US20110214850A1 - Nanotube Materials for Thermal Management of Electronic Components - Google Patents

Nanotube Materials for Thermal Management of Electronic Components Download PDF

Info

Publication number
US20110214850A1
US20110214850A1 US13/008,256 US201113008256A US2011214850A1 US 20110214850 A1 US20110214850 A1 US 20110214850A1 US 201113008256 A US201113008256 A US 201113008256A US 2011214850 A1 US2011214850 A1 US 2011214850A1
Authority
US
United States
Prior art keywords
heat
medium
set forth
bristles
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/008,256
Inventor
David S. Lashmore
Joseph J. Brown
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanocomp Technologies Inc
Original Assignee
Nanocomp Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanocomp Technologies Inc filed Critical Nanocomp Technologies Inc
Priority to US13/008,256 priority Critical patent/US20110214850A1/en
Assigned to NANOCOMP TECHNOLOGIES, INC. reassignment NANOCOMP TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BROWN, JOSEPH J., LASHMORE, DAVID S.
Publication of US20110214850A1 publication Critical patent/US20110214850A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/2612Auxiliary members for layer connectors, e.g. spacers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3677Wire-like or pin-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01004Beryllium [Be]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01019Potassium [K]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/0102Calcium [Ca]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01023Vanadium [V]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01029Copper [Cu]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01042Molybdenum [Mo]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01047Silver [Ag]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01057Lanthanum [La]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01074Tungsten [W]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/014Solder alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/734Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
    • Y10S977/742Carbon nanotubes, CNTs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/734Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
    • Y10S977/753Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc. with polymeric or organic binder
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/778Nanostructure within specified host or matrix material, e.g. nanocomposite films
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/4935Heat exchanger or boiler making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/30Self-sustaining carbon mass or layer with impregnant or other layer

Definitions

  • the present invention relates to systems and methods for thermal management of electronic components, and more particularly to a thermal junction device for facilitating heat transfer between a heat source and a heat sink.
  • Heat transfer for thermal management between two materials at different temperatures often may be accomplished by conduction, radiation and/or convection.
  • the temperature present in the integrated circuit (IC) can typically be between about 40° C. to 150° C.
  • thermal management may typically be accomplished through conduction.
  • the use of flat plates at the interface to facilitate the heat transfer from the integrated circuit to the heat sink has not been optimal.
  • the use of a flat plate may provide only between 20 to 50 points of contact to the integrated circuit and/or the heat sink. As a result, the heat that flows out of the hot integrated circuit can only pass through these few contact spots.
  • the heat sink device in general, may be of any type, including a passive heat sink, a Peltier cooler, a refrigerated copper block, a heat pipe, or an active fan type, or a copper block in which embedded heat pipes can carry heat to a water-cooled bus outside of the system.
  • thermal greases that are commercially available typically contain silver powder or silver flake, and may be used by applying to machined, and occasionally, lapped heat sinks and integrated circuit lids.
  • thermal conductivity of these commercially available greases at best may only be about 9 watts/m-deg K.
  • Arctic Silver III has a thermal conductivity of >9.0 W/m-deg K
  • AOS Thermal Compounds has a thermal conductivity of about 7.21 W/m-deg K
  • Shin-Etsu G751 has a thermal conductivity of about 4.5 W/m-deg K
  • AOS Thermal Compounds HTC-60 has a thermal conductivity of about 2.51 W/m-deg K
  • Thermagon T-grease has a thermal conductivity of about 1.3 W/m-deg K
  • Radio Shack Thermal Grease has a thermal conductivity of about 0.735 W/m-deg K.
  • FIG. 1 there exists, generally, a 20 degrees difference between the heat source and the heat sink. Such a difference may indicate a thermal resistance at the junction and suggests that the potential to carry heat to the sink may be hurt by the poor interface provided by the grease.
  • metal fiber structures and material can provide a low loss connection at greatly reduced forces, thereby providing high-efficiency, low force electrical contact.
  • the capability of fiber brushes to efficiently transfer electrical current across interfaces, which can be in relative motion or at rest is paralleled by their capability to similarly transfer heat.
  • the fiber brushes can provide a substantial amount contact points between the heat source and heat sink to permit efficient heat transfer.
  • metal fiber brushes have been used in a thermal interface as heat conduits for cooling or heating purposes.
  • U.S. Pat. No. 6,891,724 discloses the use of carbon nanotubes deposited on a CVD diamond coated thermally heat die.
  • a CVD diamond coating is placed on a heat die, and the die subsequently coated with carbon nanotubes.
  • the present invention in one embodiment, is directed to a heat-conducting medium for placement between a heat source and heat sink to facilitate transfer of heat from the source to the sink.
  • the heat-conducting medium includes a disk, made from a material having a relatively high thermal conductivity characteristic, for placement between a heat source and a heat sink.
  • the disk may also have a heat spreading characteristic.
  • the heat-conducting medium further includes a first recessed surface on the disk for placement adjacent the heat source and an opposing second recessed surface on the disk for placement adjacent the heat sink.
  • the heat-conducting medium may further include an array of heat conducting bristles extending from within the first and second recessed surfaces.
  • the recessed surfaces may be defined by a rim positioned circumferentially about the disk.
  • each recessed surface acts to provide a spacer between the heat source and heat sink and to minimize the amount of pressure that may be exerted by the heat sink and the heat source against the bristles.
  • the bristles in an embodiment, may extend beyond the rim on the respective surface from which the bristle are positioned to provide a plurality of contact points to the heat source and to the heat sink to aid in the transfer of heat.
  • the present invention in another embodiment, is directed to a substantially flexible heat-conducting medium.
  • This heat-conducting medium in one embodiment, includes a flexible member made from an array of interweaving carbon nanotubes.
  • the flexible member may include an upper surface against which a heat source may be placed, an opposing lower surface, and edges about the member designed for coupling to a heat sink toward which heat from the heat source can be directed.
  • the heat-conducting medium also includes a pad for placement on the upper surface of the member to provide structural support to the member. In an embodiment, a second pad may be provided against the lower surface of the member to provide additional support to the flexible member.
  • the heat-conducting medium may further include a heat spreader positioned adjacent the heat source and the upper surface of the member to facilitate radial transfer of heat from the heat source to a wider area on the member.
  • a second heat spreader may be provided against the lower surface of the flexible member to enhance spreading of heat from the heat source radially along the flexible member.
  • the present invention provides a method for manufacturing a heat-conducting medium.
  • a disk having opposing recessed surfaces and a relatively high thermal conductivity characteristic may initially be provided.
  • a plurality of catalyst particles may be deposited into the recessed surfaces.
  • the recessed surfaces may be coated with a material that can enhance attachment of the particles to the recessed surfaces.
  • the catalyst particles may be exposed to a gaseous carbon source, and from the uptake of carbon by the catalyst particles, may be allowed to permit growth of nanotubes from the recessed surfaces. Once the nanotubes have extended beyond the recessed surfaces, the growth of the nanotubes may be terminated.
  • FIG. 1 illustrates a table with examples of commercial conducting greases and their thermal conductivity.
  • FIG. 2 illustrates a cross-sectional perspective view of a heat conducting medium in accordance with one embodiment of the present invention.
  • FIG. 3 illustrates a cross-sectional view of the heat-conducting medium in FIG. 2 having an array of nanotubes positioned within opposing recesses.
  • FIG. 4 illustrates a cross-sectional view of a heat-conducting medium in accordance with another embodiment of the present invention.
  • the present invention provides, in one embodiment, a medium for thermal management of electronic components.
  • the medium in an embodiment may be a thinly designed device that may be place at a thermal junction between a heat source, such as an integrated circuit, and a heat sink to facilitate heat transfer from the heat source to the heat sink
  • the present invention provides, in one embodiment, a heat-conducting medium 20 for carrying thermal energy away from a heat source.
  • the heat-conducting medium 20 in an embodiment, includes a substantially thin disk 21 designed so that it may be placed in a narrow region at, for instance, an interface between a lid of a heat generating integrated circuit (IC) and a heat sink.
  • disk 21 may be provided with a thickness ranging from about 2 millimeter (mm) to about 4 mm. Of course the thickness of the disk 21 may vary according to the particular application and placement.
  • disk 21 may be made from a material having relatively high thermal conductivity and heat spreading characteristics, so as to facilitate heat transfer from the heat generating IC to the heat sink.
  • disk 21 may be made from substantially high purity copper. Of course other materials may be used, so long as they provide disk 21 with high thermal conductivity and heat spreading characteristics.
  • disk 21 of heat-conducting medium 20 may include a first surface 211 for placement adjacent a heat source.
  • Disk 21 may also include an opposing second surface 212 for placement adjacent a heat sink.
  • the first and second surfaces 211 and 212 may act as a conduit to pull heat from a heat source to the heat sink.
  • First surface 211 in an embodiment, may be designed to include a recessed surface 23 defined by rim 25
  • the second surface 212 may be designed to include a recessed surface 24 defined by rim 26 .
  • Recessed surfaces 23 and 24 may be situated, in an embodiment, approximately in the center of disk 21 for accommodating an array of carbon nanotube bristles 30 (see FIG. 3 ).
  • the recessed surfaces 23 and 24 may be provided with a depth that is measurably less than the length of the nanotube bristles 30 .
  • the depth of each recessed surface may be approximately between 100 microns and 500 microns or more, depending of the particular application and location at which the disk may be placed.
  • Rims 25 and 26 situated circumferentially about disk 21 , may be provided, in an embodiment, to act as a spacer between the heat sink and the heat source.
  • the presence of rims 25 and 26 on disk 21 may also act to limit the amount of pressure or provide the appropriate amount of pressure that may be exerted by the heat sink and heat source against the nanotube bristles 30 . To the extent that a significant amount of pressure is exerted on the nanotube bristles 30 , that is, significantly more than necessary, the bristles 30 may be damaged and the transfer of heat may be compromised.
  • the recessed surfaces 23 and 24 may be created by machining, coined on a coin press, or any other methods known in the art.
  • the disk 21 may be provided with any geometric shape, for instance, square, hexagonal, octagonal etc., so long as the disk can act as an interface between a heat source and a heat sink.
  • the heat-conducting medium 20 may also include an array of heat-conducting bristles 30 situated within recessed surfaces 23 and 24 .
  • the presence of the array of bristles 30 which may be flexible in nature, can overcome the low number of contact spots between the heat source and heat sink typically observed in prior art flat plate.
  • the flexible bristles 30 may be situated substantially transverse to the recessed surfaces 23 and 24 , and may extend or protrude from within recessed surfaces 23 and 24 to about 10 microns to about 100 microns or slight more beyond rims 25 and 26 of disk 21 . In this way, the tips of the bristles 30 can maintain substantially good contact with the heat source and heat sink during use.
  • bristles 30 may be made from carbon nanotubes.
  • the carbon nanotubes for use in connection with the heat-conducting medium 20 of the present invention may be single wall nanotubes or multi-wall nanotubes, and may, in an embodiment, be less than approximately 50 nm in diameter.
  • disk 21 when situated within the narrow region or junction between the heat source and heat sink, can permit the heat sink and the heat source (e.g., lid of the IC) to both bear against rims 25 and 26 on disk 21 , thereby bending the protruding flexible nanotube bristles 30 in such manner so as to maintain good thermal coupling to both the heat source and the heat sink.
  • the heat sink and the heat source e.g., lid of the IC
  • the number of contact points can be significantly increased.
  • the number of contact points provided may range on the order of up to about 10 8 per square centimeter or higher.
  • an approximate thermal conductivity can be estimated to be about 0.20*2980 watts/m-deg. K or about 600 watts/m-deg. K, which compares rather well with currently available 9 watts/m-deg K for thermally conducting grease.
  • the medium 20 can be designed so that the amount of bristles 30 on each surface may be uneven relative to one another.
  • the heat source is a small die or small integrated circuit
  • the heat source side (i.e., surface 23 ) of disk 21 can be relatively smaller with fewer bristles 30 in comparison to the heat sink side (i.e., surface 24 ) of disk 21 .
  • the heat-conducting medium 20 may also act as a heat spreader, spreading heat from the smaller heat source surface 23 radially along the medium 20 to the larger heat sink surface 24 .
  • recessed surface 23 which may generally be similar in size to recessed surface 24 , may be made to be smaller relatively to recessed surface 24 .
  • rim 25 may, in an embodiment, be made to be radially thicker.
  • the array of bristles 30 may be provided on opposing recessed surfaces 23 and 24 of the disk 21 by various means known in the art.
  • coatings may be placed on the heat-conducting medium 20 in the region where the nanotube bristles 12 may grow (i.e., the recessed surfaces 23 and 24 ). These coatings may be selected so as not to react with the material from which the heat-conducting medium 20 may be made.
  • the coatings may include, for example, iron, molybdenum, alumina, silicon carbon, aluminum nitride, tungsten or a combination thereof.
  • the coatings can be applied onto the recessed surfaces 23 and 24 by any means known in the art, so that a dense substantially pore-free deposit may be produced.
  • catalysts may be deposited onto the coatings.
  • Deposition of the catalysts onto the coatings can be accomplished, in an embodiment, by spraying, painting, screen-printing, evaporation or by any process known in the art.
  • Catalysts that may be used in connection with the heat-conducting medium 20 of the present invention may generally be magnetic transition metals, examples of which include as iron, cobalt, nickel or a combination thereof.
  • the catalyst particles may subsequently be exposed to a gaseous carbon source, such as that associated with a chemical vapor deposition (CVD) process, a well-known process in the art, and allowed to take up carbon to permit growth of nanotubes therefrom.
  • CVD chemical vapor deposition
  • the heat conducting medium 20 of the present invention can overcome a number of problems, including a low number of contact spots observed in prior art flat plates by employing an array of flexible nanotube bristles 30 .
  • the bristles 30 on disk 21 may be pressed onto a hot surface of the heat source and act to carry heat away or act as a heat spreader from the surface of the heat source to a cooler heat sink in a manner that results in a low thermal resistance path between the heat source and the heat sink.
  • heat can travel along the nanotube bristles 30 and across the thin disk 21 to the contacting surfaces with substantially low contact resistance.
  • thermal resistance between such heat source and a heat sink can be as high as 20 degrees Centigrade. It is believed that this thermal resistance can be reduced to a small fraction of this amount using the present invention. The consequences can be that the power dissipated can be increased, and the temperature of the heat source can also be reduced.
  • the temperature gradient required to drive heat to the heat sink can be reduced to much less than 20° C.
  • rough interfaces may be accommodated so that lapping the interfaces may not be required. In other words, grinding of the rough interfaces may be minimized.
  • differences in the coefficient of thermal expansion between the heat source (e.g., lid of the IC) and the heat sink may be accommodated, so that, for example, expensive copper tungsten heat spreaders and the required brazing process can be eliminated.
  • the heat-conducting medium 20 with an array of nanotube bristles 30 can also be used as a drop-in substitute for “conducting grease” taking up only a few mm in vertical geometry.
  • the heat-conducting medium 40 includes a flexible member 41 , such as a mat or textile material made from carbon nanotubes.
  • a flexible member 41 such as a mat or textile material made from carbon nanotubes.
  • carbon nanotubes may be wound into fibers or yarns and the fibers or yarns formed or woven into a mat or textile material 41 .
  • the heat-conducting medium 40 in one embodiment, may be infiltrated with polyamide 42 , epoxy, other polymers or a combination thereof.
  • the heat-conducting medium 40 may also include a pad 43 placed on upper surface 44 of textile material 41 to support a heat source, such as IC 46 .
  • the presence of pad 43 may also provide structural support to the flexible member 41 .
  • pad 43 may also be placed against lower surface 45 of textile material 41 to provide additional structural support to the flexible member 41 .
  • the heat-conducting medium 40 may be used as a heat conducting medium in the manner similar to that discussed with medium 20 above.
  • a heat source such as IC 46 may be placed onto heat conducting medium 40 against the upper surface 44 of the flexible member 41 .
  • heat generated from the heat source may be carried by the flexible member 41 toward its edges 411 designed to couple to a heat sink, such as water cooling pipe 47 , a heat pipe, or any material that passively conducts heat along the flexible member 41 away from the heat source 46 .
  • the heat-conducting medium 40 may further include a heat spreader 48 placed adjacent to the heat source 46 and the upper surface 44 of the flexible member 41 .
  • Heat spreader 48 in one embodiment, may be situated between the heat source 46 and the upper surface 44 of the textile material 41 .
  • heat spreader 48 may act to facilitate the radial transfer of heat from the heat source 46 quickly to a wider area on the textile material 41 than otherwise may be, so that the heat from the heat source 46 may subsequently be carried to heat sink 47 .
  • an additional heat spreader 49 may be positioned against the lower surface 45 of the textile material 41 to further facilitate the spreading of heat from the heat source 46 radially along the textile material 41 .
  • the additional heat spreader 49 may be placed directly below the heat spreader 48 on the upper surface of the flexible member 41 .
  • the textile material 41 may also, in one embodiment of the present invention, be incorporated within, for example, a printed circuit board for diverting heat from a heat source.
  • the textile material 51 may not be a textile or textile-like in nature, but rather, be part of a thermally conductive composite, such as a highly loaded carbon-carbon composite, where the fiber loading may be above about 50%, and further be directional in the direction of the heat flux.

Abstract

A heat-conducting medium for placement between a heat source and heat sink to facilitate transfer of heat from the source to the sink is provided. The heat-conducting medium can include a disk having relatively high thermal conductivity and heat spreading characteristics. The heat-conducting medium also includes a first recessed surface and an opposing second recessed surface. Extending from within each recessed surface is an array of heat conducting bristles to provide a plurality of contact points to the heat source and heat sink to aid in the transfer of heat. The recessed surfaces may be defined by a rim positioned circumferentially about the disk. The presence of the rim about each recessed surface acts to minimize the amount of pressure that may be exerted by the heat sink and the heat source against the bristles. A method for manufacturing the heat-conducting medium is also provided.

Description

  • This present application is a divisional of U.S. application Ser. No. 11/413,512, filed Apr. 28, 2006, which claims priority to U.S. Provisional Patent Application Ser. No. 60/684,821, filed May 26, 2005, both of which are hereby incorporated herein by reference.
  • TECHNICAL FIELD
  • The present invention relates to systems and methods for thermal management of electronic components, and more particularly to a thermal junction device for facilitating heat transfer between a heat source and a heat sink.
  • BACKGROUND ART
  • Heat transfer for thermal management between two materials at different temperatures often may be accomplished by conduction, radiation and/or convection. In the area of electronics, in a narrow region at, for instance, an interface between a die lid (e.g., commonly a copper-tungsten material) of the integrated circuit and the heat sink, the temperature present in the integrated circuit (IC) can typically be between about 40° C. to 150° C. For such a situation, thermal management may typically be accomplished through conduction. However, the use of flat plates at the interface to facilitate the heat transfer from the integrated circuit to the heat sink has not been optimal. In particular, the use of a flat plate may provide only between 20 to 50 points of contact to the integrated circuit and/or the heat sink. As a result, the heat that flows out of the hot integrated circuit can only pass through these few contact spots.
  • To enhance the transfer of heat to the heat sink, current technology usually involves placing a thermally conducting grease between the die lid of an integrated circuit and the heat sink device. The heat sink device, in general, may be of any type, including a passive heat sink, a Peltier cooler, a refrigerated copper block, a heat pipe, or an active fan type, or a copper block in which embedded heat pipes can carry heat to a water-cooled bus outside of the system.
  • Presently, thermal greases that are commercially available typically contain silver powder or silver flake, and may be used by applying to machined, and occasionally, lapped heat sinks and integrated circuit lids. However, the thermal conductivity of these commercially available greases at best may only be about 9 watts/m-deg K. For example, (i) Arctic Silver III has a thermal conductivity of >9.0 W/m-deg K, (ii) AOS Thermal Compounds has a thermal conductivity of about 7.21 W/m-deg K, (iii) Shin-Etsu G751 has a thermal conductivity of about 4.5 W/m-deg K, (iv) AOS Thermal Compounds HTC-60 has a thermal conductivity of about 2.51 W/m-deg K, (v) Thermagon T-grease has a thermal conductivity of about 1.3 W/m-deg K, and (vi) Radio Shack Thermal Grease has a thermal conductivity of about 0.735 W/m-deg K. As illustrated in FIG. 1, there exists, generally, a 20 degrees difference between the heat source and the heat sink. Such a difference may indicate a thermal resistance at the junction and suggests that the potential to carry heat to the sink may be hurt by the poor interface provided by the grease.
  • It has been known that metal fiber structures and material can provide a low loss connection at greatly reduced forces, thereby providing high-efficiency, low force electrical contact. Based on simple laws of physics, the capability of fiber brushes to efficiently transfer electrical current across interfaces, which can be in relative motion or at rest, is paralleled by their capability to similarly transfer heat. In particular, since they operate at low loads and have very low resistance, they can dissipate relatively much less heat. Moreover, the fiber brushes can provide a substantial amount contact points between the heat source and heat sink to permit efficient heat transfer. As a result, metal fiber brushes have been used in a thermal interface as heat conduits for cooling or heating purposes. (U.S. Pat. No. 6,245,440)
  • Recently, carbon nanotubes have been used in thermal management. It has been shown that the thermal conductivity of carbon nanotubes is over 2980 watts/m-deg K as compared to thermal grease, which is only about 9 watts/m-deg K maximum (Thermal Conductivity of Carbon Nanotubes by Jianwei Che*, Tahir Cagin, and William A. Goddard III Materials and Process Simulation Center California Institute of Technology Pasadena, Calif. 91106E-mail: [email protected]. Even higher numbers are reported by Tomanek (VOLUME 84, NUMBER 20 PHYSICAL REVIEW LETTERS 15 MAY 2000 “Unusually High Thermal Conductivity of Carbon Nanotubes,” Savas Berber, Young-Kyun Kwon,* and David Tomanek).
  • In addition, U.S. Pat. No. 6,891,724, discloses the use of carbon nanotubes deposited on a CVD diamond coated thermally heat die. In particular, a CVD diamond coating is placed on a heat die, and the die subsequently coated with carbon nanotubes.
  • In Carbon nanotube composites for thermal management, M. J. Biercuk, M. C. Llaguno, M. Radosavljevic, J. K. Hyun, and A. T. Johnson, Department of Physics and Astronomy and Laboratory for Research on the Structure of Matter, University of Pennsylvania, Philadelphia, Pa. 19104—Applied Physics Letters—Apr. 15, 2002—Volume 80, Issue 15, pp. 2767-2769, the authors discussed adding a small amount of carbon nanotubes, without surface modification, to an epoxy matrix to improve heat transfer. In Study of Carbon Nanofiber Dispersion for Application of Advanced Thermal Interface Materials, Xinhe Tang*, Ernst Hammel, Markus Trampert, Klaus Mauthner, Theodor Schmitt, Electrovac GmbH, Aufeldgasse 37-39, 3400 Klosterneuburg, Austria and Jurgen Schulz-Harder, Michael Haberkorn, Andereas Meyer, Curamik Electronics GmbH, Am Stadtwald 2, 92676 Eschenbach, Germany, the authors described how adding carbon nanotubes to thermal grease improves thermal performance.
  • Others have developed approaches to aligning nanotubes in arrays for other applications. For example, Jung, Y. J., et al. “Aligned Carbon Nanotube-Polymer Hybrid Architectures for Diverse Flexible Electronic Applications.” Nano Lett., 6 (3), 413-418, 2006, discloses a nanotube filled polymer but does not include thermal applications.
  • SUMMARY OF THE INVENTION
  • The present invention, in one embodiment, is directed to a heat-conducting medium for placement between a heat source and heat sink to facilitate transfer of heat from the source to the sink.
  • In one embodiment, the heat-conducting medium includes a disk, made from a material having a relatively high thermal conductivity characteristic, for placement between a heat source and a heat sink. The disk may also have a heat spreading characteristic. The heat-conducting medium further includes a first recessed surface on the disk for placement adjacent the heat source and an opposing second recessed surface on the disk for placement adjacent the heat sink. The heat-conducting medium may further include an array of heat conducting bristles extending from within the first and second recessed surfaces. In an embodiment, the recessed surfaces may be defined by a rim positioned circumferentially about the disk. The presence of the rim about each recessed surface acts to provide a spacer between the heat source and heat sink and to minimize the amount of pressure that may be exerted by the heat sink and the heat source against the bristles. The bristles, in an embodiment, may extend beyond the rim on the respective surface from which the bristle are positioned to provide a plurality of contact points to the heat source and to the heat sink to aid in the transfer of heat.
  • The present invention, in another embodiment, is directed to a substantially flexible heat-conducting medium. This heat-conducting medium, in one embodiment, includes a flexible member made from an array of interweaving carbon nanotubes. The flexible member may include an upper surface against which a heat source may be placed, an opposing lower surface, and edges about the member designed for coupling to a heat sink toward which heat from the heat source can be directed. The heat-conducting medium also includes a pad for placement on the upper surface of the member to provide structural support to the member. In an embodiment, a second pad may be provided against the lower surface of the member to provide additional support to the flexible member. The heat-conducting medium may further include a heat spreader positioned adjacent the heat source and the upper surface of the member to facilitate radial transfer of heat from the heat source to a wider area on the member. To the extent desired, a second heat spreader may be provided against the lower surface of the flexible member to enhance spreading of heat from the heat source radially along the flexible member.
  • In accordance with another embodiment, the present invention provides a method for manufacturing a heat-conducting medium. In one embodiment, a disk having opposing recessed surfaces and a relatively high thermal conductivity characteristic may initially be provided. Next, a plurality of catalyst particles may be deposited into the recessed surfaces. In an embodiment, prior to depositing the catalyst particles, the recessed surfaces may be coated with a material that can enhance attachment of the particles to the recessed surfaces. Thereafter, the catalyst particles may be exposed to a gaseous carbon source, and from the uptake of carbon by the catalyst particles, may be allowed to permit growth of nanotubes from the recessed surfaces. Once the nanotubes have extended beyond the recessed surfaces, the growth of the nanotubes may be terminated.
  • BRIEF DESCRIPTION OF DRAWINGS
  • FIG. 1 illustrates a table with examples of commercial conducting greases and their thermal conductivity.
  • FIG. 2 illustrates a cross-sectional perspective view of a heat conducting medium in accordance with one embodiment of the present invention.
  • FIG. 3 illustrates a cross-sectional view of the heat-conducting medium in FIG. 2 having an array of nanotubes positioned within opposing recesses.
  • FIG. 4 illustrates a cross-sectional view of a heat-conducting medium in accordance with another embodiment of the present invention.
  • DESCRIPTION OF SPECIFIC EMBODIMENTS
  • The present invention provides, in one embodiment, a medium for thermal management of electronic components. The medium, in an embodiment may be a thinly designed device that may be place at a thermal junction between a heat source, such as an integrated circuit, and a heat sink to facilitate heat transfer from the heat source to the heat sink
  • With reference now to FIG. 2, the present invention provides, in one embodiment, a heat-conducting medium 20 for carrying thermal energy away from a heat source. The heat-conducting medium 20, in an embodiment, includes a substantially thin disk 21 designed so that it may be placed in a narrow region at, for instance, an interface between a lid of a heat generating integrated circuit (IC) and a heat sink. To that end, disk 21 may be provided with a thickness ranging from about 2 millimeter (mm) to about 4 mm. Of course the thickness of the disk 21 may vary according to the particular application and placement. In addition, disk 21 may be made from a material having relatively high thermal conductivity and heat spreading characteristics, so as to facilitate heat transfer from the heat generating IC to the heat sink. Examples of such a material include copper, aluminum, beryllium, or a combination thereof. In one embodiment of the invention, disk 21 may be made from substantially high purity copper. Of course other materials may be used, so long as they provide disk 21 with high thermal conductivity and heat spreading characteristics.
  • As illustrated in FIG. 2, disk 21 of heat-conducting medium 20 may include a first surface 211 for placement adjacent a heat source. Disk 21 may also include an opposing second surface 212 for placement adjacent a heat sink. In that manner, the first and second surfaces 211 and 212 may act as a conduit to pull heat from a heat source to the heat sink. First surface 211, in an embodiment, may be designed to include a recessed surface 23 defined by rim 25, while the second surface 212 may be designed to include a recessed surface 24 defined by rim 26. Recessed surfaces 23 and 24 may be situated, in an embodiment, approximately in the center of disk 21 for accommodating an array of carbon nanotube bristles 30 (see FIG. 3). To that end, the recessed surfaces 23 and 24 may be provided with a depth that is measurably less than the length of the nanotube bristles 30. In one embodiment, the depth of each recessed surface may be approximately between 100 microns and 500 microns or more, depending of the particular application and location at which the disk may be placed.
  • Rims 25 and 26, situated circumferentially about disk 21, may be provided, in an embodiment, to act as a spacer between the heat sink and the heat source. The presence of rims 25 and 26 on disk 21 may also act to limit the amount of pressure or provide the appropriate amount of pressure that may be exerted by the heat sink and heat source against the nanotube bristles 30. To the extent that a significant amount of pressure is exerted on the nanotube bristles 30, that is, significantly more than necessary, the bristles 30 may be damaged and the transfer of heat may be compromised.
  • It should be appreciated that the recessed surfaces 23 and 24 may be created by machining, coined on a coin press, or any other methods known in the art. In addition, although illustrated as circular in shape, the disk 21 may be provided with any geometric shape, for instance, square, hexagonal, octagonal etc., so long as the disk can act as an interface between a heat source and a heat sink.
  • Looking now at FIG. 3, the heat-conducting medium 20 may also include an array of heat-conducting bristles 30 situated within recessed surfaces 23 and 24. The presence of the array of bristles 30, which may be flexible in nature, can overcome the low number of contact spots between the heat source and heat sink typically observed in prior art flat plate. In accordance with one embodiment of the present invention, the flexible bristles 30 may be situated substantially transverse to the recessed surfaces 23 and 24, and may extend or protrude from within recessed surfaces 23 and 24 to about 10 microns to about 100 microns or slight more beyond rims 25 and 26 of disk 21. In this way, the tips of the bristles 30 can maintain substantially good contact with the heat source and heat sink during use.
  • Moreover, because good thermal conductivity is necessary, bristles 30, in an embodiment, may be made from carbon nanotubes. The carbon nanotubes for use in connection with the heat-conducting medium 20 of the present invention may be single wall nanotubes or multi-wall nanotubes, and may, in an embodiment, be less than approximately 50 nm in diameter. It should be noted that by allowing the bristles 30 to extend beyond rims 25 and 26, disk 21, when situated within the narrow region or junction between the heat source and heat sink, can permit the heat sink and the heat source (e.g., lid of the IC) to both bear against rims 25 and 26 on disk 21, thereby bending the protruding flexible nanotube bristles 30 in such manner so as to maintain good thermal coupling to both the heat source and the heat sink.
  • By employing an array of nanotube bristles 30, the number of contact points can be significantly increased. In one embodiment, the number of contact points provided may range on the order of up to about 108 per square centimeter or higher. Moreover, if, for instance, only about 20 percent of the surface of the apparent contact area is filled with nanotube bristles 30, then an approximate thermal conductivity can be estimated to be about 0.20*2980 watts/m-deg. K or about 600 watts/m-deg. K, which compares rather well with currently available 9 watts/m-deg K for thermally conducting grease.
  • It should be appreciated that although the amount of bristles 30 illustrated in FIG. 3 may be substantially similar on recessed surface 23 and recessed surface 24, the medium 20 can be designed so that the amount of bristles 30 on each surface may be uneven relative to one another. For example, if the heat source is a small die or small integrated circuit, the heat source side (i.e., surface 23) of disk 21 can be relatively smaller with fewer bristles 30 in comparison to the heat sink side (i.e., surface 24) of disk 21. With such a design the heat-conducting medium 20 may also act as a heat spreader, spreading heat from the smaller heat source surface 23 radially along the medium 20 to the larger heat sink surface 24. In addition, to the extent that there may be fewer bristles 30 on recessed surface 23, recessed surface 23, which may generally be similar in size to recessed surface 24, may be made to be smaller relatively to recessed surface 24. To provide a relatively smaller recessed surface 23, rim 25 may, in an embodiment, be made to be radially thicker.
  • The array of bristles 30, in an embodiment, may be provided on opposing recessed surfaces 23 and 24 of the disk 21 by various means known in the art. In one approach, coatings may be placed on the heat-conducting medium 20 in the region where the nanotube bristles 12 may grow (i.e., the recessed surfaces 23 and 24). These coatings may be selected so as not to react with the material from which the heat-conducting medium 20 may be made. The coatings may include, for example, iron, molybdenum, alumina, silicon carbon, aluminum nitride, tungsten or a combination thereof. In one embodiment, the coatings can be applied onto the recessed surfaces 23 and 24 by any means known in the art, so that a dense substantially pore-free deposit may be produced. In addition, certain catalysts may be deposited onto the coatings. Deposition of the catalysts onto the coatings can be accomplished, in an embodiment, by spraying, painting, screen-printing, evaporation or by any process known in the art. Catalysts that may be used in connection with the heat-conducting medium 20 of the present invention may generally be magnetic transition metals, examples of which include as iron, cobalt, nickel or a combination thereof. The catalyst particles may subsequently be exposed to a gaseous carbon source, such as that associated with a chemical vapor deposition (CVD) process, a well-known process in the art, and allowed to take up carbon to permit growth of nanotubes therefrom.
  • The heat conducting medium 20 of the present invention can overcome a number of problems, including a low number of contact spots observed in prior art flat plates by employing an array of flexible nanotube bristles 30. In particular, when placed within a junction between the heat source and heat sink, the bristles 30 on disk 21 may be pressed onto a hot surface of the heat source and act to carry heat away or act as a heat spreader from the surface of the heat source to a cooler heat sink in a manner that results in a low thermal resistance path between the heat source and the heat sink. In particular, heat can travel along the nanotube bristles 30 and across the thin disk 21 to the contacting surfaces with substantially low contact resistance. Presently thermal resistance between such heat source and a heat sink can be as high as 20 degrees Centigrade. It is believed that this thermal resistance can be reduced to a small fraction of this amount using the present invention. The consequences can be that the power dissipated can be increased, and the temperature of the heat source can also be reduced.
  • In addition, by employing an array of nanotube bristles 30, the temperature gradient required to drive heat to the heat sink can be reduced to much less than 20° C. Furthermore, rough interfaces may be accommodated so that lapping the interfaces may not be required. In other words, grinding of the rough interfaces may be minimized. Moreover, differences in the coefficient of thermal expansion between the heat source (e.g., lid of the IC) and the heat sink may be accommodated, so that, for example, expensive copper tungsten heat spreaders and the required brazing process can be eliminated. The heat-conducting medium 20 with an array of nanotube bristles 30 can also be used as a drop-in substitute for “conducting grease” taking up only a few mm in vertical geometry.
  • Looking now at FIG. 4, there is illustrated another heat-conducting medium 40 for thermal management in accordance with further embodiment of the present invention. The heat-conducting medium 40, in an embodiment, includes a flexible member 41, such as a mat or textile material made from carbon nanotubes. In other words, carbon nanotubes may be wound into fibers or yarns and the fibers or yarns formed or woven into a mat or textile material 41. The heat-conducting medium 40, in one embodiment, may be infiltrated with polyamide 42, epoxy, other polymers or a combination thereof.
  • The heat-conducting medium 40 may also include a pad 43 placed on upper surface 44 of textile material 41 to support a heat source, such as IC 46. The presence of pad 43 may also provide structural support to the flexible member 41. To the extent desired, pad 43 may also be placed against lower surface 45 of textile material 41 to provide additional structural support to the flexible member 41.
  • As illustrated in FIG. 4, the heat-conducting medium 40 may be used as a heat conducting medium in the manner similar to that discussed with medium 20 above. In particular, a heat source, such as IC 46 may be placed onto heat conducting medium 40 against the upper surface 44 of the flexible member 41. To that end, heat generated from the heat source may be carried by the flexible member 41 toward its edges 411 designed to couple to a heat sink, such as water cooling pipe 47, a heat pipe, or any material that passively conducts heat along the flexible member 41 away from the heat source 46.
  • In another embodiment, the heat-conducting medium 40 may further include a heat spreader 48 placed adjacent to the heat source 46 and the upper surface 44 of the flexible member 41. Heat spreader 48, in one embodiment, may be situated between the heat source 46 and the upper surface 44 of the textile material 41. As such, heat spreader 48 may act to facilitate the radial transfer of heat from the heat source 46 quickly to a wider area on the textile material 41 than otherwise may be, so that the heat from the heat source 46 may subsequently be carried to heat sink 47. As shown in FIG. 4, an additional heat spreader 49 may be positioned against the lower surface 45 of the textile material 41 to further facilitate the spreading of heat from the heat source 46 radially along the textile material 41. In an embodiment, the additional heat spreader 49 may be placed directly below the heat spreader 48 on the upper surface of the flexible member 41.
  • To the extent desired, the textile material 41 may also, in one embodiment of the present invention, be incorporated within, for example, a printed circuit board for diverting heat from a heat source. Alternatively, the textile material 51 may not be a textile or textile-like in nature, but rather, be part of a thermally conductive composite, such as a highly loaded carbon-carbon composite, where the fiber loading may be above about 50%, and further be directional in the direction of the heat flux.
  • While the invention has been described in connection with the specific embodiments thereof, it will be understood that it is capable of further modification. Furthermore, this application is intended to cover any variations, uses, or adaptations of the invention, including such departures from the present disclosure as come within known or customary practice in the art to which the invention pertains.

Claims (35)

1. A heat-conducting medium for thermal management, the medium comprising:
a disk for placement between a heat source and a heat sink;
a first recessed surface on the disk for placement adjacent the heat source;
an opposing second recessed surface on the disk for placement adjacent the heat sink; and
an array of heat conducting bristles extending from within the first and second recessed surfaces, such that the bristles in the first recessed surface provides a plurality of contact points to the heat source and the bristles in the second recessed surface provides a plurality of contact points to the heat sink.
2. A medium as set forth in claim 1, wherein the disk is made from a material having a relatively high thermal conductivity characteristic.
3. A medium as set forth in claim 1, wherein the disk is made from a material having a heat spreading characteristic.
4. A medium as set forth in claim 1, wherein the disk is made from one of copper, aluminum, beryllium, or a combination thereof.
5. A medium as set forth in claim 1, wherein each of the first and second recessed surfaces is defined by a rim positioned circumferentially about the disk.
6. A medium as set forth in claim 5, wherein the rim acts as a spacer between the heat sink and the heat source.
7. A medium as set forth in claim 5, wherein the rim acts to an amount of pressure that may be exerted by the heat sink and the heat source against the array of bristles.
8. A medium as set forth in claim 1, wherein each of the first and second recessed surfaces includes a depth that is measurably less than the length of the array of bristles extending therefrom.
9. A medium as set forth in claim 1, wherein each of the first and second recessed surfaces includes a depth between approximately 100 microns and approximately 500 microns.
10. A medium as set forth in claim 1, wherein the first and second recessed surfaces are substantially similar in size.
11. A medium as set forth in claim 1, wherein the first and second recessed surfaces are different in size.
12. A medium as set forth in claim 11, wherein the first recessed surface is smaller in size than the second recessed surface to permit heat from a small heat source to be spread to a relatively larger heat sink.
13. A medium as set forth in claim 1, wherein each array of bristles is situated substantially transverse to the respective recessed surface from which it extends.
14. A medium as set forth in claim 1, wherein each array of bristles extends about 10 microns to about 100 microns beyond its respective recessed surface.
15. A medium as set forth in claim 1, wherein the number of contact points provided by each array of bristles ranges on the order of up to about 108 per square centimeter or more.
16. A medium as set forth in claim 1, wherein the arrays of bristles extending from the first and second recessed surfaces are substantially similar in number.
17. A medium as set forth in claim 1, wherein the arrays of bristles extending from the first and second recessed surfaces are different in number.
18. A medium as set forth in claim 1, wherein the bristles extending from the first recessed surface is less in number than the bristles extending from the second recessed surface to permit heat from a small heat source to be spread to a relatively larger heat sink.
19. A medium as set forth in claim 1, wherein the bristles are made from carbon nanotubes.
20. A heat-conducting medium for thermal management, the medium comprising:
a disk having a first side for placement adjacent a heat source and an opposing second side for placement adjacent a heat sink;
a rim positioned circumferentially about each side of the disk;
a first recessed surface defined by the rim on the first side of the disk;
a second recessed surface defined by the rim on the second side of the disk; and
an array of heat conducting bristles extending from within the first and second recessed surfaces, such that the bristles in the first recessed surface provides a plurality of contact points to the heat source and the bristles in the second recessed surface provides a plurality of contact points to the heat sink.
21. A medium as set forth in claim 20, wherein the disk is made from a material having a relatively high thermal conductivity characteristic.
22. A medium as set forth in claim 20, wherein the disk is made from a material having a heat spreading characteristic.
23. A medium as set forth in claim 20, wherein the rim acts to an amount of pressure that may be exerted by the heat sink and the heat source against the array of bristles.
24. A medium as set forth in claim 20, wherein the first and second recessed surfaces are of similar size defined by their respective rim.
25. A medium as set forth in claim 20, wherein the first and second recessed surfaces are different in size defined respectively by different sized rims.
26. A medium as set forth in claim 20, wherein each array of bristles extends slightly beyond the rim on the respective surface, such that the medium can accommodate differences in coefficient of thermal expansion between the heat source and the heat sink.
27. A medium as set forth in claim 20, wherein the arrays of bristles permit the medium to accommodate rough interfaces between the heat source and heat sink, so that lapping the interfaces can be minimized.
28. A medium as set forth in claim 20, wherein the arrays of bristles extending from the first and second recessed surfaces are substantially similar in number.
29. A medium as set forth in claim 20, wherein the arrays of bristles extending from the first and second recessed surfaces are different in number.
30. A method for manufacturing a heat-conducting medium for thermal management, the method comprising:
providing a disk having opposing recessed surfaces and a relatively high thermal conductivity characteristic;
depositing a plurality of catalyst particles into the recessed surfaces;
exposing the catalyst particles in the recessed surfaces to a gaseous carbon source;
allowing uptake of carbon by the catalyst particles to permit growth of nanotubes from the recessed surface; and
terminating the growth of the nanotubes when they extend beyond the recessed surfaces.
31. A method as set forth in claim 30, wherein prior to the depositing the catalyst particles, the method includes coating the recessed surfaces with a material that enhances attachment of the particles to the recessed surfaces.
32. A method as set forth in claim 31, wherein, in the step coating, the material includes one of iron, molybdenum, alumina, silicon carbon, aluminum nitride, tungsten, or a combination thereof.
33. A method as set forth in claim 30, wherein, in the step of depositing, the catalyst particles are made from magnetic transition metals.
34. A method as set forth in claim 30, wherein, in the step of depositing, the catalyst particles include one of iron, cobalt, nickel, or a combination thereof.
35. A method as set forth in claim 30, wherein the step of exposing includes the use of chemical vapor deposition for growing the fibers.
US13/008,256 2005-05-26 2011-01-18 Nanotube Materials for Thermal Management of Electronic Components Abandoned US20110214850A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/008,256 US20110214850A1 (en) 2005-05-26 2011-01-18 Nanotube Materials for Thermal Management of Electronic Components

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US68482105P 2005-05-26 2005-05-26
US11/413,512 US7898079B2 (en) 2005-05-26 2006-04-28 Nanotube materials for thermal management of electronic components
US13/008,256 US20110214850A1 (en) 2005-05-26 2011-01-18 Nanotube Materials for Thermal Management of Electronic Components

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US11/413,512 Division US7898079B2 (en) 2005-05-26 2006-04-28 Nanotube materials for thermal management of electronic components

Publications (1)

Publication Number Publication Date
US20110214850A1 true US20110214850A1 (en) 2011-09-08

Family

ID=37452549

Family Applications (2)

Application Number Title Priority Date Filing Date
US11/413,512 Active 2028-11-04 US7898079B2 (en) 2005-05-26 2006-04-28 Nanotube materials for thermal management of electronic components
US13/008,256 Abandoned US20110214850A1 (en) 2005-05-26 2011-01-18 Nanotube Materials for Thermal Management of Electronic Components

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US11/413,512 Active 2028-11-04 US7898079B2 (en) 2005-05-26 2006-04-28 Nanotube materials for thermal management of electronic components

Country Status (6)

Country Link
US (2) US7898079B2 (en)
EP (2) EP2112249A1 (en)
JP (2) JP4972640B2 (en)
AU (1) AU2006249601B2 (en)
CA (1) CA2609712C (en)
WO (1) WO2006127208A2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140124186A1 (en) * 2012-11-08 2014-05-08 Shinshu University Radiation member
US9198232B2 (en) 2008-05-07 2015-11-24 Nanocomp Technologies, Inc. Nanostructure-based heating devices and methods of use
US9988718B2 (en) 2015-06-19 2018-06-05 Rolls-Royce Corporation Directed energy deposition with cooling mechanism

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2005230961B2 (en) * 2004-01-15 2010-11-11 Nanocomp Technologies, Inc. Systems and methods for synthesis of extended length nanostructures
TWI388042B (en) * 2004-11-04 2013-03-01 Taiwan Semiconductor Mfg Integrated circuit nanotube-based substrate
EP2570385A3 (en) * 2005-05-03 2013-10-16 Nanocomp Technologies, Inc. Carbon composite materials and methods of manufacturing same
EP2112249A1 (en) * 2005-05-26 2009-10-28 Nanocomp Technologies, Inc. Systems and methods for thermal management of electronic components
US7993620B2 (en) 2005-07-28 2011-08-09 Nanocomp Technologies, Inc. Systems and methods for formation and harvesting of nanofibrous materials
JP4992461B2 (en) * 2007-02-21 2012-08-08 富士通株式会社 Electronic circuit device and electronic circuit device module
EP2125212A2 (en) 2007-03-23 2009-12-02 Lydall, Inc. Substrate for carrying catalytic particles
US9061913B2 (en) 2007-06-15 2015-06-23 Nanocomp Technologies, Inc. Injector apparatus and methods for production of nanostructures
ES2785044T3 (en) 2007-07-09 2020-10-05 Nanocomp Technologies Inc Chemically assisted alignment of nanotubes within extensible structures
JP5496887B2 (en) * 2007-07-25 2014-05-21 ナノコンプ テクノロジーズ インコーポレイテッド System and method for controlling nanotube chirality
CA2695853A1 (en) 2007-08-07 2009-02-12 Nanocomp Technologies, Inc. Electrically and thermally non-metallic conductive nanostructure-based adapters
US8919428B2 (en) * 2007-10-17 2014-12-30 Purdue Research Foundation Methods for attaching carbon nanotubes to a carbon substrate
JP5057233B2 (en) * 2008-03-28 2012-10-24 住友電気工業株式会社 Reactor
US20130345703A1 (en) * 2009-05-25 2013-12-26 Creosalus, Inc. Method for manipulating objects employing nanotechnology
US8405996B2 (en) 2009-06-30 2013-03-26 General Electric Company Article including thermal interface element and method of preparation
JP5276565B2 (en) * 2009-10-14 2013-08-28 新光電気工業株式会社 Heat dissipation parts
KR101390462B1 (en) * 2010-08-04 2014-04-29 아이신세이끼가부시끼가이샤 Carbon nanotube device, process for production of carbon nanotube, and device for production of carbon nanotube
ES2721377T3 (en) 2011-01-04 2019-07-31 Nanocomp Technologies Inc Thermal insulators based on nanotubes, their use and method of thermal insulation
JP5392272B2 (en) * 2011-01-13 2014-01-22 株式会社豊田自動織機 Double-sided substrate, semiconductor device, and method for manufacturing semiconductor device
US9403121B2 (en) 2013-06-06 2016-08-02 Idex Health & Science, Llc Carbon nanotube composite membrane
US9381449B2 (en) 2013-06-06 2016-07-05 Idex Health & Science Llc Carbon nanotube composite membrane
ES2943257T3 (en) 2013-06-17 2023-06-12 Nanocomp Technologies Inc Exfoliating-dispersing agents for nanotubes, bundles and fibers
US11286372B2 (en) * 2013-08-28 2022-03-29 Eaton Intelligent Power Limited Heat sink composition for electrically resistive and thermally conductive circuit breaker and load center and method of preparation therefor
EP3105300B1 (en) 2014-02-13 2019-08-21 Honeywell International Inc. Compressible thermal interface materials
US20160106004A1 (en) * 2014-10-13 2016-04-14 Ntherma Corporation Carbon nanotubes disposed on metal substrates with one or more cavities
WO2016126818A1 (en) 2015-02-03 2016-08-11 Nanocomp Technologies, Inc. Carbon nanotube structures and methods for production thereof
US10781349B2 (en) 2016-03-08 2020-09-22 Honeywell International Inc. Thermal interface material including crosslinker and multiple fillers
US10581082B2 (en) 2016-11-15 2020-03-03 Nanocomp Technologies, Inc. Systems and methods for making structures defined by CNT pulp networks
US11279836B2 (en) 2017-01-09 2022-03-22 Nanocomp Technologies, Inc. Intumescent nanostructured materials and methods of manufacturing same
US11041103B2 (en) 2017-09-08 2021-06-22 Honeywell International Inc. Silicone-free thermal gel
US11072706B2 (en) 2018-02-15 2021-07-27 Honeywell International Inc. Gel-type thermal interface material
DE102018218830B4 (en) * 2018-11-05 2022-09-29 Robert Bosch Gmbh Thermally conductive connecting element, its use, cooling arrangement and heat distribution arrangement
US11373921B2 (en) 2019-04-23 2022-06-28 Honeywell International Inc. Gel-type thermal interface material with low pre-curing viscosity and elastic properties post-curing

Citations (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3090876A (en) * 1960-04-13 1963-05-21 Bell Telephone Labor Inc Piezoelectric devices utilizing aluminum nitride
US3109712A (en) * 1960-01-11 1963-11-05 Plessey Co Ltd Bodies and shapes of carbonaceous materials and processes for their production
US3706193A (en) * 1971-04-19 1972-12-19 Electrospin Corp Spinning head
US3943689A (en) * 1971-10-07 1976-03-16 Hamel Projektierungs- Und Verwaltungs-Ag. Method of and apparatus for twisting yarn or thread
US4358699A (en) * 1980-06-05 1982-11-09 The University Of Virginia Alumni Patents Foundation Versatile electrical fiber brush and method of making
US4384944A (en) * 1980-09-18 1983-05-24 Pirelli Cable Corporation Carbon filled irradiation cross-linked polymeric insulation for electric cable
US4468922A (en) * 1983-08-29 1984-09-04 Battelle Development Corporation Apparatus for spinning textile fibers
US4987274A (en) * 1989-06-09 1991-01-22 Rogers Corporation Coaxial cable insulation and coaxial cable made therewith
US5428884A (en) * 1992-11-10 1995-07-04 Tns Mills, Inc. Yarn conditioning process
US5488752A (en) * 1993-12-23 1996-02-06 Randolph; Norman C. Heat conducting apparatus for wiper blades
US6110590A (en) * 1998-04-15 2000-08-29 The University Of Akron Synthetically spun silk nanofibers and a process for making the same
US6143412A (en) * 1997-02-10 2000-11-07 President And Fellows Of Harvard College Fabrication of carbon microstructures
US6245440B1 (en) * 1996-04-05 2001-06-12 University Of Virginia Continuous metal fiber brushes
US20010003576A1 (en) * 1999-09-10 2001-06-14 Klett James W. Gelcasting polymeric precursors for producing net-shaped graphites
US6265466B1 (en) * 1999-02-12 2001-07-24 Eikos, Inc. Electromagnetic shielding composite comprising nanotubes
US6308509B1 (en) * 1997-10-10 2001-10-30 Quantum Group, Inc Fibrous structures containing nanofibrils and other textile fibers
US6333016B1 (en) * 1999-06-02 2001-12-25 The Board Of Regents Of The University Of Oklahoma Method of producing carbon nanotubes
US20020004028A1 (en) * 1998-09-18 2002-01-10 Margrave John L. Chemical derivatization of single-wall carbon nanotubes to facilitate solvation thereof; and use of derivatized nanotubes to form catalyst-containing seed materials for use in making carbon fibers
US20020040900A1 (en) * 2000-08-18 2002-04-11 Arx Theodore Von Packaging having self-contained heater
US6452085B2 (en) * 2000-01-17 2002-09-17 Aisin Seiki Kabushiki Kaisha Thermoelectric device
US20020136681A1 (en) * 1997-03-07 2002-09-26 William Marsh Rice University Method for producing a catalyst support and compositions thereof
US20020179564A1 (en) * 1999-11-26 2002-12-05 Ut-Battelle, Llc, Lockheed Martin Energy Research Corporation Condensed phase conversion and growth of nanorods and other materials
US6495116B1 (en) * 2000-04-10 2002-12-17 Lockheed Martin Corporation Net shape manufacturing using carbon nanotubes
US20030117770A1 (en) * 2001-12-20 2003-06-26 Intel Corporation Carbon nanotube thermal interface structures
US20030133865A1 (en) * 2001-07-06 2003-07-17 William Marsh Rice University Single-wall carbon nanotube alewives, process for making, and compositions thereof
US20030165648A1 (en) * 2002-03-04 2003-09-04 Alex Lobovsky Composite material comprising oriented carbon nanotubes in a carbon matrix and process for preparing same
US6682677B2 (en) * 2000-11-03 2004-01-27 Honeywell International Inc. Spinning, processing, and applications of carbon nanotube filaments, ribbons, and yarns
US6706402B2 (en) * 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US20040053780A1 (en) * 2002-09-16 2004-03-18 Jiang Kaili Method for fabricating carbon nanotube yarn
US20040081758A1 (en) * 2001-03-16 2004-04-29 Klaus Mauthner Ccvd method for producing tubular carbon nanofibers
US20040124772A1 (en) * 2002-12-25 2004-07-01 Ga-Lane Chen Plasma display panel
US6790426B1 (en) * 1999-07-13 2004-09-14 Nikkiso Co., Ltd. Carbonaceous nanotube, nanotube aggregate, method for manufacturing a carbonaceous nanotube
US20040265489A1 (en) * 2003-06-25 2004-12-30 Dubin Valery M. Methods of fabricating a composite carbon nanotube thermal interface device
US20040266065A1 (en) * 2003-06-25 2004-12-30 Yuegang Zhang Method of fabricating a composite carbon nanotube thermal interface device
US6842328B2 (en) * 2003-05-30 2005-01-11 Joachim Hossick Schott Capacitor and method for producing a capacitor
US20050006754A1 (en) * 2003-07-07 2005-01-13 Mehmet Arik Electronic devices and methods for making same using nanotube regions to assist in thermal heat-sinking
US20050006801A1 (en) * 2003-07-11 2005-01-13 Cambridge University Technical Service Limited Production of agglomerates from gas phase
US20050048697A1 (en) * 2003-09-03 2005-03-03 Industrial Technology Research Institute Self-assembled nanometer conductive bumps and method for fabricating
US20050046017A1 (en) * 2003-08-25 2005-03-03 Carlos Dangelo System and method using self-assembled nano structures in the design and fabrication of an integrated circuit micro-cooler
US20050063658A1 (en) * 1997-01-16 2005-03-24 Crowley Robert Joseph Optical antenna array for harmonic generation, mixing and signal amplification
US20050067406A1 (en) * 2003-09-30 2005-03-31 Shanmugam Rajarajan Self heating apparatus
US6891724B2 (en) * 2002-06-12 2005-05-10 Intel Corporation Increasing thermal conductivity of thermal interface using carbon nanotubes and CVD
US20050104258A1 (en) * 2003-07-02 2005-05-19 Physical Sciences, Inc. Patterned electrospinning
US20050269726A1 (en) * 2003-09-24 2005-12-08 Matabayas James C Jr Thermal interface material with aligned carbon nanotubes
US20060118158A1 (en) * 2005-05-03 2006-06-08 Minjuan Zhang Nanostructured bulk thermoelectric material
US20060252853A1 (en) * 2002-11-18 2006-11-09 Rensselaer Polytechnic Institute Nanotube polymer composite and methods of making same
US20060269670A1 (en) * 2005-05-26 2006-11-30 Lashmore David S Systems and methods for thermal management of electronic components
US20060272701A1 (en) * 2002-12-09 2006-12-07 Pulickel Ajayan Nanotube-organic photoelectric conversion device and methods of making same
US7182929B1 (en) * 2003-08-18 2007-02-27 Nei, Inc. Nanostructured multi-component and doped oxide powders and method of making same
US20070116627A1 (en) * 2005-01-25 2007-05-24 California Institute Of Technology Carbon nanotube compositions and devices and methods of making thereof
US20070140947A1 (en) * 2003-12-24 2007-06-21 Juan Schneider Continuous production of carbon nanotubes
US20070151744A1 (en) * 2005-12-30 2007-07-05 Hon Hai Precision Industry Co., Ltd. Electrical composite conductor and electrical cable using the same
US20070232699A1 (en) * 2004-05-13 2007-10-04 Russell Alan J Self assembled nanostructures and mehods for preparing the same
US20070293086A1 (en) * 2006-06-14 2007-12-20 Tsinghua University Coaxial cable
US7323938B2 (en) * 2004-11-22 2008-01-29 Asahi Kasei Microsystems Co., Ltd. Amplifier circuit and light receiving apparatus
US20080170982A1 (en) * 2004-11-09 2008-07-17 Board Of Regents, The University Of Texas System Fabrication and Application of Nanofiber Ribbons and Sheets and Twisted and Non-Twisted Nanofiber Yarns
US20090044848A1 (en) * 2007-08-14 2009-02-19 Nanocomp Technologies, Inc. Nanostructured Material-Based Thermoelectric Generators
US20090169819A1 (en) * 2007-10-05 2009-07-02 Paul Drzaic Nanostructure Films
US20090194525A1 (en) * 2006-02-03 2009-08-06 Exaenc Corp. Heating element using carbon nano tube
US20090269511A1 (en) * 2008-04-25 2009-10-29 Aruna Zhamu Process for producing hybrid nano-filament electrodes for lithium batteries
US20090277897A1 (en) * 2008-05-07 2009-11-12 Nanocomp Technologies, Inc. Nanostructure-based heating devices and methods of use

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2855493A1 (en) * 1978-12-22 1980-07-03 Bbc Brown Boveri & Cie PERFORMANCE SEMICONDUCTOR COMPONENT
DE4445849A1 (en) * 1994-12-22 1996-06-27 Sel Alcatel Ag Device for dissipating heat from an electronic component
JPH09129793A (en) * 1995-10-27 1997-05-16 Tonen Corp Heat conductive plate for semiconductor package
US5939408A (en) * 1996-05-23 1999-08-17 Hoffman-La Roche Inc. Vitamin D3 analogs
US6301471B1 (en) 1998-11-02 2001-10-09 Openwave System Inc. Online churn reduction and loyalty system
US6191944B1 (en) * 1998-11-05 2001-02-20 Electrovac, Fabrikation Elektrotechnischer Spezialartikel Gesellschaft M.B.H. Heat sink for electric and/or electronic devices
JP2001160607A (en) * 1999-12-02 2001-06-12 Polymatech Co Ltd Anisotropic heat conducting sheet
DE60132397T2 (en) 2000-06-01 2009-01-22 Matsushita Electric Industrial Co., Ltd., Kadoma-shi Method for producing a thermally conductive substrate with lead frame and heat radiation plate
JP2004051852A (en) * 2002-07-22 2004-02-19 Polymatech Co Ltd Thermally conductive polymer molding and its production method
JP2004119621A (en) * 2002-09-25 2004-04-15 Sony Corp Cooling device and electronic equipment having the same
DE10248644B4 (en) * 2002-10-18 2008-07-03 Semikron Elektronik Gmbh & Co. Kg The power semiconductor module
JP2004241295A (en) * 2003-02-07 2004-08-26 Hitachi Zosen Corp Electrode material for electron emission element using carbon nanotube and its manufacturing method
CN100405519C (en) * 2003-03-27 2008-07-23 清华大学 Preparation method of field emission element
JP2004315297A (en) 2003-04-17 2004-11-11 Misuzu Kogyo:Kk Nano carbon composite material and its manufacturing method
JP2005116839A (en) * 2003-10-08 2005-04-28 Sony Corp Heat conductor, cooling device, electronic apparatus, and method for manufacturing heat conductor
JP4689261B2 (en) 2004-03-01 2011-05-25 三菱レイヨン株式会社 Carbon nanotube-containing composition, composite having coating film made thereof, and method for producing them
US7437938B2 (en) 2007-03-21 2008-10-21 Rosemount Inc. Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires

Patent Citations (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3109712A (en) * 1960-01-11 1963-11-05 Plessey Co Ltd Bodies and shapes of carbonaceous materials and processes for their production
US3090876A (en) * 1960-04-13 1963-05-21 Bell Telephone Labor Inc Piezoelectric devices utilizing aluminum nitride
US3706193A (en) * 1971-04-19 1972-12-19 Electrospin Corp Spinning head
US3943689A (en) * 1971-10-07 1976-03-16 Hamel Projektierungs- Und Verwaltungs-Ag. Method of and apparatus for twisting yarn or thread
US4358699A (en) * 1980-06-05 1982-11-09 The University Of Virginia Alumni Patents Foundation Versatile electrical fiber brush and method of making
US4384944A (en) * 1980-09-18 1983-05-24 Pirelli Cable Corporation Carbon filled irradiation cross-linked polymeric insulation for electric cable
US4468922A (en) * 1983-08-29 1984-09-04 Battelle Development Corporation Apparatus for spinning textile fibers
US4987274A (en) * 1989-06-09 1991-01-22 Rogers Corporation Coaxial cable insulation and coaxial cable made therewith
US5428884A (en) * 1992-11-10 1995-07-04 Tns Mills, Inc. Yarn conditioning process
US5488752A (en) * 1993-12-23 1996-02-06 Randolph; Norman C. Heat conducting apparatus for wiper blades
US6245440B1 (en) * 1996-04-05 2001-06-12 University Of Virginia Continuous metal fiber brushes
US20050063658A1 (en) * 1997-01-16 2005-03-24 Crowley Robert Joseph Optical antenna array for harmonic generation, mixing and signal amplification
US6143412A (en) * 1997-02-10 2000-11-07 President And Fellows Of Harvard College Fabrication of carbon microstructures
US20020136681A1 (en) * 1997-03-07 2002-09-26 William Marsh Rice University Method for producing a catalyst support and compositions thereof
US7048999B2 (en) * 1997-03-07 2006-05-23 Wiiliam Marsh Rice University Method for producing self-assembled objects comprising single-wall carbon nanotubes and compositions thereof
US6308509B1 (en) * 1997-10-10 2001-10-30 Quantum Group, Inc Fibrous structures containing nanofibrils and other textile fibers
US6110590A (en) * 1998-04-15 2000-08-29 The University Of Akron Synthetically spun silk nanofibers and a process for making the same
US20020004028A1 (en) * 1998-09-18 2002-01-10 Margrave John L. Chemical derivatization of single-wall carbon nanotubes to facilitate solvation thereof; and use of derivatized nanotubes to form catalyst-containing seed materials for use in making carbon fibers
US6265466B1 (en) * 1999-02-12 2001-07-24 Eikos, Inc. Electromagnetic shielding composite comprising nanotubes
US6333016B1 (en) * 1999-06-02 2001-12-25 The Board Of Regents Of The University Of Oklahoma Method of producing carbon nanotubes
US6790426B1 (en) * 1999-07-13 2004-09-14 Nikkiso Co., Ltd. Carbonaceous nanotube, nanotube aggregate, method for manufacturing a carbonaceous nanotube
US20010003576A1 (en) * 1999-09-10 2001-06-14 Klett James W. Gelcasting polymeric precursors for producing net-shaped graphites
US20020179564A1 (en) * 1999-11-26 2002-12-05 Ut-Battelle, Llc, Lockheed Martin Energy Research Corporation Condensed phase conversion and growth of nanorods and other materials
US6452085B2 (en) * 2000-01-17 2002-09-17 Aisin Seiki Kabushiki Kaisha Thermoelectric device
US6495116B1 (en) * 2000-04-10 2002-12-17 Lockheed Martin Corporation Net shape manufacturing using carbon nanotubes
US20020040900A1 (en) * 2000-08-18 2002-04-11 Arx Theodore Von Packaging having self-contained heater
US6682677B2 (en) * 2000-11-03 2004-01-27 Honeywell International Inc. Spinning, processing, and applications of carbon nanotube filaments, ribbons, and yarns
US20040081758A1 (en) * 2001-03-16 2004-04-29 Klaus Mauthner Ccvd method for producing tubular carbon nanofibers
US20030133865A1 (en) * 2001-07-06 2003-07-17 William Marsh Rice University Single-wall carbon nanotube alewives, process for making, and compositions thereof
US6706402B2 (en) * 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US20030117770A1 (en) * 2001-12-20 2003-06-26 Intel Corporation Carbon nanotube thermal interface structures
US6965513B2 (en) * 2001-12-20 2005-11-15 Intel Corporation Carbon nanotube thermal interface structures
US20030165648A1 (en) * 2002-03-04 2003-09-04 Alex Lobovsky Composite material comprising oriented carbon nanotubes in a carbon matrix and process for preparing same
US20050074569A1 (en) * 2002-03-04 2005-04-07 Alex Lobovsky Composite material comprising oriented carbon nanotubes in a carbon matrix and process for preparing same
US6891724B2 (en) * 2002-06-12 2005-05-10 Intel Corporation Increasing thermal conductivity of thermal interface using carbon nanotubes and CVD
US7045108B2 (en) * 2002-09-16 2006-05-16 Tsinghua University Method for fabricating carbon nanotube yarn
US20040053780A1 (en) * 2002-09-16 2004-03-18 Jiang Kaili Method for fabricating carbon nanotube yarn
US20060252853A1 (en) * 2002-11-18 2006-11-09 Rensselaer Polytechnic Institute Nanotube polymer composite and methods of making same
US20060272701A1 (en) * 2002-12-09 2006-12-07 Pulickel Ajayan Nanotube-organic photoelectric conversion device and methods of making same
US20040124772A1 (en) * 2002-12-25 2004-07-01 Ga-Lane Chen Plasma display panel
US6842328B2 (en) * 2003-05-30 2005-01-11 Joachim Hossick Schott Capacitor and method for producing a capacitor
US20040265489A1 (en) * 2003-06-25 2004-12-30 Dubin Valery M. Methods of fabricating a composite carbon nanotube thermal interface device
US20040266065A1 (en) * 2003-06-25 2004-12-30 Yuegang Zhang Method of fabricating a composite carbon nanotube thermal interface device
US20050104258A1 (en) * 2003-07-02 2005-05-19 Physical Sciences, Inc. Patterned electrospinning
US20050006754A1 (en) * 2003-07-07 2005-01-13 Mehmet Arik Electronic devices and methods for making same using nanotube regions to assist in thermal heat-sinking
US6864571B2 (en) * 2003-07-07 2005-03-08 Gelcore Llc Electronic devices and methods for making same using nanotube regions to assist in thermal heat-sinking
US20050006801A1 (en) * 2003-07-11 2005-01-13 Cambridge University Technical Service Limited Production of agglomerates from gas phase
US7182929B1 (en) * 2003-08-18 2007-02-27 Nei, Inc. Nanostructured multi-component and doped oxide powders and method of making same
US20050046017A1 (en) * 2003-08-25 2005-03-03 Carlos Dangelo System and method using self-assembled nano structures in the design and fabrication of an integrated circuit micro-cooler
US6989325B2 (en) * 2003-09-03 2006-01-24 Industrial Technology Research Institute Self-assembled nanometer conductive bumps and method for fabricating
US20050048697A1 (en) * 2003-09-03 2005-03-03 Industrial Technology Research Institute Self-assembled nanometer conductive bumps and method for fabricating
US20050269726A1 (en) * 2003-09-24 2005-12-08 Matabayas James C Jr Thermal interface material with aligned carbon nanotubes
US20050067406A1 (en) * 2003-09-30 2005-03-31 Shanmugam Rajarajan Self heating apparatus
US20070140947A1 (en) * 2003-12-24 2007-06-21 Juan Schneider Continuous production of carbon nanotubes
US20070232699A1 (en) * 2004-05-13 2007-10-04 Russell Alan J Self assembled nanostructures and mehods for preparing the same
US20080170982A1 (en) * 2004-11-09 2008-07-17 Board Of Regents, The University Of Texas System Fabrication and Application of Nanofiber Ribbons and Sheets and Twisted and Non-Twisted Nanofiber Yarns
US7323938B2 (en) * 2004-11-22 2008-01-29 Asahi Kasei Microsystems Co., Ltd. Amplifier circuit and light receiving apparatus
US20070116627A1 (en) * 2005-01-25 2007-05-24 California Institute Of Technology Carbon nanotube compositions and devices and methods of making thereof
US20060118158A1 (en) * 2005-05-03 2006-06-08 Minjuan Zhang Nanostructured bulk thermoelectric material
US20060269670A1 (en) * 2005-05-26 2006-11-30 Lashmore David S Systems and methods for thermal management of electronic components
US20070151744A1 (en) * 2005-12-30 2007-07-05 Hon Hai Precision Industry Co., Ltd. Electrical composite conductor and electrical cable using the same
US20090194525A1 (en) * 2006-02-03 2009-08-06 Exaenc Corp. Heating element using carbon nano tube
US20070293086A1 (en) * 2006-06-14 2007-12-20 Tsinghua University Coaxial cable
US20090044848A1 (en) * 2007-08-14 2009-02-19 Nanocomp Technologies, Inc. Nanostructured Material-Based Thermoelectric Generators
US20090169819A1 (en) * 2007-10-05 2009-07-02 Paul Drzaic Nanostructure Films
US20090269511A1 (en) * 2008-04-25 2009-10-29 Aruna Zhamu Process for producing hybrid nano-filament electrodes for lithium batteries
US20090277897A1 (en) * 2008-05-07 2009-11-12 Nanocomp Technologies, Inc. Nanostructure-based heating devices and methods of use

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9198232B2 (en) 2008-05-07 2015-11-24 Nanocomp Technologies, Inc. Nanostructure-based heating devices and methods of use
US20140124186A1 (en) * 2012-11-08 2014-05-08 Shinshu University Radiation member
US9513070B2 (en) * 2012-11-08 2016-12-06 Shinko Electric Industries Co., Ltd. Radiation member
US9988718B2 (en) 2015-06-19 2018-06-05 Rolls-Royce Corporation Directed energy deposition with cooling mechanism

Also Published As

Publication number Publication date
CA2609712A1 (en) 2006-11-30
CA2609712C (en) 2015-04-07
EP1885907A4 (en) 2008-12-10
EP2112249A1 (en) 2009-10-28
WO2006127208A2 (en) 2006-11-30
JP2008543051A (en) 2008-11-27
JP2012119725A (en) 2012-06-21
EP1885907A2 (en) 2008-02-13
AU2006249601B2 (en) 2011-08-11
US7898079B2 (en) 2011-03-01
US20060269670A1 (en) 2006-11-30
WO2006127208A3 (en) 2008-01-31
AU2006249601A1 (en) 2006-11-30
JP4972640B2 (en) 2012-07-11

Similar Documents

Publication Publication Date Title
US7898079B2 (en) Nanotube materials for thermal management of electronic components
US7086451B2 (en) Heat sink with carbon nanotubes and method for manufacturing same
US7253442B2 (en) Thermal interface material with carbon nanotubes
US7160620B2 (en) Thermal interface material and method for manufacturing same
JP5628312B2 (en) Nanotube thermal interface structure
CN104813751B (en) Thermal management assembly including bulk graphene material
US7109581B2 (en) System and method using self-assembled nano structures in the design and fabrication of an integrated circuit micro-cooler
US20180158753A1 (en) Heat dissipating structure and manufacture
US8890312B2 (en) Heat dissipation structure with aligned carbon nanotube arrays and methods for manufacturing and use
US7168484B2 (en) Thermal interface apparatus, systems, and methods
US7148512B2 (en) Thermal interface with silver-filled carbon nanotubes
US20100172101A1 (en) Thermal interface material and method for manufacturing the same
JP2008543051A5 (en)
US20070205792A1 (en) Semiconductor packages, methods of forming semiconductor packages, and methods of cooling semiconductor dies
JP2011091106A (en) Thermally conductive member and method of manufacturing the same, heat dissipating component, and semiconductor package
CN101275209A (en) Thermal interfacial material and method for preparing same
JP2011086700A (en) Heat dissipating part
CA2690795A1 (en) Metal bonded nanotube array

Legal Events

Date Code Title Description
AS Assignment

Owner name: NANOCOMP TECHNOLOGIES, INC., NEW HAMPSHIRE

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LASHMORE, DAVID S.;BROWN, JOSEPH J.;REEL/FRAME:026467/0733

Effective date: 20060803

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION