer 205 according to the present exemplary embodiment can obtain more light than a case where an opaque electrode such as copper is used as thefirst electrode 201. As another example, thefirst electrode 201 according to the present exemplary embodiment may be formed of polysilicon or metal having a thickness to an extent that a predetermined amount of light transmits. - The
blocking layer 203 suppresses injection into thephotoelectric conversion layer 205 of electric carriers having a same conductive type as signal carriers accumulated by thephotoelectric conversion layer 205 from thefirst electrode 201 to thephotoelectric conversion layer 205. Thephotoelectric conversion layer 205 is depleted by a potential difference between a potential Vs applied to thefirst electrode 201 and a potential of thesecond electrode 209. A gradient of the potential of thephotoelectric conversion layer 205 is inverted in accordance with a relationship between the potential Vs applied to thefirst electrode 201 and the potential of thesecond electrode 209. With the above-described configuration, thephotoelectric conversion layer 205 can perform the accumulation of the signal carriers and discharge of the accumulated signal carriers. An operation by thephotoelectric conversion unit 101 a will be described below. - It is noted that, according to the present exemplary embodiment, a power source voltage supplied to the
first electrode 201 is the potential Vs supplied from thepower source unit 30 a. - The
photoelectric conversion layer 205 is formed of intrinsic amorphous silicon (hereinafter, will be referred to as a-Si), low concentration P-type a-Si, low concentration N-type a-Si, or the like. Alternatively, thephotoelectric conversion layer 205 may be formed of a compound semiconductor. For example, the compound semiconductor includes a group III-V compound semiconductor such as BN, GaAs, GaP, AlSb, or GaAlAsP, a group II-VI compound semiconductor such as CdSe, ZnS, or HdTe, or a group IV-VI compound semiconductor such as PbS, PbTe, or CuO. Alternatively, thephotoelectric conversion layer 205 may be formed of an organic material. For example, fullerene, coumarin 6 (C6), rhodamine 6G (R6G), zinc phthalocyanine (ZnPc), quinacridone, phthalocyanine compounds, naphthalocyanine compounds, or the like can be used. Furthermore, a quantum dot film constituted by including the above-described compound semiconductor can be used can be used as thephotoelectric conversion layer 205. - In a case where the
photoelectric conversion layer 205 is constituted by a semiconductor, an impurity concentration of this semiconductor may be low, or this semiconductor may be intrinsic. According to the above-described configuration, since the depletion layer can be sufficiently extended in thephotoelectric conversion layer 205, it is possible to attain advantages such as the increase in the sensitivity and the noise reduction. - An N-type or P-type semiconductor using the same material as the semiconductor used for the
photoelectric conversion layer 205 and also having a higher impurity concentration than the semiconductor used for thephotoelectric conversion layer 205 can be used for theblocking layer 203. For example, in a case where a-Si is used for thephotoelectric conversion layer 205, an N-type a-Si into which impurity is doped or a P-type a-Si into which impurity is doped is used for theblocking layer 203. Since a position of a Fermi level varies depending on a difference of the impurity concentration, theblocking layer 203 functions as a potential barrier with respect to only one of the electron and the hole. In a case where thephotoelectric conversion layer 205 includes the quantum dot film, using the same material as the semiconductor used for the quantum dot film and also having theblocking layer 203 of a conductivity type opposite to that of the quantum dot film may be provided. For example, in a case where the quantum dot film is P-type PbS, theblocking layer 203 may be N-type PbS. Even in the case of theblocking layer 203 using the same material as the quantum dot film and having the same conductivity type, it is sufficient when the impurity concentration of the quantum dot film is set to be different from that of theblocking layer 203. - Alternatively, the
blocking layer 203 can be constituted by a material different from that of thephotoelectric conversion layer 205. According to the above-described configuration, a hetero junction is formed. Since a bandgap varies depending on a difference of the materials, the potential barrier can be formed with respect to only one of the electron and the hole. In a case where thephotoelectric conversion layer 205 contains the quantum dot film, for example, PbS may be used for the quantum dot film, and ZnO may be used for theblocking layer 203. - The insulating
layer 207 is arranged between thephotoelectric conversion layer 205 and thesecond electrode 209. For example, amorphous silicon oxide (hereinafter, will be referred to as a-SiO), amorphous silicon nitride (a-SiN), or an organic material is used as a material of the insulatinglayer 207. A thickness of the insulatinglayer 207 may be set as a thickness to an extent that signal carriers do not transmit by a tunnel effect. With the above-described configuration, the leak current can be reduced, and the noise can be reduced. Specifically, it is sufficient when the thickness of the insulatinglayer 207 may be 50 nm or higher. - In a case where the amorphous film is used as the
blocking layer 203, thephotoelectric conversion layer 205, and the insulatinglayer 207, hydrogenation processing may be performed, and a dangling bond may be terminated by hydrogen. With the above-described configuration, it is possible to reduce the noise. - The
second electrode 209 is constituted by a conductive member such as metal. A same material as a conductive material constituting a conductive line or a conductive material constituting a pad electrode for a connection to an external part is used for thesecond electrode 209. According to the above-described configuration, thephotoelectric conversion unit 101 a according to the present exemplary embodiment can be formed at the same time as thesecond electrode 209 and the conductive material constituting the conductive line or the pad electrode. Therefore, thephotoelectric conversion unit 101 a according to the present exemplary embodiment can be manufactured in a more simplified manufacturing process as compared with a case where thesecond electrode 209 is formed of a material different from that of the conductive material constituting the conductive line or the pad electrode. - The
first electrode 201 of thephotoelectric conversion unit 101 a is electrically connected to thepower source unit 30 a. Thepower source unit 30 a supplies the potential Vs to thefirst electrode 201. Thereset unit 14 includes areset transistor 14 a. In thereset transistor 14 a, one of a source and a drain is supplied with a reset voltage Vres, and the other one of the source and the drain is electrically connected to a node FD. The reset voltage Vres is a potential lower than the potential Vs. According to the present exemplary embodiment, the potential Vs is set as 5 V, and the reset voltage Vres is set as 2 V. A signal φRes is input to a gate of thereset transistor 14 a from a vertical scanning circuit that is not illustrated in the drawing. - The
capacitance driving unit 12 includes abuffer circuit 12 a and acapacitance element 12 b. A first node corresponding to one node of thecapacitance element 12 b is electrically connected to the node FD corresponding to a third node. Furthermore, the first node of thecapacitance element 12 b is electrically connected to thesecond electrode 209 of thephotoelectric conversion unit 101 a. A second node corresponding to the other node of thecapacitance element 12 b is electrically connected to thebuffer circuit 12 a. A signal φVp is input to thebuffer circuit 12 a from a timing generator that is not illustrated in the drawing. Thebuffer circuit 12 a supplies a potential obtained by buffering a potential of the signal φVp to thecapacitance element 12 b. The timing generator is a capacitance potential supply unit configured to supply the signal φVp having a different potential to thecapacitance element 12 b via thebuffer circuit 12 a. - The
capacitance element 12 b is electrically connected to the node FD. Thecapacitance element 12 b includes, for example, two electrodes facing each other. The two electrodes are formed of a material such as polysilicon or a metal. Alternatively, thecapacitance element 12 b is constituted by including a semiconductor region and a gate electrode arranged on the semiconductor region. - According to the configuration in which the
capacitance element 12 b is connected to the node FD, it is possible to reduce the noise when an optical signal is read out from thephotoelectric conversion unit 101 a. This noise reduction effect will be described. - The photoelectric conversion apparatus according to the present exemplary embodiment controls the potential of the node FD. The potential of the
second electrode 209 of thephotoelectric conversion unit 101 a changes in accordance with a ratio of thecapacitance element 12 b to a combined capacitance of a gate capacitance of anamplification transistor 16 a connected by the node FD and a capacitance value of a capacitance component between thefirst electrode 201 and the second electrode 209 (hereinafter, will be referred to as capacitance value of thephotoelectric conversion unit 101 a). This is because thecapacitance element 12 b and the combined capacitance can be regarded as two capacitance connected in series. - In the photoelectric conversion apparatus according to the present exemplary embodiment, as the capacitance value of the
capacitance element 12 b is higher, the changing quantity of the potential of thesecond electrode 209 when the signal ®Vp is changed becomes higher. - According to the present exemplary embodiment, the
capacitance element 12 b is electrically connected to the node FD. A node of thecapacitance element 12 b to which the potential of the signal φVp is input is electrically separated from the node FD. - In the photoelectric conversion apparatus according to the present exemplary embodiment, as the capacitance value of the node FD is higher, the changing quantity of the potential of the
second electrode 209 when the potential of the node FD is changed becomes higher. - According to the present exemplary embodiment, the
capacitance element 12 b is electrically connected to the node FD. Therefore, when the potential of thesecond electrode 209 is controlled to read out the optical signal from thephotoelectric conversion unit 101 a, it is possible to apply a large potential difference between thefirst electrode 201 and thesecond electrode 209. According to this, since the photoelectric conversion apparatus according to the present exemplary embodiment can easily deplete thephotoelectric conversion layer 205, it is possible to reduce the noise included in the optical signal. - The
pixel output unit 16 includes theamplification transistor 16 a and aselection transistor 16 b. A gate corresponding to an input node of theamplification transistor 16 a is electrically connected to the node FD. A potential Vdd is input to one of a source and a drain of theamplification transistor 16 a, and the other one of the source and the drain is electrically connected to one of a source and a drain of theselection transistor 16 b. The other one of the source and the drain of theselection transistor 16 b are electrically connected to thevertical signal line 17. A signal φSel is input to a gate of theselection transistor 16 b from the vertical scanning circuit that is not illustrated. Theamplification transistor 16 a corresponding to an amplification unit outputs a signal obtained by amplifying the signal output from thesecond electrode 209. A node connected to thevertical signal line 17 of theselection transistor 16 b is an output node of the amplification unit. - The
current source 18 is electrically connected to theselection transistor 16 b via thevertical signal line 17. When theselection transistor 16 b is turned on, theamplification transistor 16 a and thecurrent source 18 constitute a source follower circuit. - The signal output from the
amplification transistor 16 a via theselection transistor 16 b to thevertical signal line 17 is input to the columnsignal processing unit 20. The columnsignal processing unit 20 outputs a signal based on the signal output from theamplification transistor 16 a to thevertical signal line 17. -
FIG. 1B illustrates a configuration of the columnsignal processing unit 20. - The column
signal processing unit 20 includes acolumn amplification unit 21 and an analog-to-digital (AD)conversion unit 22. Thecolumn amplification unit 21 includes a capacitance element CO, a capacitance element C1, a switch SW1, and anamplifier 23. An operation by the switch SW1 is controlled by a signal φC0 output from the timing generator that is not illustrated. A signal output from theamplification transistor 16 a via the capacitance element C0 to thevertical signal line 17 is input to an inverting input node of theamplifier 23. A reference voltage Vref is input to a non-inverting input node of theamplifier 23. A signal Vamp output from theamplifier 23 is a signal obtained by inverting and amplifying the signal input to the inverting input node of theamplifier 23. An amplification factor of theamplifier 23 is k that is a negative value. - The
AD conversion unit 22 includes acomparison unit 25 and amemory 27. The signal Vamp is input from theamplifier 23 to thecomparison unit 25. Thecomparison unit 25 compares a potential of a ramp signal Ramp input from an external part of the columnsignal processing unit 20 with a potential of the signal Vamp. The ramp signal Ramp is a signal in which a potential monotonically changes depending on time. The signal output from thecomparison unit 25 to thememory 27 is a signal indicating a result of a comparison between the potential of the ramp signal Ramp and the potential of the signal Vamp. Thememory 27 holds a signal with which time from a timing when the ramp signal Ramp starts the change of the potential until the signal level of the comparison result signal changes is counted. This signal held by thememory 27 is a digital signal based on the signal Vamp. - The digital signal held by the
memory 27 in each of the columnsignal processing units 20 on the plurality of columns is output sequentially for each column to an external part of the photoelectric conversion apparatus by a horizontal scanning circuit that is not illustrated in the drawing. - Next, an operation by the
photoelectric conversion unit 101 a according to the present exemplary embodiment will be described. Each ofFIGS. 2A to 2D schematically illustrates energy bands in thephotoelectric conversion unit 101 a. Each ofFIGS. 2A to 2D illustrates the energy bands of thefirst electrode 201, theblocking layer 203, thephotoelectric conversion layer 205, the insulatinglayer 207, and thesecond electrode 209. A vertical axis ofFIGS. 2A to 2D represents a potential with respect to an electron. The higher the vertical axis ofFIGS. 2A to 2D , the higher the potential to the electron. Therefore, the lower the vertical axis ofFIGS. 2A to 2D , the lower the potential to the electron. With regard to thefirst electrode 201 and thesecond electrode 209, a Fermi level is indicated. With regard to theblocking layer 203 and thephotoelectric conversion layer 205, a band cap between an energy level of a conduction band and an energy level of a valence band are indicated. - As operations by the
photoelectric conversion unit 101 a, the following steps (1) to (5) are repeatedly performed: (1) Reset of the input node of the amplification unit, (2) read of a noise signal, (3) transfer of the signal carriers from photoelectric conversion unit, (4) read of the optical signal, and (5) accumulation of the signal carriers. Hereinafter, each of the steps will be described. -
FIG. 2A illustrates a state of thephotoelectric conversion unit 101 a in step (1) to step (2). Thefirst electrode 201 is supplied with the potential Vs. The first potential Vs is, for example, 3 V. Holes indicated by white circles are accumulated as signal carriers generated during an exposure period in thephotoelectric conversion layer 205. A surface potential on the insulatinglayer 207 side of thephotoelectric conversion layer 205 changes in accordance with an amount of accumulated holes. Thebuffer circuit 12 a supplies a first potential Vd1 to thecapacitance element 12 b. The first potential Vd1 is, for example, 0 V. - The
reset transistor 14 a is turned on in this state. According to this, the potential of the node including thesecond electrode 209, that is, the node FD, is reset to the reset voltage Vres. The reset voltage Vres is, for example, 1 V. The node FD is connected to the gate corresponding to the input node of theamplification transistor 16 a. For that reason, reset of the input node of the amplification unit is performed. - Thereafter, the
reset transistor 14 a is turned off. According to this, the node FD becomes electrically floating. At this time, reset noise byreset transistor 14 a (noise kTC1 inFIGS. 2A to 2D ) may be generated. At this time, the holes of the signal carriers remain to be accumulated in thephotoelectric conversion layer 205. - When the
selection transistor 16 b is turned on, theamplification transistor 16 a outputs the noise signal including the reset noise. -
FIGS. 2B and 2C illustrate states of thephotoelectric conversion unit 101 a in step (3). First, thebuffer circuit 12 a supplies a second potential Vd2 to thecapacitance element 12 b. Since holes are used as the signal carriers, the second potential Vd2 is a potential higher than the first potential Vd1. The second potential Vd2 is, for example, 5 V. - At this time, the potential of the second electrode 209 (node FD) changes towards the same direction as the change of the potential supplied by the
buffer circuit 12 a. The changing quantity of the potential dVB of thesecond electrode 209 is determined in accordance with a ratio of a capacitance value C1 of thecapacitance element 12 b electrically connected to the node FD to a capacitance value C2 of thephotoelectric conversion unit 101 a. dVB is represented as follows. -
dVB=(Vd2−Vd1)×C1/(C1+C2) (1) - In the following explanation, the capacitance value C1 and the capacitance value C2 are set to be equal to each other to simplify the explanation. Therefore, the changing quantity dVB is represented as follows.
-
dVB=(Vd2−Vd1)×(½) (2) - According to the present exemplary embodiment, the changing quantity of the potential dVB of the
second electrode 209 is sufficiently higher than a difference (Vs−Vres) between the potential Vs of thefirst electrode 201 and the reset voltage Vres. For that reason, the potential of thesecond electrode 209 becomes lower than the potential of thefirst electrode 201, and the gradient of the potential of thephotoelectric conversion layer 205 is inverted. According to this, electrons indicated by black circles are injected from thefirst electrode 201 into thephotoelectric conversion layer 205. In addition, a part or all of the holes accumulated in thephotoelectric conversion layer 205 move towards the blockinglayer 203 as the signal carriers. The moved holes are coupled again with a large number of carriers of theblocking layer 203 and disappear. As a result, the holes of thephotoelectric conversion layer 205 are discharged from thephotoelectric conversion layer 205. In a case where the entirety of thephotoelectric conversion layer 205 is to be depleted, all the holes accumulated as the signal carriers are discharged. - Next, in the state illustrated in
FIG. 2C , thebuffer circuit 12 a supplies the first potential Vd1 to thecapacitance element 12 b. According to this, the gradient of the potential of thephotoelectric conversion layer 205 is inverted again. For that reason, the electrons injected into thephotoelectric conversion layer 205 in the state illustrated inFIG. 2B are discharged from thephotoelectric conversion layer 205. On the other hand, the injection of the holes from thefirst electrode 201 into thephotoelectric conversion layer 205 is suppressed by theblocking layer 203. Therefore, the potential of the node FD changes by a potential Vsig in accordance with the amount of disappearing holes from the reset state. That is, the potential Vsig in accordance with the amount of holes accumulated as the signal carriers appear at the node FD. The potential Vsig in accordance with the amount of accumulated holes will be referred to as optical signal component. - Herein, the
selection transistor 16 b is turned on in the state illustrated inFIG. 2C . According to this, theamplification transistor 16 a outputs the optical signal. A difference between the noise signal read out in step (2) and the optical signal read out in step (4) is a signal based on the potential Vsig in accordance with the accumulated signal carriers. -
FIG. 2D illustrates a state of thephotoelectric conversion unit 101 a in step (5). Thefirst electrode 201 is supplied with the potential Vs, and the node FD is supplied with the reset voltage Vres. Since the reset voltage Vres is lower than the potential Vs of thefirst electrode 201, the electrons of thephotoelectric conversion layer 205 are discharged to thefirst electrode 201. On the other hand, the holes of thephotoelectric conversion layer 205 move towards an interface between thephotoelectric conversion layer 205 and the insulatinglayer 207. However, since the holes are not moved to the insulatinglayer 207, the holes are accumulated in thephotoelectric conversion layer 205. In addition, as described above, the injection of the holes into thephotoelectric conversion layer 205 is suppressed by theblocking layer 203. Therefore, when light is incident on thephotoelectric conversion layer 205 in this state, among the electron-hole pairs generated by the photoelectric conversion, only holes are accumulated in thephotoelectric conversion layer 205 as the signal carriers. A potential Vch is a changing potential of thesecond electrode 209 on the basis of the holes accumulated in thephotoelectric conversion layer 205. - In a case where the signal carriers are electrons, it is sufficient when the second potential Vd2 is set as a potential lower than the first potential Vd1. In addition, the conductive type of the
blocking layer 203 may be set to be opposite to the conductive type of theblocking layer 203 according to the present exemplary embodiment. For that reason, the gradient of the potential inFIGS. 2A to 2D is inverted. The other operations are the same. -
FIG. 3 illustrates an operation by the photoelectric conversion apparatus illustrated inFIG. 1A . - First, a timing until the signal is read out from the
pixel cell 1000 to thevertical signal line 17 will be described. - The
reset transistor 14 a and theselection transistor 16 b illustrated inFIG. 1A are respectively on in sequence when a signal φRes and the signal φSel are at a Hi level (hereinafter, will be referred to as Hi) are respectively off when the signals are at a Lo level (hereinafter, will be referred to as Lo). - A period T1 is a reset period of the node FD, a period T2 is a period during which the node FD is in the floating state, a period T3 is a refresh period of the
photoelectric conversion unit 101 a, and a period T4 is a signal carrier holding period of the node FD. The photoelectric conversion apparatus according to the present exemplary embodiment sets theamplification transistor 16 a to be in a non-operating state in a period from a time t3 to a time t4. Thephotoelectric conversion unit 101 a starts new photoelectric conversion from the time t4 after the refresh operation. - In
FIG. 3 , the potential of the node FD is denoted by VFD, and the potential of thevertical signal line 17 is denoted by Vline. - At a time before a time t1, the
photoelectric conversion unit 101 a accumulates the signal carriers. - At the time t1, the vertical scanning circuit that is not illustrated sets the signal level of the signal φRes from Lo to Hi. According to this, the
reset transistor 14 a is turned on, and both thesecond electrode 209 and the node FD are reset to the reset voltage Vres. - In addition, at the time t1, the vertical scanning circuit sets the signal φSel from Lo to Hi. According to this, the
selection transistor 16 b is turned on. According to this, since the current is supplied from thecurrent source 18 to theamplification transistor 16 a, theamplification transistor 16 a is put into the operating state. - In addition, at the time t1, the timing generator that is not illustrated sets the signal level of the signal C0 to Hi. According to this, the electric carriers of the capacitance element C1 are reset.
- At a time t2, the vertical scanning circuit sets the signal level of the signal φRes to Lo. According to this, the node FD is put into the floating state. A floating potential V21 of the node FD at this time is referred to as reset FD potential. The
amplification transistor 16 a outputs a signal based on this reset FD potential to thevertical signal line 17. An operation in the period T1 from the time t1 to the time t2 is an operation corresponding to the above-described (2). - Thereafter, at a time t21, the timing generator sets the signal level of the signal φC0 to Lo. According to this, the capacitance element C0 holds the signal based on the reset FD potential that is output from the
amplification transistor 16 a to thevertical signal line 17. - The signal Vamp at a time t22 is a signal mainly containing an offset component of the
column amplification unit 21. This signal will be referred to as offset signal. - Subsequently, in a period from the time t22 to a time t23, the ramp signal Ramp performs change of the potential depending on the time. This period from the time t22 to the time t23 is a period during which the offset signal is converted into a digital signal by the
AD conversion unit 22. This period is referred to as N-AD period inFIG. 3 . The digital signal based on the offset signal which is obtained by theAD conversion unit 22 is referred to as digital N signal. - At the time t3, the vertical scanning circuit sets the signal φSel to Lo. According to this, since the current from the
current source 18 to theamplification transistor 16 a is interrupted, theamplification transistor 16 a is put into the non-operating state. - At a time t31, the timing generator that is not illustrated sets the signal level of the signal φVp from Lo to the potential Vp1 corresponding to the Hi signal level. According to the present exemplary embodiment, the potential Vp1 is 10 V, and the signal level of the signal φVp at Lo is 0 V. The changing quantity of the potential dVB of the
second electrode 209 is calculated by the above-described Expression (2) as dVB=(10−0)×(½)=5 (V). Therefore, the potential of thesecond electrode 209 becomes a potential obtained by adding 5 V to the reset voltage Vres. - Since the signal φVp at the Hi signal level is input, the holes of the
photoelectric conversion layer 205 are refreshed as illustrated inFIG. 2B . - Thereafter, at a time t32, the timing generator sets the signal φVp to Lo. According to this, as illustrated in
FIG. 2C , the optical signal is output to thesecond electrode 209. Thus, the node FD becomes the potential based on the optical signal. This operation corresponds to the above-described step (3). It is noted thatFIG. 3 illustrates a case where light hardly streams onto thephotoelectric conversion unit 101 a. Therefore, the potential of the node FD remains at the reset FD potential. - At the time t4, the vertical scanning circuit sets the signal level of the signal φSel from Lo to Hi. According to this, the current is supplied to the
amplification transistor 16 a again from thecurrent source 18. Thus, theamplification transistor 16 a is put into the operating state. The node FD has the potential based on the optical signal. Thus, theamplification transistor 16 a outputs the signal based on the optical signal to thevertical signal line 17. This operation corresponds to the above-described step (4). The signal Vamp of thecolumn amplification unit 21 becomes a potential of a signal (hereinafter, will be referred to as amplified optical signal) obtained by amplifying the signal based on the optical signal output by theamplification transistor 16 a. - Thereafter, in a period from a time t41 to a time t42, the ramp signal Ramp performs change of the potential depending on the time. This period from the time t41 to the time t42 is a period during which the amplified optical signal is converted into a digital signal by the
AD conversion unit 22. This period is referred to as S-AD period inFIG. 3 . The digital signal based on the amplified optical signal which is obtained by theAD conversion unit 22 is referred to as digital S signal. - According to this, the
memory 27 on each column holds the digital N signal and the digital S signal. The horizontal scanning circuit that is not illustrated sequentially reads out the digital N signal and the digital S signal from thememory 27 on each column to be output to the external part of the photoelectric conversion apparatus. - According to the present exemplary embodiment, in the period from the time t3 to the time t4 which includes the period from the time t31 to the time t32 during which the refresh operation of the
photoelectric conversion unit 101 a is performed, theamplification transistor 16 a is set to be in the non-operating state. An effect attained by this operation will be described. - A waveform indicated by a broken line in the potential Vline of
FIG. 3 represents the potential Vline of thevertical signal line 17 in a case where theamplification transistor 16 a is set to be in the operating state in the period from the time t3 to the time t4 for comparison. When the signal level of the signal φVp turns to Hi at the time t31, the potential of the node FD is increased by dVB (=5 V). Thus, thevertical signal line 17 corresponding to the load of theamplification transistor 16 a starts to be charged rapidly. - When the signal level of the signal φVp turns to Lo at the time t32, the charging of the
vertical signal line 17 is ended, and a potential at that time is set as V32. Since the potential of the node FD is decreased to V21 corresponding to the reset potential, the potential Vline of thevertical signal line 17 decreases from V32 towards V22. - As illustrated in
FIG. 3 , it takes time since the signal level of the signal φVp turns to Lo at the time t32 until the potential Vline of thevertical signal line 17 is statically determined to be the potential of the signal based on the potential of the optical signal. In order that theAD conversion unit 22 performs AD conversion of the amplified optical signal based on the statically determined potential Vline of thevertical signal line 17, standby for the potential Vline of thevertical signal line 17 to be statically determined is demanded. This standby time of theAD conversion unit 22 becomes a factor of hindering the speeding-up of the photoelectric conversion apparatus. - On the other hand, in a case where the
AD conversion unit 22 starts the AD conversion before the potential Vline of thevertical signal line 17 is not sufficiently statically determined for the speeding-up of the photoelectric conversion apparatus, theAD conversion unit 22 performs the AD conversion of the amplified optical signal having the decreased accuracy. Thus, the signal accuracy of the digital S signal is decreased. In particular, in a case where the light does not stream onto thephotoelectric conversion unit 101 a, the signal accuracy of the amplified optical signal is largely decreased. This is because it takes much time until the potential Vline of the potential of thevertical signal line 17 is statically determined since the potential Vline of thevertical signal line 17 is decreased from the potential V32 to the potential V22. In addition, the decrease in the signal accuracy of the digital S signal in a case where the image is generated by using the signal output by the photoelectric conversion apparatus or a case where the light does not stream onto thephotoelectric conversion unit 101 a causes a decreased in a quality of a generated image. Since the image generated by using this digital S signal having the decreased signal accuracy turns to an image having an increased luminance of a part that is to be imaged as black, the decrease in the image quality is easily recognized by human eyes. In a case where a time constant fluctuates for eachvertical signal line 17 among the plurality ofvertical signal lines 17, the discharge amount varies for eachvertical signal line 17. According to this, vertical streak patterns are generated in the generated image. - Meanwhile, as illustrated in
FIG. 3 , the photoelectric conversion apparatus according to the present exemplary embodiment sets theamplification transistor 16 a to be in the non-operating state in the period from the time t3 to the time t4. According to this, in the period from the time t3 to the time t4 too, the potential Vline of thevertical signal line 17 remains at the potential of the signal based on the reset FD potential. According to this, it is possible to shorten the period since the signal level of the signal φVp turns to Lo at the time t32 until the potential Vline of the potential of thevertical signal line 17 is statically determined. According to this, the photoelectric conversion apparatus according to the present exemplary embodiment can realize the speeding-up of the photoelectric conversion apparatus. In addition, the photoelectric conversion apparatus according to the present exemplary embodiment can suppress the decrease in the signal accuracy of the signal based on the potential Vline of thevertical signal line 17 in a case where the optical signal of the photoelectric conversion unit is small. - In this manner, in a period from the time t31 to the time t32 during which the signal carriers accumulated by the
photoelectric conversion unit 101 a are discharged, the photoelectric conversion apparatus according to the present exemplary embodiment sets theamplification transistor 16 a to be in the non-operating state. In a period corresponding to a first period from a time before the time t1 to the time t31 during which thephotoelectric conversion layer 205 accumulates the signal carriers, the magnitude relationship between the potential Vs of thefirst electrode 201 and the potential of thesecond electrode 209 is thefirst electrode 201<thesecond electrode 209 corresponding to a first relationship. In a period corresponding to a second period from the time t31 to the time t32 during which the signal carriers are discharged from thephotoelectric conversion layer 205, the magnitude relationship between the potential Vs of thefirst electrode 201 and the potential of thesecond electrode 209 is thefirst electrode 201>thesecond electrode 209 corresponding to a second relationship opposite to the first relationship. Then, in a period corresponding to a third period from a time after the time t32 during which thephotoelectric conversion layer 205 can accumulate the signal carriers, the magnitude relationship between the potential Vs of thefirst electrode 201 and the potential of thesecond electrode 209 is thefirst electrode 201<thesecond electrode 209 that is the same as the first relationship. The photoelectric conversion apparatus according to the present exemplary embodiment sets theamplification transistor 16 a to be in the non-operating state in the period from the time t31 to the time t32 during which the magnitude relationship between thefirst electrode 201 and the potential of thesecond electrode 209 is the second relationship. According to this, the potential Vline of thevertical signal line 17 is restricted within a predetermined range. The output control unit that puts theamplification transistor 16 a into the non-operating state according to the present exemplary embodiment is theselection transistor 16 b that interrupts the supply of the current from thecurrent source 18 to theamplification transistor 16 a. - Herein, a case where intense light is incident on the
photoelectric conversion unit 101 a will be described. The potential of the node FD at the period T4 becomes a potential obtained by adding the potential VS (FD) corresponding to the potential based on the signal carriers to the potential V21 as indicated by a chain dot line inFIG. 3 . This potential obtained by the potential V21+VS is described as an example as a potential close to a potential V31 to facilitate the understanding inFIG. 3 . A potential of the signal output by theamplification transistor 16 a corresponds to a potential obtained by the potential V22+VS (SF) in the vicinity of the potential V32. In this case, as in the present exemplary embodiment, when theamplification transistor 16 a is set to be in the non-operating state from the time t3 to the time t4, it takes time until the potential Vline of thevertical signal line 17 reaches the potential V22+VS (SF) from the potential V22. In a case where theAD conversion unit 22 starts the AD conversion before the potential Vline of thevertical signal line 17 is statically determined, the decrease in the signal accuracy of the digital S signal occurs. However, in the image generated by using the signal output by the photoelectric conversion apparatus, the decrease in the luminance of the high luminance part is more difficult to be recognized by the human eyes than the increase in the luminance of the part that is to be imaged as black. - It is possible to provide the image in which the increase in the luminance of the part that is to be imaged as black that is easily recognized by the human eyes is suppressed by using the signal output by the photoelectric conversion apparatus according to the present exemplary embodiment. In addition, it is possible to suppress the generation of the vertical streak patterns in the image.
- It is noted that, according to the present exemplary embodiment, the example in which the column
signal processing unit 20 includes theAD conversion unit 22 has been illustrated. The AD conversion unit may be provided in the external part of the photoelectric conversion apparatus. In this case, the columnsignal processing unit 20 includes a signal holding unit that holds both the offset signal and the amplified optical signal output by theamplifier 23. The horizontal scanning circuit that is not illustrated sequentially scans the signal holding unit on each of the columns, and the offset signal and the amplified optical signal are both read out from the signal holding unit on each of the columns. The photoelectric conversion apparatus outputs both the offset signal and the amplified optical signal or outputs a signal of a difference between the amplified optical signal and the offset signal to the AD conversion unit provided in the external part of the photoelectric conversion apparatus. The AD conversion unit converts the signal output from the photoelectric conversion unit into a digital signal. - It is noted that, according to the present exemplary embodiment, the example in which the amplification unit is the
amplification transistor 16 a has been illustrated. Other than that, the amplification unit may be a differential amplifier or a circuit that outputs a signal obtained by amplifying the optical signal like a grounded source circuit. In this case too, the output control unit may set the amplitude of the signal that is output to thevertical signal line 17 to be smaller than a case where the amplification unit outputs the signal on the basis of the potential of thesecond electrode 209 or may put the amplification unit into the non-operating state. For example, in a case where the amplifier is the differential amplifier, the differential amplifier may be put into the non-operating state by turning off the current source that supplies the current to a differential pair of the differential amplifier. In this case, the circuit that turns off the current source of the differential pair is the output control unit. On the other hand, in a case where the amplification unit is the grounded source circuit, a switch that interrupts the power source voltage supplied to the grounded source circuit may be provided on an electric path between the supply unit of the power source voltage and the grounded source circuit as the output control unit. - It is noted that the
photoelectric conversion unit 101 a according to the present exemplary embodiment may be a Schottky-type photoelectric conversion unit. - It is noted that, according to the present exemplary embodiment, the example in which the
pixel output unit 16 outputs the signal to thevertical signal line 17 provided in each column has been described. As another example, a processing unit having the function of the columnsignal processing unit 20 is provided in apixel cell 1000, and thepixel output unit 16 may output the signal to this processing unit. In this case, an electric path between thepixel output unit 16 and the processing unit is a signal line where the potential is controlled by the output control unit in the second period. - The photoelectric conversion apparatus according to the present exemplary embodiment puts the
amplification transistor 16 a into the non-operating state in the second period during which the signal φVp is at Hi. The present exemplary embodiment is not limited to this example, and the output control unit may put theamplification transistor 16 a into the non-operating state at a part of the second period. In this case too, as compared with a case where theamplification transistor 16 a is set to be in the operating state over the entire second period, it is possible to reduce the fluctuation of the potential Vline of thevertical signal line 17 while theamplification transistor 16 a is set to be in the non-operating state at the part of the second period. - With regard to the photoelectric conversion apparatus according to the present exemplary embodiment, a different point from the first exemplary embodiment will be mainly described.
-
FIG. 4 illustrates a part of a configuration of the photoelectric conversion apparatus according to the present exemplary embodiment. InFIG. 4 too, components having the same functions as the components illustrated inFIGS. 1A and 1B are assigned with the same reference symbols assigned inFIGS. 1A and 1B . -
FIG. 4 illustrates a configuration in which thepixel output unit 16 is omitted from thepixel cell 1000. The other configurations of thepixel cell 1000 are the same as the configurations of thepixel cell 1000 illustrated inFIGS. 1A and 1B . - The photoelectric conversion apparatus according to the present exemplary embodiment includes a switch SW0 on an electric path between the
current source 18 and theselection transistor 16 b. The switch SW0 is on when a signal level of a signal φIsel output from the timing generator that is not illustrated is at Hi and is off when the signal level is at Lo. - The operation by the photoelectric conversion apparatus according to the present exemplary embodiment is the same as the operation illustrated in
FIG. 3 except for the signal level of the signal φSel from the time t3 to the time t4 and the signal φIsel. - In the photoelectric conversion apparatus according to the present exemplary embodiment, the signal level of the signal φSel remains to Hi in the period from the time t3 to the time t4 too. On the other hand, the timing generator sets the signal level of the signal φIsel to Lo in the period from the time t3 to the time t4 to turn the switch SW0 off in the photoelectric conversion apparatus according to the present exemplary embodiment. According to this, in the period from the time t31 to the time t32, the supply of the current from the
current source 18 to theamplification transistor 16 a is interrupted. In the other periods, the timing generator sets the signal level of the signal φIsel to Hi to turn the switch SW0 on. According to this, in the other periods, while the signal φSel is at Hi, theamplification transistor 16 a is supplied with the current from thecurrent source 18. - In the photoelectric conversion apparatus according to the present exemplary embodiment too, the
amplification transistor 16 a can be put into the non-operating state in the second period described in the first exemplary embodiment. Therefore, the potential Vline of thevertical signal line 17 is restricted within the predetermined range. According to this, the same effect described in the first exemplary embodiment can be also attained by the photoelectric conversion apparatus according to the present exemplary embodiment. - It is noted that the period during which the signal level of the signal φIsel is set to Lo may be at least the period from the time t31 to the time t32 during which the signal level of the signal φVp is at Hi.
- The output control unit according to the present exemplary embodiment which puts the
amplification transistor 16 a into the non-operating state is the switch SW0 that interrupts the supply of the current from thecurrent source 18 to theamplification transistor 16 a. - With regard to the photoelectric conversion apparatus according to the present exemplary embodiment, a different point from the first exemplary embodiment will be mainly described.
-
FIG. 5 illustrates a part of a configuration of the photoelectric conversion apparatus according to the present exemplary embodiment. InFIG. 5 too, components having the same functions as the components illustrated inFIG. 5 are assigned with the same reference symbols assigned inFIGS. 1A and 1B . -
FIG. 5 illustrates a configuration in which thepixel output unit 16 is omitted from thepixel cell 1000. The other configurations of thepixel cell 1000 are the same as the configurations of thepixel cell 1000 illustrated inFIGS. 1A and 1B . - The photoelectric conversion apparatus according to the present exemplary embodiment includes the switch SW1 electrically connected to the
vertical signal line 17 and apotential supply unit 35. The switch SW1 is on when a signal level of a signal φCsel output from the timing generator that is not illustrated is at Hi and is off when the signal level is at Lo. Thepotential supply unit 35 is a circuit that supplies a potential to thevertical signal line 17 such that the potential Vline of thevertical signal line 17 does not become higher than or equal to a predetermined potential. - The operation by the photoelectric conversion apparatus according to the present exemplary embodiment is the same as the operation illustrated in
FIG. 3 except for the signal level of the signal φSel from the time t3 to the time t4 and the signal φCsel. - In the photoelectric conversion apparatus according to the present exemplary embodiment, the signal level of the signal φSel remains at Hi in the period from the time t3 to the time t4 too. On the other hand, the timing generator sets the signal level of the signal φCsel to Hi in the period from the time t3 to the time t4 to turn the switch SW1 on in the photoelectric conversion apparatus according to the present exemplary embodiment. According to this, the potential Vline of the
vertical signal line 17 is clipped at the potential output by thepotential supply unit 35. Thus, the potential Vline of thevertical signal line 17 becomes a potential having a smaller amplitude than the signal that is output by theamplification transistor 16 a on the basis of the potential V31 of the node FD. - It is noted that, in a period other than the period from the time t3 to the time t4, the timing generator sets the signal level of the signal φCsel to Lo to turn the switch SW1 off.
- According to this, the photoelectric conversion apparatus according to the present exemplary embodiment can set the potential Vline of the
vertical signal line 17 in the second period described in the first exemplary embodiment to be the potential having the smaller amplitude than the potential of the signal output by theamplification transistor 16 a. That is, the output control unit sets a range of the amplitude in which the potential Vline of thevertical signal line 17 is changed to be smaller than a range of the amplitude that can be output by theamplification transistor 16 a. That is, the potential Vline of thevertical signal line 17 is restricted within the predetermined range. Thus, the photoelectric conversion apparatus according to the present exemplary embodiment can also attain the same effect as the photoelectric conversion apparatus according to the first exemplary embodiment. - It is noted that the period during which the signal level of the signal φCsel is set to Lo may be at least the period from the time t31 to the time t32 during which the signal level of the signal φVp is at Hi.
- The potential supplied by the
potential supply unit 35 when the signal level of the signal φCsel is at Hi may be higher than or equal to the potential V22 and also lower than the potential V32. In one embodiment, the potential supplied by thepotential supply unit 35 is the potential V22. - It is noted that, according to the present exemplary embodiment, the timing generator sets the signal φCsel to Lo in the period after the time t4 during which the
amplification transistor 16 a outputs the signal based on the optical signal. As another example, during this period, the timing generator may set the signal φCsel to Hi. In this case, thepotential supply unit 35 may be operated to suppress the potential Vline of thevertical signal line 17 so as not to become higher than or equal to a predetermined potential. - It is noted that the output control unit according to the present exemplary embodiment in which the
amplification transistor 16 a sets the amplitude of the signal that is output to thevertical signal line 17 to be smaller than that in a case where the signal is output on the basis of the potential of thesecond electrode 209 is thepotential supply unit 35. - With regard to the photoelectric conversion apparatus according to the present exemplary embodiment, a different point from the first exemplary embodiment will be mainly described.
-
FIG. 6 illustrates a configuration of the photoelectric conversion apparatus according to the present exemplary embodiment. InFIG. 6 too, components having the same functions as the components illustrated inFIG. 6 are assigned with the same reference symbols assigned inFIGS. 1A and 1B . - The
unit pixel 10 a includes thephotoelectric conversion unit 101 a and atransfer transistor 15 a. Aunit pixel 10 b includes a photoelectric conversion unit 101 b and a transfer transistor 15 b. Thephotoelectric conversion unit 101 a includes thefirst electrode 201, theblocking layer 203, thephotoelectric conversion layer 205, the insulatinglayer 207, and thesecond electrode 209. Theblocking layer 203 is provided between thefirst electrode 201 and thephotoelectric conversion layer 205, and thephotoelectric conversion layer 205 is provided between theblocking layer 203 and the insulatinglayer 207. The insulatinglayer 207 is provided between thephotoelectric conversion layer 205 and thesecond electrode 209. The configuration of the photoelectric conversion unit 101 b is the same as the configuration of thephotoelectric conversion unit 101 a. Each of thetransfer transistors 15 a and 15 b is provided so as to correspond to each of the plurality ofphotoelectric conversion units 101 a and 101 b. Each of thetransfer transistors 15 a and 15 b is a transfer unit that transfers the optical signal of each of the plurality ofphotoelectric conversion units 101 a and 101 b to theamplification transistor 16 a corresponding to the amplification unit. - The
transfer transistor 15 a is electrically connected to thesecond electrode 209 of thephotoelectric conversion unit 101 a. The transfer transistor 15 b is electrically connected to a second electrode of the photoelectric conversion unit 101 b. A signal φT1 is input to a gate of thetransfer transistor 15 a from the vertical scanning circuit that is not illustrated. A signal φT2 is input to a gate of the transfer transistor 15 b from the vertical scanning circuit that is not illustrated. - A
power source unit 30 b supplies the potential Vs to a first electrode of the photoelectric conversion unit 101 b. -
FIG. 7A illustrates an operation by the photoelectric conversion apparatus illustrated inFIG. 6 . In the operation illustrated inFIG. 7A , the optical signals of both the twophotoelectric conversion units 101 a and 101 b are added at the node FD to each other. Theamplification transistor 16 a outputs a signal to thevertical signal line 17 on the basis of the potential of the node FD that has a potential of this added optical signal. - The vertical scanning circuit sets the signal level of the signal φT1 to Hi in a period from the time t1 to a time t6. The vertical scanning circuit also sets the signal level of the signal φT1 to Hi and the signal level of the signal φT2 to Hi in the period from the time t1 to the time t6.
- The vertical scanning circuit sets the signal level of the signal φVp to Hi in the period from the time t31 to the time t32. According to this, the optical signal is output from both the two
photoelectric conversion units 101 a and 101 b to the node FD. At the node FD, the optical signals of these twophotoelectric conversion units 101 a and 101 b are added to each other. - The vertical scanning circuit sets the signal level of the signal φSel to Lo in the period from the time t3 to the time t4 including the period from the time t31 to the time t32. According to this, since the current from the
current source 18 to theamplification transistor 16 a is interrupted, theamplification transistor 16 a is put into the non-operating state. - At the time t4, the vertical scanning circuit sets the signal level of the signal φSel to Hi. According to this, the
amplification transistor 16 a is supplied with the current again from thecurrent source 18. Thus, theamplification transistor 16 a is put into the operating state. The node FD has the potential based on the optical signal. Thus, theamplification transistor 16 a outputs a signal based on the potential of the signal obtained by adding the optical signals of thephotoelectric conversion units 101 a and 101 b to each other to thevertical signal line 17. - According to this, the photoelectric conversion apparatus according to the present exemplary embodiment can also attain the same effect as the first exemplary embodiment.
- The output control unit according to the present exemplary embodiment which puts the
amplification transistor 16 a into the non-operating state is theselection transistor 16 b that interrupts the supply of the current from thecurrent source 18 to theamplification transistor 16 a. - It is noted that the potential Vp1 according to the present exemplary embodiment corresponding to the Hi signal level of the signal φVp is 3/2 times the Hi signal level of the potential Vp1 according to the first exemplary embodiment when the capacitance values of the
photoelectric conversion units 101 a and 101 b are the same. - The changing quantity of the potential dVB of the
second electrode 209 which is represented by the above-described Expression (1) is represented as follows while a capacitance value of the photoelectric conversion unit 101 b is set as C3 in the operation illustrated inFIG. 7A . -
dVB=(Vd2−Vd1)×C1/(C1+C2+C3) (3) - As described above, in a case where C1=C2=C3 is established, Expression (3) is rewritten as follows.
-
dVB=(Vd2−Vd1)×(⅓) (4) - Since Vd1=0 (V) is set in order that the changing quantity of the potential dVB of the
second electrode 209 in each of thephotoelectric conversion unit 101 a and the photoelectric conversion unit 101 b is set to be 5 V that is the same as the operation ofFIG. 3 , Vd2=15 (V) is set. Thus, the potential Vp1 is set as 15 V. In contrast to a case where the optical signals are individually read out from thephotoelectric conversion unit 101 a and the photoelectric conversion unit 101 b as inFIG. 3 , the potential Vp1 is multiplied by 3/2 in a case where the optical signals are read out at the same time from the twophotoelectric conversion units 101 a and 101 b as inFIG. 7A . - A case will be described where the potential Vp1 is set to be the same in a case where the optical signals are individually read out from the
photoelectric conversion unit 101 a and the photoelectric conversion unit 101 b and a case where the optical signals are read out at the same time from thephotoelectric conversion units 101 a and 101 b. In one embodiment, the capacitance value of thecapacitance element 12 b is doubled in a case where the optical signals are read out at the same time from the twophotoelectric conversion units 101 a and 101 b as compared with a case where the optical signals are individually read out from thephotoelectric conversion unit 101 a and the photoelectric conversion unit 101 b.FIG. 7B illustrates a configuration of thecapacitance element 12 b in which the capacitance value is variable as described above. Thecapacitance element 12 b includes capacitance elements C11 and C12 and a switch SW3. Capacitance values of the capacitance elements C11 and C12 are set to be equal to each other. In a case where the optical signals are individually read out from thephotoelectric conversion unit 101 a and the photoelectric conversion unit 101 b, the timing generator sets the signal level of the signal φCsel to Lo to turn the switch SW3 off. According to this, thebuffer circuit 12 a does not supply the signal φVp to the capacitance element C12 but supplies the signal φVp to the capacitance element C11. On the other hand, in a case where the optical signals are read out at the same time from the twophotoelectric conversion units 101 a and 101 b, the timing generator sets the signal level of the signal φCsel to Hi. According to this, thebuffer circuit 12 a supplies the signal φVp to both the capacitance elements C11 and C12. - Thus, the capacitance value of the
capacitance element 12 b inFIG. 7B can be doubled in a case where the optical signals are read out at the same time from the twophotoelectric conversion units 101 a and 101 b as compared with a case where the optical signals are individually read out from thephotoelectric conversion unit 101 a and the photoelectric conversion unit 101 b. - In the photoelectric conversion apparatus according to the present exemplary embodiment, the switch SW0 may be provided on the electric path between the
current source 18 and theselection transistor 16 b as in the photoelectric conversion apparatus according to the second exemplary embodiment. - In addition, in the photoelectric conversion apparatus according to the present exemplary embodiment, the
potential supply unit 35 that supplies the potential to thevertical signal line 17 and the switch SW1 that switches a conductive state and a non-conductive state of the electric path between thepotential supply unit 35 and thevertical signal line 17 may be provided as in the photoelectric conversion apparatus according to the third exemplary embodiment. - Moreover, the photoelectric conversion apparatus according to the present exemplary embodiment may combine the operation of individually reading out the optical signal from each of the plurality of photoelectric conversion units with the operation of reading out the signal obtained by adding the optical signals of the plurality of photoelectric conversion units to each other illustrated in
FIG. 7A . An example of the above-described operation will be illustrated inFIG. 10 . - A period from the time t21 to a time t26 is a period during which an operation related to the reading of the noise signal and the optical signal of the
photoelectric conversion unit 101 a is performed. A period from a time t27 to the time t31 is a period during which an operation related to the reading of the signal obtained by adding the optical signals of thephotoelectric conversion unit 101 a and the photoelectric conversion unit 101 b to each other is performed. With this operation, the signal holding unit holds an A signal corresponding to a signal obtained by amplifying the optical signal of thephotoelectric conversion unit 101 a by theamplification transistor 16 a and an amplifier 19 at the time t26. At a time t29, the signal holding unit holds an A+B signal corresponding to a signal obtained by amplifying the signal, which is obtained by adding the optical signals of thephotoelectric conversion unit 101 a and the photoelectric conversion unit 101 b to each other, by theamplification transistor 16 a and the amplifier 19. The photoelectric conversion apparatus outputs both the A signal and the A+B signal to the external part of the photoelectric conversion apparatus. - Herein, an example of a photoelectric conversion system including the photoelectric conversion apparatus and an output signal processing unit configured to process the signal output by the photoelectric conversion apparatus will be described. The output signal processing unit provided in the external part of the photoelectric conversion apparatus can obtain a B signal by subtracting the A signal from the A+B signal. The B signal generated by the output signal processing unit is a signal equivalent to the signal obtained by amplifying the optical signal of the photoelectric conversion unit 101 b by the
amplification transistor 16 a and the amplifier 19. A case where the photoelectric conversion apparatus further includes a micro lens array in which a plurality of micro lenses are provided, and one micro lens is provided to each of thephotoelectric conversion units 101 a and 101 b is conceivable. In this case, lights ejected from mutually different exit pupils of an optical system that guides light to the photoelectric conversion apparatus are incident on each of a plurality of photoelectric conversion units 191 a and 101 b. In the case of this configuration, the output signal processing unit can detect a phase difference between the light incident on thephotoelectric conversion unit 101 a and the light incident on the photoelectric conversion unit 101 b by the B signal generated by the output signal processing unit and the A signal output by the photoelectric conversion apparatus. According to this, the photoelectric conversion system including the photoelectric conversion apparatus and the output signal processing unit can perform focus detection based on a phase difference detection system. In addition, the output signal processing unit can generate an image by using the A+B signal output from the photoelectric conversion apparatus. - According to the present exemplary embodiment, the configuration has been described in which the two
photoelectric conversion units 101 a and 101 b share thesingle capacitance element 12 b and thesingle amplification transistor 16 a. It is sufficient when a plurality of photoelectric conversion units are shared by thesingle capacitance element 12 b and thesingle amplification transistor 16 a. In the plurality ofphotoelectric conversion units 101 commonly electrically connected to the node FD, in a case where the number of the optical signals read out at the same time to the node FD is M that is higher than N (N is an integer higher than or equal to 1), the Hi signal level of the signal φVp is set to be still higher as compared with a case where the above-described number of the optical signals is N. This corresponds to a case where the signal carriers accumulated by thephotoelectric conversion units 101 are holes. In a case where the signal carriers accumulated by thephotoelectric conversion units 101 are electrons, when the number of the optical signals read out at the same time to the node FD M that is higher than N (N is an integer higher than or equal to 1), the Hi signal level of the signal φVp is set to be still lower as compared with a case where the above-described number of the optical signals is N. - A case also exists where color filters of RGB are arranged in the Bayer pattern, and each of the plurality of photoelectric conversion units is provided so as to correspond to each color. In this case, the
single capacitance element 12 b and thesingle amplification transistor 16 a may be shared by the plurality of photoelectric conversion units on which the color filters of the same color are arranged. - According to the present exemplary embodiment, the configuration in which the
single amplification transistor 16 a is shared by the plurality ofphotoelectric conversion units 101 a and 101 b has been described. As another example, a configuration may be adopted in which each of the plurality ofamplification transistors 16 a is provided to each of the plurality ofphotoelectric conversion units 101 a and 101 b. For example, in the case of a configuration where the plurality ofpixel cells 1000 are arranged in a matrix, each of the plurality ofpixel cells 1000 includes the same number of theamplification transistors 16 a as the number of photoelectric conversion units provided in each of thepixel cells 1000. Furthermore, a configuration in which thepixel cells 1000 belonging to a same row share thesingle capacitance element 12 b may be adopted. In the configuration in which the plurality ofcapacitance elements 12 b are provided, each of the plurality ofbuffer circuits 12 a is provided so as to correspond to each of the plurality ofcapacitance elements 12 b. Since thebuffer circuit 12 a is provided so as to correspond to thecapacitance element 12 b in the above-described manner, it is possible to reduce the load on the capacitance potential supply unit. - With regard to the photoelectric conversion apparatus according to the present exemplary embodiment, a different point from the fourth exemplary embodiment will be mainly described.
-
FIG. 8 illustrates a configuration of the photoelectric conversion apparatus according to the present exemplary embodiment. The photoelectric conversion apparatus according to the present exemplary embodiment includes atransistor 40 between the node FD and the input node of theamplification transistor 16 a. Thetransistor 40 is on when a signal level of a signal φT3 output from the vertical scanning circuit is at Hi and is off when the signal level of the signal φT3 is at Lo. That is, thetransistor 40 is a second switch that switches a conductive state and a non-conductive state of the electric path between the node FD corresponding to a third node where thesecond electrode 209 is electrically connected to thecapacitance element 12 b and the input node of theamplification transistor 16 a. - The operation by the photoelectric conversion apparatus according to the present exemplary embodiment is the same as the operation of
FIG. 7A described in the fourth exemplary embodiment except for the signal φSel and the signal φT3. In the photoelectric conversion apparatus according to the present exemplary embodiment, the vertical scanning circuit sets the signal level of the signal φSel to Hi in the period from the time t3 to the time t4 too. On the other hand, the vertical scanning circuit sets the signal level of the signal φT3 to Lo in the period from the time t3 to the time t4. The vertical scanning circuit sets the signal level of the signal φT3 to Hi in a period other than the period from the time t3 to the time t4. - According to this, in the period from the time t31 to the time t32 during which the signal level of the signal φVp turns to Hi, the node FD and the input node of the
amplification transistor 16 a are put into the non-conductive state. Thus, the photoelectric conversion apparatus according to the present exemplary embodiment can also attain the same effect as the photoelectric conversion apparatus according to the fourth exemplary embodiment. - It is noted that the output control unit according to the present exemplary embodiment which sets the amplitude of the signal that is output to the
vertical signal line 17 to be smaller as compared with a case where theamplification transistor 16 a outputs the signal on the basis of the potential of thesecond electrode 209 is thetransistor 40. - The photoelectric conversion apparatus according to the above-described first to fifth exemplary embodiments can be applied to various photoelectric conversion systems. Examples of the photoelectric conversion system include a digital still camera, a digital camcorder, a monitoring camera, and the like.
FIG. 9 is a schematic diagram of the photoelectric conversion system in which the photoelectric conversion apparatus according to any one of the first to fifth exemplary embodiments of the first to fifth exemplary embodiments is applied to the digital still camera as an example of the photoelectric conversion system. - The photoelectric conversion system exemplified in
FIG. 9 includes aphotoelectric conversion apparatus 154, abarrier 151 that projects a lens, alens 152 that forms an optical image of a subject onto thephotoelectric conversion apparatus 154, and adiaphragm 153 that sets the quantity of light that passes through thelens 152 to be variable. Thelens 152 and thediaphragm 153 are an optical system in which light is focused on thephotoelectric conversion apparatus 154. The photoelectric conversion system exemplified inFIG. 9 also includes an outputsignal processing unit 155 that performs processing on an output signal that is output from thephotoelectric conversion apparatus 154. - The output
signal processing unit 155 performs AD conversion for converting an analog signal output by thephotoelectric conversion apparatus 154 into a digital signal. In addition, the outputsignal processing unit 155 also performs operation of outputting image data while various corrections and compressions are performed when necessary. - The photoelectric conversion system exemplified in
FIG. 9 further includes abuffer memory unit 156 that temporarily stores the image data and an external interface unit (external I/F unit) 157 that establishes a communication with an external computer or the like. The photoelectric conversion system further includes arecording medium 159 such as a semiconductor memory for performing recording or reading of picked-up image data and a recording medium control interface unit (recording medium control I/F unit) 158 for performing recording or reading in therecording medium 159. It is noted that therecording medium 159 may be built in the photoelectric conversion system or may be detachably attached. - The photoelectric conversion system further includes an overall control/
calculation unit 1510 that controls various calculations and the entire digital still camera and atiming generation unit 1511 that outputs various timing signals to thephotoelectric conversion apparatus 154 and the outputsignal processing unit 155. Herein, the timing signals or the like may be output from an external part, and it is sufficient when the photoelectric conversion system includes at least thephotoelectric conversion apparatus 154 and the outputsignal processing unit 155 that processes the output signal that is output from thephotoelectric conversion apparatus 154. As described above, with the application of thephotoelectric conversion apparatus 154, the photoelectric conversion system according to the present exemplary embodiment can perform image pickup operation. - The output
signal processing unit 155 may also perform the phase difference detection by using the signal output by thephotoelectric conversion apparatus 154 as described in the fourth exemplary embodiment. - It is noted that each of the above-described exemplary embodiments is merely a specific example for carrying out the present invention, and a technical scope of the present invention is not to be construed in a limited manner by these exemplifications. That is, the present invention can be carried out in various modes without departing from the technical concept or the main characteristic. In addition, the above-described exemplary embodiments can be combined with each other in various manners and carried out.
- According to the exemplary embodiments of the present invention, the speeding-up of the photoelectric conversion apparatus and the improvement in the accuracy of the signal based on the optical signal in a case where the signal level of the optical signal is small can be realized.
- While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
Claims (1)
1. A photoelectric conversion apparatus comprising:
a photoelectric conversion unit;
an amplification unit;
a signal line; and
an output control unit, wherein
the photoelectric conversion unit includes a first electrode, a second electrode, a photoelectric conversion layer that is arranged between the first electrode and the second electrode and accumulates signal carriers, and an insulating layer arranged between the photoelectric conversion layer and the second electrode,
an optical signal based on the accumulated signal carriers is output to an input node of the amplification unit,
an output node of the amplification unit is connected to the signal line,
a magnitude relationship between a potential applied to the first electrode and a potential applied to the second electrode is a first relationship in a first period during which the photoelectric conversion layer accumulates the signal carriers, and the magnitude relationship is a second relationship that is opposite to the first relationship in a second period during which the signal carriers are discharged from the photoelectric conversion layer while the second electrode is applied with a potential having a different value from the potential applied in the first period, and
the output control unit restricts a potential range of the signal line to be within a predetermined range narrower than a potential range of an output of the amplification unit in at least a part of the second period, or the output control unit puts the amplification unit into a non-operating state in at least a part of the second period.
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US15/691,450 US20170366775A1 (en) | 2014-07-31 | 2017-08-30 | Photoelectric conversion apparatus, photoelectric conversion system, and driving method for the photoelectric conversion apparatus |
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JP2014156784A JP6494207B2 (en) | 2014-07-31 | 2014-07-31 | Photoelectric conversion device, photoelectric conversion system, and method for driving photoelectric conversion device |
JP2014-156784 | 2014-07-31 | ||
US14/814,058 US9781374B2 (en) | 2014-07-31 | 2015-07-30 | Photoelectric conversion apparatus, photoelectric conversion system, and driving method for the photoelectric conversion apparatus |
US15/691,450 US20170366775A1 (en) | 2014-07-31 | 2017-08-30 | Photoelectric conversion apparatus, photoelectric conversion system, and driving method for the photoelectric conversion apparatus |
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US14/814,058 Continuation US9781374B2 (en) | 2014-07-31 | 2015-07-30 | Photoelectric conversion apparatus, photoelectric conversion system, and driving method for the photoelectric conversion apparatus |
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US15/691,450 Abandoned US20170366775A1 (en) | 2014-07-31 | 2017-08-30 | Photoelectric conversion apparatus, photoelectric conversion system, and driving method for the photoelectric conversion apparatus |
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CN107018289B (en) * | 2016-01-22 | 2021-01-19 | 松下知识产权经营株式会社 | Image pickup apparatus |
JP7000020B2 (en) * | 2016-11-30 | 2022-01-19 | キヤノン株式会社 | Photoelectric conversion device, imaging system |
CN110098203A (en) * | 2018-01-30 | 2019-08-06 | 维深半导体公司 | Back side illumination image sensor and its preparation |
JP2021044310A (en) * | 2019-09-09 | 2021-03-18 | キヤノン株式会社 | Semiconductor device |
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MY181933A (en) | 2021-01-14 |
US20160037113A1 (en) | 2016-02-04 |
CN105323510B (en) | 2018-09-11 |
US9781374B2 (en) | 2017-10-03 |
JP2016034102A (en) | 2016-03-10 |
JP6494207B2 (en) | 2019-04-03 |
CN105323510A (en) | 2016-02-10 |
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